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@@ -19,6 +19,7 @@ using Venus_Unity;
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using MECF.Framework.Common.CommonData.DeviceData;
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using System.Windows.Shapes;
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using Path = System.IO.Path;
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+using Aitex.Core.RT.Log;
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namespace Venus_MainPages.ViewModels
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{
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@@ -1437,145 +1438,154 @@ namespace Venus_MainPages.ViewModels
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}
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void timer_Tick(object sender, EventArgs e)
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{
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- RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
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-
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- if (RtDataValues==null)
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+ try
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{
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- return;
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- }
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- TurboN2FlowSetPoint = Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
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-
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- PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
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- GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
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- PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
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- PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
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- PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
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- PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
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- PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
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- PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
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- PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
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- PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
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- MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
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- MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
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- MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
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- MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
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- MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
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- MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
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- MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
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- MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
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- N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
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- SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
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- FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
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- GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
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- PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
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- PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
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- PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
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- PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
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- TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
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- TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
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- PVHe3ValveIsOpen= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
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- HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
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-
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-
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-
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- PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
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- TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
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-
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-
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- LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
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- IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
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- IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
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-
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- PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
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- TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
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-
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- PositionValue = -((int)((PendulumValvePosition) * 0.09));
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-
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-
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- PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
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-
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- GasIsFlowing = PMCurrentState == PMState.GasFlowing;
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- IsProcessing=PMCurrentState == PMState.Processing;
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- MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
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- MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
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- MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
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- MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
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- MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
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- MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
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- MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
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- MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
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- MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
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- MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
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-
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- SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
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- BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
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- PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
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- ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
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-
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-
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- ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
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- ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
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- WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
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-
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- ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
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- ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
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- ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
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- ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
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-
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- ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
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-
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- HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
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-
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-
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-
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- ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
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-
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- SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
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- IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
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- IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
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- IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
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- IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
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- SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
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- SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
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-
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- IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
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- IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
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-
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- ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
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-
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- MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
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- MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
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-
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- BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
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- BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
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- TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
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- IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
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- IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
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+ RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
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+ if (RtDataValues == null)
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+ {
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+ return;
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+ }
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- if (PMCurrentState == PMState.Processing)
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- {
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- CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
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- if (CurrentRecipeResult.RecipeStepNumber != null)
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- {
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- CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
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+ TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
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+
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+ PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
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+ GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
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+ PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
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+ PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
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+ PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
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+ PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
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+ PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
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+ PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
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+ PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
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+ PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
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+ MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
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+ MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
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+ MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
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+ MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
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+ MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
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+ MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
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+ MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
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+ MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
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+ N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
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+ SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
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+ FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
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+ GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
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+ PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
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+ PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
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+ PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
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+ PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
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+ TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
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+ TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
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+ PVHe3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
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+ HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
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+
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+
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+
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+ PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
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+ TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
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+
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+
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+ LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
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+ IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
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+ IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
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+
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+ PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
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+ TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
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+
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+ PositionValue = -((int)((PendulumValvePosition) * 0.09));
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+
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+
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+ PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
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+
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+ GasIsFlowing = PMCurrentState == PMState.GasFlowing;
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+ IsProcessing = PMCurrentState == PMState.Processing;
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+ MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
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+ MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
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+ MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
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+ MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
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+ MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
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+ MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
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+ MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
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+ MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
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+ MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
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+ MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
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+
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+ SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
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+ BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
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+ PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
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+ ESCHVData = CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
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+
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+
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+ ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
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+ ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
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+ WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
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+
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+ ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
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+ ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
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+ ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
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+ ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
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+
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+ ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
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+
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+ HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
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+
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+
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+
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+ ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
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+
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+ SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
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+ IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
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+ IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
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+ IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
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+ IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
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+ SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
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+ SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
|
|
|
+
|
|
|
+ IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
|
|
|
+ IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
|
|
|
+
|
|
|
+ ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
|
|
|
+
|
|
|
+
|
|
|
+ MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
|
|
|
+ MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
|
|
|
+
|
|
|
+ BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
|
|
|
+ BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
|
|
|
+ TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
|
|
|
+ IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
|
|
|
+ IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
|
|
|
+
|
|
|
+
|
|
|
+ if (PMCurrentState == PMState.Processing)
|
|
|
+ {
|
|
|
+ CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
|
|
|
+ if (CurrentRecipeResult.RecipeStepNumber != null)
|
|
|
+ {
|
|
|
+ CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
|
|
|
+ }
|
|
|
+ }
|
|
|
+ else
|
|
|
+ {
|
|
|
+ CurrentRecipeResult = null;
|
|
|
+ CurrentRecipeStep = null;
|
|
|
}
|
|
|
- }
|
|
|
- else
|
|
|
- {
|
|
|
- CurrentRecipeResult = null;
|
|
|
- CurrentRecipeStep = null;
|
|
|
- }
|
|
|
|
|
|
- if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
|
|
|
- {
|
|
|
- ChamberPressureFeedBack = ProcessLowPressure;
|
|
|
+ if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
|
|
|
+ {
|
|
|
+ ChamberPressureFeedBack = ProcessLowPressure;
|
|
|
+ }
|
|
|
+ else
|
|
|
+ {
|
|
|
+ ChamberPressureFeedBack = ProcessHighPressure;
|
|
|
+ }
|
|
|
}
|
|
|
- else
|
|
|
- {
|
|
|
- ChamberPressureFeedBack = ProcessHighPressure;
|
|
|
+ catch (Exception ex)
|
|
|
+ {
|
|
|
+ LOG.WriteExeption(ex.Message, ex);
|
|
|
}
|
|
|
}
|
|
|
public void addDataKeys()
|