TM/EFEM robot single arm option.

Venus/Framework/Common/SCCore/SystemConfigManager.cs

@@ -65,8 +65,7 @@ namespace MECF.Framework.Common.SCCore
             if (InitializeItemValue(_items[(string)parameters[0]], (string)parameters[1]))
             {
                 GenerateDataFile();
-                EV.PostInfoLog("System", string.Format("SC {0} value changed from {1} to {2}", key, old, parameters[1]));
-
+                LOG.Write(eEvent.EV_SYSTEM_CONFIG, ModuleName.System, string.Format("SC {0} value changed from {1} to {2}", key, old, parameters[1]));
             }
 
             if ((string)parameters[0] == "PMA.Chiller.EnableChiller" && (string)parameters[1] == "false")
@@ -75,7 +74,7 @@ namespace MECF.Framework.Common.SCCore
                 if (InitializeItemValue(_items["PMB.Chiller.ChillerSameWithPMA"], "False"))
                 {
                     GenerateDataFile();
-                    EV.PostInfoLog("System", string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.ChillerSameWithPMA", "true", "false"));
+                    LOG.Write(eEvent.EV_SYSTEM_CONFIG, ModuleName.System, string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.ChillerSameWithPMA", "true", "false"));
                 }
             }
 
@@ -85,7 +84,7 @@ namespace MECF.Framework.Common.SCCore
                 if (InitializeItemValue(_items["PMB.Chiller.EnableChiller"], "true"))
                 {
                     GenerateDataFile();
-                    EV.PostInfoLog("System", string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.EnableChiller", "false", "true"));
+                    LOG.Write(eEvent.EV_SYSTEM_CONFIG, ModuleName.System, string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.EnableChiller", "false", "true"));
                 }
             }
 
@@ -95,7 +94,7 @@ namespace MECF.Framework.Common.SCCore
                 if (InitializeItemValue(_items["PMB.Chiller.EnableChiller"], "true"))
                 {
                     GenerateDataFile();
-                    EV.PostInfoLog("System", string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.EnableChiller", "false", "true"));
+                    LOG.Write(eEvent.EV_SYSTEM_CONFIG, ModuleName.System, string.Format("SC {0} value changed from {1} to {2}", "PMB.Chiller.EnableChiller", "false", "true"));
                 }
             }
 
@@ -409,7 +408,7 @@ namespace MECF.Framework.Common.SCCore
 
                         if (intValue <min  || intValue > max)
                         {
-                            EV.PostWarningLog(ModuleNameString.System, $"SC {item.PathName} value  {intValue} out of setting range ({item.Min}, {item.Max})");
+                            LOG.Write(eEvent.WARN_SYSTEM_CONFIG, ModuleName.System, $"SC {item.PathName} value  {intValue} out of setting range ({item.Min}, {item.Max})");
                             break;
                         }
                         item.IntValue = intValue;
@@ -424,7 +423,7 @@ namespace MECF.Framework.Common.SCCore
                         double.TryParse(item.Max, out double max);
                         if (doubleValue < min || doubleValue > max)
                         {
-                            EV.PostWarningLog(ModuleNameString.System, $"SC {item.PathName}  value  {doubleValue} out of setting range ({item.Min}, {item.Max})");
+                            LOG.Write(eEvent.WARN_SYSTEM_CONFIG, ModuleName.System, $"SC {item.PathName}  value  {doubleValue} out of setting range ({item.Min}, {item.Max})");
                             break;
                         }
                         item.DoubleValue = doubleValue;

Venus/Venus_Core/EventDefine.cs

@@ -34,6 +34,8 @@ namespace Aitex.Core.RT.Log{
 		WARN_SEQUENCE = 33,
 		ERR_SEQUENCE = 34,
 		ERR_INTERLOCK_FAIL = 35,
+		EV_SYSTEM_CONFIG = 36,
+		WARN_SYSTEM_CONFIG = 37,
 		INFO_DEVICE_IO_HEATER = 1000,
 		WARN_DEVICE_IO_HEATER = 1001,
 		ERR_DEVICE_IO_HEATER = 1002,

