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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- namespace Venus_RT.Modules.PMs
- {
- class LoadLockPurgeRoutine : PMRoutineBase, IRoutine
- {
- private enum PurgeStep
- {
- kCloseValves,
- kPumpToBase,
- kPurgeDelay_1,
- kPurgeVent,
- kPurgeDelay_2,
- kPurgePumpToBase,
- kPurgePumpDelay,
- kPurgeEnd,
- kEnd,
- }
- public int PurgeCounter { get; private set; }
- private int _basePressureLL = 100;
- private int _purgeVentPressureLL = 10;
- private int _purgeCycleCounter = 30;
- private int _purgePumpTime = 120;
- public LoadLockPurgeRoutine(JetPMBase chamber) : base(chamber)
- {
- Name = "Loadlock Purge";
- }
- public RState Start(params object[] objs)
- {
- if (CheckLidLoadLock() &&
- CheckSlitDoor() &&
- CheckDryPump())
- {
- Reset();
- _chamber.CloseValves();
- _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
- _purgeVentPressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeVentPressure");
- _purgeCycleCounter = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgeCycleCount");
- _purgePumpTime = SC.GetValue<int>($"{Module}.Pump.LoadLockPurgePumpTime");
- PurgeCounter = 0;
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- Runner.Delay(PurgeStep.kCloseValves, _delay_1s)
- .Run(PurgeStep.kPumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
- .LoopStart(PurgeStep.kPurgeDelay_1, "Purge", _purgeCycleCounter, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, false), _delay_1s)
- .LoopRun(PurgeStep.kPurgeVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _purgeVentPressureLL; })
- .LoopRun(PurgeStep.kPurgeDelay_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s)
- .LoopRun(PurgeStep.kPurgePumpToBase, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure < _basePressureLL; })
- .LoopRun(PurgeStep.kPurgePumpDelay, NullFun, _purgePumpTime * 1000)
- .LoopEnd(PurgeStep.kPurgeEnd, ClosePumpValve, _delay_1s)
- .End(PurgeStep.kEnd, NullFun, _delay_50ms);
-
- return Runner.Status;
- }
- public void Abort()
- {
- CloseAllValves();
- }
- private bool ClosePumpValve()
- {
- _chamber.OpenValve(ValveType.LoadlockPumping, false);
- return true;
- }
- }
- }
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