 sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
 Intern01
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ca4aebf454
LoadLock Left&Right UI Update
|
2 years ago |
 lixiang
|
b6acfe2e29
优化TM leak check功能
|
2 years ago |
|
Intern01
|
b1f52bbe8a
Simulator PMC update
|
2 years ago |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
|
2 years ago |
|
Intern01
|
6d76a4b7ac
TM IO UPDATE
|
2 years ago |
|
Intern01
|
ab0daf4dd9
kepler2200interlock update
|
2 years ago |
|
Intern01
|
2950d1e981
TM IO配置更新
|
2 years ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
2 years ago |
|
Intern01
|
265a3b67bc
TMInterlock update
|
2 years ago |
|
lixiang
|
4a6cf3aa4c
pm interlock报错修改
|
2 years ago |
|
lixiang
|
4992e94a4e
代码提交
|
2 years ago |
|
Intern01
|
aa9669d263
修改TM界面，更新PM IO
|
2 years ago |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
|
2 years ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
|
2 years ago |
 zhouhr
|
1b4b48cc7b
合并代码 使track数据的模拟、解析与真实通讯数据一致
|
2 years ago |
|
zhouhr
|
6fb68b7c84
修改HomeRoutine、JetEfem中Track解析、Simulator中track相关的回复
|
2 years ago |
|
Intern01
|
29b9af7ccc
增加waferhistory界面与逻辑
|
2 years ago |
|
zhouhr
|
e75457c3c2
修改alignroutine
|
2 years ago |
|
zhouhr
|
586b0de7a3
修改alignroutine、AdTecRF、DBModel
|
2 years ago |
|
sangwq
|
90a6b1e72d
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
|
2 years ago |
|
Intern01
|
aaff066e93
EFEM Align UI RT 更新
|
2 years ago |
|
sangwq
|
3ee9634ad3
developing routing algorithm.
|
2 years ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
2 years ago |
|
lixiang
|
0580ba292f
添加lp3
|
2 years ago |
|
lixiang
|
6d9d4bce31
efem界面添加loadport联动rt功能
|
2 years ago |
|
lixiang
|
2cc409c5f8
合并代码
|
2 years ago |
|
sangwq
|
9f239420d8
improve the efem code.
|
2 years ago |
|
sangwq
|
f5ee1dcbf1
fix loadport routine bugs.
|
2 years ago |
