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EFEMAlignRoutine.cs
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38b40b702d
1.修复all in all out 不做cooling bug
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4 kuukautta sitten |
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EfemEntity.cs
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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5 kuukautta sitten |
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EfemHomeRoutine.cs
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4f7a01400f
fix the sync issue for efem socket.
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11 kuukautta sitten |
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EfemPickRoutine.cs
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 kuukautta sitten |
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EfemPlaceRoutine.cs
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 kuukautta sitten |
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EfemSwapRoutine.cs
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5687e44ebc
Enhance routing algorithm.
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8 kuukautta sitten |
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sysdiag-all-5.0.75.6-2024.06.24.1.exe
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5ce110574e
1，添加cooling功能
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9 kuukautta sitten |
lixiang
38b40b702d
1.修复all in all out 不做cooling bug