PMD&Simulator update

Venus/Venus_RT/Config/IoProviderConfig.xml

@@ -68,8 +68,30 @@
 			<Block type="ao" offset="0" size="128" value_type=""></Block>
 		</Blocks>
 	</IoProvider>
-	
 
+  <IoProvider load_condition="0" module="PMD" name="PLC" map_module="PMD"  class="MECF.Framework.RT.Core.IoProviders.MCProtocolPlc" assembly="MECF.Framework.RT.Core">
+    <Parameter ip="127.0.0.1" port="6734" network_id="1" station_id="1"></Parameter>
+    <Blocks>
+      <Block type="di" offset="0" size="640" value_type=""></Block>
+      <Block type="do" offset="0" size="640" value_type=""></Block>
+      <Block type="ai" offset="0" size="640" value_type=""></Block>
+      <Block type="ao" offset="0" size="640" value_type=""></Block>
+    </Blocks>
+  </IoProvider>
+
+
+  <IoProvider load_condition="1" module="PMD" name="PLC" map_module="PMD"   class="Venus_RT.Devices.FinsPlc" assembly="Venus_RT">
+    <Parameter  ip="192.168.10.14" port="9600"
+					diBlockType="WR" doBlockType="WR" aiBlockType="D" aoBlockType="D"
+					diStartPosition="20" doStartPosition="0" aiStartPosition="2000" aoStartPosition="1000" ></Parameter>
+    <Blocks>
+      <Block type="di" offset="0" size="128" value_type=""></Block>
+      <Block type="do" offset="0" size="128" value_type=""></Block>
+      <Block type="ai" offset="0" size="128" value_type=""></Block>
+      <Block type="ao" offset="0" size="128" value_type=""></Block>
+    </Blocks>
+  </IoProvider>
+  
 	<IoProvider load_condition="0" module="TM" name="PLC" map_module="TM" map_file="TM\\_ioDefineVenus_MF.xml" class="MECF.Framework.RT.Core.IoProviders.MCProtocolPlc" assembly="MECF.Framework.RT.Core">
 		<Parameter ip="127.0.0.1" port="6831" network_id="1" station_id="1"></Parameter>
 		<Blocks>

Venus/Venus_RT/Config/System.sccfg

@@ -1572,6 +1572,455 @@
 
 	</configs>
 
+  <!--PMD-->
+  <configs name="PMD" nameView="PMD" >
+    <config default="2" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="3" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
+    <config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+    <config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+    <config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+    <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    <config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
+    <config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+    <config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
+    <config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+    <config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
+    <config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+    <config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+    <config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
+    <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+    <config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
+    <config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+    <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
+    <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
+    <config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
+    <config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
+    <config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+    <config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
+    <config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
+    <config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
+    <config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+    <config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+    <config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
+    <config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
+    <config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
+
+    <configs name="MFCVerification" nameView="MFC Verification" >
+      <config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
+      <config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+      <config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+      <config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+      <config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
+      <config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
+      <config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
+
+      <config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
+      <config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
+      <config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
+      <config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
+    </configs>
+
+    <configs name="Chiller" nameView="Chiller" >
+      <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
+      <config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
+      <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
+      <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
+      <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
+      <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="DryPump" nameView="Dry Pump" >
+      <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+      <config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+    </configs>
+    <configs name="Rf" nameView="Source RF" >
+      <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
+      <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
+      <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
+    </configs>
+    <configs name="Match" nameView="Source Match" >
+      <config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
+      <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
+    </configs>
+
+    <configs name="BiasRf" nameView="Bias RF" >
+      <config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
+      <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
+      <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
+    </configs>
+    <configs name="BiasMatch" nameView="Bias Match" >
+      <config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
+      <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+    </configs>
+    <configs name="MfcGas1" nameView="MFC Gas1" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
+      <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas2" nameView="MFC Gas2" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
+      <config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas3" nameView="MFC Gas3" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
+      <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas4" nameView="MFC Gas4" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
+      <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas5" nameView="MFC Gas5" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
+      <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas6" nameView="MFC Gas6" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
+      <config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas7" nameView="MFC Gas7" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
+      <config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcGas8" nameView="MFC Gas8" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
+      <config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcN2" nameView="MFC N2" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
+      <config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="MfcHe" nameView="MFC He" >
+      <config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
+      <config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
+      <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+      <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+      <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+      <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="Pump" nameView="Pump" >
+      <config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+      <config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+      <config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+      <config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
+      <config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+      <config default="75" name="RoughPumpDownPressure" description="PM Rough Pumping Pressure" max="200" min="0" paramter="" tag="" unit="Torr" type="Integer" />
+      <config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+      <config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+      <config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
+      <config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+    </configs>
+    <configs name="Purge" nameView="Purge" >
+      <config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
+      <config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+      <config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+      <config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
+      <config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
+    </configs>
+    <configs name="HeaterChamber" nameView="Heater Substrate" >
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+      <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+    </configs>
+
+    <configs name="WallHeater" nameView="Heater Wall" >
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+      <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+    </configs>
+
+    <configs name="ForelineHeater" nameView="Heater Foreline" >
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+      <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+    </configs>
+
+    <configs name="ValveHeater" nameView="Valve Heater" >
+      <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+      <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+      <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+      <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+      <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+      <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+    </configs>
+    <configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
+      <config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
+    </configs>
+    <configs name="TurboPump" nameView="Turbo Pump">
+      <config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+      <config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+    </configs>
+    <configs name="PendulumValve" nameView="Pendulum Valve">
+      <config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+    </configs>
+
+    <!--Clean-->
+    <configs name="IdleClean" nameView="Idle Clean" visible="false">
+      <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+    </configs>
+
+    <configs name="JobClean" nameView="Job Clean" visible="false">
+      <config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+
+      <config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />
+
+    </configs>
+
+
+    <configs name="EPD" nameView="EPD Setting">
+      <config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+      <config default="0" name="ChannelNumber" nameView="EPD Channel Number"  description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
+      <config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
+      <config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
+    </configs>
+
+  </configs>
 	<!--Recipe-->
 	<configs name="Recipe" nameView="Recipe">		
 		<configs name="Venus" nameView="Venus Module" >

