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@@ -0,0 +1,902 @@
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+using Aitex.Core.Common.DeviceData;
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+using Aitex.Core.RT.Device;
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+using Aitex.Core.RT.Device.Unit;
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+using Aitex.Core.RT.Log;
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+using Aitex.Core.RT.SCCore;
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+using MECF.Framework.Common.Device.Bases;
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+using MECF.Framework.Common.Equipment;
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+using MECF.Framework.Common.SubstrateTrackings;
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+using System;
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+using System.Collections.Generic;
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+using System.Linq;
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+using System.Text;
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+using System.Threading.Tasks;
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+using Venus_Core;
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+using Venus_RT.Devices.IODevices;
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+using IoMfc = Venus_RT.Devices.IODevices.IoMfc;
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+
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+namespace Venus_RT.Devices
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+{
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+ class JetVenusSEPM : JetVenusSEPMBase
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+ {
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+ #region io变量定义
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+ private readonly IoLid _Lid;
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+
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+ private readonly IoCylinder _slitDoor;
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+ private readonly IoCylinder _LiftPin;
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+
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+ private readonly IoValve _PVN21Valve;
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+ private readonly IoValve _PVN22Valve;
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+ private readonly IoValve _PV11Valve;
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+ private readonly IoValve _PV12Valve;
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+ private readonly IoValve _PV21Valve;
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+ private readonly IoValve _PV22Valve;
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+ private readonly IoValve _PV31Valve;
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+ private readonly IoValve _PV32Valve;
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+ private readonly IoValve _PV41Valve;
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+ private readonly IoValve _PV42Valve;
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+ private readonly IoValve _PV51Valve;//新增
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+ private readonly IoValve _PV52Valve;//新增
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+ private readonly IoValve _PV61Valve;//新增
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+ private readonly IoValve _PV62Valve;//新增
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+ private readonly IoValve _PV71Valve;//新增
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+ private readonly IoValve _PV72Valve;//新增
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+ private readonly IoValve _PV81Valve;//新增
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+ private readonly IoValve _PV82Valve;//新增
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+ private readonly IoValve _PV91Valve;//新增
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+ private readonly IoValve _PV92Valve;//新增
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+ private readonly IoValve _PVA1Valve;//新增
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+ private readonly IoValve _PVA2Valve;//新增
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+ private readonly IoValve _PVB1Valve;//新增
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+ private readonly IoValve _PVB2Valve;//新增
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+ private readonly IoValve _PVC1Valve;//新增
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+ private readonly IoValve _PVC2Valve;//新增
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+ private readonly IoValve _N2Valve;
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+ private readonly IoValve _Mfc1Valve;
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+ private readonly IoValve _Mfc2Valve;
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+ private readonly IoValve _Mfc3Valve;
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+ private readonly IoValve _Mfc4Valve;
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+ private readonly IoValve _Mfc5Valve;
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+ private readonly IoValve _Mfc6Valve;
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+ private readonly IoValve _Mfc7Valve;
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+ private readonly IoValve _Mfc8Valve;
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+ private readonly IoValve _Mfc9Valve; //新增
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+ private readonly IoValve _Mfc10Valve;//新增
