Update TM software interlock about Loadlock slit door open issue.

Venus/Venus_Core/VenusDevice.cs

@@ -162,7 +162,7 @@
         LLAFastVentValve,
         LLBSoftVentValve,
         LLBFastVentValve,
-
+        TMVacAtmMode,
 
     }
 

Venus/Venus_MainPages/ViewModels/OperationOverViewModel.cs

@@ -423,7 +423,7 @@ namespace Venus_MainPages.ViewModels
         }
         private void OnUnLoadWafer(object obj)
         {
-            InvokeClient.Instance.Service.DoOperation($"{obj.ToString()}.UnLoad", ModuleManager.ModuleInfos[obj.ToString()].ModuleID);
+            InvokeClient.Instance.Service.DoOperation($"{obj.ToString()}.Unload", ModuleManager.ModuleInfos[obj.ToString()].ModuleID);
         }
         private void OnSelectAll(object obj)
         {

Venus/Venus_RT/Config/TM/TMInterlock.xml

@@ -112,17 +112,6 @@
 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
 	</Action>
 
-  <Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
-    <Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
-    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
-    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
-    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
-    <Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
-    <Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
-    <Limit di="DI_LLA_VAC_Switch"				value="false" tip="LLA VAC Switch"					tip.zh-CN="" tip.en-US="DI-34" />
-    <Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
-    <Limit do="DO_TM_VAC_ATM_MODE"				value="true" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
-  </Action>
   
 	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />

Venus/Venus_RT/Devices/TM/JetTM.cs

@@ -60,6 +60,8 @@ namespace Venus_RT.Devices
         private readonly IoValve _LLBVentValve;
         private readonly IoValve _WaferRelayValve;
 
+        private readonly IoValve _TMVacAtmMode;
+
         private readonly IoSensor _TMPowerOn;
         private readonly IoSensor _TMInSafty;
         private readonly IoSensor _WaferLeakSensor;
@@ -98,9 +100,8 @@ namespace Venus_RT.Devices
         private readonly PumpBase _TMPump;
         private readonly PumpBase _LLPump;
 
-
-
         private readonly IoTMPressureCtrl _presureCtrl;
+        private readonly bool _isATMMode;
 
         public bool TMLidClosed => _TMLid.OFFFeedback;
         public bool LLALidClosed => _LLALid.OFFFeedback;
@@ -185,6 +186,8 @@ namespace Venus_RT.Devices
             _LLBSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftVentValve}");
             _LLBFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastVentValve}");
 
+            _TMVacAtmMode = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVacAtmMode}");
+
 
             _LLBSoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftPumpValve}");
             _LLBFastPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastPumpValve}");
@@ -276,6 +279,9 @@ namespace Venus_RT.Devices
                 return true;
             });
 
+            _isATMMode = SC.GetValue<bool>("System.IsATMMode");
+            _TMVacAtmMode.TurnValve(_isATMMode, out string _);
+
         }
 
         public override void Monitor()
@@ -555,7 +561,6 @@ namespace Venus_RT.Devices
         {
             if (open)
             {
-                bool _isATMMode = SC.GetValue<bool>("System.IsATMMode");
                 if (_isATMMode)
                 {
                     if (!IsTMATM)
@@ -574,6 +579,13 @@ namespace Venus_RT.Devices
                 }
                 else
                 {
+                    if(!IsModuleVaccum(loadlock))
+                    {
+                        reason = $"{loadlock} is notVacuum, can not open slit door";
+                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
+                        return false;
+                    }
+
                     double maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");
                     if (Math.Abs(GetModulePressure(loadlock) - GetModulePressure(ModuleName.TM)) > maxPressureDifference)
                     {

Venus/Venus_RT/Modules/AutoCycle.cs

@@ -36,9 +36,14 @@ namespace Venus_RT.Modules
 
     public enum MovingStatus
     {
-        Staying,
+        Idle,
         Waiting,
         Moving,
+
+        // PM Status
+        WaitProcess,
+        StartProcess,
+        Processing,
     }
     class ModuleFlag
     {
@@ -48,7 +53,7 @@ namespace Venus_RT.Modules
         public ModuleFlag(ModulePriority _priority)
         {
             Priority = _priority;
-            MovingStatus = MovingStatus.Staying;
+            MovingStatus = MovingStatus.Idle;
         }
     }
 
@@ -542,6 +547,7 @@ namespace Venus_RT.Modules
         private void epilogue()
         {
             CheckWaferArrived();
+            ProcessPMTask();
 
