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EventDefine.cs
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a5245356d0
source files
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2 years ago |
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GasBoxLeakCheckRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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GasFlowRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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LLPickRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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LLPlaceRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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LoadLockLeakCheckRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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LoadLockPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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LoadLockPurgeRoutine.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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LoadLockVentRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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PMControlPressureRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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PMEntity.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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PMGasVerificationRoutine.cs
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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PMGaslinePurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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PMHeatRoutine.cs
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 year ago |
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PMHomeRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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PMLeakCheckRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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PMPartialPressureRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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PMProcessRoutine.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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PMProcess_FA.cs
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563a30f852
1、add recipe event notify;
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1 year ago |
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PMPurgeRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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PMRoutineBase.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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PMVATPerformanceRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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Process.cs
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3cad102221
更新 RT
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2 years ago |
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ProcessDefine.cs
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f62e761ad2
修复小标题efem online/offline报警bug
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1 year ago |
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PumpDownRoutine.cs
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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RFPowerSwitchRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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StartDryPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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StartTurboPumpRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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VentRoutine.cs
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
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VenusRecipeFileContext.cs
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7d93bf0076
Job Clean function, not finished.
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1 year ago |
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VenusSequenceFileContext.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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2 years ago |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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2 years ago |
