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EFEM
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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LLs
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6d393bb86d
new routing algorithm with prediction.
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1 year ago |
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LPs
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
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PMs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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TM
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 year ago |
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VCE
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 year ago |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 year ago |
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Autotransfer_LP_FA.cs
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cc41474996
1、add WaferStart sequenceId information
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1 year ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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RouteManager.cs
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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SEManualTransfer.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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SETMCycle.cs
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
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SystemDispatcher.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
lixiang
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度