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@@ -0,0 +1,208 @@
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+<?xml version='1.0'?>
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+<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
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+ <Dig_In>
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+ <DI_ITEM Index="0" Name="DI_Smif1_Ready_to_load" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
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+ <DI_ITEM Index="1" Name="DI_Smif1_Ready_to_unload" Device="" Addr="w0.01" Note="System CDA Pressure ok" />
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+ <DI_ITEM Index="2" Name="DI_Smif2_Ready_to_load" Device="" Addr="w0.02" Note="System CDA Pressure ok" />
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+ <DI_ITEM Index="3" Name="DI_Smif2_Ready_to_unload" Device="" Addr="w0.03" Note="System CDA Pressure ok" />
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+ <DI_ITEM Index="4" Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.04" Note="PMA SLIT DOOR OPEN ENABLE" />
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+ <DI_ITEM Index="5" Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.05" Note="PMB SLIT DOOR OPEN ENABLE" />
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+ <DI_ITEM Index="6" Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.06" Note="PMC SLIT DOOR OPEN ENABLE" />
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+ <DI_ITEM Index="7" Name="DI_ROBOT_TO_VCEA_RETRACT" Device="" Addr="w0.07" Note="ROBOT_TO_VCEA_RETRACT" />
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+ <DI_ITEM Index="8" Name="DI_ROBOT_TO_VCEB_RETRACT" Device="" Addr="w0.08" Note="ROBOT_TO_VCEB_RETRACT" />
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+ <DI_ITEM Index="9" Name="DI_ROBOT_TO_PMA_RETRACT" Device="" Addr="w0.09" Note="ROBOT_TO_PMA_RETRACT" />
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+ <DI_ITEM Index="10" Name="DI_ROBOT_TO_PMB_RETRACT" Device="" Addr="w0.10" Note="ROBOT_TO_PMB_RETRACT" />
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+ <DI_ITEM Index="11" Name="DI_ROBOT_TO_PMC_RETRACT" Device="" Addr="w0.11" Note="ROBOT_TO_PMC_RETRACT" />
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+ <DI_ITEM Index="12" Name="DI_ROBOT_TO_PMD_RETRACT" Device="" Addr="w0.12" Note="ROBOT_TO_PMD_RETRACT" />
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+ <DI_ITEM Index="13" Name="DI_VCEA_Wafer_Sensor" Device="" Addr="w0.13" Note="VCEA Wafer Sensor" />
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+ <DI_ITEM Index="14" Name="DI_VCEB_Wafer_Sensor" Device="" Addr="w0.14" Note="VCEB Wafer Sensor" />
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+ <DI_ITEM Index="15" Name="DI_PMA_Wafer_Sensor" Device="" Addr="w0.15" Note="PMA Wafer Sensor" />
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+ <DI_ITEM Index="16" Name="DI_PMB_Wafer_Sensor" Device="" Addr="w1.00" Note="PMB Wafer Sensor" />
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+ <DI_ITEM Index="17" Name="DI_PMC_Wafer_Sensor" Device="" Addr="w1.01" Note="PMC Wafer Sensor" />
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+ <DI_ITEM Index="18" Name="DI_PMD_Wafer_Sensor" Device="" Addr="w1.02" Note="PMD Wafer Sensor" />
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+ <DI_ITEM Index="19" Name="DI_VCEA_SlitDoor_Open_POS" Device="" Addr="w1.03" Note="VCEA SlitDoor Open POS" />
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+ <DI_ITEM Index="20" Name="DI_VCEA_SlitDoor_Close_POS" Device="" Addr="w1.04" Note="VCEA SlitDoor Close POS" />
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+ <DI_ITEM Index="21" Name="DI_VCEB_SlitDoor_Open_POS" Device="" Addr="w1.05" Note="VCEB SlitDoor Open POS" />