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+ private readonly IoValve _Mfc11Valve;//新增 空的
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+ private readonly IoValve _Mfc12Valve;//新增
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+ private readonly IoValve _PVHe1Valve;
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+ private readonly IoValve _PVHe2Valve;
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+ private readonly IoValve _GasFinalValve;
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+ private readonly IoValve _SoftPumpValve;
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+ private readonly IoValve _FastPumpValve;
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+ private readonly IoValve _TurboPumpPumpingValve;
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+ private readonly IoValve _TurboPumpPurgeValve;
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+ private readonly IoValve _GuageValve;
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+ private readonly IoValve _PVHe3Valve;
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+ private readonly IoValve _HeISOValve;
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+ private readonly IoValve _MainPurgeValve;//新增
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+
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+ private readonly IoSensor _ATM_sw;
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+ private readonly IoSensor _CDAPressure;
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+ private readonly IoSensor _N2Pressure_sw;
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+ private readonly IoSensor _VAC_sw;
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+ private readonly IoSensor _WLK_sw;
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+ private readonly IoSensor _Water_Flow;
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+ private readonly IoSensor _RFG_Interlock;
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+ private readonly IoSensor _PM_Lid_Closed;
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+ private readonly IoSensor _Source_RF_Fan;
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+ private readonly IoSensor _TurboPumpInterlock;
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+ private readonly IoSensor _GasBoxDoor;
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+ private readonly IoSensor _GasBoxPressure;
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+
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+ private readonly PumpBase _MainPump;
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+ private readonly ESC5HighVoltage _ESCHV;
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+ private readonly AdixenTurboPump _TurboPump;
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+ private readonly PendulumValve _pendulumValve;
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+
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+ private readonly ChillerBase _Chiller;
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+
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+ private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
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+ private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
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+ private readonly RfMatchBase _Match;
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+ private readonly RfMatchBase _BiasMatch;
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+
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+ private readonly IoHeater _ForelineTC;
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+ private readonly IoHeater _WallTC;
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+
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+ private readonly IoPressureControl _pressureController;
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+
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+ private readonly IoGasStick[] _gasLines;
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+ private readonly IoGasStick _gasLineN2;
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+ private readonly IoBacksideHe _backsideHe;
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+
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+ private readonly IoMfc _heMfc;
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+
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+ private readonly double _foreline_interlock_pressure = 750;
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+
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+ private readonly Dictionary<ValveType, IoValve> Valve2IO;
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+ #endregion
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+
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+ #region 构造函数
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+ public JetVenusSEPM(ModuleName moduleName) : base(moduleName)
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+ {
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+ Module = moduleName;
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+ _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
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+ _slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.SlitDoor}");
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+ _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
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+
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+ _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
