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@@ -2,7 +2,7 @@
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<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
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<!--文件根据210-0062-100_ IO LIST_KPL2200_PM_20230726.xlsx生成-->
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- <!--生成时间:08/03/2023 08:56:15-->
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+ <!--生成时间:10/08/2023 10:07:36-->
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<Dig_In>
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<DI_ITEM Index="0" Name="DI_Lid_Closed" Device="" Addr="w20.00" />
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<DI_ITEM Index="1" Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
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@@ -24,17 +24,17 @@
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<DI_ITEM Index="17" Name="" />
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<DI_ITEM Index="18" Name="DI_Foreline_Pressure_10t_Guage_Alarm" Device="VG_FL" Addr="w21.02" />
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<DI_ITEM Index="19" Name="" />
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- <DI_ITEM Index="20" Name="DI_S_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" />
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+ <DI_ITEM Index="20" Name="" Device="" Addr="" />
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<DI_ITEM Index="21" Name="DI_S_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
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- <DI_ITEM Index="22" Name="DI_S_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" />
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+ <DI_ITEM Index="22" Name="" Device="" Addr="" />
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<DI_ITEM Index="23" Name="DI_S_Valve_Heater_On_FB" Device="" Addr="w21.07" />
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- <DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" />
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- <DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" />
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- <DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" />
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- <DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" />
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- <DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" />
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+ <DI_ITEM Index="24" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="25" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="26" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="27" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="28" Name="" Device="" Addr="" />
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<DI_ITEM Index="29" Name="DI_CHB_H-HT_Control_TC_Broken_Alarm" Device="" Addr="w21.13" />
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- <DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" />
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+ <DI_ITEM Index="30" Name="" Device="" Addr="" />
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<DI_ITEM Index="31" Name="DI_CHB_H-HT_Heater_On_FB" Device="" Addr="w21.15" />
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<DI_ITEM Index="32" Name="DI_CHB_H-HT_OT_Switch_Alarm" Device="" Addr="w22.00" />
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<DI_ITEM Index="33" Name="" />
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@@ -48,7 +48,7 @@
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<DI_ITEM Index="41" Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
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<DI_ITEM Index="42" Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
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<DI_ITEM Index="43" Name="DI_N2_Purge_Pressure_Switch" Device="N2_P" Addr="w22.11" Note="Gas Box" />
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- <!--<DI_ITEM Index="44" Name="DI_ESC_He_Pressure_100t_Guage_Alarm" Device="VG_He" Addr="w22.12" Note="ESC配置" />-->
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+ <DI_ITEM Index="44" Name="" Device="VG_He" Addr="" Note="ESC配置" />
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<DI_ITEM Index="45" Name="" />
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<DI_ITEM Index="46" Name="" />
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<DI_ITEM Index="47" Name="" />
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@@ -60,18 +60,18 @@
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<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
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<DI_ITEM Index="54" Name="DI_Source_RF_Water_Flow_Switch" Device="" Addr="w23.06" />
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<DI_ITEM Index="55" Name="" />
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- <DI_ITEM Index="56" Name="DI_P_Valve_TC_Deviation_out_of_range" Device="" Addr="w23.08" />
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- <DI_ITEM Index="57" Name="DI_P_Valve_Control_TC_Broken_Alarm" Device="" Addr="w23.09" />
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- <DI_ITEM Index="58" Name="DI_P_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w23.10" />
