增加PMB的兼容

Venus/Framework/RTEquipmentLibrary/HardwareUnits/PMs/PM.cs

@@ -30,6 +30,7 @@ namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs
 
         public PM(string module) : base(module, module, module, module)
         {
+            IsInstalled = false;
         }
 
 
@@ -45,7 +46,7 @@ namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs
             DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
 
 
-            IsInstalled = SC.GetValue<bool>($"System.{Name}IsInstalled");
+            IsInstalled = true;
 
 
             return true;

Venus/Venus_MainPages/Unity/ModuleManager.cs

@@ -20,12 +20,11 @@ namespace Venus_MainPages.Unity
 
         static ModuleManager()
         {
-            bool bInstalledA = (bool)QueryDataClient.Instance.Service.GetConfig("System.PMAIsInstalled");
-            if (bInstalledA)
+            string installModules = (string)QueryDataClient.Instance.Service.GetConfig("System.InstalledModules");
+            if (installModules.Contains("PMA"))
                 ModulesID.Add("PMA");
 
-            bool bInstalledB = (bool)QueryDataClient.Instance.Service.GetConfig("System.PMBIsInstalled");
-            if (bInstalledB)
+            if (installModules.Contains("PMB"))
                 ModulesID.Add("PMB");
         }
 

Venus/Venus_RT/Config/IoProviderConfig.xml

@@ -23,6 +23,29 @@
     </Blocks>
   </IoProvider>
 
+	<IoProvider load_condition="0" module="PMB" name="PLC" map_module="PMB" map_file="_ioDefineVenus.xml" class="MECF.Framework.RT.Core.IoProviders.MCProtocolPlc" assembly="MECF.Framework.RT.Core">
+		<Parameter ip="127.0.0.1" port="6732" network_id="1" station_id="1"></Parameter>
+		<Blocks>
+			<Block type="di" offset="0" size="640" value_type=""></Block>
+			<Block type="do" offset="0" size="640" value_type=""></Block>
+			<Block type="ai" offset="0" size="640" value_type=""></Block>
+			<Block type="ao" offset="0" size="640" value_type=""></Block>
+		</Blocks>
+	</IoProvider>
+
+
+	<IoProvider load_condition="1" module="PMB" name="PLC" map_module="PMB" map_file="_ioDefineVenus.xml"  class="Venus_RT.Devices.FinsPlc" assembly="Venus_RT">
+		<Parameter  ip="192.168.10.12" port="9600"
+					diBlockType="WR" doBlockType="WR" aiBlockType="D" aoBlockType="D"
+					diStartPosition="20" doStartPosition="0" aiStartPosition="2000" aoStartPosition="1000" ></Parameter>
+		<Blocks>
+			<Block type="di" offset="0" size="128" value_type=""></Block>
+			<Block type="do" offset="0" size="128" value_type=""></Block>
+			<Block type="ai" offset="0" size="128" value_type=""></Block>
+			<Block type="ao" offset="0" size="128" value_type=""></Block>
+		</Blocks>
+	</IoProvider>
+
 	<IoProvider load_condition="0" module="TM" name="PLC" map_module="TM" map_file="_ioDefineVenus_MF.xml" class="MECF.Framework.RT.Core.IoProviders.MCProtocolPlc" assembly="MECF.Framework.RT.Core">
 		<Parameter ip="127.0.0.1" port="6831" network_id="1" station_id="1"></Parameter>
 		<Blocks>

Venus/Venus_RT/Config/System.sccfg

@@ -7,8 +7,6 @@
 		<config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
 		<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
 		<config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
-		<config default="true" name="PMAIsInstalled" nameView="PMA Is Installed" description="PMA已安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
-		<config default="false" name="PMBIsInstalled" nameView="PMB Is Installed" description="PMB已安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
 		<config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
 		<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
 		<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
@@ -632,4 +630,450 @@
 		</configs>
 
