LoadLockPurgeRoutine.cs 3.4 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using Venus_Core;
  6. namespace Venus_RT.Modules.PMs
  7. {
  8. class LoadLockPurgeRoutine : PMRoutineBase, IRoutine
  9. {
  10. private enum PurgeStep
  11. {
  12. kCloseValves,
  13. kPumpToBase,
  14. kPurgeDelay_1,
  15. kPurgeVent,
  16. kPurgeDelay_2,
  17. kPurgePumpToBase,
  18. kPurgePumpDelay,
  19. kPurgeEnd,
  20. kEnd,
  21. }
  22. public int PurgeCounter { get; private set; }
  23. private int _basePressureLL = 100;
  24. private int _purgeVentPressureLL = 10;
  25. private int _purgeCycleCounter = 30;
  26. private int _purgePumpTime = 120;
  27. public LoadLockPurgeRoutine(JetPMBase chamber) : base(chamber)
  28. {
  29. Name = "Loadlock Purge";
  30. }
  31. public RState Start(params object[] objs)
  32. {
  33. if (CheckLidLoadLock() &&
  34. CheckSlitDoor() &&
  35. CheckDryPump())
  36. {
  37. Reset();
  38. _chamber.CloseValves();
  39. _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
  40. _purgeVentPressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeVentPressure");
  41. _purgeCycleCounter = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeCycleCount");
  42. _purgePumpTime = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgePumpTime");
  43. PurgeCounter = 0;
  44. return Runner.Start(Module, Name);
  45. }
  46. return RState.Failed;
  47. }
  48. public RState Monitor()
  49. {
  50. Runner.Delay(PurgeStep.kCloseValves, _delay_1s)
  51. .Run(PurgeStep.kPumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  52. .LoopStart(PurgeStep.kPurgeDelay_1, "Purge", _purgeCycleCounter, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s)
  53. .LoopRun(PurgeStep.kPurgeVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _purgeVentPressureLL; })
  54. .LoopRun(PurgeStep.kPurgeDelay_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s)
  55. .LoopRun(PurgeStep.kPurgePumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
  56. .LoopRun(PurgeStep.kPurgePumpDelay, NullFun, _purgePumpTime * 1000)
  57. .LoopEnd(PurgeStep.kPurgeEnd, ClosePumpValve, _delay_1s)
  58. .End(PurgeStep.kEnd, NullFun, _delay_50ms);
  59. return Runner.Status;
  60. }
  61. public void Abort()
  62. {
  63. CloseAllValves();
  64. }
  65. private bool ClosePumpValve()
  66. {
  67. _chamber.OpenValve(ValveType.LoadlockPumping, false);
  68. return true;
  69. }
  70. }
  71. }