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+ _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
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+ _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
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+ _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
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+ _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
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+ _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
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+ _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
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+ _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
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+ _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
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+ _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
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+ _PV51Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV51}");
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+ _PV52Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV52}");
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+ _PV61Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV61}");
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+ _PV62Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV62}");
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+ _PV71Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV71}");
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+ _PV72Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV72}");
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+ _PV81Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV81}");
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+ _PV82Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV82}");
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+ _PV91Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV91}");
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+ _PV92Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV92}");
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+ _PVA1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVA1}");
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+ _PVA2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVA2}");
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+ _PVB1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVB1}");
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+ _PVB2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVB2}");
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+ _PVC1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVC1}");
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+ _PVC2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVC2}");
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+
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+ _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
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+ _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
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+ _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
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+ _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc3}");
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+ _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc4}");
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+ _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc5}");
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+ _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc6}");
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+ _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc7}");
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+ _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc8}");
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+ _Mfc9Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc9}");
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+ _Mfc10Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc10}");
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+ _Mfc11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc11}");
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+ _Mfc12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc12}");
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+ _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
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+ _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
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+ _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
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+ _SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
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+ _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
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+ _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
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+ _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
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+ _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
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+ _PVHe3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe3}");
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+ _HeISOValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveHeISO}");
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+
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+ _heMfc = DEVICE.GetDevice<IoMfc>($"{Module}.MfcHe");
