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@@ -9,13 +9,13 @@
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<DI_ITEM Index="2" Name="DI_VAC_Switch" Device="" Addr="w20.02" />
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<DI_ITEM Index="3" Name="" Device="" Addr="w20.03" Note="" />
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<DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
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- <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_Position" Device="" Addr="w20.05" />
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- <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_Position" Device="" Addr="w20.06" />
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+ <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
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+ <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
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<DI_ITEM Index="7" Name="DI_Source_RF_Generator_Interlock" Device="" Addr="w20.07" />
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<DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" />
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<DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" />
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- <DI_ITEM Index="10" Name="DI_Slit_Door_Open_Position" Device="" Addr="w20.10" />
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- <DI_ITEM Index="11" Name="DI_Slit_Door_Close_Position" Device="" Addr="w20.11" />
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+ <DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" />
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+ <DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" />
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<DI_ITEM Index="12" Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
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<DI_ITEM Index="13" Name="" Device="" Addr="" Note="" />
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<DI_ITEM Index="14" Name="" Device="" Addr="" />
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@@ -54,7 +54,7 @@
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<DI_ITEM Index="47" Name="" Device="" Addr="" />
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<DI_ITEM Index="48" Name="" Device="" Addr="" />
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<DI_ITEM Index="49" Name="" Device="" Addr="" />
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- <DI_ITEM Index="50" Name="" Device="LL_ATM_SW" Addr="" />
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+ <DI_ITEM Index="50" Name="" Device="" Addr="" />
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<DI_ITEM Index="51" Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
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<DI_ITEM Index="52" Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
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<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
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@@ -232,29 +232,29 @@
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<DO_ITEM Index="111" Name="" />
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</Dig_Out>
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<Ana_Out>
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- <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
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- <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
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- <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
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- <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
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- <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
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- <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
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- <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
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- <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
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- <AO_ITEM Index="8" Name="AO_He_Flow_Setpoint" Device="" Addr="d1016" Note="MFC" />
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- <AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint" Device="" Addr="d1018" Note="MFC" />
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- <AO_ITEM Index="10" Name="AO_S_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="以前是Valve" />
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- <AO_ITEM Index="11" Name="AO_S_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" />
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- <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
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- <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
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- <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
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- <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
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- <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
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- <AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint" Device="" Addr="d1034" Note="ESC配置" />
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- <AO_ITEM Index="18" Name="AO_ESC_He_Control_Mode" Device="" Addr="d1036" />
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- <AO_ITEM Index="19" Name="AO_P_Valve_Temperature_Setpoint" Device="" Addr="d1038" Note="钟摆阀门加热设定温度" />
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- <AO_ITEM Index="20" Name="AO_P_Valve_Temp_Limit_Setpoint" Device="" Addr="d1040" Note="钟摆阀门Temp Limit" />
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- <AO_ITEM Index="21" Name="AO_Gas_Line_Temperature_Setpoint" Device="" Addr="d1042" Note="Gas Line加热设定温度" />
