 Intern01
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261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
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2 years ago |
 sangwq
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f216c69fcf
Enhance AutoCycle Module.
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2 years ago |
 lixiang
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afb706578a
添加CycleCount/WaferCount显示
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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2 years ago |
|
Intern01
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73729331e4
Simulator Device Update
|
2 years ago |
|
Intern01
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c5abe7c813
Simulator Communication Port Update
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2 years ago |
|
sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
|
lixiang
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9c46c55950
解决冲突
|
2 years ago |
|
lixiang
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
 zhouhr
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bcc9d2faf8
1、Chamber add the waferID
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2 years ago |
|
Intern01
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60e9a04892
Simulator LP3 Update
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2 years ago |
|
lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
2 years ago |
|
Intern01
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211accc82b
PMD&Simulator update
|
2 years ago |
|
zhouhr
|
296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
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2 years ago |
|
sangwq
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344d734fff
ATM Transfer.
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2 years ago |
|
lixiang
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aad749230c
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
|
2 years ago |
|
zhouhr
|
2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
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2 years ago |
|
lixiang
|
bb6f18ea1a
修改配置文件名，合并代码
|
2 years ago |
|
Intern01
|
b7129c8da5
PM&Simulator update
|
2 years ago |
|
zhouhr
|
c8ec52ec1e
修复下手臂无法右键的问题
|
2 years ago |
|
zhouhr
|
1408b6822f
增加return wafer的Dialog、右键wafer的菜单项return wafer
|
2 years ago |
|
sangwq
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6a29fad5f9
update for unload/PMleakcheck bugs
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
|
zhouhr
|
f56f80e34a
完善UI 拖片 LP的job显示效果、传参 修改Robot槽位显示效果 TM数据绑定 return wafer等
|
2 years ago |
|
Intern01
|
41052afc3b
recipeviewmodel uodate && simulator update
|
2 years ago |
|
zhouhr
|
ba61077913
增加拖片功能
|
2 years ago |
|
Intern01
|
f845cd22f1
TMInterlock Update
|
2 years ago |
|
Intern01
|
646fbf3676
PMProcessRoutine update
|
2 years ago |
