JetPlasma/Kepler-Release: Kepler2200软件出货版本

lixiang 38b40b702d 1.修复all in all out 不做cooling bug		4 ヶ月前
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EFEMAlignRoutine.cs	38b40b702d 1.修复all in all out 不做cooling bug	4 ヶ月前
EfemEntity.cs	add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息	5 ヶ月前
EfemHomeRoutine.cs	4f7a01400f fix the sync issue for efem socket.	11 ヶ月前
EfemPickRoutine.cs	a4f8a29122 1.Kepler2200 Gas 改造，六路变八路	10 ヶ月前
EfemPlaceRoutine.cs	a4f8a29122 1.Kepler2200 Gas 改造，六路变八路	10 ヶ月前
EfemSwapRoutine.cs	5687e44ebc Enhance routing algorithm.	8 ヶ月前
sysdiag-all-5.0.75.6-2024.06.24.1.exe	5ce110574e 1，添加cooling功能	9 ヶ月前