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- <AO_ITEM Index="22" Name="AO_Gas_Line_Temp_Limit_Setpoint" Device="" Addr="d1044" Note="Gas LineTemp Limit" />
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+ <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="MFC" />
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+ <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" BufferOffset="2" Device="" Addr="d1002" Note="MFC" />
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+ <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
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+ <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
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+ <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
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+ <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
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+ <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
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+ <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" BufferOffset="14" Device="" Addr="d1014" Note="MFC" />
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+ <AO_ITEM Index="8" Name="AO_He_Flow_Setpoint" BufferOffset="16" Device="" Addr="d1016" Note="MFC" />
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+ <AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint" BufferOffset="18" Device="" Addr="d1018" Note="MFC" />
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+ <AO_ITEM Index="10" Name="AO_S_Valve_Temperature_Setpoint" BufferOffset="20" Device="" Addr="d1020" Note="以前是Valve" />
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+ <AO_ITEM Index="11" Name="AO_S_Valve_Temp_Limit_Setpoint" BufferOffset="22" Device="" Addr="d1022" />
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+ <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" BufferOffset="24" Device="" Addr="d1024" Note="前级管道设定温度" />
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+ <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" BufferOffset="26" Device="" Addr="d1026" Note="Temp Limit" />
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+ <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" BufferOffset="28" Device="" Addr="d1028" Note="腔体壁设定温度" />
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+ <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" BufferOffset="30" Device="" Addr="d1030" Note="Temp Limit" />
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+ <AO_ITEM Index="16" Name="AO_Heartbeat" BufferOffset="32" Device="" Addr="d1032" Note="PC to PLC" />
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+ <AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint" BufferOffset="34" Device="" Addr="d1034" Note="ESC配置" />
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+ <AO_ITEM Index="18" Name="AO_ESC_He_Control_Mode" BufferOffset="36" Device="" Addr="d1036" />
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+ <AO_ITEM Index="19" Name="AO_P_Valve_Temperature_Setpoint" BufferOffset="38" Device="" Addr="d1038" Note="钟摆阀门加热设定温度" />
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+ <AO_ITEM Index="20" Name="AO_P_Valve_Temp_Limit_Setpoint" BufferOffset="40" Device="" Addr="d1040" Note="钟摆阀门Temp Limit" />
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+ <AO_ITEM Index="21" Name="AO_Gas_Line_Temperature_Setpoint" BufferOffset="42" Device="" Addr="d1042" Note="Gas Line加热设定温度" />
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+ <AO_ITEM Index="22" Name="AO_Gas_Line_Temp_Limit_Setpoint" BufferOffset="44" Device="" Addr="d1044" Note="Gas LineTemp Limit" />
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<AO_ITEM Index="23" Name="" />
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<AO_ITEM Index="24" Name="" />
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<AO_ITEM Index="25" Name="" />
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@@ -284,64 +284,64 @@
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<AO_ITEM Index="49" Name="" />
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</Ana_Out>
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<Ana_In>
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- <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
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- <AI_ITEM Index="1" Name="AI_Process_Pressure_100mt" Device="" Addr="d2002" Note="float" />
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- <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
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- <AI_ITEM Index="3" Name="AI_ESC_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
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- <AI_ITEM Index="4" Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
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- <AI_ITEM Index="5" Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
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- <AI_ITEM Index="6" Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
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- <AI_ITEM Index="7" Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
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- <AI_ITEM Index="8" Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
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- <AI_ITEM Index="9" Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
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- <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
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- <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
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- <AI_ITEM Index="12" Name="AI_ESC_He_Flow" Device="" Addr="d2024" Note="float" />
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- <AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" Device="" Addr="d2026" Note="float" />
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- <AI_ITEM Index="14" Name="AI_S_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