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+ _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
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+ _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
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+ _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
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+ _Water_Flow = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterFlowOk");
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+ _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
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+ _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
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+ _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");
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+
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+ _PM_Lid_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorPMLidClosed");
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+ _Source_RF_Fan = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSourceRFFan");
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+ _TurboPumpInterlock = DEVICE.GetDevice<IoSensor>($"{Module}.TurboPumpInterlock");
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+ _GasBoxDoor = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxDoorSW");
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+ _GasBoxPressure = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxPressureSW");
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+
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+
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+ _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
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+ _WallTC = DEVICE.GetDevice<IoHeater>($"{Module}.WallHeater");
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+
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+
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+ _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
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+ _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");
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+
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+ _gasLines = new IoGasStick[8];
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+ for (int index = 0; index < 8; index++)
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+ {
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+ _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
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+ }
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+
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+ _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
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+ _backsideHe = DEVICE.GetDevice<IoBacksideHe>($"{Module}.BacksideHelium");
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+
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+ _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");
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+ // RS232 Dry pump, SKY
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+ if (SC.GetValue<int>($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
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+ {
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+ if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY)
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+ {
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+ _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
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+ }
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+ else if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
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+ {
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+ _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
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+ }
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+ }
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+
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+ _ESCHV = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
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+ _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
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+ _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");
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+
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+ if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
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+ SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
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+ {
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+ if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
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+ {
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+ _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
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+ }
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+ else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
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+ {
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+ _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
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+ }
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+ }
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+
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+
