VenusDevice.cs

Venus/Venus_Core/EventDefine.cs

@@ -0,0 +1,58 @@
+namespace Aitex.Core.RT.Log{
+	public enum eEvent{
+
+		OperationAuthorization = 9,
+		UserLoggedOff = 10,
+		UserLoggedIn = 11,
+		AccountChanged = 12,
+		PasswordChanged = 13,
+		AccountDeleted = 14,
+		AccountCreated = 15,
+		PuttingWaferToChamberEnds = 19,
+		PuttingWaferToChamberBegins = 20,
+		PickingWaferFromChamberEnds = 21,
+		PickingWaferFromChamberBegins = 22,
+		AlignBegins = 25,
+		AlignEnds = 26,
+		AlignFailed = 27,
+		WaferMoved = 28,
+		WaferCreate = 36,
+		WaferDelete = 37,
+		LoadFOUPStart = 41,
+		LoadFOUPEnd = 42,
+		LoadFOUPFailed = 43,
+		UnloadFOUPStart = 44,
+		UnloadFOUPEnd = 45,
+		UnloadFOUPFailed = 46,
+		RoutineNotify = 500,
+		RoutineFailed = 501,
+		GeneralInfo = 1000,
+		ServiceRoutineAborted = 1023,
+		ServiceRoutineInfo = 1033,
+		GuiCmdExecSucc = 1040,
+		SwInterlock = 1052,
+		AccountWithoutAuthorization = 2052,
+		DefaultWarning = 2053,
+		GuiCmdExecFailed = 3027,
+		DbConnFailed = 3034,
+		SafePlcInterlock = 3038,
+		ValveOperationFail = 3039,
+		TransferPrepareFailed = 4050,
+		DefaultAlarm = 4093,
+		PlcHeartBeatFail = 5027,
+		TCPConnSucess = 5120,
+		CommunicationError = 5125,
+		ToleranceAlarm = 5126,
+		TCBroken = 5128,
+		HomeBegins = 5200,
+		HomeEnds = 5201,
+		HomeFailed = 5202,
+		CarrierArrived = 5203,
+		CarrierRemoved = 5204,
+		ManualOpAccess = 5205,
+		CarrierIdRead = 5206,
+		CarrierIdReadFailed = 5207,
+		SlotMapAvailable = 5208,
+		SlotMapAvailable_2 = 5308,
+	}
+}

