| .. |
|
EventDefine.cs
|
a5245356d0
source files
|
пре 2 година |
|
Fdc.cs
|
d33079596b
1.优化新版跑片动画
|
пре 11 месеци |
|
GasBoxLeakCheckRoutine.cs
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
пре 1 година |
|
GasFlowRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
пре 1 година |
|
LLPickRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
LLPlaceRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
LoadLockLeakCheckRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
LoadLockPumpRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
LoadLockPurgeRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
LoadLockVentRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
пре 11 месеци |
|
PMEntity.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
пре 11 месеци |
|
PMGasVerificationRoutine.cs
|
6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
|
пре 1 година |
|
PMGaslinePurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
пре 1 година |
|
PMHeatRoutine.cs
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
пре 1 година |
|
PMHomeRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
пре 1 година |
|
PMLeakCheckRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
пре 1 година |
|
PMPartialPressureRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
пре 1 година |
|
PMProcessRoutine.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
пре 11 месеци |
|
PMProcess_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
пре 1 година |
|
PMPurgeRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
пре 1 година |
|
PMRoutineBase.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
пре 1 година |
|
PMVATPerformanceRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
пре 1 година |
|
Process.cs
|
3cad102221
更新 RT
|
пре 2 година |
|
ProcessDefine.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
пре 11 месеци |
|
PumpDownRoutine.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
пре 11 месеци |
|
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
пре 1 година |
|
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
пре 1 година |
|
StartTurboPumpRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
пре 1 година |
|
VentRoutine.cs
|
d33079596b
1.优化新版跑片动画
|
пре 11 месеци |
|
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
пре 1 година |
|
VenusSequenceFileContext.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
пре 11 месеци |
|
VenusVentRoutine.cs
|
0a2d5ac547
Venus DE TM simulator add
|
пре 11 месеци |
|
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
пре 2 година |
|
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
пре 2 година |
hecl