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@@ -535,7 +535,7 @@ namespace Venus_RT.Modules.PMs
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Chamber.FlowGas(4, ProcessUnit.Gas5);
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}
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else
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- {
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+ {
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Chamber.FlowGas(4, 0);
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}
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@@ -813,7 +813,7 @@ namespace Venus_RT.Modules.PMs
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private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step)
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{
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var ProcessUnit = unit as ESCHVUnit;
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- if (Chamber.BackSideHeOutOfRange && step.ElapsedTime()>ProcessUnit.CheckDelay_ms)
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+ if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay_ms)
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{
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LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range.");
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return RState.Failed;
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@@ -876,7 +876,10 @@ namespace Venus_RT.Modules.PMs
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var ProcessUnit = unit as HeaterUnit;
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var position = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), ProcessUnit.SuspectPosition.ToString());
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Chamber.HighTemperatureHeaterGotoPosition(position);
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- Chamber.SetHighTemperatureHeaterTemperature(ProcessUnit.HeaterTemp);
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+ if (ProcessUnit.HeaterTemp > 0)
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+ {
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+ Chamber.SetHighTemperatureHeaterTemperature(ProcessUnit.HeaterTemp);
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+ }
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Chamber.SetHighTemperatureHeaterRatio(ProcessUnit.HeaterRatio);
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return RState.Running;
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}
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