             UpdateProcessJobStatus();
             UpdateControlJobStatus();
@@ -563,7 +569,7 @@ namespace Venus_RT.Modules
 
             foreach(var mod in _vacSchedulers)
             {
-                if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Staying)
+                if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Idle)
                 {
                     if(ModuleHelper.IsLoadLock(mod.Key))
                     {
@@ -814,6 +820,41 @@ namespace Venus_RT.Modules
             }
         }
 
+        private void ProcessPMTask()
+        {
+            foreach(var mod in _vacModules)
+            {
+                if(ModuleHelper.IsPm(mod.Key))
+                {
+                    if(_vacSchedulers[mod.Key].IsAvailable)
+                    {
+                        switch (mod.Value.MovingStatus)
+                        {
+                            case MovingStatus.WaitProcess:
+                                {
+                                    _vacSchedulers[mod.Key].EventWaferArrived?.Invoke(this,  new WaferMoveArgs(ModuleName.TMRobot, 0, mod.Key, 0));
+                                    mod.Value.MovingStatus = MovingStatus.StartProcess;
+                                }
+                                break;
+                            case MovingStatus.Processing:
+                                mod.Value.MovingStatus = MovingStatus.Idle;
+                                break;
+                        }
+                    }
+                    else
+                    {
+                        switch(mod.Value.MovingStatus)
+                        {
+                            case MovingStatus.StartProcess:
+                                mod.Value.MovingStatus = MovingStatus.Processing;
+                                break;
+                        }
+                    }
+
+                }
+            }
+        }
+
         private Hand GetTMRobotFreeHand()
         {
             var blade1HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
@@ -970,7 +1011,7 @@ namespace Venus_RT.Modules
         }
         private bool ProcessLLEFEMRobotTask(ModuleName ll)
         {
-            if (_vacModules[ll].MovingStatus != MovingStatus.Staying)
+            if (_vacModules[ll].MovingStatus != MovingStatus.Idle)
                 return false;
 
             var robotSlots = GetEfemRobotWaferReadyInHands(ll);
@@ -1307,7 +1348,7 @@ namespace Venus_RT.Modules
                             if (!string.IsNullOrEmpty(recipeName))
                             {
                                 var recipeContent =
-                                    RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
+                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false);
                                 if (string.IsNullOrEmpty(recipeContent))
                                 {
                                     reason = $"Can not find recipe file{recipeName}";
@@ -1454,6 +1495,15 @@ namespace Venus_RT.Modules
                             _vacWaferTargets.Remove(tar.Key);
                             if(!ModuleHelper.IsTMRobot(tar.Key.Module))
                                 wafer.NextSequenceStep++;
+                            else
+                            {
+                                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Wafer {wafer.WaferOrigin} Skip increase NextSequenceStep while move to {tar.Key.Module}");
+                            }
+                        }
+                        else
+                        {
+                            // should not go here 
+                            LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System, $"wafer {wafer.WaferOrigin} iner id dismatch, before move{tar.Value}, after move {wafer.InnerId}.");
                         }
                     }
                 }
@@ -1464,14 +1514,18 @@ namespace Venus_RT.Modules
             {
                 foreach(var item in _movingItems)
                 {
-                    if(!ModuleHelper.IsTMRobot(item.DestinationModule))
+                    if(ModuleHelper.IsPm(item.DestinationModule))
+                    {
+                        _vacModules[item.DestinationModule].MovingStatus = MovingStatus.WaitProcess;
+                    }
+                    else if(ModuleHelper.IsLoadLock(item.DestinationModule))
                     {
-                        _vacModules[item.DestinationModule].MovingStatus = MovingStatus.Staying;
+                        _vacModules[item.DestinationModule].MovingStatus = MovingStatus.Idle;
                     }
 
-                    if(!ModuleHelper.IsTMRobot(item.SourceModule))
+                    if(ModuleHelper.IsLoadLock(item.SourceModule) || (ModuleHelper.IsPm(item.SourceModule) && _vacModules[item.SourceModule].MovingStatus == MovingStatus.Moving))
                     {
-                        _vacModules[item.SourceModule].MovingStatus = MovingStatus.Staying;
+                        _vacModules[item.SourceModule].MovingStatus = MovingStatus.Idle;
                     }
                 }
 
@@ -1508,7 +1562,7 @@ namespace Venus_RT.Modules
                 {
                     if(ModuleHelper.IsLoadLock(item.Module))
                     {
-                        _vacModules[item.Module].MovingStatus = MovingStatus.Staying;
+                        _vacModules[item.Module].MovingStatus = MovingStatus.Idle;
                     }
                 }
 