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- <AI_ITEM Index="15" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="16" Name="AI_Foreline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
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- <AI_ITEM Index="17" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
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- <AI_ITEM Index="19" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="20" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="21" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
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- <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
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- <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
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- <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
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- <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
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- <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
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- <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
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- <AI_ITEM Index="29" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="30" Name="" Device="" Addr="" Note="float" />
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- <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
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- <AI_ITEM Index="32" Name="AI_P_Valve_Control_TC_Temp" Device="" Addr="d2064" Note="float" />
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- <AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp" Device="" Addr="d2066" Note="float" />
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- <AI_ITEM Index="34" Name="" />
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- <AI_ITEM Index="35" Name="AI_S_Valve_Monitor_TC1_Temp" Device="" Addr="d2070" Note="float" />
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- <AI_ITEM Index="36" Name="" />
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- <AI_ITEM Index="37" Name="" />
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- <AI_ITEM Index="38" Name="" />
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- <AI_ITEM Index="39" Name="AI_Foreline_Monitor_TC1_Temp" Device="" Addr="d2078" Note="float" />
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- <AI_ITEM Index="40" Name="AI_Foreline_Monitor_TC2_Temp" Device="" Addr="d2080" Note="float" />
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- <AI_ITEM Index="41" Name="AI_Foreline_Monitor_TC3_Temp" Device="" Addr="d2082" Note="float" />
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- <AI_ITEM Index="42" Name="" />
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- <AI_ITEM Index="43" Name="AI_CHB_Wall_Monitor_TC1_Temp" Device="" Addr="d2086" Note="float" />
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- <AI_ITEM Index="44" Name="AI_CHB_Wall_Monitor_TC2_Temp" Device="" Addr="d2088" Note="float" />
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- <AI_ITEM Index="45" Name="AI_CHB_Wall_Monitor_TC3_Temp" Device="" Addr="d2090" Note="float" />
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- <AI_ITEM Index="46" Name="" />
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- <AI_ITEM Index="47" Name="" />
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- <AI_ITEM Index="48" Name="" />
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- <AI_ITEM Index="49" Name="" />
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- <AI_ITEM Index="50" Name="" />
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- <AI_ITEM Index="51" Name="" />
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- <AI_ITEM Index="52" Name="" />
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- <AI_ITEM Index="53" Name="AI_ESC_inner_coolant_inlet_TC_Temp" Device="" Addr="d2106" Note="float" />
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- <AI_ITEM Index="54" Name="AI_ESC_inner_coolant_outlet_TC_Temp" Device="" Addr="d2108" Note="float" />
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- <AI_ITEM Index="55" Name="AI_ESC_outer_coolant_inlet_TC_Temp" Device="" Addr="d2110" Note="float" />
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- <AI_ITEM Index="56" Name="AI_ESC_outer_coolant_outlet_TC_Temp" Device="" Addr="d2112" Note="float" />
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- <AI_ITEM Index="57" Name="AI_Top_Plate_coolant_inlet_TC_Temp" Device="" Addr="d2114" Note="float" />
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- <AI_ITEM Index="58" Name="AI_Top_Plate_coolant_outlet_TC_Temp" Device="" Addr="d2116" Note="float" />
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+ <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" BufferOffset="0" Device="" Addr="d2000" Note="float" />
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+ <AI_ITEM Index="1" Name="AI_Process_Pressure_100mt" BufferOffset="2" Device="" Addr="d2002" Note="float" />
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+ <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" BufferOffset="4" Device="" Addr="d2004" Note="float" />
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+ <AI_ITEM Index="3" Name="AI_ESC_He_Pressure_100t" BufferOffset="6" Device="" Addr="d2006" Note="float" />
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+ <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="float" />
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+ <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="float" />
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+ <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="float" />
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+ <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="float" />
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+ <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="float" />
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+ <AI_ITEM Index="9" Name="AI_MFC6_Flow" BufferOffset="18" Device="" Addr="d2018" Note="float" />