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- <DI_ITEM Index="59" Name="DI_P_Valve_Heater_On_FB" Device="" Addr="w23.11" />
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+ <DI_ITEM Index="56" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="57" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="58" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="59" Name="" Device="" Addr="" />
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<DI_ITEM Index="60" Name="" />
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- <DI_ITEM Index="61" Name="DI_Gas_Line_TC_Deviation_out_of_range" Device="" Addr="w23.13" />
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+ <DI_ITEM Index="61" Name="" Device="" Addr="" />
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<DI_ITEM Index="62" Name="DI_Gas_Line_Control_TC_Broken_Alarm" Device="" Addr="w23.14" />
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- <DI_ITEM Index="63" Name="DI_Gas_Line_Monitor_TC_Broken_Alarm" Device="" Addr="w23.15" />
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+ <DI_ITEM Index="63" Name="" Device="" Addr="" />
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<DI_ITEM Index="64" Name="DI_Gas_Line_Heater_On_FB" Device="" Addr="w24.00" />
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- <DI_ITEM Index="65" Name="DI_Gas_Line_OT_Switch_Alarm" Device="" Addr="w24.01" />
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+ <DI_ITEM Index="65" Name="" Device="" Addr="" />
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<DI_ITEM Index="66" Name="DI_S_Valve_OT_Switch_Alarm" Device="" Addr="w24.02" />
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- <DI_ITEM Index="67" Name="DI_Foreline_OT_Switch_Alarm" Device="" Addr="w24.03" />
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+ <DI_ITEM Index="67" Name="" Device="" Addr="" />
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<DI_ITEM Index="68" Name="" />
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<DI_ITEM Index="69" Name="" />
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<DI_ITEM Index="70" Name="" />
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@@ -82,21 +82,21 @@
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<DI_ITEM Index="75" Name="DI_Lid_Down_Limit_Pos_SW" Device="" Addr="w24.11" />
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<DI_ITEM Index="76" Name="DI_Arm_Not_Extend_to_PM" Device="" Addr="w24.12" />
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<DI_ITEM Index="77" Name="DI_TM_Safety_Door_Colse" Device="" Addr="w24.13" />
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- <DI_ITEM Index="78" Name="DI_ESC_Inner_Coolant_Flow_SW" Device="" Addr="w24.14" />
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- <DI_ITEM Index="79" Name="DI_ESC_Outer_Coolant_Flow_SW" Device="" Addr="w24.15" />
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+ <DI_ITEM Index="78" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="79" Name="" Device="" Addr="" />
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<DI_ITEM Index="80" Name="DI_Top_Plate_Coolant_Flow_SW" Device="" Addr="w25.00" />
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<DI_ITEM Index="81" Name="" />
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<DI_ITEM Index="82" Name="" />
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<DI_ITEM Index="83" Name="DI_Lid_Servo_Alarm" Device="" Addr="w25.03" />
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- <DI_ITEM Index="84" Name="DI_ADAM-1_communication_Alarm" Device="" Addr="w25.04" />
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- <DI_ITEM Index="85" Name="DI_ADAM-2_communication_Alarm" Device="" Addr="w25.05" />
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+ <DI_ITEM Index="84" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="85" Name="" Device="" Addr="" />
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<DI_ITEM Index="86" Name="" />
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- <DI_ITEM Index="87" Name="DI_ESC_inner_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.07" />
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- <DI_ITEM Index="88" Name="DI_ESC_inner_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.08" />
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- <DI_ITEM Index="89" Name="DI_ESC_outer_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.09" />
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- <DI_ITEM Index="90" Name="DI_ESC_outer_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.10" />
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- <DI_ITEM Index="91" Name="DI_Top_Plate_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.11" />
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- <DI_ITEM Index="92" Name="DI_Top_Plate_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.12" />
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+ <DI_ITEM Index="87" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="88" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="89" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="90" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="91" Name="" Device="" Addr="" />
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+ <DI_ITEM Index="92" Name="" Device="" Addr="" />
