 sangwq
|
3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 years ago |
 lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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2 years ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
2 years ago |
|
lixiang
|
a62816fc3f
优化efem
|
2 years ago |
|
lixiang
|
9f512c69c9
优化efem动画
|
2 years ago |
 Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
|
2 years ago |
|
sangwq
|
8d21b41b42
AutoCycle enhancement.
|
2 years ago |
|
lixiang
|
46aa26403c
优化压差开siltdoor功能
|
2 years ago |
 zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
2 years ago |
|
lixiang
|
fc317f2d07
添加控压状态，开关slitdoor，check压差的功能
|
2 years ago |
|
lixiang
|
00d42e8c17
efem动画优化
|
2 years ago |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
|
2 years ago |
|
Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
2 years ago |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
2 years ago |
|
lixiang
|
afb706578a
添加CycleCount/WaferCount显示
|
2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
2 years ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 years ago |
|
Intern01
|
73729331e4
Simulator Device Update
|
2 years ago |
|
Intern01
|
c5abe7c813
Simulator Communication Port Update
|
2 years ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
lixiang
|
9c46c55950
解决冲突
|
2 years ago |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
2 years ago |
|
zhouhr
|
bcc9d2faf8
1、Chamber add the waferID
|
2 years ago |
|
Intern01
|
60e9a04892
Simulator LP3 Update
|
2 years ago |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
2 years ago |
|
Intern01
|
211accc82b
PMD&Simulator update
|
2 years ago |
|
zhouhr
|
296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
|
2 years ago |
|
sangwq
|
344d734fff
ATM Transfer.
|
2 years ago |
|
lixiang
|
aad749230c
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