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+ <AI_ITEM Index="10" Name="AI_MFC7_Flow" BufferOffset="20" Device="" Addr="d2020" Note="float" />
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+ <AI_ITEM Index="11" Name="AI_MFC8_Flow" BufferOffset="22" Device="" Addr="d2022" Note="float" />
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+ <AI_ITEM Index="12" Name="AI_ESC_He_Flow" BufferOffset="24" Device="" Addr="d2024" Note="float" />
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+ <AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" BufferOffset="26" Device="" Addr="d2026" Note="float" />
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+ <AI_ITEM Index="14" Name="AI_S_Valve_Control_TC_Temp" BufferOffset="28" Device="" Addr="d2028" Note="float" />
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+ <AI_ITEM Index="15" Name="" BufferOffset="30" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="16" Name="AI_Foreline_Control_TC_Temp" BufferOffset="32" Device="" Addr="d2032" Note="float" />
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+ <AI_ITEM Index="17" Name="" BufferOffset="34" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" BufferOffset="36" Device="" Addr="d2036" Note="float" />
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+ <AI_ITEM Index="19" Name="" BufferOffset="38" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="20" Name="" BufferOffset="40" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="21" Name="" BufferOffset="42" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="22" Name="AI_Heartbeat_FB" BufferOffset="44" Device="" Addr="d2044" Note="float" />
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+ <AI_ITEM Index="23" Name="AI_Second" BufferOffset="46" Device="" Addr="d2046" Note="float" />
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+ <AI_ITEM Index="24" Name="AI_Minute" BufferOffset="48" Device="" Addr="d2048" Note="float" />
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+ <AI_ITEM Index="25" Name="AI_Time" BufferOffset="50" Device="" Addr="d2050" Note="float" />
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+ <AI_ITEM Index="26" Name="AI_Day" BufferOffset="52" Device="" Addr="d2052" Note="float" />
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+ <AI_ITEM Index="27" Name="AI_Month" BufferOffset="54" Device="" Addr="d2054" Note="float" />
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+ <AI_ITEM Index="28" Name="AI_Year" BufferOffset="56" Device="" Addr="d2056" Note="float" />
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+ <AI_ITEM Index="29" Name="" BufferOffset="58" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="30" Name="" BufferOffset="60" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" BufferOffset="62" Device="" Addr="d2062" Note="float" />
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+ <AI_ITEM Index="32" Name="AI_P_Valve_Control_TC_Temp" BufferOffset="64" Device="" Addr="d2064" Note="float" />
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+ <AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp" BufferOffset="66" Device="" Addr="d2066" Note="float" />
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+ <AI_ITEM Index="34" Name="" BufferOffset="68"/>
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+ <AI_ITEM Index="35" Name="AI_S_Valve_Monitor_TC1_Temp" BufferOffset="70" Device="" Addr="d2070" Note="float" />
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+ <AI_ITEM Index="36" Name="" BufferOffset="72"/>
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+ <AI_ITEM Index="37" Name="" BufferOffset="74"/>
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+ <AI_ITEM Index="38" Name="" BufferOffset="76"/>
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+ <AI_ITEM Index="39" Name="AI_Foreline_Monitor_TC1_Temp" BufferOffset="78" Device="" Addr="d2078" Note="float" />
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+ <AI_ITEM Index="40" Name="AI_Foreline_Monitor_TC2_Temp" BufferOffset="80" Device="" Addr="d2080" Note="float" />
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+ <AI_ITEM Index="41" Name="AI_Foreline_Monitor_TC3_Temp" BufferOffset="82" Device="" Addr="d2082" Note="float" />
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+ <AI_ITEM Index="42" Name="" BufferOffset="84"/>
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+ <AI_ITEM Index="43" Name="AI_CHB_Wall_Monitor_TC1_Temp" BufferOffset="86" Device="" Addr="d2086" Note="float" />
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+ <AI_ITEM Index="44" Name="AI_CHB_Wall_Monitor_TC2_Temp" BufferOffset="88" Device="" Addr="d2088" Note="float" />
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+ <AI_ITEM Index="45" Name="AI_CHB_Wall_Monitor_TC3_Temp" BufferOffset="90" Device="" Addr="d2090" Note="float" />
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+ <AI_ITEM Index="46" Name="" BufferOffset="92"/>
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+ <AI_ITEM Index="47" Name="" BufferOffset="94"/>
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+ <AI_ITEM Index="48" Name="" BufferOffset="96"/>
|
|
|
+ <AI_ITEM Index="49" Name="" BufferOffset="98"/>
|
|
|
+ <AI_ITEM Index="50" Name="" BufferOffset="100"/>
|
|
|
+ <AI_ITEM Index="51" Name="" BufferOffset="102"/>
|
|
|
+ <AI_ITEM Index="52" Name="" BufferOffset="104"/>
|
|
|
+ <AI_ITEM Index="53" Name="AI_ESC_inner_coolant_inlet_TC_Temp" BufferOffset="106" Device="" Addr="d2106" Note="float" />
|
|
|
+ <AI_ITEM Index="54" Name="AI_ESC_inner_coolant_outlet_TC_Temp" BufferOffset="108" Device="" Addr="d2108" Note="float" />
|
|
|
+ <AI_ITEM Index="55" Name="AI_ESC_outer_coolant_inlet_TC_Temp" BufferOffset="110" Device="" Addr="d2110" Note="float" />
|
|
|
+ <AI_ITEM Index="56" Name="AI_ESC_outer_coolant_outlet_TC_Temp" BufferOffset="112" Device="" Addr="d2112" Note="float" />
|
|
|
+ <AI_ITEM Index="57" Name="AI_Top_Plate_coolant_inlet_TC_Temp" BufferOffset="114" Device="" Addr="d2114" Note="float" />
|
|
|
+ <AI_ITEM Index="58" Name="AI_Top_Plate_coolant_outlet_TC_Temp" BufferOffset="116" Device="" Addr="d2116" Note="float" />
|
|
|
</Ana_In>
|
|
|
</IO_DEFINE>
|