| .. |
|
EFEM
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 éve%!(EXTRA string=óta) |
|
LLs
|
6d393bb86d
new routing algorithm with prediction.
|
1 éve%!(EXTRA string=óta) |
|
LPs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 éve%!(EXTRA string=óta) |
|
PMs
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 éve%!(EXTRA string=óta) |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 éve%!(EXTRA string=óta) |
|
Schedulers
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 éve%!(EXTRA string=óta) |
|
TM
|
d15749f5b1
1.fix VenusSE show chiler temp bugs
|
1 éve%!(EXTRA string=óta) |
|
VCE
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
1 éve%!(EXTRA string=óta) |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 éve%!(EXTRA string=óta) |
|
Autotransfer_LP_FA.cs
|
cc41474996
1、add WaferStart sequenceId information
|
1 éve%!(EXTRA string=óta) |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 éve%!(EXTRA string=óta) |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 éve%!(EXTRA string=óta) |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
1 éve%!(EXTRA string=óta) |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 éve%!(EXTRA string=óta) |
|
RouteManager.cs
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 éve%!(EXTRA string=óta) |
|
SEManualTransfer.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 éve%!(EXTRA string=óta) |
|
SETMCycle.cs
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 éve%!(EXTRA string=óta) |
|
SystemDispatcher.cs
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 éve%!(EXTRA string=óta) |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 éve%!(EXTRA string=óta) |
lixiang
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度