 zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
1 rok temu |
 lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
1 rok temu |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
1 rok temu |
 sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
1 rok temu |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
1 rok temu |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
1 rok temu |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
|
1 rok temu |
 Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
1 rok temu |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
1 rok temu |
|
Intern01
|
c5abe7c813
Simulator Communication Port Update
|
1 rok temu |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
1 rok temu |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
1 rok temu |
|
Intern01
|
211accc82b
PMD&Simulator update
|
1 rok temu |
|
sangwq
|
344d734fff
ATM Transfer.
|
1 rok temu |
|
zhouhr
|
c8ec52ec1e
修复下手臂无法右键的问题
|
1 rok temu |
|
zhouhr
|
1408b6822f
增加return wafer的Dialog、右键wafer的菜单项return wafer
|
1 rok temu |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
1 rok temu |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
|
1 rok temu |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
1 rok temu |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
|
1 rok temu |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
|
1 rok temu |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
1 rok temu |
|
sangwq
|
7b98756c26
兼容新旧 Endpoint, 未完成
|
1 rok temu |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
1 rok temu |
|
lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
1 rok temu |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
1 rok temu |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
1 rok temu |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
1 rok temu |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 rok temu |
|
lixiang
|
ec1eeba67c
添加数据分析界面
|
1 rok temu |
