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@@ -38,7 +38,7 @@
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<DI_ITEM Index="31" Name="" />
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<DI_ITEM Index="32" Name="" />
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<DI_ITEM Index="33" Name=""/>
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- <DI_ITEM Index="34" Name="DI_N2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
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+ <DI_ITEM Index="34" Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
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<DI_ITEM Index="35" Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
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<DI_ITEM Index="36" Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
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<DI_ITEM Index="37" Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
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@@ -140,7 +140,7 @@
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<DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
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<DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
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<DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
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- <DO_ITEM Index="22" Name="" />
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+ <DO_ITEM Index="22" Name="DO_Purge_Valve" Device="PV2" Addr="w1.06" />
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<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
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<DO_ITEM Index="24" Name="DO_PM_Slit_Door_Open" Device="PV4" Addr="w1.08"/>
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<DO_ITEM Index="25" Name="DO_PM_Slit_Door_Close" Device="PV4" Addr="w1.09"/>
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@@ -149,7 +149,7 @@
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<DO_ITEM Index="28" Name="" />
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<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
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<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
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- <DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
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+ <DO_ITEM Index="31" Name="DO_Guage_Valve" Device="PV8" Addr="w1.15" />
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<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
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<DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
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<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
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@@ -173,7 +173,7 @@
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<DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
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<DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
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<DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
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- <DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
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+ <DO_ITEM Index="55" Name="DO_Second_Purge_Valve" Device="GPV12" Addr="w3.07" />
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<DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
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<DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
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<DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
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@@ -232,47 +232,47 @@
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<DO_ITEM Index="111" Name="" />
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</Dig_Out>
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<Ana_Out>
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- <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
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- <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
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- <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
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- <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
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- <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
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- <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
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- <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
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- <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
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+ <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="MFC" />
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+ <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" BufferOffset="2" Device="" Addr="d1002" Note="MFC" />
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+ <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
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+ <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
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+ <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
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+ <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
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+ <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
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+ <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" BufferOffset="14" Device="" Addr="d1014" Note="MFC" />
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<AO_ITEM Index="8" Name="" />
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<AO_ITEM Index="9" Name=""/>
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- <AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
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- <AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
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- <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
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- <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
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+ <AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" BufferOffset="20" Device="" Addr="d1020" Note="阀门加热设定温度" />
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+ <AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" BufferOffset="22" Device="" Addr="d1022" Note="Temp Limit" />
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+ <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
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+ <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="26" Device="" Addr="d1026" Note="Temp Limit" />
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<AO_ITEM Index="14" Name="" />
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<AO_ITEM Index="15" Name="" />
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- <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
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- <AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint1" Device="" Addr="d1034" Note="Torr,(1~50可控,0~50全量程)"/>
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+ <AO_ITEM Index="16" Name="AO_Heartbeat" BufferOffset="32" Device="" Addr="d1032" Note="PC to PLC" />
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+ <AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint1" BufferOffset="34" Device="" Addr="d1034" Note="Torr,(1~50可控,0~50全量程)"/>
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<AO_ITEM Index="18" Name=""/>