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+ <DI_ITEM Index="22" Name="DI_VCEB_SlitDoor_Close_POS" Device="" Addr="w1.06" Note="VCEB SlitDoor Close POS" />
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+ <DI_ITEM Index="23" Name="DI_PMA_SlitDoor_Open_POS" Device="" Addr="w1.07" Note="PMA SlitDoor Open POS" />
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+ <DI_ITEM Index="24" Name="DI_PMA_SlitDoor_Close_POS" Device="" Addr="w1.08" Note="PMA SlitDoor Close POS" />
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+ <DI_ITEM Index="25" Name="DI_PMB_SlitDoor_Open_POS" Device="" Addr="w1.09" Note="PMB SlitDoor Open POS" />
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+ <DI_ITEM Index="26" Name="DI_PMB_SlitDoor_Close_POS" Device="" Addr="w1.10" Note="PMB SlitDoor Close POS" />
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+ <DI_ITEM Index="27" Name="DI_PMC_SlitDoor_Open_POS" Device="" Addr="w1.11" Note="PMC SlitDoor Open POS" />
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+ <DI_ITEM Index="28" Name="DI_PMC_SlitDoor_Close_POS" Device="" Addr="w1.12" Note="PMC SlitDoor Close POS" />
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+ <DI_ITEM Index="29" Name="DI_TM_N2_1_SW" Device="" Addr="w1.13" Note="TM N2 1 SW" />
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+ <DI_ITEM Index="30" Name="DI_TM_N2_2_SW" Device="" Addr="w1.14" Note="TM_N2 2 SW" />
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+ <DI_ITEM Index="31" Name="DI_TM_CDA_SW" Device="" Addr="w1.15" Note="TM CDA SW" />
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+ <DI_ITEM Index="32" Name="DI_TM_He_SW" Device="" Addr="w2.00" Note="TM He SW" />
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+ <DI_ITEM Index="33" Name="DI_LEAK" Device="" Addr="w2.01" Note="LEAK" />
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+ <DI_ITEM Index="34" Name="DI_VCEA_ATM_SW" Device="" Addr="w2.02" Note="VCEA ATM SW" />
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+ <DI_ITEM Index="35" Name="DI_VCEB_ATM_SW" Device="" Addr="w2.03" Note="VCEB ATM SW" />
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+ <DI_ITEM Index="36" Name="DI_TM_ATM_SW" Device="" Addr="w2.04" Note="TM ATM SW" />
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+ <DI_ITEM Index="37" Name="" Device="" Addr="" Note="" />
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+ <DI_ITEM Index="38" Name="" Device="" Addr="" Note="" />
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+ <DI_ITEM Index="39" Name="" Device="" Addr="" Note="" />
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+ <DI_ITEM Index="40" Name="DI_AC_RACK_FAN_OK" Device="" Addr="w2.08" Note="AC RACK FAN OK" />
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+ <DI_ITEM Index="41" Name="DI_AC_RACK_SMOKE_Out1" Device="" Addr="w2.09" Note="AC RACK 烟感out1" />
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+ <DI_ITEM Index="42" Name="DI_AC_RACK_SMOKE_Out2" Device="" Addr="w2.10" Note="AC RACK 烟感out2" />
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+ <DI_ITEM Index="43" Name="DI_FACTORY_SMOKE_Out" Device="" Addr="w2.11" Note="厂房烟感 out" />
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+ <DI_ITEM Index="44" Name="DI_Abnormal_Exhaust_Gas" Device="" Addr="w2.12" Note="尾气处理异常" />
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+ <DI_ITEM Index="45" Name="DI_VCEA_Cassette_Present" Device="" Addr="w2.13" Note="VCEA-cassette present" />
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+ <DI_ITEM Index="46" Name="DI_VCEB_Cassette_Present" Device="" Addr="w2.14" Note="VCEB-cassette present" />
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+ <DI_ITEM Index="47" Name="DI_VCEA_ADR_LOCKED" Device="" Addr="w2.15" Note="VCE-A-ADR-LOCKED" />
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+ <DI_ITEM Index="48" Name="DI_VCEB_ADR_LOCKED" Device="" Addr="w3.00" Note="VCE-B-ADR-LOCKED" />