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<DI_ITEM Index="93" Name="" />
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<DI_ITEM Index="94" Name="" />
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<DI_ITEM Index="95" Name="" />
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@@ -144,15 +144,15 @@
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<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
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<DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="PV4" Addr="w1.08" />
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<DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="PV4" Addr="w1.09" />
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- <DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
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- <DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
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+ <DO_ITEM Index="26" Name="" />
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+ <DO_ITEM Index="27" Name="" />
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<DO_ITEM Index="28" Name="" />
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<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
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<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
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<DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
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<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
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<DO_ITEM Index="33" Name="DO_S_Valve_Heater_On" Device="" Addr="w2.01" />
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- <!--<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />-->
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+ <DO_ITEM Index="34" Name="" Device="" Addr="" />
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<DO_ITEM Index="35" Name="DO_CHB_H-HT_Heater_On" Device="" Addr="w2.03" />
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<DO_ITEM Index="36" Name="" />
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<DO_ITEM Index="37" Name="" />
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@@ -164,7 +164,7 @@
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<DO_ITEM Index="43" Name="" />
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<DO_ITEM Index="44" Name="" />
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<DO_ITEM Index="45" Name="" />
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- <!--<DO_ITEM Index="46" Name="DO_P_Valve_Heater_On" Device="" Addr="w2.14" />-->
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+ <DO_ITEM Index="46" Name="" Device="" Addr="" />
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<DO_ITEM Index="47" Name="DO_Gas_Line_Heater_On" Device="" Addr="w2.15" />
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<DO_ITEM Index="48" Name="" />
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<DO_ITEM Index="49" Name="" />
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@@ -232,36 +232,36 @@
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<DO_ITEM Index="111" Name="" />
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</Dig_Out>
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<Ana_Out>
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- <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
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- <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
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- <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
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- <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
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- <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
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- <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
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- <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
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- <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
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- <!--<AO_ITEM Index="8" Name="AO_He_Flow_Setpoint" Device="" Addr="d1016" Note="MFC" />-->
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- <AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint" Device="" Addr="d1018" Note="MFC" />
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- <AO_ITEM Index="10" Name="AO_S_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="以前是Valve" />
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- <AO_ITEM Index="11" Name="AO_S_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" />
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- <!--<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
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- <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />-->
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- <AO_ITEM Index="14" Name="AO_CHB_H-HT_Temperature_Setpoint" Device="" Addr="d1028" Note="H-HT设定温度" />
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- <AO_ITEM Index="15" Name="AO_CHB_H-HT_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="H-HT极限温度设定" />