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<AO_ITEM Index="19" Name="" />
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- <AO_ITEM Index="20" Name="AO_ESC_He_Pressure_Setpoint2" Device="" Addr="d1040" Note="Torr,(1~50可控,0~50全量程)"/>
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+ <AO_ITEM Index="20" Name="AO_ESC_He_Pressure_Setpoint2" BufferOffset="40" Device="" Addr="d1040" Note="Torr,(1~50可控,0~50全量程)"/>
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<AO_ITEM Index="21" Name="" />
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<AO_ITEM Index="22" Name="" />
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<AO_ITEM Index="23" Name="" />
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<AO_ITEM Index="24" Name="" />
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- <AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
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- <AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
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- <AO_ITEM Index="27" Name="AO_MFC11_Flow_Setpoint" Device="" Addr="d1054" Note="MFC" />
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- <AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
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+ <AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" BufferOffset="50" Device="" Addr="d1050" Note="MFC" />
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+ <AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" BufferOffset="52" Device="" Addr="d1052" Note="MFC" />
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+ <AO_ITEM Index="27" Name="AO_MFC11_Flow_Setpoint" BufferOffset="54" Device="" Addr="d1054" Note="MFC" />
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+ <AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" BufferOffset="56" Device="" Addr="d1056" Note="MFC" />
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<AO_ITEM Index="29" Name="" />
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<AO_ITEM Index="30" Name="" />
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<AO_ITEM Index="31" Name="" />
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<AO_ITEM Index="32" Name="" />
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<AO_ITEM Index="33" Name="" />
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<AO_ITEM Index="34" Name="" />
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- <AO_ITEM Index="35" Name="AO_Magnet_cycle_time" Device="" Addr="d1070" Note="MFC"/>
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- <AO_ITEM Index="36" Name="AO_Magnet_voltage_amplitude" Device="" Addr="d1072" Note="MFC" />
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- <AO_ITEM Index="37" Name="AO_Magnet_sine_wave_square_switch" Device="" Addr="d1074" Note="MFC" />
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+ <AO_ITEM Index="35" Name="AO_Magnet_cycle_time" BufferOffset="70" Device="" Addr="d1070" Note="MFC"/>
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+ <AO_ITEM Index="36" Name="AO_Magnet_voltage_amplitude" BufferOffset="72" Device="" Addr="d1072" Note="MFC" />
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+ <AO_ITEM Index="37" Name="AO_Magnet_sine_wave_square_switch" BufferOffset="74" Device="" Addr="d1074" Note="MFC" />
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<AO_ITEM Index="38" Name="" />
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<AO_ITEM Index="39" Name="" />
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- <AO_ITEM Index="40" Name="AO_Magnet_Driver_Current_Limit_Setpoint" Device="" Addr="d1080" Note="MFC"/>
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+ <AO_ITEM Index="40" Name="AO_Magnet_Driver_Current_Limit_Setpoint" BufferOffset="80" Device="" Addr="d1080" Note="MFC"/>
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<AO_ITEM Index="41" Name="" />
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<AO_ITEM Index="42" Name="" />
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<AO_ITEM Index="43" Name="" />
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@@ -284,55 +284,55 @@
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<AO_ITEM Index="49" Name="" />
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</Ana_Out>
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<Ana_In>
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- <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
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- <AI_ITEM Index="1" Name="AI_Process_Pressure_1t" Device="" Addr="d2002" />
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- <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
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+ <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" BufferOffset="0" Device="" Addr="d2000" Note="float" />
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+ <AI_ITEM Index="1" Name="AI_Process_Pressure_1t" BufferOffset="2" Device="" Addr="d2002" />
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+ <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" BufferOffset="4" Device="" Addr="d2004" Note="float" />
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<AI_ITEM Index="3" Name="" />
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- <AI_ITEM Index="4" Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
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- <AI_ITEM Index="5" Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
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- <AI_ITEM Index="6" Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
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- <AI_ITEM Index="7" Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
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- <AI_ITEM Index="8" Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
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- <AI_ITEM Index="9" Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
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- <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
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- <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
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- <AI_ITEM Index="12" Name="AI_MFC_He1_Flow" Device="" Addr="d2024" Note="float" />
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+ <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="float" />
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+ <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="float" />
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+ <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="float" />
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+ <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="float" />
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+ <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="float" />
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+ <AI_ITEM Index="9" Name="AI_MFC6_Flow" BufferOffset="18" Device="" Addr="d2018" Note="float" />
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+ <AI_ITEM Index="10" Name="AI_MFC7_Flow" BufferOffset="20" Device="" Addr="d2020" Note="float" />
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+ <AI_ITEM Index="11" Name="AI_MFC8_Flow" BufferOffset="22" Device="" Addr="d2022" Note="float" />
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+ <AI_ITEM Index="12" Name="AI_MFC_He1_Flow" BufferOffset="24" Device="" Addr="d2024" Note="float" />
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<AI_ITEM Index="13" />
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- <AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
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+ <AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" BufferOffset="28" Device="" Addr="d2028" Note="float" />
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<AI_ITEM Index="15" Name="" />
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- <AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
