 hecl
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afc3b9494f
VenusSE TM pressurecontrol update
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2 years ago |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
2 years ago |
 lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
|
2 years ago |
|
lixiang
|
b1e6a9ce63
bug提交
|
2 years ago |
 sangwq
|
052baa3ed3
fix the clear error command confirm sequence problem and PM pressure bug.
|
2 years ago |
 zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 years ago |
|
lixiang
|
9f512c69c9
优化efem动画
|
2 years ago |
|
Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
|
2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
2 years ago |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
2 years ago |
|
Intern01
|
211accc82b
PMD&Simulator update
|
2 years ago |
|
Intern01
|
b7129c8da5
PM&Simulator update
|
2 years ago |
|
Intern01
|
41052afc3b
recipeviewmodel uodate && simulator update
|
2 years ago |
|
Intern01
|
b1f52bbe8a
Simulator PMC update
|
2 years ago |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
|
2 years ago |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
|
2 years ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
|
2 years ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
2 years ago |
|
lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
2 years ago |
|
lixiang
|
e52d3832a4
模拟器chamber选择由手动改动变为都rt配置文件
|
2 years ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 years ago |
|
sangwq
|
dff905345f
增加PMB的兼容
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
