 zhouhr
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
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1 anno fa |
 lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
1 anno fa |
 sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
1 anno fa |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
1 anno fa |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
|
1 anno fa |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
|
1 anno fa |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
1 anno fa |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
1 anno fa |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
1 anno fa |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 anni fa |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 anni fa |
|
sangwq
|
e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 anni fa |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 anni fa |
|
lixiang
|
60d08c1285
1.ui与rt联动功能添加
|
2 anni fa |
|
lixiang
|
bad994820a
添加PM与部分loadlock与rt交互功能
|
2 anni fa |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 anni fa |
|
lixiang
|
da4e6f6a4e
Recipe功能完善
|
2 anni fa |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 anni fa |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 anni fa |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 anni fa |
|
sangwq
|
8f2e8686aa
VenusDevice.cs
|
2 anni fa |
