PMControlPressureRoutine.cs 2.3 KB

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  1. //using Aitex.Core.RT.Routine;
  2. //using Aitex.Core.RT.SCCore;
  3. //using MECF.Framework.Common.Equipment;
  4. //using System;
  5. //using System.Collections.Generic;
  6. //using System.Linq;
  7. //using System.Text;
  8. //using System.Threading.Tasks;
  9. //using Venus_Core;
  10. //using Venus_RT.Devices;
  11. //using Venus_RT.Modules.PMs;
  12. //namespace Venus_RT.Modules.PMs
  13. //{
  14. // class PMControlPressureRoutine : PMRoutineBase, IRoutine
  15. // {
  16. // private enum ControlPressureStep
  17. // {
  18. // Delay1s,
  19. // StartControlPressure,
  20. // End
  21. // }
  22. // private readonly JetPMBase _chamber;
  23. // private int _controlPressureSetPoint = 90;
  24. // private int _controlFlowSetPoint = 90;
  25. // public PMControlPressureRoutine(JetPMBase chamber) : base(chamber)
  26. // {
  27. // _chamber = chamber;
  28. // }
  29. // public RState Start(params object[] objs)
  30. // {
  31. // if (!CheckTurboPump())
  32. // {
  33. // return RState.Failed;
  34. // }
  35. // if (_chamber.GetPVPosition() == 0)
  36. // {
  37. // Stop("钟摆阀没有打开");
  38. // return RState.Failed;
  39. // }
  40. // Reset();
  41. // // open process final valve and flow
  42. // Notify("Open valve and flow mfc");
  43. // _chamber.OpenValve(ValveType.GasFinal, true);
  44. // _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  45. // _controlFlowSetPoint= SC.GetValue<int>($"{Module}.ControlPressureN2FlowSetPoint");
  46. // return Runner.Start(Module, Name);
  47. // }
  48. // public RState Monitor()
  49. // {
  50. // Runner.Delay(ControlPressureStep.Delay1s, _delay_1s)
  51. // .Run(ControlPressureStep.StartControlPressure, StartControlPressure)
  52. // .End(ControlPressureStep.End, End);
  53. // return Runner.Status;
  54. // }
  55. // private bool StartControlPressure()
  56. // {
  57. // _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  58. // return true;
  59. // }
  60. // private bool End()
  61. // {
  62. // return true;
  63. // }
  64. // public void Abort()
  65. // {
  66. // _chamber.AbortControlPressure();
  67. // }
  68. // }
  69. //}