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+ // RS223 AdTec Generator
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+ if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
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+ SC.GetValue<int>($"{Module}.Rf.MFG") == (int)GeneratorMFG.AdTec)
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+ {
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+ _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.Rf}");
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+ }
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+
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+ // Ethernet Comet Generator Bias
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+ if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
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+ {
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+ if (SC.GetValue<int>($"{Module}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
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+ SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
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+ {
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+ _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VenusDevice.BiasRf}");
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+ }
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+ else if (SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
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+ {
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+ _GeneratorBias = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.BiasRf}");
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+ }
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+ }
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+
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+ // RS232 AdTec match
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+ if (SC.GetValue<int>($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
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+ SC.GetValue<int>($"{Module}.Match.MFG") == (int)MatchMFG.AdTec)
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+ {
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+ _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
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+ }
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+
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+ // Bias Match
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+ if (SC.GetValue<bool>($"{Module}.BiasMatch.EnableBiasMatch") &&
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+ SC.GetValue<int>($"{Module}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
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+ SC.GetValue<int>($"{Module}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
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+ {
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+ _BiasMatch = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.BiasMatch}");
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+ }
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+
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+
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+ _foreline_interlock_pressure = SC.GetValue<double>($"{Module}.ForelineInterlockPressure");
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+ Valve2IO = new Dictionary<ValveType, IoValve>()
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+ {
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+ { ValveType.PVN21, _PVN21Valve },
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+ { ValveType.PVN22, _PVN22Valve },
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+ { ValveType.PV11, _PV11Valve },
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+ { ValveType.PV12, _PV12Valve },
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+ { ValveType.PV21, _PV21Valve },
|
|
|
+ { ValveType.PV22, _PV22Valve },
|
|
|
+ { ValveType.PV31, _PV31Valve },
|
|
|
+ { ValveType.PV32, _PV32Valve },
|
|
|
+ { ValveType.PV41, _PV41Valve },
|
|
|
+ { ValveType.PV42, _PV42Valve },
|
|
|
+ { ValveType.PV51, _PV51Valve },
|
|
|
+ { ValveType.PV52, _PV52Valve },
|
|
|
+ { ValveType.PV61, _PV61Valve },
|
|
|
+ { ValveType.PV62, _PV62Valve },
|
|
|
+ { ValveType.PV71, _PV71Valve },
|
|
|
+ { ValveType.PV72, _PV72Valve },
|
|
|
+ { ValveType.PV81, _PV81Valve },
|
|
|
+ { ValveType.PV82, _PV82Valve },
|
|
|
+ { ValveType.PV91, _PV91Valve },
|
|
|
+ { ValveType.PV92, _PV92Valve },
|
|
|
+ { ValveType.PVA1, _PVA1Valve },
|
|
|
+ { ValveType.PVA2, _PVA2Valve },
|
|
|
+ { ValveType.PVB1, _PVB1Valve },
|
|
|
+ { ValveType.PVB2, _PVB2Valve },
|
|
|
+ { ValveType.PVC1, _PVC1Valve },
|
|
|
+ { ValveType.PVC2, _PVC2Valve },
|
|
|
+ { ValveType.N2, _N2Valve },
|
|
|
+ { ValveType.Mfc1, _Mfc1Valve },
|
|
|
+ { ValveType.Mfc2, _Mfc2Valve },
|
|
|
+ { ValveType.Mfc3, _Mfc3Valve },
|
|
|
+ { ValveType.Mfc4, _Mfc4Valve },
|
|
|
+ { ValveType.Mfc5, _Mfc5Valve },
|
|
|
+ { ValveType.Mfc6, _Mfc6Valve },
|
|
|
+ { ValveType.Mfc7, _Mfc7Valve },
|
|
|
+ { ValveType.Mfc8, _Mfc8Valve },
|
|
|
+ { ValveType.Mfc9, _Mfc9Valve },
|
|
|
+ { ValveType.Mfc10, _Mfc10Valve },
|
|
|
+ { ValveType.Mfc11, _Mfc11Valve },
|
|
|
+ { ValveType.Mfc12, _Mfc12Valve },
|
|
|
+ { ValveType.PVHe1, _PVHe1Valve },
|
|
|
+ { ValveType.PVHe3, _PVHe3Valve },
|
|
|
+ { ValveType.PVHe2, _PVHe2Valve },
|
|
|
+ { ValveType.GasFinal, _GasFinalValve},
|
|
|
+ { ValveType.SoftPump, _SoftPumpValve},
|
|
|
+ { ValveType.FastPump, _FastPumpValve},
|
|
|
+ { ValveType.TurboPumpPumping, _TurboPumpPumpingValve},
|
|
|