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- <AI_ITEM Index="17" Name="AI_Fline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
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- <AI_ITEM Index="18" Name="AI_CHB_Coolant_Inlet_Temp" Device="" Addr="d2036" Note="float" />
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- <AI_ITEM Index="19" Name="AI_CHB_Coolant_Outlet_Temp" Device="" Addr="d2038" Note="float" />
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- <AI_ITEM Index="20" Name="AI_ESC_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
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- <AI_ITEM Index="21" Name="AI_ESC_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
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- <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
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- <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
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- <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
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- <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
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- <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
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- <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
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- <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
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+ <AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" BufferOffset="32" Device="" Addr="d2032" Note="float" />
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+ <AI_ITEM Index="17" Name="AI_Fline_Monitor_TC_Temp" BufferOffset="34" Device="" Addr="d2034" Note="float" />
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+ <AI_ITEM Index="18" Name="AI_CHB_Coolant_Inlet_Temp" BufferOffset="36" Device="" Addr="d2036" Note="float" />
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+ <AI_ITEM Index="19" Name="AI_CHB_Coolant_Outlet_Temp" BufferOffset="38" Device="" Addr="d2038" Note="float" />
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+ <AI_ITEM Index="20" Name="AI_ESC_Coolant_Inlet_Temp" BufferOffset="40" Device="" Addr="d2040" Note="float" />
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+ <AI_ITEM Index="21" Name="AI_ESC_Coolant_Outlet_Temp" BufferOffset="42" Device="" Addr="d2042" Note="float" />
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+ <AI_ITEM Index="22" Name="AI_Heartbeat_FB" BufferOffset="44" Device="" Addr="d2044" Note="float" />
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+ <AI_ITEM Index="23" Name="AI_Second" BufferOffset="46" Device="" Addr="d2046" Note="float" />
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+ <AI_ITEM Index="24" Name="AI_Minute" BufferOffset="48" Device="" Addr="d2048" Note="float" />
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+ <AI_ITEM Index="25" Name="AI_Time" BufferOffset="50" Device="" Addr="d2050" Note="float" />
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+ <AI_ITEM Index="26" Name="AI_Day" BufferOffset="52" Device="" Addr="d2052" Note="float" />
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+ <AI_ITEM Index="27" Name="AI_Month" BufferOffset="54" Device="" Addr="d2054" Note="float" />
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+ <AI_ITEM Index="28" Name="AI_Year" BufferOffset="56" Device="" Addr="d2056" Note="float" />
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<AI_ITEM Index="29" Name="" />
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<AI_ITEM Index="30" Name="" />
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- <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
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+ <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" BufferOffset="62" Device="" Addr="d2062" Note="float" />
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<AI_ITEM Index="32" Name="" />
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<AI_ITEM Index="33" Name="" />
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<AI_ITEM Index="34" Name="" />
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- <AI_ITEM Index="35" Name="AI_MFC9Flow" Device="" Addr="d2070" Note="float" />
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- <AI_ITEM Index="36" Name="AI_MFC10Flow" Device="" Addr="d2072" Note="float" />
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- <AI_ITEM Index="37" Name="AI_MFC11Flow" Device="" Addr="d2074" Note="float" />
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- <AI_ITEM Index="38" Name="AI_MFC12Flow" Device="" Addr="d2076" Note="float" />
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- <AI_ITEM Index="39" Name="AI_MFC_He2_Flow" Device="" Addr="d2078" Note="MFC He2"/>
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- <AI_ITEM Index="40" Name="AI_He_Pressure1" Device="" Addr="d2080" Note="float" />
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- <AI_ITEM Index="41" Name="AI_He_Pressure2" Device="" Addr="d2082" Note="float" />
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+ <AI_ITEM Index="35" Name="AI_MFC9Flow" BufferOffset="70" Device="" Addr="d2070" Note="float" />
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+ <AI_ITEM Index="36" Name="AI_MFC10Flow" BufferOffset="72" Device="" Addr="d2072" Note="float" />
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+ <AI_ITEM Index="37" Name="AI_MFC11Flow" BufferOffset="74" Device="" Addr="d2074" Note="float" />
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+ <AI_ITEM Index="38" Name="AI_MFC12Flow" BufferOffset="76" Device="" Addr="d2076" Note="float" />
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+ <AI_ITEM Index="39" Name="AI_MFC_He2_Flow" BufferOffset="78" Device="" Addr="d2078" Note="MFC He2"/>
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+ <AI_ITEM Index="40" Name="AI_He_Pressure1" BufferOffset="80" Device="" Addr="d2080" Note="float" />
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+ <AI_ITEM Index="41" Name="AI_He_Pressure2" BufferOffset="82" Device="" Addr="d2082" Note="float" />
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<AI_ITEM Index="42" Name="" />
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- <AI_ITEM Index="43" Name="AI_Magnet_Driver_1_Phase_U_Current" Addr="d2086" Note="float"/>
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- <AI_ITEM Index="44" Name="AI_Magnet Driver_1_Phase_V_Current" Addr="d2088" Note="float" />
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- <AI_ITEM Index="45" Name="AI_Magnet Driver_1_Phase_W_Current" Addr="d2090" Note="float" />
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- <AI_ITEM Index="46" Name="AI_Magnet_Driver_2_Phase_U_Current" Addr="d2092" Note="float" />
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- <AI_ITEM Index="47" Name="AI_Magnet_Driver_2_Phase_V_Current" Addr="d2094" Note="float" />
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- <AI_ITEM Index="48" Name="AI_Magnet_Driver_2_Phase_W_Current" Addr="d2096" Note="float" />
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+ <AI_ITEM Index="43" Name="AI_Magnet_Driver_1_Phase_U_Current" BufferOffset="86" Addr="d2086" Note="float"/>
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+ <AI_ITEM Index="44" Name="AI_Magnet Driver_1_Phase_V_Current" BufferOffset="88" Addr="d2088" Note="float" />
|
|
|
+ <AI_ITEM Index="45" Name="AI_Magnet Driver_1_Phase_W_Current" BufferOffset="90" Addr="d2090" Note="float" />
|
|
|
+ <AI_ITEM Index="46" Name="AI_Magnet_Driver_2_Phase_U_Current" BufferOffset="92" Addr="d2092" Note="float" />
|
|
|
+ <AI_ITEM Index="47" Name="AI_Magnet_Driver_2_Phase_V_Current" BufferOffset="94" Addr="d2094" Note="float" />
|
|
|
+ <AI_ITEM Index="48" Name="AI_Magnet_Driver_2_Phase_W_Current" BufferOffset="96" Addr="d2096" Note="float" />
|
|
|
<AI_ITEM Index="49" Name="" />
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|
|
</Ana_In>
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|
|
</IO_DEFINE>
|