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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using Venus_Core;
- namespace Venus_RT.Modules.PMs
- {
- class LoadLockVentRoutine : PMRoutineBase, IRoutine
- {
- private enum VentStep
- {
- kClosePendulumValve,
- kCloseValves,
- kVent,
- kOverVent,
- kCloseVentValves,
- }
- private int _overVentTime = 2000;
- private int _checkATMTimeout = 90000;
- //private int _ATMPressureLL = 720000;
- public LoadLockVentRoutine(JetPMBase chamber) : base(chamber)
- {
- Name = "Loadlock Vent";
- }
- public RState Start(params object[] objs)
- {
- if (CheckLidLoadLock()&&
- CheckSlitDoor()&&
- CheckATMLoadLock())
- {
- Reset();
- // _chamber.CloseValves();
- //_chamber.TurnPendulumValve(false);
- _checkATMTimeout = SC.GetValue<int>($"{Module}.CheckATMTimeout") * 1000;
- _overVentTime = SC.GetValue<int>($"{Module}.OverVentTime");
- return Runner.Start(Module, Name);
- }
- return RState.Failed;
- }
- public RState Monitor()
- {
- Runner.Run(VentStep.kClosePendulumValve, ClosePendulumValve, _delay_1s)
- .Run(VentStep.kCloseValves, CloseValves, _delay_1s)
- //.Run(VentStep.kVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _ATMPressureLL; }, _checkATMTimeout)
- .Run(VentStep.kVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.IsATMLoadlock; }, _checkATMTimeout)
- .Delay(VentStep.kOverVent, _overVentTime)
- .End(VentStep.kCloseVentValves, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s);
- return Runner.Status;
- }
- public void Abort()
- {
- CloseAllValves();
- }
- public bool ClosePendulumValve()
- {
- if (_chamber.PendulumValveIsOpen() == true)
- {
- _chamber.TurnPendulumValve(false);
- }
- _chamber.OpenValve(ValveType.TurboPumpPurge, false);
- _chamber.OpenValve(ValveType.Guage, false);
- return true;
- }
- public bool CloseValves()
- {
- _chamber.OpenValve(ValveType.TurboPumpPumping, false);
- return true;
- }
- public bool CheckATMLoadLock()
- {
- if (_chamber.IsATMLoadlock)
- {
- this.Stop("LoadLock 是ATM状态");
- return false;
- }
- return true;
- }
- }
- }
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