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- <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
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- <!--<AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint" Device="" Addr="d1034" Note="ESC配置" />
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- <AO_ITEM Index="18" Name="AO_ESC_He_Control_Mode" Device="" Addr="d1036" />
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- <AO_ITEM Index="19" Name="AO_P_Valve_Temperature_Setpoint" Device="" Addr="d1038" Note="钟摆阀门加热设定温度" />
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- <AO_ITEM Index="20" Name="AO_P_Valve_Temp_Limit_Setpoint" Device="" Addr="d1040" Note="钟摆阀门Temp Limit" />-->
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- <AO_ITEM Index="21" Name="AO_Gas_Line_Temperature_Setpoint" Device="" Addr="d1042" Note="Gas Line加热设定温度" />
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- <AO_ITEM Index="22" Name="AO_Gas_Line_Temp_Limit_Setpoint" Device="" Addr="d1044" Note="Gas LineTemp Limit" />
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+ <AO_ITEM Index="0" Name="AO_MFC1_Flow_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="MFC" />
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+ <AO_ITEM Index="1" Name="AO_MFC2_Flow_Setpoint" BufferOffset="2" Device="" Addr="d1002" Note="MFC" />
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+ <AO_ITEM Index="2" Name="AO_MFC3_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
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+ <AO_ITEM Index="3" Name="AO_MFC4_Flow_Setpoint" BufferOffset="6" Device="" Addr="d1006" Note="MFC" />
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+ <AO_ITEM Index="4" Name="AO_MFC5_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1008" Note="MFC" />
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+ <AO_ITEM Index="5" Name="AO_MFC6_Flow_Setpoint" BufferOffset="10" Device="" Addr="d1010" Note="MFC" />
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+ <AO_ITEM Index="6" Name="AO_MFC7_Flow_Setpoint" BufferOffset="12" Device="" Addr="d1012" Note="MFC" />
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+ <AO_ITEM Index="7" Name="AO_MFC8_Flow_Setpoint" BufferOffset="14" Device="" Addr="d1014" Note="MFC" />
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+ <AO_ITEM Index="8" Name="" Device="" Addr="" Note="MFC" />
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+ <AO_ITEM Index="9" Name="AO_Turbo_Pump_N2_Flow_Setpoint" BufferOffset="18" Device="" Addr="d1018" Note="MFC" />
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+ <AO_ITEM Index="10" Name="AO_S_Valve_Temperature_Setpoint" BufferOffset="20" Device="" Addr="d1020" Note="以前是Valve" />
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+ <AO_ITEM Index="11" Name="AO_S_Valve_Temp_Limit_Setpoint" BufferOffset="22" Device="" Addr="d1022" />
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+ <AO_ITEM Index="12" Name="" Device="" Addr="" Note="前级管道设定温度" />
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+ <AO_ITEM Index="13" Name="" Device="" Addr="" Note="Temp Limit" />
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+ <AO_ITEM Index="14" Name="AO_CHB_H-HT_Temperature_Setpoint" BufferOffset="28" Device="" Addr="d1028" Note="H-HT设定温度" />
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+ <AO_ITEM Index="15" Name="AO_CHB_H-HT_Temp_Limit_Setpoint" BufferOffset="30" Device="" Addr="d1030" Note="H-HT极限温度设定" />
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+ <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" BufferOffset="32" Addr="d1032" Note="PC to PLC" />
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+ <AO_ITEM Index="17" Name="" Device="" Addr="" Note="ESC配置" />
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+ <AO_ITEM Index="18" Name="" Device="" Addr="" />
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+ <AO_ITEM Index="19" Name="" Device="" Addr="" Note="钟摆阀门加热设定温度" />
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+ <AO_ITEM Index="20" Name="" Device="" Addr="" Note="钟摆阀门Temp Limit" />
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+ <AO_ITEM Index="21" Name="AO_Gas_Line_Temperature_Setpoint" BufferOffset="42" Device="" Addr="d1042" Note="Gas Line加热设定温度" />
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+ <AO_ITEM Index="22" Name="AO_Gas_Line_Temp_Limit_Setpoint" BufferOffset="44" Device="" Addr="d1044" Note="Gas LineTemp Limit" />
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<AO_ITEM Index="23" Name="" />
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<AO_ITEM Index="24" Name="" />
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<AO_ITEM Index="25" Name="" />
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<AO_ITEM Index="26" Name="" />
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<AO_ITEM Index="27" Name="" />
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<AO_ITEM Index="28" Name="" />
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- <AO_ITEM Index="29" Name="AO_CHB_H-HT_Power_Distribute_Percent" Device="" Addr="d1058" />
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+ <AO_ITEM Index="29" Name="AO_CHB_H-HT_Power_Distribute_Percent" BufferOffset="58" Device="" Addr="d1058" />