Venus/Venus_RT/Devices/DeviceManager.cs

@@ -62,7 +62,11 @@ namespace Venus_RT.Instances
                 JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMC.ChamberType");
                 InitPM(ModuleName.PMC, jetChamber);
             }
-
+            if (ModuleHelper.IsInstalled(ModuleName.PMD))
+            {
+                JetChamber jetChamber = (JetChamber)SC.GetValue<int>("PMD.ChamberType");
+                InitPM(ModuleName.PMD, jetChamber);
+            }
             if (ModuleHelper.IsInstalled(ModuleName.TM))
                 InitTM(ModuleName.TM);
 

Venus/Venus_Simulator/App.xaml.cs

@@ -17,7 +17,7 @@ namespace Venus_Simulator
             SimulatorJetChamber.CurrentPMAChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMA.ChamberType");
             SimulatorJetChamber.CurrentPMBChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMB.ChamberType");
             SimulatorJetChamber.CurrentPMCChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMC.ChamberType");
-            SimulatorJetChamber.CurrentPMDChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMA.ChamberType");
+            SimulatorJetChamber.CurrentPMDChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMD.ChamberType");
 
 
 

Venus/Venus_Simulator/Instances/SimulatorSystem.cs

@@ -324,6 +324,7 @@ namespace Venus_Simulator.Instances
                     IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
                     //// pressure
                     SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
+                    //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
                     SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
                     SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
 
@@ -433,9 +434,7 @@ namespace Venus_Simulator.Instances
                         ChangeTime(ModuleName.PMA);
                         //MonitorIOPumpCtrl(ModuleName.PMA);
                         break;
-
-                    case JetChamber.Kepler2300:
-                    case JetChamber.Kepler2200A:
+                    case JetChamber.Kepler2300:                 
                     case JetChamber.Kepler2200B:
                         // PMA
                         MonitorSlitDoor(ModuleName.PMA);
@@ -449,6 +448,17 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMA);
                         MonitorLid(ModuleName.PMA);
                         break;
+                    case JetChamber.Kepler2200A:
+                        MonitorSlitDoor(ModuleName.PMC);
+                        MonitorPin(ModuleName.PMC);
+                        MonitorPressure_Kepler2200A(ModuleName.PMC);
+                        //MonitorTemperature(ModuleName.PMB);
+                        MonitorGas(ModuleName.PMC);
+                        // MonitorRF(ModuleName.PMB);
+                        ChangeTime(ModuleName.PMC);
+                        //MonitorIOPumpCtrl(ModuleName.PMB);
+                        MonitorLid(ModuleName.PMC);
+                        break;
                 }
                 switch (SimulatorJetChamber.CurrentPMBChamber)
                 {
@@ -464,8 +474,7 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         break;
 
