lixiang 38b40b702d 1.修复all in all out 不做cooling bug 4 maanden geleden
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EFEMAlignRoutine.cs 38b40b702d 1.修复all in all out 不做cooling bug 4 maanden geleden
EfemEntity.cs add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID,Process History 切recipe 保留原查询信息 5 maanden geleden
EfemHomeRoutine.cs 4f7a01400f fix the sync issue for efem socket. 11 maanden geleden
EfemPickRoutine.cs a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 10 maanden geleden
EfemPlaceRoutine.cs a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 10 maanden geleden
EfemSwapRoutine.cs 5687e44ebc Enhance routing algorithm. 8 maanden geleden
sysdiag-all-5.0.75.6-2024.06.24.1.exe 5ce110574e 1,添加cooling功能 9 maanden geleden