Venus/Venus_RT/Config/LogDefine.json

@@ -297,6 +297,24 @@
     "Note": "Interlock Failed"
   },
   {
+    "Id": 36,
+    "Level": "Info",
+    "LogEnum": "EV_SYSTEM_CONFIG",
+    "GlobalDescription_zh": "{0}。",
+    "GlobalDescription_en": "{0}.",
+    "Module": "System",
+    "Note": "Configuration Info"
+  },
+  {
+    "Id": 37,
+    "Level": "Warning",
+    "LogEnum": "WARN_SYSTEM_CONFIG",
+    "GlobalDescription_zh": "{0}。",
+    "GlobalDescription_en": "{0}.",
+    "Module": "System",
+    "Note": "Configuration Warning"
+  },
+  {
     "Id": 1000,
     "Level": "Info",
     "LogEnum": "INFO_DEVICE_IO_HEATER",

Venus/Venus_RT/Config/System.sccfg

@@ -89,6 +89,7 @@
 		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
 
 		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
+		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		<configs name="LoadPort" nameView="LoadPort" >
 			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
@@ -144,6 +145,7 @@
 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		<config default="50"  name="WithLLPressureDifference"   nameView="TM LL Pressure Difference"   description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		<config default="50"  name="WithPMPressureDifference"   nameView="TM PM Pressure Difference"   description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		<configs name="TM_MFC1" nameView="MFC1" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />

Venus/Venus_RT/Modules/AutoCycle.cs

@@ -86,6 +86,7 @@ namespace Venus_RT.Modules
         List<int> _LLBOutSlot = new List<int> { 0, 1, 2, 3 };
         int _LLASlotNumber = 4;
         int _LLBSlotNumber = 4;
+        int _efemRobotSingleArmOption = 0;
 
         List<MoveItem> _movingItems = new List<MoveItem>();
         List<MoveItem> _efemMovingItems = new List<MoveItem>();
@@ -122,6 +123,8 @@ namespace Venus_RT.Modules
             _LLBInSlot.RemoveAll(item => item >= _LLBSlotNumber);
             _LLBOutSlot.RemoveAll(item => item >= _LLBSlotNumber);
 
+            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
+
             DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
             DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
             DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
@@ -1001,6 +1004,9 @@ namespace Venus_RT.Modules
             var slots = new List<int>();
             for(int i = 0; i < 2; i++)
             {
+                if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != i + 1)
+                    continue;
+
                 var wafer = GetCloneWafer(ModuleName.EfemRobot, i);
                 if (wafer.IsEmpty)
                     continue;
@@ -1217,6 +1223,9 @@ namespace Venus_RT.Modules
             // check return
             for(int i = 0; i < 2; i++)
             {
+                if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != i + 1)
+                    continue;
+
                 if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i))
                 {
                     var returnWafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
@@ -1238,7 +1247,7 @@ namespace Venus_RT.Modules
                 var outSlots = GetNextWaferInJobQueue(lp);
 
                 var hand = GetEFEMRobotFreeHand();
-                if (hand != Hand.None && outSlots.Count > 0)
+                if (hand != Hand.None && outSlots.Count > 0 && !IsForwardPathBlocking(lp, outSlots[0]))
                 {
                     _efemMovingItems.Add(new MoveItem(lp, outSlots[0], ModuleName.EfemRobot, (int)hand, hand));
                 }
@@ -1376,6 +1385,9 @@ namespace Venus_RT.Modules
         {
             for(int i = 0; i < 2; i++)
             {
+                if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != i + 1)
+                    continue;
+
                 if ((WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, i) && 
                     !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)) ||
                 (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i) && 

Venus/Venus_RT/Modules/ManualTransfer.cs

@@ -39,6 +39,15 @@ namespace Venus_RT.Modules
         private R_TRIG _wafer_arrive_trig = new R_TRIG();
         private MovingStatus _moving_status = MovingStatus.Idle;
 
+        private int _tmRobotSingleArmOption = 0;
+        private int _efemRobotSingleArmOption = 0;
+
+        public ManualTransfer()
+        {
+            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
+            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
+        }
+
         public RState Start(params object[] objs)
         {
             // RESET
@@ -53,7 +62,13 @@ namespace Venus_RT.Modules
 
             _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;
 