-                    case JetChamber.Kepler2300:
-                    case JetChamber.Kepler2200A:
+                    case JetChamber.Kepler2300:                  
                     case JetChamber.Kepler2200B:
                         // PMB
                         MonitorSlitDoor(ModuleName.PMB);
@@ -477,7 +486,17 @@ namespace Venus_Simulator.Instances
                         ChangeTime(ModuleName.PMB);
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         MonitorLid(ModuleName.PMB);
-
+                        break;
+                    case JetChamber.Kepler2200A:
+                        MonitorSlitDoor(ModuleName.PMC);
+                        MonitorPin(ModuleName.PMC);
+                        MonitorPressure_Kepler2200A(ModuleName.PMC);
+                        //MonitorTemperature(ModuleName.PMB);
+                        MonitorGas(ModuleName.PMC);
+                        // MonitorRF(ModuleName.PMB);
+                        ChangeTime(ModuleName.PMC);
+                        //MonitorIOPumpCtrl(ModuleName.PMB);
+                        MonitorLid(ModuleName.PMC);
                         break;
                 }
                 switch (SimulatorJetChamber.CurrentPMCChamber)
@@ -494,8 +513,7 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         break;
 
-                    case JetChamber.Kepler2300:
-                    case JetChamber.Kepler2200A:
+                    case JetChamber.Kepler2300:                    
                     case JetChamber.Kepler2200B:
                         // PMC
                         MonitorSlitDoor(ModuleName.PMC);
@@ -508,11 +526,22 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         MonitorLid(ModuleName.PMC);
                         break;
+                    case JetChamber.Kepler2200A:
+                        MonitorSlitDoor(ModuleName.PMC);
+                        MonitorPin(ModuleName.PMC);
+                        MonitorPressure_Kepler2200A(ModuleName.PMC);
+                        //MonitorTemperature(ModuleName.PMB);
+                        MonitorGas(ModuleName.PMC);
+                        // MonitorRF(ModuleName.PMB);
+                        ChangeTime(ModuleName.PMC);
+                        //MonitorIOPumpCtrl(ModuleName.PMB);
+                        MonitorLid(ModuleName.PMC);
+                        break;
                 }
                 switch (SimulatorJetChamber.CurrentPMDChamber)
                 {
                     case JetChamber.Venus:
-                        // PMC
+                        // PMD
                         MonitorSlitDoor(ModuleName.PMD);
                         MonitorPin(ModuleName.PMD);
                         MonitorPressure(ModuleName.PMD);
@@ -523,10 +552,9 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         break;
 
-                    case JetChamber.Kepler2300:
-                    case JetChamber.Kepler2200A:
+                    case JetChamber.Kepler2300:                  
                     case JetChamber.Kepler2200B:
-                        // PMC
+                        // PMD
                         MonitorSlitDoor(ModuleName.PMD);
                         MonitorPin(ModuleName.PMD);
                         MonitorPressure_Kepler(ModuleName.PMD);
@@ -537,6 +565,17 @@ namespace Venus_Simulator.Instances
                         //MonitorIOPumpCtrl(ModuleName.PMB);
                         MonitorLid(ModuleName.PMD);
                         break;
+                    case JetChamber.Kepler2200A:
+                        MonitorSlitDoor(ModuleName.PMC);
+                        MonitorPin(ModuleName.PMC);
+                        MonitorPressure_Kepler2200A(ModuleName.PMC);
+                        //MonitorTemperature(ModuleName.PMB);
+                        MonitorGas(ModuleName.PMC);
+                        // MonitorRF(ModuleName.PMB);
+                        ChangeTime(ModuleName.PMC);
+                        //MonitorIOPumpCtrl(ModuleName.PMB);
+                        MonitorLid(ModuleName.PMC);
+                        break;
                 }
 
                 ChangeTime(ModuleName.TM);
@@ -1134,7 +1173,171 @@ namespace Venus_Simulator.Instances
             IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
 
         }
+        void MonitorPressure_Kepler2200A(ModuleName mod)
+        {
+            string sAI_Foreline = "AI_Foreline_Pressure_10t";
+
+
+
+
+
+            if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
+            {
+                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
+            }
+            else
+            {
+                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
+            }
+
+            // PLC 模拟量范围[0，4000], 电压[0, 10V], 压力[0, 760Torr]
+            string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
+            string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
+            //float chamber_pressure = GetMockChamberPressure(mod);
+            //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
+
+            // soft pump & fast pump
+            DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
+            DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
+            DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
+
+            if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
+            {
+                if (fast_pump_vlv.Value && soft_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
+                    }
+
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
+                }
+                else if (fast_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
+                    }
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
+                }
+                else if (soft_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
+                    }
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
+                }
+                else if (turbo_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+
+                    getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                    SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
+                    SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
+                }
+            }
+
+            // fast vent & purge
+            DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
+
+
+            if (vent_vlv.Value)
+            {
+                float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                {
+                    SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                }
+                else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                {
+                    getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                    SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
+                    SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
+                }
+                else
+                {
+                    SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
+                }
+                //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
+                //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
+            }
+
+
+            // Loadlock Pumping Valve
 