Venus/Venus_RT/Modules/ManualTransfer.cs

@@ -37,13 +37,13 @@ namespace Venus_RT.Modules
 
         private Guid _wafer_id;
         private R_TRIG _wafer_arrive_trig = new R_TRIG();
-        private MovingStatus _moving_status = MovingStatus.Staying;
+        private MovingStatus _moving_status = MovingStatus.Idle;
 
         public RState Start(params object[] objs)
         {
             // RESET
             _moveTaskQueue.Clear();
-            _moving_status = MovingStatus.Staying;
+            _moving_status = MovingStatus.Idle;
             _wafer_arrive_trig.RST = true ;
 
             _move_item.SourceModule = (ModuleName)objs[0];
@@ -176,11 +176,11 @@ namespace Venus_RT.Modules
                         _wafer_arrive_trig.CLK = IsArriveCurrentTarget();
                         if (_wafer_arrive_trig.Q)
                         {
-                            _moving_status = MovingStatus.Staying;
+                            _moving_status = MovingStatus.Idle;
                         }
                     }
                     break;
-                case MovingStatus.Staying:
+                case MovingStatus.Idle:
                     {
                         if(IsCurrentModuleReady())
                         {
@@ -282,7 +282,7 @@ namespace Venus_RT.Modules
             if (IsTransferError())
                 return RState.Failed;
 
-            if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Staying)
+            if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)
                 return RState.End;
 
             return RState.Running;

Venus/Venus_RT/Modules/Schedulers/SchedulerPM.cs

@@ -362,9 +362,8 @@ namespace Venus_RT.Scheduler
         private void WaferArrived(object sender, EventArgs e)
         {
             WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
-            var recipeName = Module == ModuleName.PMA
-                ? wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMARecipe"]
-                : wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMBRecipe"];
+            string attr = $"{Module}Recipe";
+            var recipeName = wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep - 1].StepParameter[attr];
 
             Process((string)recipeName, false, true, wafer);
         }

Venus/Venus_RT/Modules/Schedulers/SchedulerTMRobot.cs

@@ -215,13 +215,13 @@ namespace Venus_RT.Modules.Schedulers
                 }
             }
 
-
             Hand freeHand = SelectFreeHand();
-            if(freeHand == Hand.None)
+            if(freeHand == Hand.None && !ModuleHelper.IsTMRobot(items[0].SourceModule))
             {
                 LOG.Write(eEvent.WARN_ROUTER, ModuleName.TMRobot, "No Free Arm to transfer wafer");
                 return false;
             }
+
             if(_schedulerList.Count == 0)
             {
                 foreach(var moveItem in items)

Venus/Venus_RT/Modules/TM/MFPMPlaceRoutine.cs

@@ -90,13 +90,13 @@ namespace Venus_RT.Modules.TM
 
         public RState Monitor()
         {
-            Runner.Wait((int)PlaceStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
-                .Run((int)PlaceStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
-                .Run((int)PlaceStep.ArmExtend, ArmExtend, WaitRobotExtendDone)
-                .Run((int)PlaceStep.LiftUpWafer, NotifyPMPlaceWafer, WaitPMWaferLiftUp)
-                .Delay((int)PlaceStep.PlaceDelay, _placeDelayTime)
-                .Run((int)PlaceStep.ArmRetract, ArmRetract, WaitRobotRetractDone)
-                .End((int)PlaceStep.NotifyDone, NotifyPMDone, _delay_50ms);
+            Runner.Wait((int)PlaceStep.WaitPMReady,     () => _pmModule.IsIdle,                         _delay_60s)
+                .Run((int)PlaceStep.PMPrepare,          ModulePrepare,          IsModulePrepareReady,   _delay_60s)
+                .Run((int)PlaceStep.ArmExtend,          ArmExtend,              WaitRobotExtendDone,    _placingTimeout)
+                .Run((int)PlaceStep.LiftUpWafer,        NotifyPMPlaceWafer,     WaitPMWaferLiftUp,      _delay_30s)
+                .Delay((int)PlaceStep.PlaceDelay,                                                       _placeDelayTime)
+                .Run((int)PlaceStep.ArmRetract,         ArmRetract,             WaitRobotRetractDone,   _delay_30s)
+                .End((int)PlaceStep.NotifyDone,         NotifyPMDone,                                   _delay_50ms);
             return Runner.Status;
         }