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@@ -205,6 +205,13 @@
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<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
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<config default="4" name="SlotNumber" nameView="Slot number" description="槽位个数" max="60" min="1" paramter="" tag="" unit="" type="Integer" />
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+ <configs name="DryPump" nameView="Dry Pump" >
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+ <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="COM26" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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+ <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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+ </configs>
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</configs>
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<!--PMA-->
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@@ -1155,10 +1162,10 @@
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
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- <config default="COM48" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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<configs name="TurboPump" nameView="Turbo Pump">
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- <config default="COM2" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM8" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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@@ -1793,7 +1800,7 @@
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM41" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM50" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -2127,7 +2134,7 @@
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
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- <config default="COM53" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM56" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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<configs name="TurboPump" nameView="Turbo Pump">
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<config default="COM5" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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@@ -2135,7 +2142,7 @@
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<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="PendulumValve" nameView="Pendulum Valve">
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- <config default="COM57" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM80" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
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</configs>
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