 	</configs>
+
+	<!--PMB-->
+	<configs name="PMB" nameView="PMB" >
+		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
+		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
+		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
+		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
+		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
+		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
+		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
+		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
+		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
+		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
+		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
+		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
+
+		<configs name="MFCVerification" nameView="MFC Verification" >
+			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
+			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
+			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
+			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
+			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
+
+			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
+			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
+			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
+			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
+		</configs>
+
+		<configs name="Chiller" nameView="Chiller" >
+			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
+			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
+			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
+			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="DryPump" nameView="Dry Pump" >
+			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		</configs>
+		<configs name="Rf" nameView="Source RF" >
+			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
+			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
+			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
+		</configs>
+		<configs name="Match" nameView="Source Match" >
+			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
+      <config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
+		</configs>
+
+		<configs name="BiasRf" nameView="Bias RF" >
+			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
+			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
+		</configs>
+		<configs name="BiasMatch" nameView="Bias Match" >
+			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
+			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
+		</configs>
+		<configs name="MfcGas1" nameView="MFC Gas1" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
+			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas2" nameView="MFC Gas2" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
+			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas3" nameView="MFC Gas3" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
+			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas4" nameView="MFC Gas4" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
+			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas5" nameView="MFC Gas5" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
+			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas6" nameView="MFC Gas6" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
+			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas7" nameView="MFC Gas7" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
+			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcGas8" nameView="MFC Gas8" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
+			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcN2" nameView="MFC N2" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
+			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="MfcHe" nameView="MFC He" >
+			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
+			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
+			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
+			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
+			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="Pump" nameView="Pump" >
+			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
+			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
+			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
+			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+			<config default="75" name="RoughPumpDownPressure" description="PM Rough Pumping Pressure" max="200" min="0" paramter="" tag="" unit="Torr" type="Integer" />
+			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
+			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
+			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+		</configs>
+		<configs name="Purge" nameView="Purge" >
+			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
+			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
+			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
+		</configs>
+		<configs name="HeaterChamber" nameView="Heater Substrate" >
+			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+		</configs>
+
+		<configs name="WallHeater" nameView="Heater Wall" >
+			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+		</configs>
+
+		<configs name="ForelineHeater" nameView="Heater Foreline" >
+			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+		</configs>
+
+		<configs name="ValveHeater" nameView="Valve Heater" >
+			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
+			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
+
+			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
+			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
+			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
+		</configs>
+		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
+			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
+		</configs>
+		<configs name="TurboPump" nameView="Turbo Pump">
+			<config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
+			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		</configs>
+		<configs name="PendulumValve" nameView="Pendulum Valve">
+			<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
+		</configs>
+
+		<!--Clean-->
+		<configs name="IdleClean" nameView="Idle Clean" visible="false">
+			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
+		</configs>
+
+		<configs name="JobClean" nameView="Job Clean" visible="false">
+			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+
+			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />
+
+		</configs>
+
+
+		<configs name="EPD" nameView="EPD Setting">
+			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
+			<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
+		</configs>
+
+	</configs>
 </root>

Venus/Venus_RT/Modules/RouteManager.cs

@@ -15,6 +15,7 @@ using MECF.Framework.Common.Equipment;
 using MECF.Framework.Common.SubstrateTrackings;
 using Venus_Core;
 using Venus_RT.Modules.PMs;
+using Aitex.Core.RT.Log;
 namespace Venus_RT.Modules
 {
     class RouteManager : Entity, IEntity
@@ -229,17 +230,23 @@ namespace Venus_RT.Modules
             LLB?.Initialize();
 
             _TMCycle = new TMCycle();
+
+            BuildTransitionTable();
             return true;
         }
 
         private void BuildTransitionTable()
         {
+            fsm = new StateMachine<RouteManager>(ModuleName.System.ToString(), (int)RtState.Init, 50);
             //Init sequence
             Transition(RtState.Init, MSG.HOME, FsmStartHome, RtState.Initializing);
             Transition(RtState.Idle, MSG.HOME, FsmStartHome, RtState.Initializing);
             Transition(RtState.Error, MSG.HOME, FsmStartHome, RtState.Initializing);
 
             ////  EnterExitTransition<RtState, FSM_MSG>(RtState.Initializing, fStartInit, FSM_MSG.NONE, null);
+            ///
+            Transition(RtState.Idle, FSM_MSG.TIMER, FsmMonitor, RtState.Idle);
+            Transition(RtState.Init, FSM_MSG.TIMER, FsmMonitor, RtState.Init);
 
             Transition(RtState.Initializing, FSM_MSG.TIMER, FsmMonitorHome, RtState.Idle);
             Transition(RtState.Initializing, MSG.ERROR, FsmError, RtState.Error);
@@ -253,14 +260,51 @@ namespace Venus_RT.Modules
 
         }
 
+        private bool FsmMonitor(object[] objs)
+        {
+            _debugRoutine();
+            return true;
+        }
+
         private bool FsmStartHome(object[] objs)
         {
+            PMA?.Invoke("Home");
+            PMB?.Invoke("Home");
+            PMC?.Invoke("Home");
+            PMD?.Invoke("Home");
+            TM?.Invoke("Home");
+            LLA?.Invoke("Home");
+            LLB?.Invoke("Home");
+
             return true;
         }
 
         private bool FsmMonitorHome(object[] objs)
         {
-            return true;
+            bool CheckHomed(string name, bool bValid, bool bDone)
+            {
+                if (bValid && !bDone)
+                {
+                    if (fsm.ElapsedTime > 20 * 1000)
+                    {
+                        LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"{name} home timeout");
+                        PostMsg(MSG.ERROR);
+                        return true;
+                    }
+                    else
+                        return false;
+                }
+
+                return true;
+            }
+
+            return CheckHomed("PMA", PMA != null, PMA != null&&PMA.IsIdle) &&
+                CheckHomed("PMB", PMB != null, PMB != null&&PMA.IsIdle) &&
+                CheckHomed("PMC", PMC != null, PMC != null&&PMC.IsIdle) &&
+                CheckHomed("PMD", PMD != null, PMD != null&&PMD.IsIdle) &&
+                CheckHomed("LLA", LLA != null, LLA != null&&LLA.IsIdle) &&
+                CheckHomed("LLB", LLB != null, LLB != null&&LLB.IsIdle) &&
+                CheckHomed("TM", TM != null, TM != null&&TM.IsIdle);
         }
 
         private bool FsmError(object[] objs)
@@ -290,5 +334,20 @@ namespace Venus_RT.Modules
             return ret == RState.End;
         }
 