+
+            // 压力值越界，复位
+            float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+            if (chamber_pressure1 > ATM_PRESSURE)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
+            }
+            else if (chamber_pressure1 < 20)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
+            }
+
+            float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+            if (process_pressure1 > PROCESS_GAUGE)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
+            }
+            else if (process_pressure1 < 20)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
+            }
+
+            float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
+            if (foreline_pressure > 10000)
+            {
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
+            }
+            else if (foreline_pressure < 150)
+            {
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
+            }
+
+            // ATM switch
+            IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
+
+            // VAC switch
+            IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
+
+        }
         void MonitorMFPressure()
         {
 

Venus/Venus_Simulator/Views/SimulatorIo4View.xaml.cs

@@ -19,7 +19,7 @@ namespace Venus_Simulator.Views
         public SimulatorIo4View()
         {
             InitializeComponent();
-            DataContext = new IoViewModel(6732, "PMD.PLC", PathManager.GetCfgDir() + $"_ioDefine{SimulatorJetChamber.CurrentPMDChamber}.xml", "PMD");
+            DataContext = new IoViewModel(6734, "PMD.PLC", PathManager.GetCfgDir() + $"_ioDefine{SimulatorJetChamber.CurrentPMDChamber}.xml", "PMD");
 
             this.IsVisibleChanged += IOView_IsVisibleChanged;
         }

Venus/Venus_Themes/UserControls/LoadLockRight.xaml

@@ -94,8 +94,10 @@
             <!--<Path  Stroke="Black"  Canvas.Top="15" >
                 <Path.Data>
                     <GeometryGroup>
-                        --><!--<PathGeometry Figures="M 200,100 A 80,80 1 1 1 200,99.9"/>-->
-                        <!--<PathGeometry Figures="M 190,100 A 70,70 1 1 1 190,99.9" />--><!--
+                        -->
+            <!--<PathGeometry Figures="M 200,100 A 80,80 1 1 1 200,99.9"/>-->
+            <!--<PathGeometry Figures="M 190,100 A 70,70 1 1 1 190,99.9" />-->
+            <!--
                         <PathGeometry Figures="M 180,100 A 60,60 1 1 1 180,99.9" />
                         <PathGeometry Figures="M 170,100 A 50,50 1 1 1 170,99.9" />
                         <PathGeometry Figures="M 160,100 A 40,40 1 1 1 160,99.9" />
@@ -149,6 +151,14 @@
                     </ContextMenu>
                 </Rectangle.ContextMenu>
             </Rectangle>
+            <Rectangle Cursor="Hand" DataContext="{Binding RelativeSource={RelativeSource Mode=FindAncestor, AncestorType=UserControl,AncestorLevel=1}}" Fill="DimGray" Style="{StaticResource door2Animation}"  VerticalAlignment="Center"    Height="20"  Canvas.Top="200" Canvas.Left="38" Visibility="{Binding ElementName=LeftLoadLock,Path=Door2IsVisibility}" HorizontalAlignment="Left">
+                <Rectangle.ContextMenu>
+                    <ContextMenu>
+                        <MenuItem Header="Open Door"  Click="OpenDoor2_Click"    IsChecked="{Binding Door2IsOpen}" IsEnabled="{Binding Door2IsOpen,Converter={StaticResource BoolToBool}}"/>
+                        <MenuItem Header="Close Door" Click="CloseDoor2_Click"    IsChecked="{Binding Door2IsOpen,Converter={StaticResource BoolToBool}}" IsEnabled="{Binding Door2IsOpen}"/>
+                    </ContextMenu>
+                </Rectangle.ContextMenu>
+            </Rectangle>
             <TextBlock Text="LLB" FontSize="35" Canvas.Left="210" Canvas.Top="50"/>
 
         </Canvas>

Venus/Venus_UI/Config/UIMenu.json

@@ -203,7 +203,7 @@
   {
     "Id": "PMD",
 
-    "IsShow": "false",
+    "IsShow": "true",
 
     "MenuItem": [
       {