Venus/Venus_Core/VenusDevice.cs

@@ -0,0 +1,258 @@
+namespace Venus_Core
+{
+    public enum VenusDevice
+    {
+        ValveMfc1,
+        ValveMfc2,
+        ValveMfc3,
+        ValveMfc4,
+        ValveMfc5,
+        ValveMfc6,
+        ValveMfc7,
+        ValveMfc8,
+
+        ValvePVN21,
+        ValvePVN22,
+        ValvePV11,
+        ValvePV12,
+        ValvePV21,
+        ValvePV22,
+        ValvePV31,
+        ValvePV32,
+        ValvePV41,
+        ValvePV42,
+
+        ValveN2,
+        ValvePVHe1,
+        ValvePVHe2,
+        ValveGasFinal,
+        ValveSoftPump,
+        ValveFastPump,
+        ValveCHBPurge,
+        ValveCHBVent,
+        ValveTurboPumpPurge,
+        ValveGuage,
+        ValveLoadlockVent,
+        ValveLoadlockPumping,
+
+        MfcGas1,
+        MfcGas2,
+        MfcGas3,
+        MfcGas4,
+        MfcGas5,
+
+        GasStick1,
+        GasStick2,
+        GasStick3,
+
+        TemperatureControl,
+        ChamberLid,
+        ATM_SW,
+        VAC_SW,
+        WaterFlow_SW,
+        N2_Pressure,
+
+        ProcessGauge,
+        PressureGauge,
+        ForelineGauge,
+
+        MainPump,
+        Chiller,
+
+        Rf,
+        BiasRf,
+        Match,
+        BiasMatch,
+
+        PressureControl,
+        ThrottleValve,
+        HeaterChamber,
+        ForelineHeater,
+
+        Heartbeat,
+        ResetPlcSignal,
+
+        LiftPin,
+        SlitDoor,
+        SmallPin,
+        MediumPin,
+
+        LoadLockArm,
+
+        StatisticsRfOnTime,
+        StatisticsPumpOnTime,
+
+        PlcDateTime,
+        Lid,
+        LidLoadlock,
+        LidLocker
+    }
+
+    public enum StateData
+    {
+        RecipeProcessTime,
+        RecipeStepNo,
+        RecipeStepMode,
+        RecipeName,
+        RecipeBaseName,
+
+        RecipeStepTimeElapsed,
+        RecipeStepTimeSetPoint,
+
+        RecipeStepRfTimeSetPoint,
+        RecipeStepElectrodeTemp,
+
+        SmallWafer,
+        MidWafer,
+        BigWafer,
+
+        RfTimeElapsed,
+
+        PumpTime,
+
+        PMState,
+
+        TMState,
+
+        IsAutoMode,
+
+        IsPmOnline,
+        IsTmOnline,
+
+        PMJobState,
+        TMJobState,
+
+        PmPlatformState,
+
+        JobState,
+        JobTmRecipe,
+        JobPmRecipe,
+
+        JobStartTime,
+        JobStopTime,
+        JobProcessCount,
+
+        IsPumpingOkForProcess,
+        IsCoolingOkForProcess,
+        IsGasFlowingOkForProcess,
+        IsRfPowering,
+
+        TotalCycle,
+
+        ProcessStatus,
+
+        AlarmEvent,
+
+        LeakCheckElapseTime,
+
+        DataLogName,
+
+        LotName,
+
+        CurrentMagazineType,
+        SchedulerRecipe,
+
+        SchedulerState,
+
+        SchedulerLoadStationInSubstrate,
+        SchedulerRailInSubstrate,
+        SchedulerPmSubstrate,
+        SchedulerRailOutSubstrate,
+        SchedulerLoadStationOutSubstrate,
+    }
+
+    public enum RtOperation
+    {
+        DeviceOperation,
+
+        LockLid,
+        UnlockLid,
+        StartPump,
+        Pump,
+        StopPump,
+
+        GasFlow,
+        StopGasFlow,
+
+        Cooling,
+        StopCooling,
+
+        /// <summary>
+        ///
+        /// 0:Step mode
+        /// 1:Power on time
+        /// 2:Electrode temperature
+        /// 3:Electrode Critical temperature
+        /// </summary>
+        RfPower,
+
+        Vent,
+
+        Purge,
+
+        Abort,
+
+        Heat,
+        SetConfig,
+        SetPMBChillerState,
+        SetHardwareConfig,
+
+        RunRecipe,
+
+        SkipCurrentStep,
+
+        ResumeRecipe,
+
+        AbortRecipe,
+
+        Reset,
+
+        LeakCheck,
+
+        DeleteLeakCheck,
+        MFCVerification,
+        AllMFCVerification,
+
+        SwitchOffBuzzer,
+
+        // Lift pin & Guide pin
+        MoveLiftPin,
+        MoveGuidePin,
+
+        StartAutoRun,
+        StopAutoRun,
+        PauseAutoRun,
+        ResumeAutoRun,
+        InitAll,
+        AckError,
+
+        TmRun,
+        TmStop,
+
+        PmAuto,
+        PmManual,
+
+        PmOnline,
+        PmOffline,
+
+        JobAuto,
+        JobManual,
+        JobRun,
+        JobStop,
+        JobAbort,
+        JobPmLoadRecipe,
+        JobTmLoadRecipe,
+        JobTmRun,
+        JobTmStop,
+        JobPmOnline,
+        JobPmOffline,
+        JobPmProcessDone,
+
+        JobTmRecovered,
+    }
+
+    public enum MovementPosition
+    {
+        Unknown, Down, Up, Left, Right, Middle
+    }
+}