-            if(IsCrossTransfer(_move_item))
+            if (!CheckSingleArmOption(_move_item.DestinationModule, _move_item.DestinationSlot))
+                return RState.Failed;
+
+            if (!CheckSingleArmOption(_move_item.SourceModule, _move_item.SourceSlot))
+                return RState.Failed;
+
+            if (IsCrossTransfer(_move_item))
             {
                 var slot = SelectLLFreeSlot();
                 if (slot.Module == ModuleName.System)
@@ -66,7 +81,6 @@ namespace Venus_RT.Modules
                     if(ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
                     {
                         _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
-
                     }
                     else
                     {
@@ -289,6 +303,33 @@ namespace Venus_RT.Modules
 
             return RState.Running;
         }
+
+        private bool CheckSingleArmOption(ModuleName robot, int slot)
+        {
+            if(ModuleHelper.IsTMRobot(robot))
+            {
+                if (_tmRobotSingleArmOption != 0 && _tmRobotSingleArmOption != slot + 1)
+                {
+                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"Cannot move the wafer as TM Robot {(Hand)slot} is disabled.");
+                    return false;
+                }
+            }
+            else if(ModuleHelper.IsEFEMRobot(robot))
+            {
+                if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != slot + 1)
+                {
+                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"Cannot move the wafer as EFEM Robot {(Hand)slot} is disabled.");
+                    return false;
+                }
+            }
+
+            return true;
+        }
+
+        public int GetSingleArmOption(ModuleName robot)
+        {
+            return ModuleHelper.IsTMRobot(robot) ? _tmRobotSingleArmOption : _efemRobotSingleArmOption;
+        }
     }
 
     public class ReturnAllWafer : IRoutine
@@ -310,19 +351,26 @@ namespace Venus_RT.Modules
             {
                 if (ModuleHelper.IsInstalled(mod) && Singleton<TransferModule>.Instance.GetScheduler(mod).IsAvailable)
                 {
-                    PushWaferToReturnQueqe(mod, 0);
                     if (ModuleHelper.IsEFEMRobot(mod) || ModuleHelper.IsTMRobot(mod))
                     {
-                        PushWaferToReturnQueqe(mod, 1);
+                        if (_manualTransfer.GetSingleArmOption(mod) != 2)
+                            PushWaferToReturnQueqe(mod, 0);
+
+                        if (_manualTransfer.GetSingleArmOption(mod) != 1)
+                            PushWaferToReturnQueqe(mod, 1);
                     }
                     else if (ModuleHelper.IsLoadLock(mod))
                     {
                         int nSlotNumber = SC.GetValue<int>($"{mod}.SlotNumber");
-                        for (int i = 1; i < nSlotNumber; i++)
+                        for (int i = 0; i < nSlotNumber; i++)
                         {
                             PushWaferToReturnQueqe(mod, i);
                         }
                     }
+                    else
+                    {
+                        PushWaferToReturnQueqe(mod, 0);
+                    }
                 }
             }
 

Venus/Venus_RT/Modules/Schedulers/SchedulerEfemRobot.cs

@@ -165,7 +165,16 @@ namespace Venus_RT.Scheduler
                 else if(_currentScheduler.Status == RState.Running)
                 {
                     if (IsAllWafersArrived())
+                    {
+                        if( _entityTaskToken == (int)EfemEntity.MSG.Pick || 
+                            _entityTaskToken == (int)EfemEntity.MSG.Place || 
+                            _entityTaskToken == (int)EfemEntity.MSG.Swap)
+                        {
+                            _entityTaskToken = (int)FSM_MSG.NONE;
+                        }
+
                         _currentScheduler.Status = RState.End;
+                    }
                 }
             }
 

Venus/Venus_RT/Modules/Schedulers/SchedulerTMRobot.cs

@@ -44,9 +44,11 @@ namespace Venus_RT.Modules.Schedulers
         public int _entityTaskToken = (int)FSM_MSG.NONE;
         private Queue<SchedulerItem> _schedulerList = new Queue<SchedulerItem>();
         private SchedulerItem _currentScheduler = null;
+        private int _singleArmOption = 0;
         public SchedulerTMRobot() : base(ModuleName.TM.ToString())
         {
             _entity = Singleton<RouteManager>.Instance.TM;
+            _singleArmOption = SC.GetValue<int>("TM.SingleArmOption");
 
         }
 
@@ -168,7 +170,7 @@ namespace Venus_RT.Modules.Schedulers
                 }
             }
 
-            if(WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
+            if(WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _singleArmOption == 0)
             {
                 if (items.Length == 4)
                 {
@@ -269,10 +271,10 @@ namespace Venus_RT.Modules.Schedulers
 
         Hand SelectFreeHand()
         {
-            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0))
+            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _singleArmOption != 2)
                 return Hand.Blade1;
 
-            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
+            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _singleArmOption != 1)
                 return Hand.Blade2;
 
             return Hand.None;