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@@ -7,7 +7,7 @@ using Aitex.Core.RT.Log;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Device.Bases;
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using MECF.Framework.Common.Equipment;
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-using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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+
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using System;
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using System.Collections.Generic;
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using Venus_Core;
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@@ -20,11 +20,15 @@ using Aitex.Core.RT.OperationCenter;
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using MECF.Framework.Common.SubstrateTrackings;
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-namespace Venus_RT.Devices.TM
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+using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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+
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+namespace Venus_RT.Devices
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{
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- class JetTM
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+ class JetTM : TM
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{
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private readonly IoLid _TMLid;
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+ private readonly IoLid _LLALid;
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+ private readonly IoLid _LLBLid;
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private readonly IoCylinder _LLASlitDoor;
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private readonly IoCylinder _LLBSlitDoor;
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@@ -47,6 +51,47 @@ namespace Venus_RT.Devices.TM
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private readonly IoSensor _VaccumPressureSwitch;
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private readonly IoSensor _N2PressureSwitch;
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-
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+ private readonly IoTMPressureCtrl _presureCtrl;
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+
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+ public bool TMLidClosed => _TMLid.OFFFeedback;
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+ public bool LLALidClosed => _LLALid.OFFFeedback;
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+ public bool LLBLidClosed => _LLBLid.OFFFeedback;
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+
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+ public JetTM() : base("TM")
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+ {
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+ _TMLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.TMLid}");
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+ _LLALid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLALid}");
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+ _LLBLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLBLid}");
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+
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+ _LLASlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLATSlitDoor}");
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+ _LLBSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBTSlitDoor}");
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+
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+ _N2Valve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveN2}");
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+ _SoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveSoftPump}");
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+ _FastPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveFastPump}");
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+ _PurgeValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValvePurge}");
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+ _VentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveVent}");
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+ _WaferRelayValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveWaterRelay}");
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+
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+ _TMPowerOn = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPowerOn}");
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+ _TMInSafty = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMInSafty}");
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+ _WaferLeakSensor = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.WaferLeakSensor}");
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+ _EFEMSideDoorClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EFEMSideDoorClosed}");
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+ _TMPCWFlowSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPCWFlowSwitch}");
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+ _TMLidClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMLidClosed}");
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+
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+ _CDAPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.CDAPressureSwitch}");
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+ _VaccumPressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.VaccumPressureSwitch}");
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+ _N2PressureSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.N2PressureSwitch}");
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+
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+ _presureCtrl = DEVICE.GetDevice<IoTMPressureCtrl>($"TM.{VenusDevice.TMPressureCtrl}");
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+
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+ }
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+
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+ public override void Monitor()
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+ {
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+ }
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+
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+
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}
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}
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