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- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using Venus_RT.Devices;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_Core;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Schedulers;
- using System.Collections.Generic;
- using Venus_RT.Devices.EFEM;
- namespace Venus_RT.Modules.EFEM
- {
- class EfemPlaceRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PlaceStep
- {
- WaitModuleReady,
- Placing1,
- Placing2,
- End,
- }
- private int _moveTimeout = 20 * 1000;
- private ModuleName _targetModule = ModuleName.System;
- private ModuleName _targetModule2 = ModuleName.System;
- int _targetSlot;
- int _targetSlot2;
- Hand _hand;
- Hand _hand2;
- EfemBase _efem;
- bool _bDoublePlace = false;
- public EfemPlaceRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
- {
- _efem = efem;
- }
- public RState Start(params object[] objs)
- {
- if (!_efem.IsHomed)
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM is not homed, please home it first");
- return RState.Failed;
- }
- _bDoublePlace = false;
- var placeItem = (Queue<MoveItem>)objs[0];
- if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(placeItem))
- return RState.Failed;
- _targetModule = placeItem.Peek().DestinationModule;
- _targetSlot = placeItem.Peek().DestinationSlot;
- _hand = placeItem.Peek().RobotHand;
- if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand} already has no wafer, cannot do the place action");
- return RState.Failed;
- }
- if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target: {_targetModule}{_targetSlot} has a wafer, cannot do the place action");
- return RState.Failed;
- }
- if (placeItem.Count >= 2)
- {
- placeItem.Dequeue();
- _targetModule2 = placeItem.Peek().DestinationModule;
- if (!ModuleHelper.IsLoadPort(_targetModule2))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Wrong double place command, target is not loadport");
- return RState.Failed;
- }
- _hand2 = _hand != Hand.Blade1 ? Hand.Blade1 : Hand.Blade2;
- if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)_hand2))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot arm{_hand2} has no wafer, cannot do the double place action");
- return RState.Failed;
- }
- _targetSlot2 = placeItem.ToArray()[0].DestinationSlot;
- if (WaferManager.Instance.CheckHasWafer(_targetModule2, _targetSlot2))
- {
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"The target: {_targetModule2} {_targetSlot2} has a wafer, cannot do the double place action");
- return RState.Failed;
- }
- _bDoublePlace = true;
- }
- _moveTimeout = SC.GetValue<int>($"EFEM.MotionTimeout") * 1000;
- string targetModule2 = "";
- if (_targetModule2 != ModuleName.System)
- {
- targetModule2 = _targetModule2.ToString();
- }
- return Runner.Start(Module, $"Place to {_targetModule} {targetModule2}");
- }
- public RState Monitor()
- {
- if (_bDoublePlace)
- {
- Runner.Wait(PlaceStep.WaitModuleReady, WaitModuleReady, _delay_60s)
- .Run(PlaceStep.Placing1, Place1, Place1Done, _moveTimeout + _delay_1s)
- .Run(PlaceStep.Placing2, Place2, Place2Done, _moveTimeout + _delay_1s)
- .End(PlaceStep.End, ActionDone);
- }
- else
- {
- Runner.Wait(PlaceStep.WaitModuleReady, WaitModuleReady, _delay_60s)
- .Run(PlaceStep.Placing1, Place1, Place1Done, _moveTimeout + _delay_1s)
- .End(PlaceStep.End, ActionDone);
- }
- return Runner.Status;
- }
- public void Abort()
- {
- //_efem.Halt();
- }
- private bool WaitModuleReady()
- {
- return _efem.Status == RState.End;
- }
- private bool Place1()
- {
- return _efem.Place(_targetModule, _targetSlot, _hand);
- }
- private bool Place1Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)_hand, _targetModule, _targetSlot);
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- WaferManager.Instance.CreateDuplicatedWafer(ModuleName.EfemRobot, (int)_hand, _targetModule, _targetSlot);
- Runner.Stop($"EFEM Robot place wafer to {_targetModule}.{_targetSlot + 1} failed, {_efem.Status}");
- return true;
- }
- if (Runner.StepElapsedMS > _moveTimeout)
- {
- WaferManager.Instance.CreateDuplicatedWafer(ModuleName.EfemRobot, (int)_hand, _targetModule, _targetSlot);
- Runner.Stop($"EFEM Robot place wafer to {_targetModule}.{_targetSlot + 1} timeout, {_moveTimeout}ms");
- return true;
- }
- return false;
- }
- private bool Place2()
- {
- return _efem.Place(_targetModule2, _targetSlot2, _hand2);
- }
- private bool Place2Done()
- {
- if (_efem.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.EfemRobot, (int)_hand2, _targetModule2, _targetSlot2);
- return true;
- }
- else if (_efem.Status != RState.Running)
- {
- WaferManager.Instance.CreateDuplicatedWafer(ModuleName.EfemRobot, (int)_hand2, _targetModule2, _targetSlot2);
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem robot place failed: {_efem.Status}");
- return true;
- }
- if (Runner.StepElapsedMS > _moveTimeout)
- {
- WaferManager.Instance.CreateDuplicatedWafer(ModuleName.EfemRobot, (int)_hand2, _targetModule2, _targetSlot2);
- Runner.Stop($"EFEM Robot place wafer to {_targetModule}.{_targetSlot2 + 1} timeout, {_moveTimeout}ms");
- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Robot place wafer to {_targetModule}.{_targetSlot2 + 1} timeout, {_moveTimeout}ms");
- return true;
- }
- return false;
- }
- private bool ActionDone()
- {
- return true;
- }
- }
- }
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