+ { ValveType.TurboPumpPurge, _TurboPumpPurgeValve},
|
|
|
+ { ValveType.Guage, _GuageValve},
|
|
|
+ { ValveType.HeISO, _HeISOValve},
|
|
|
+ { ValveType.MainPurge,_MainPurgeValve}
|
|
|
+ };
|
|
|
+ }
|
|
|
+ #endregion
|
|
|
+
|
|
|
+ #region 暴露变量
|
|
|
+ public override bool IsLidClosed => _Lid.OFFFeedback;
|
|
|
+
|
|
|
+ public override bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
|
|
|
+
|
|
|
+ public override bool IsPumpRunning => _MainPump.IsRunning;
|
|
|
+
|
|
|
+ public override bool IsTurboPumpRunning => _TurboPump.IsRunning;
|
|
|
+
|
|
|
+ public override bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;
|
|
|
+
|
|
|
+ public override float TurboPumpSpeed => _TurboPump.Speed;
|
|
|
+
|
|
|
+ public override bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;
|
|
|
+
|
|
|
+ public override bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;
|
|
|
+
|
|
|
+ public override bool IsCDA_OK => _CDAPressure.Value;
|
|
|
+
|
|
|
+ public override bool IsFastPumpOpened => _FastPumpValve.Status;
|
|
|
+
|
|
|
+ public override bool IsSoftPumpOpened => _SoftPumpValve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc1ValveOpened => _Mfc1Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc2ValveOpened => _Mfc2Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc3ValveOpened => _Mfc3Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc4ValveOpened => _Mfc4Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc5ValveOpened => _Mfc5Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc6ValveOpened => _Mfc6Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc7ValveOpened => _Mfc7Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc8ValveOpened => _Mfc8Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc9ValveOpened => _Mfc9Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc10ValveOpened => _Mfc10Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc11ValveOpened => _Mfc11Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsMfc12ValveOpened => _Mfc12Valve.Status;
|
|
|
+
|
|
|
+ public override bool IsGuageValveOpened => _GuageValve.Status;
|
|
|
+
|
|
|
+ public override bool IsATM => _ATM_sw.Value;
|
|
|
+
|
|
|
+ public override bool PVN22ValveIsOpen => _PVN22Valve.Status;
|
|
|
+
|
|
|
+ public override bool LiftPinIsDown => _LiftPin.OFFFeedback;
|
|
|
+
|
|
|
+ public override bool LiftPinIsUp => _LiftPin.ONFeedback;
|
|
|
+
|
|
|
+ public override bool IsVAC => _VAC_sw.Value;
|
|
|
+
|
|
|
+ public override bool IsWaterFlowOk => _Water_Flow.Value;
|
|
|
+
|
|
|
+ public override bool IsWLK => _WLK_sw.Value;
|
|
|
+
|
|
|
+ public override bool IsRFGInterlockOn => _RFG_Interlock.Value;
|
|
|
+
|
|
|
+ public override bool PMLidClosed => _PM_Lid_Closed.Value;
|
|
|
+
|
|
|
+ public override bool TurboPumpInterlock => _TurboPumpInterlock.Value;
|
|
|
+
|
|
|
+ public override bool SourceRFFanInterlock => _Source_RF_Fan.Value;
|
|
|
+
|
|
|
+ public override bool SlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
|
|
|
+
|
|
|
+ public override double ProcessLowPressure => _pressureController.ProcessLow.Value;
|
|
|
+
|
|
|
+ public override double ProcessHighPressure => _pressureController.ProcessHigh.Value;
|
|
|
+
|
|
|
+ public override double ProcessPressure => _pressureController.ProcessGauge.Value;
|
|
|
+
|
|
|
+ public override double ChamberPressure => _pressureController.PressureGauge.Value;
|
|
|
+
|
|
|
+ public override double ForelinePressure => _pressureController.ForelineGauge.Value;
|
|
|
+
|
|
|
+ public override double TargetPressure => _pressureController.TargetPressure;
|
|
|
+
|
|
|
+ public override double ESCHePressure => _pressureController.ESCHeGauge.Value;
|
|
|
+
|
|
|
+ public override int ESCOutputVoltage => _ESCHV.OutputVoltage;
|
|
|
+
|
|
|
+ public override double ESCPositiveOutputCurrent => _ESCHV.PositiveOutputCurrent;
|
|
|
+
|
|
|
+ public override double ESCNegativeOutputCurrent => _ESCHV.NegativeOutputCurrent;
|
|
|
+
|
|
|
+ public override bool IsHVOn => _ESCHV.IsOn;
|
|
|
+
|
|
|
+ public override float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback;
|
|
|
+
|
|
|
+ public override float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;
|
|
|
+
|
|
|
+ public override bool ChillerIsRunning => _Chiller.IsRunning;
|
|
|
+
|
|
|
+ public override float ReflectPower => _Generator.ReflectPower;
|
|
|
+
|
|
|
+ public override float BiasReflectPower => _GeneratorBias.ReflectPower;
|
|
|
+
|
|
|
+ public override bool BackSideHeOutOfRange => _backsideHe.OutOfRange;
|
|
|
+
|
|
|
+ public override MovementPosition LiftPinPosition
|
|
|
+ {
|
|
|
+ get
|
|
|
+ {
|
|
|
+ MovementPosition pos = MovementPosition.Unknown;
|
|
|
+ if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
|
|
|
+ {
|
|
|
+ pos = MovementPosition.Up;
|
|
|
+ }
|
|
|
+ else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
|
|
|
+ {
|
|
|
+ pos = MovementPosition.Down;
|
|
|
+ }
|
|
|
+ return pos;
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override double TotalGasSetpoint
|
|
|
+ {
|
|
|
+ get
|
|
|
+ {
|
|
|
+ double sum = 0;
|
|
|
+ foreach (var gas in _gasLines)
|
|
|
+ {
|
|
|
+ sum += gas.FlowSP;
|
|
|
+ }
|
|
|
+ return sum;
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool HasGasOutOfRange
|
|
|
+ {
|
|
|
+ get
|
|
|
+ {
|
|
|
+ foreach (var gas in _gasLines)
|
|
|
+ {
|
|
|
+ if (!gas.IsOutOfRange)
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+ }
|
|
|
+ #endregion
|
|
|
+
|
|
|
+ #region 公共方法
|
|
|
+ public override bool CheckAtm()
|
|
|
+ {
|
|
|
+ //检查是否是ATM模式
|
|
|
+ return _ATM_sw.Value && ChamberPressure > 700000;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool CheckChillerStatus()
|
|
|
+ {
|
|
|
