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@@ -318,7 +318,7 @@
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM38" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -350,7 +350,7 @@
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<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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@@ -766,7 +766,7 @@
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<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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@@ -813,14 +813,14 @@
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<configs name="DryPump" nameView="Dry Pump" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM34" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM36" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -844,7 +844,7 @@
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<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM42" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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@@ -1154,15 +1154,15 @@
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
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- <config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM48" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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<configs name="TurboPump" nameView="Turbo Pump">
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- <config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM2" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="PendulumValve" nameView="Pendulum Valve">
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- <config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM74" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
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</configs>
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@@ -1252,7 +1252,7 @@
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<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM86" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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@@ -1299,14 +1299,14 @@
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<configs name="DryPump" nameView="Dry Pump" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM96" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM59" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -1330,7 +1330,7 @@
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<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM75" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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@@ -1640,15 +1640,15 @@
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
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- <config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM17" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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<configs name="TurboPump" nameView="Turbo Pump">
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- <config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM3" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="PendulumValve" nameView="Pendulum Valve">
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- <config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM77" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
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</configs>
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@@ -1738,7 +1738,7 @@
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<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM27" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
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@@ -1785,14 +1785,14 @@
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<configs name="DryPump" nameView="Dry Pump" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM29" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM41" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
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@@ -1816,7 +1816,7 @@
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<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM51" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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@@ -2126,15 +2126,15 @@
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
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- <config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM53" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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<configs name="TurboPump" nameView="Turbo Pump">
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- <config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM5" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="PendulumValve" nameView="Pendulum Valve">
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- <config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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+ <config default="COM57" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
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</configs>
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