+        private void _debugRoutine()
+        {
+            int flag = 0;
+            // Test Home routine
+            if (flag == 1)
+            {
+                PostMsg(MSG.HOME);
+            }
+            else if (flag == 2)
+            {
+                PostMsg(MSG.TMCycle);
+            }
+
+        }
+
     }
 }

Venus/Venus_RT/Modules/Schedulers/SchedulerPM.cs

@@ -27,7 +27,7 @@ namespace Venus_RT.Scheduler
     {
         public override bool IsAvailable
         {
-            get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean; }
+            get { return _entity.IsIdle /*&& _entity.IsOnline*/ && CheckTaskDone() && !_waitCompletejobClean; }
 
         }
         public override bool IsOnline

Venus/Venus_RT/Modules/TMCycle.cs

@@ -30,7 +30,7 @@ namespace Venus_RT.Modules
         private bool IsModuleAvailable(ModuleName module) => dictSchedulers.Keys.Contains(module) && dictSchedulers[module].IsAvailable;
 
         List<ModuleName> tmCycleRoutine = new List<ModuleName>() { ModuleName.LLA, ModuleName.PMA, ModuleName.PMB, ModuleName.LLB };
-        int cycleCount = 1;
+        int cycleCount = 10;
         ModuleName _sourceModule = ModuleName.LLA;
         ModuleName _destinationModule = ModuleName.LLB;
         int _sourceSlotNumber = 4;
@@ -177,7 +177,7 @@ namespace Venus_RT.Modules
             if (IsModuleAvailable(_sourceModule) && IsModuleAvailable(_destinationModule))
             {
                 if (_ReturnWafers.Count == 0)
-                    return IsModuleAvailable(ModuleName.TM);
+                    return _TMRobot.IsAvailable;
 
 
                 var InSlots = GetReadyInSlot(_sourceModule, _sourceSlotNumber);
@@ -217,7 +217,7 @@ namespace Venus_RT.Modules
         {
             foreach (var module in tmCycleRoutine)
             {
-                if (ModuleHelper.IsPm(module))
+                if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
                 {
                     if (WaferManager.Instance.CheckHasWafer(module, 0))
                         return true;
@@ -233,7 +233,7 @@ namespace Venus_RT.Modules
         {
             foreach (var module in tmCycleRoutine)
             {
-                if (ModuleHelper.IsPm(module))
+                if (ModuleHelper.IsPm(module)&&ModuleHelper.IsInstalled(module))
                 {
                     if (!IsModuleAvailable(module))
                         return false;
@@ -248,7 +248,7 @@ namespace Venus_RT.Modules
         {
             if(IsPMsAvailabe() && IsModuleAvailable(_destinationModule) && IsModuleAvailable(_sourceModule) && _TMRobot.IsAvailable)
             {
-                if (!PMsHasWafers() && IsModuleAvailable(ModuleName.TM) && _CycleWafers.Count == 0)
+                if (!PMsHasWafers() && _TMRobot.IsAvailable && _CycleWafers.Count == 0)
                     return true;
 
                 if(PMsHasWafers())

Venus/Venus_Simulator/Instances/SimulatorSystem.cs

@@ -236,14 +236,14 @@ namespace Venus_Simulator.Instances
                 ChangeTime(ModuleName.PMA);
                 //MonitorIOPumpCtrl(ModuleName.PMA);
 
-                //// PMB
-                //MonitorSlitDoor(ModuleName.PMB);
-                //MonitorPin(ModuleName.PMB);
-                //MonitorPressure(ModuleName.PMB);
+                // PMB
+                MonitorSlitDoor(ModuleName.PMB);
+                MonitorPin(ModuleName.PMB);
+                MonitorPressure(ModuleName.PMB);
                 //MonitorTemperature(ModuleName.PMB);
-                //MonitorGas(ModuleName.PMB);
-                //MonitorRF(ModuleName.PMB);
-                //ChangeTime(ModuleName.PMB);
+                MonitorGas(ModuleName.PMB);
+               // MonitorRF(ModuleName.PMB);
+                ChangeTime(ModuleName.PMB);
                 //MonitorIOPumpCtrl(ModuleName.PMB);
 
                 MonitorMFSlitDoor();