+ return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool CheckGeneratorAndHVInterlock(VenusDevice device)
|
|
|
+ {
|
|
|
+ eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV;
|
|
|
+ if (!PMLidClosed)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if (!IsVAC)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if (!IsWaterFlowOk)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if (!IsRFGInterlockOn)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if (!SourceRFFanInterlock)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if (!SlitDoorClosed)
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open.");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ if ((device == VenusDevice.ESCHV || device == VenusDevice.BiasRf) && WaferManager.Instance.CheckNoWafer(Module, 0))
|
|
|
+ {
|
|
|
+ LOG.Write(evt, Module, $"Cannot Power ON {device} as {Module} has no wafer");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void CheckIdleInterlock()
|
|
|
+ {
|
|
|
+ if (ForelinePressure > _foreline_interlock_pressure)
|
|
|
+ {
|
|
|
+ if (_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen)
|
|
|
+ {
|
|
|
+ _pendulumValve.TurnValve(false);
|
|
|
+ _TurboPumpPurgeValve.TurnValve(false, out _);
|
|
|
+ _TurboPumpPumpingValve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly.");
|
|
|
+ }
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool CheckLiftDown()
|
|
|
+ {
|
|
|
+ return _LiftPin.State == CylinderState.Close;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool CheckLiftUp()
|
|
|
+ {
|
|
|
+ return _LiftPin.State == CylinderState.Open;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool CheckSlitDoorClose()
|
|
|
+ => IsSlitDoorClosed;
|
|
|
+
|
|
|
+ public override bool CheckSlitDoorOpen()
|
|
|
+ => !IsSlitDoorClosed;
|
|
|
+
|
|
|
+ public override void CloseValves()
|
|
|
+ {
|
|
|
+ _PVN21Valve.TurnValve(false, out _);
|
|
|
+ //_PVN22Valve.TurnValve(false, out _);
|
|
|
+ _PV11Valve.TurnValve(false, out _);
|
|
|
+ _PV12Valve.TurnValve(false, out _);
|
|
|
+ _PV21Valve.TurnValve(false, out _);
|
|
|
+ _PV22Valve.TurnValve(false, out _);
|
|
|
+ _PV31Valve.TurnValve(false, out _);
|
|
|
+ _PV32Valve.TurnValve(false, out _);
|
|
|
+ _PV41Valve.TurnValve(false, out _);
|
|
|
+ _PV42Valve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ _PVHe1Valve.TurnValve(false, out _);
|
|
|
+ _PVHe2Valve.TurnValve(false, out _);
|
|
|
+ _GasFinalValve.TurnValve(false, out _);
|
|
|
+ _SoftPumpValve.TurnValve(false, out _);
|
|
|
+ _FastPumpValve.TurnValve(false, out _);
|
|
|
+ _TurboPumpPumpingValve.TurnValve(false, out _);
|
|
|
+ _TurboPumpPurgeValve.TurnValve(false, out _);
|
|
|
+ _GuageValve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ _N2Valve.TurnValve(false, out _);
|
|
|
+ _FastPumpValve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ _PVHe3Valve.TurnValve(false, out _);
|
|
|
+ _HeISOValve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ //新增
|
|
|
+ _Mfc1Valve.TurnValve(false, out _);
|
|
|
+ _Mfc2Valve.TurnValve(false, out _);
|
|
|
+ _Mfc3Valve.TurnValve(false, out _);
|
|
|
+ _Mfc4Valve.TurnValve(false, out _);
|
|
|
+ _Mfc5Valve.TurnValve(false, out _);
|
|
|
+ _Mfc6Valve.TurnValve(false, out _);
|
|
|
+ _Mfc7Valve.TurnValve(false, out _);
|
|
|
+ _Mfc8Valve.TurnValve(false, out _);
|
|
|
+ _Mfc9Valve.TurnValve(false, out _);
|
|
|
+ _Mfc10Valve.TurnValve(false, out _);
|
|
|
+ _Mfc11Valve.TurnValve(false, out _);
|
|
|
+ _Mfc12Valve.TurnValve(false, out _);
|
|
|
+ _PV51Valve.TurnValve(false, out _);
|
|
|
+ _PV52Valve.TurnValve(false, out _);
|
|
|
+ _PV61Valve.TurnValve(false, out _);
|
|
|
+ _PV62Valve.TurnValve(false, out _);
|
|
|
+ _PV71Valve.TurnValve(false, out _);
|
|
|
+ _PV72Valve.TurnValve(false, out _);
|
|
|
+ _PV81Valve.TurnValve(false, out _);
|
|
|
+ _PV82Valve.TurnValve(false, out _);
|
|
|
+ _PV91Valve.TurnValve(false, out _);
|
|
|
+ _PV92Valve.TurnValve(false, out _);
|
|
|
+ _PVA1Valve.TurnValve(false, out _);
|
|
|
+ _PVA2Valve.TurnValve(false, out _);
|
|
|
+ _PVB1Valve.TurnValve(false, out _);
|
|
|
+ _PVB2Valve.TurnValve(false, out _);
|
|
|
+ _PVC1Valve.TurnValve(false, out _);
|
|
|
+ _PVC2Valve.TurnValve(false, out _);
|
|
|
+
|
|
|
+ foreach (var stick in _gasLines)
|
|
|
+ {
|
|
|
+ stick.Stop();
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool FlowGas(int gasNum, double val)
|
|
|
+ {
|
|
|
+ if (_gasLines.Length <= gasNum)
|
|
|
+ return false;
|
|
|
+
|
|
|
+
|
|
|
+ _gasLines[gasNum].Flow(val);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool FlowN2(double val)
|
|
|
+ {
|
|
|
+ _gasLineN2.Flow(val);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool GeneratorBiasPowerOn(bool on)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+
|
|
|
+ if (on && !IsRFGInterlockOn)
|
|
|
+ {
|
|
|
+ LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ return _GeneratorBias.SetPowerOnOff(on, out _);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool GeneratorBiasSetMatchMode(bool val)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+ string reason = string.Empty;
|
|
|
+ _GeneratorBias.SetMatchingAutoMode(val, out reason);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool GeneratorBiasSetpower(float val)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+
|
|
|
+ if (Math.Abs(val) > 0.01)
|
|
|
+ _GeneratorBias.SetPower((ushort)val);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool GeneratorPowerOn(bool on)
|
|
|
+ {
|
|
|
+ if (_Generator == null) return false;
|
|
|
+
|
|
|
+ if (on && !IsRFGInterlockOn)
|
|
|
+ {
|
|
|
+ LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足");
|
|
|
+ return false;
|
|
|
+ }
|
|
|
+
|
|
|
