 lixiang
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b1e6a9ce63
bug提交
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il y a 1 an |
 sangwq
|
052baa3ed3
fix the clear error command confirm sequence problem and PM pressure bug.
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il y a 1 an |
 zhouhr
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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il y a 1 an |
|
lixiang
|
9f512c69c9
优化efem动画
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il y a 1 an |
 Intern01
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987f0abae5
1.Slove TuroN2Flow don't show problem
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il y a 1 an |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
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il y a 1 an |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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il y a 1 an |
|
Intern01
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211accc82b
PMD&Simulator update
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il y a 1 an |
|
Intern01
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b7129c8da5
PM&Simulator update
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il y a 1 an |
|
Intern01
|
41052afc3b
recipeviewmodel uodate && simulator update
|
il y a 1 an |
|
Intern01
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b1f52bbe8a
Simulator PMC update
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il y a 1 an |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
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il y a 1 an |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
|
il y a 1 an |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
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il y a 1 an |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
il y a 1 an |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
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il y a 1 an |
|
lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
il y a 1 an |
|
lixiang
|
e52d3832a4
模拟器chamber选择由手动改动变为都rt配置文件
|
il y a 1 an |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
il y a 1 an |
|
lixiang
|
8f80478982
1.添加IoSwitch
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il y a 1 an |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
il y a 1 an |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
il y a 1 an |
|
sangwq
|
dff905345f
增加PMB的兼容
|
il y a 2 ans |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
il y a 2 ans |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
|
il y a 2 ans |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
il y a 2 ans |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
il y a 2 ans |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
|
il y a 2 ans |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
il y a 2 ans |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
il y a 2 ans |