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<AO_ITEM Index="30" Name="" />
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<AO_ITEM Index="31" Name="" />
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<AO_ITEM Index="32" Name="" />
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@@ -284,52 +284,52 @@
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<AO_ITEM Index="49" Name="" />
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</Ana_Out>
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<Ana_In>
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- <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
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- <AI_ITEM Index="1" Name="AI_Process_Pressure_100mt" Device="" Addr="d2002" Note="float" />
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- <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
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- <!--<AI_ITEM Index="3" Name="AI_ESC_He_Pressure_100t" Device="" Addr="d2006" Note="float" />-->
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- <AI_ITEM Index="4" Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
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- <AI_ITEM Index="5" Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
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- <AI_ITEM Index="6" Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
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- <AI_ITEM Index="7" Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
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- <AI_ITEM Index="8" Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
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- <AI_ITEM Index="9" Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
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- <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
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- <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
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- <!--<AI_ITEM Index="12" Name="AI_ESC_He_Flow" Device="" Addr="d2024" Note="float" />-->
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- <AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" Device="" Addr="d2026" Note="float" />
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- <AI_ITEM Index="14" Name="AI_S_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
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+ <AI_ITEM Index="0" Name="AI_Chamber_Pressure_10t" BufferOffset="0" Device="" Addr="d2000" Note="float" />
|
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+ <AI_ITEM Index="1" Name="AI_Process_Pressure_100mt" Device="" BufferOffset="2" Addr="d2002" Note="float" />
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+ <AI_ITEM Index="2" Name="AI_Foreline_Pressure_10t" Device="" BufferOffset="4" Addr="d2004" Note="float" />
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+ <AI_ITEM Index="3" Name="" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="4" Name="AI_MFC1_Flow" BufferOffset="8" Device="" Addr="d2008" Note="float" />
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+ <AI_ITEM Index="5" Name="AI_MFC2_Flow" BufferOffset="10" Device="" Addr="d2010" Note="float" />
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+ <AI_ITEM Index="6" Name="AI_MFC3_Flow" BufferOffset="12" Device="" Addr="d2012" Note="float" />
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+ <AI_ITEM Index="7" Name="AI_MFC4_Flow" BufferOffset="14" Device="" Addr="d2014" Note="float" />
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+ <AI_ITEM Index="8" Name="AI_MFC5_Flow" BufferOffset="16" Device="" Addr="d2016" Note="float" />
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+ <AI_ITEM Index="9" Name="AI_MFC6_Flow" BufferOffset="18" Device="" Addr="d2018" Note="float" />
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+ <AI_ITEM Index="10" Name="AI_MFC7_Flow" BufferOffset="20" Device="" Addr="d2020" Note="float" />
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+ <AI_ITEM Index="11" Name="AI_MFC8_Flow" BufferOffset="22" Device="" Addr="d2022" Note="float" />
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+ <AI_ITEM Index="12" Name="" BufferOffset="0" Device="" Addr="" Note="float" />
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+ <AI_ITEM Index="13" Name="AI_Turbo_Pump_N2_Flow" BufferOffset="26" Device="" Addr="d2026" Note="float" />
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+ <AI_ITEM Index="14" Name="AI_S_Valve_Control_TC_Temp" BufferOffset="28" Device="" Addr="d2028" Note="float" />
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<AI_ITEM Index="15" Name="" />
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- <!--<AI_ITEM Index="16" Name="AI_Foreline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />-->
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+ <AI_ITEM Index="16" Name="" Device="" BufferOffset="0" Addr="" Note="float" />
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<AI_ITEM Index="17" Name="" />
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- <AI_ITEM Index="18" Name="AI_CHB_H-HT_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
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+ <AI_ITEM Index="18" Name="AI_CHB_H-HT_Control_TC_Temp" BufferOffset="36" Device="" Addr="d2036" Note="float" />