+ return _Generator.SetPowerOnOff(on, out _);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool GeneratorSetpower(float val)
|
|
|
+ {
|
|
|
+ if (_Generator == null) return false;
|
|
|
+
|
|
|
+ if (Math.Abs(val) > 0.01)
|
|
|
+ _Generator.SetPower((ushort)val);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override int GetPVPosition()
|
|
|
+ {
|
|
|
+ return _pendulumValve.Position;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override async void HeatChiller(ChillerType chillerType, double value, double offset)
|
|
|
+ {
|
|
|
+ _Chiller?.SetChillerTemp((float)value, (float)offset);
|
|
|
+ await Task.Delay(1000);
|
|
|
+ _Chiller?.SetChillerOnOff(true);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void Home()
|
|
|
+ {
|
|
|
+ SetLiftPin(MovementPosition.Down, out _);
|
|
|
+ //转交TM
|
|
|
+ //if (!_PM_SlitDoor_Closed.Value)
|
|
|
+ //{
|
|
|
+ // SetSlitDoor(true, out _);
|
|
|
+ //}
|
|
|
+ //else
|
|
|
+ //{
|
|
|
+ // SetSlitDoor(false, out _);
|
|
|
+ //}
|
|
|
+ //
|
|
|
+ //SetSlitDoor(false, out _);
|
|
|
+ OpenValve(ValveType.PVN22, true);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void OnOffChiller(ChillerType chillerType, bool onoff)
|
|
|
+ => _Chiller?.SetChillerOnOff(onoff);
|
|
|
+
|
|
|
+ public override bool OnOffSetESCHV(bool on)
|
|
|
+ => _ESCHV.SetPowerOnOff(on);
|
|
|
+
|
|
|
+ public override void OpenValve(ValveType vlvType, bool on)
|
|
|
+ {
|
|
|
+ if (Valve2IO.ContainsKey(vlvType))
|
|
|
+ {
|
|
|
+ Valve2IO[vlvType].TurnValve(on, out _);
|
|
|
+ LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}");
|
|
|
+ }
|
|
|
+ else
|
|
|
+ {
|
|
|
+ throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool PendulumValveIsOpen()
|
|
|
+ {
|
|
|
+ return _pendulumValve.IsOpen;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void SetBacksideHeFlow(double flow)
|
|
|
+ {
|
|
|
+ if (_backsideHe == null) return;
|
|
|
+ _backsideHe.Flow(flow);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetBacksideHePressure(float mTorr)
|
|
|
+ {
|
|
|
+ if (_backsideHe == null) return false;
|
|
|
+ return _backsideHe.SetBacksideHelium(mTorr);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetBacksideHeThreshold(int nMin, int nMax)
|
|
|
+ {
|
|
|
+ if (_backsideHe == null) return false;
|
|
|
+ return _backsideHe.SetFlowThreshold(nMin, nMax);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetBiasMatchPosition(float c1, float c2)
|
|
|
+ {
|
|
|
+ if (_BiasMatch == null) return false;
|
|
|
+ string reason = string.Empty;
|
|
|
+ _BiasMatch.SetMatchPosition(c1, c2, out reason);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetBiasPulseMode(bool on)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+ _GeneratorBias.SetPulseMode(on);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetBiasPulseRateFreq(int nFreq)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+ _GeneratorBias.SetPulseRateFreq(nFreq);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetDiasPulseDutyCycle(int percentage)
|
|
|
+ {
|
|
|
+ if (_GeneratorBias == null) return false;
|
|
|
+ _GeneratorBias.SetPulseDutyCycle(percentage);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetESCClampVoltage(int nVoltage)
|
|
|
+ {
|
|
|
+ if (_ESCHV == null) return false;
|
|
|
+ return _ESCHV.SetOutputVoltage(nVoltage);
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void SetGeneratorCommunicationMode(int mode)
|
|
|
+ => _Generator?.SetCommunicationMode(mode);
|
|
|
+
|
|
|
+ public override bool SetLiftPin(MovementPosition dirt, out string reason)
|
|
|
+ {
|
|
|
+ reason = string.Empty;
|
|
|
+
|
|
|
+ switch (dirt)
|
|
|
+ {
|
|
|
+ case MovementPosition.Down:
|
|
|
+ return _LiftPin.SetCylinder(false, out reason);
|
|
|
+ case MovementPosition.Up:
|
|
|
+ return _LiftPin.SetCylinder(true, out reason);
|
|
|
+ case MovementPosition.Left:
|
|
|
+ case MovementPosition.Right:
|
|
|
+ case MovementPosition.Middle:
|
|
|
+ throw new ArgumentException("Movement argument error");
|
|
|
+ }
|
|
|
+
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetMatchPosition(float c1, float c2)
|
|
|
+ {
|
|
|
+ if (_Match == null) return false;
|
|
|
+ string reason = string.Empty;
|
|
|
+ _Match.SetMatchPosition(c1, c2, out reason);
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool SetPVPostion(int position)
|
|
|
+ => _pendulumValve.SetPosition(position);
|
|
|
+
|
|
|
+ public override bool SetPVPressure(int pressure)
|
|
|
+ => _pendulumValve.SetPressure(pressure);
|
|
|
+
|
|
|
+ public override bool SetWallTCTemperature(float value)
|
|
|
+ => _WallTC.RampTemp(value);
|
|
|
+
|
|
|
+ public override void StopAllGases()
|
|
|
+ {
|
|
|
+ foreach (var line in _gasLines)
|
|
|
+ {
|
|
|
+ line.Stop();
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool StopGas(int gasNum)
|
|
|
+ {
|
|
|
+ if (_gasLines.Length <= gasNum)
|
|
|
+ return false;
|
|
|
+
|
|
|
+ _gasLines[gasNum].Stop();
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override bool StopN2()
|
|
|
+ {
|
|
|
+ _gasLineN2.Stop();
|
|
|
+ return true;
|
|
|
+ }
|
|
|
+
|
|
|
+ public override void TurnDryPump(bool on)
|
|
|
+ => _MainPump?.SetPumpOnOff(on);
|
|
|
+
|
|
|
+ public override bool TurnPendulumValve(bool on)
|
|
|
+ => _pendulumValve.TurnValve(on);
|
|
|
+
|
|
|
+ public override void TurnTurboPump(bool on)
|
|
|
+ {
|
|
|
+ _TurboPump?.SetPumpOnOff(on);
|
|
|
+ }
|
|
|
+
|
|
|
+ #endregion
|
|
|
+
|
|
|
+ protected override void CheckPermanentInterlock()
|
|
|
+ {
|
|
|
+ if (ProcessPressure > 100 && _GuageValve.SetPoint)
|
|
|
+ {
|
|
|
+ _GuageValve.TurnValve(false, out _);
|
|
|
+ LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed 100 mtorr, Guage Valve (DO-31) closed automaticlly.");
|
|
|
+ }
|
|
|
+ }
|
|
|
+
|
|
|
+ }
|
|
|
+}
|