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<AI_ITEM Index="19" Name="" />
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<AI_ITEM Index="20" Name="" />
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<AI_ITEM Index="21" Name="" />
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- <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
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- <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
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- <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
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- <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
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- <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
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- <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
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- <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
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+ <AI_ITEM Index="22" Name="AI_Heartbeat_FB" BufferOffset="44" Device="" Addr="d2044" Note="float" />
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|
+ <AI_ITEM Index="23" Name="AI_Second" BufferOffset="46" Device="" Addr="d2046" Note="float" />
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+ <AI_ITEM Index="24" Name="AI_Minute" BufferOffset="48" Device="" Addr="d2048" Note="float" />
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|
+ <AI_ITEM Index="25" Name="AI_Time" BufferOffset="50" Device="" Addr="d2050" Note="float" />
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|
+ <AI_ITEM Index="26" Name="AI_Day" BufferOffset="52" Device="" Addr="d2052" Note="float" />
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|
+ <AI_ITEM Index="27" Name="AI_Month" BufferOffset="54" Device="" Addr="d2054" Note="float" />
|
|
|
+ <AI_ITEM Index="28" Name="AI_Year" BufferOffset="56" Device="" Addr="d2056" Note="float" />
|
|
|
<AI_ITEM Index="29" Name="" />
|
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|
<AI_ITEM Index="30" Name="" />
|
|
|
- <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
|
|
|
- <!--<AI_ITEM Index="32" Name="AI_P_Valve_Control_TC_Temp" Device="" Addr="d2064" Note="float" />-->
|
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|
- <AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp" Device="" Addr="d2066" Note="float" />
|
|
|
+ <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" BufferOffset="62" Device="" Addr="d2062" Note="float" />
|
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|
+ <AI_ITEM Index="32" Name="" BufferOffset="0" Device="" Addr="" Note="float" />
|
|
|
+ <AI_ITEM Index="33" Name="AI_Gas_Line_Control_TC_Temp" BufferOffset="66" Device="" Addr="d2066" Note="float" />
|
|
|
<AI_ITEM Index="34" Name="" />
|
|
|
- <!--<AI_ITEM Index="35" Name="AI_S_Valve_Monitor_TC1_Temp" Device="" Addr="d2070" Note="float" />-->
|
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|
+ <AI_ITEM Index="35" Name="" Device="" BufferOffset="0" Addr="" Note="float" />
|
|
|
<AI_ITEM Index="36" Name="" />
|
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|
<AI_ITEM Index="37" Name="" />
|
|
|
<AI_ITEM Index="38" Name="" />
|
|
|
- <!--<AI_ITEM Index="39" Name="AI_Foreline_Monitor_TC1_Temp" Device="" Addr="d2078" Note="float" />
|
|
|
- <AI_ITEM Index="40" Name="AI_Foreline_Monitor_TC2_Temp" Device="" Addr="d2080" Note="float" />
|
|
|
- <AI_ITEM Index="41" Name="AI_Foreline_Monitor_TC3_Temp" Device="" Addr="d2082" Note="float" />-->
|
|
|
+ <AI_ITEM Index="39" Name="" Device="" Addr="" Note="float" />
|
|
|
+ <AI_ITEM Index="40" Name="" Device="" Addr="" Note="float" />
|
|
|
+ <AI_ITEM Index="41" Name="" Device="" Addr="" Note="float" />
|
|
|
<AI_ITEM Index="42" Name="" />
|
|
|
- <!--<AI_ITEM Index="43" Name="AI_CHB_Wall_Monitor_TC1_Temp" Device="" Addr="d2086" Note="float" />
|
|
|
- <AI_ITEM Index="44" Name="AI_CHB_Wall_Monitor_TC2_Temp" Device="" Addr="d2088" Note="float" />
|
|
|
- <AI_ITEM Index="45" Name="AI_CHB_Wall_Monitor_TC3_Temp" Device="" Addr="d2090" Note="float" />-->
|
|
|
+ <AI_ITEM Index="43" Name="" Device="" Addr="" Note="float" />
|
|
|
+ <AI_ITEM Index="44" Name="" Device="" Addr="" Note="float" />
|
|
|
+ <AI_ITEM Index="45" Name="" Device="" Addr="" Note="float" />
|
|
|
<AI_ITEM Index="46" Name="" />
|
|
|
<AI_ITEM Index="47" Name="" />
|
|
|
<AI_ITEM Index="48" Name="" />
|
|
@@ -337,11 +337,5 @@
|
|
|
<AI_ITEM Index="50" Name="" />
|
|
|
<AI_ITEM Index="51" Name="" />
|
|
|
<AI_ITEM Index="52" Name="" />
|
|
|
- <!--<AI_ITEM Index="53" Name="AI_ESC_inner_coolant_inlet_TC_Temp" Device="" Addr="d2106" Note="float" />
|
|
|
- <AI_ITEM Index="54" Name="AI_ESC_inner_coolant_outlet_TC_Temp" Device="" Addr="d2108" Note="float" />
|
|
|
- <AI_ITEM Index="55" Name="AI_ESC_outer_coolant_inlet_TC_Temp" Device="" Addr="d2110" Note="float" />
|
|
|
- <AI_ITEM Index="56" Name="AI_ESC_outer_coolant_outlet_TC_Temp" Device="" Addr="d2112" Note="float" />
|
|
|
- <AI_ITEM Index="57" Name="AI_Top_Plate_coolant_inlet_TC_Temp" Device="" Addr="d2114" Note="float" />
|
|
|
- <AI_ITEM Index="58" Name="AI_Top_Plate_coolant_outlet_TC_Temp" Device="" Addr="d2116" Note="float" />-->
|
|
|
</Ana_In>
|
|
|
</IO_DEFINE>
|