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+ <DI_ITEM Index="49" Name="DI_TM_LID_Close" Device="" Addr="w3.01" Note="TM-LID-close" />
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+ <DI_ITEM Index="50" Name="DI_LEFT_SMIF_READY" Device="" Addr="w3.02" Note="LEFT-SMIF-READY" />
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+ <DI_ITEM Index="51" Name="DI_RIGHT_SMIF_READY" Device="" Addr="w3.03" Note="RIGHT-SMIF-READY" />
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+ <DI_ITEM Index="52" Name="DI_LEFT_SMIF_POD_INPLACE" Device="" Addr="w3.04" Note="LEFT-SMIF-POD IN PLACE" />
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+ <DI_ITEM Index="53" Name="DI_RIGHT_SMIF_POD_INPLACE" Device="" Addr="w3.05" Note="RIGHT-SMIF-POD IN PLACE" />
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+ <DI_ITEM Index="54" Name="DI_LEFT_SMIF_ERROR" Device="" Addr="w3.06" Note="LEFT-SMIF-ERROR" />
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+ <DI_ITEM Index="55" Name="DI_RIGHT_SMIF_ERROR" Device="" Addr="w3.07" Note="RIGHT-SMIF-ERROR" />
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+ <DI_ITEM Index="56" Name="DI_VCEA_EXTEND_ENABLE" Device="" Addr="w3.08" Note="VCE-A-EXTEND-ENABLE" />
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+ <DI_ITEM Index="57" Name="DI_VCEB_EXTEND_ENABLE" Device="" Addr="w3.09" Note="VCE-B-EXTEND-ENABLE" />
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+ <DI_ITEM Index="58" Name="DI_PMA_EXTEND_ENABLE" Device="" Addr="w3.10" Note="PMA-EXTEND-ENABLE" />
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+ <DI_ITEM Index="59" Name="DI_PMB_EXTEND_ENABLE" Device="" Addr="w3.11" Note="PMB-EXTEND-ENABLE" />
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+ <DI_ITEM Index="60" Name="DI_PMC_EXTEND_ENABLE" Device="" Addr="w3.12" Note="PMC-EXTEND-ENABLE" />
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+ <DI_ITEM Index="61" Name="DI_Safty_Alarm" Device="" Addr="w3.13" Note="Safty-Alarm" />
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+ <DI_ITEM Index="62" Name="DI_TM_Soft_Pump" Device="" Addr="w5.00" Note="TM-Soft-pump" />
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+ <DI_ITEM Index="63" Name="DI_TM_Soft_Vent" Device="" Addr="w5.01" Note="TM-Soft-vent" />
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+
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+ </Dig_In>
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+ <Dig_Out>
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+ <DO_ITEM Index="0" Name="DO_VCEA_SlitDoor_Open" Device="" Addr="w200.00" Note="VCE-A-slit-door-open"/>
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+ <DO_ITEM Index="1" Name="DO_VCEA_SlitDoor_Close" Device="" Addr="w200.01" Note="VCE-A-slit-door-close"/>
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+ <DO_ITEM Index="2" Name="DO_VCEB_SlitDoor_Open" Device="" Addr="w200.02" Note="VCE-B-slit-door-open"/>
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+ <DO_ITEM Index="3" Name="DO_VCEB_SlitDoor_Close" Device="" Addr="w200.03" Note="VCE-B-slit-door-close"/>
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+ <DO_ITEM Index="4" Name="DO_PMA_SlitDoor_Open" Device="" Addr="w200.04" Note="PMA-slit-door-open"/>
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+ <DO_ITEM Index="5" Name="DO_PMA_SlitDoor_Close" Device="" Addr="w200.05" Note="PMA-slit-door-close"/>
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+ <DO_ITEM Index="6" Name="DO_PMB_SlitDoor_Open" Device="" Addr="w200.06" Note="PMB-slit-door-open"/>
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+ <DO_ITEM Index="7" Name="DO_PMB_SlitDoor_Close" Device="" Addr="w200.07" Note="PMB-slit-door-close"/>
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+ <DO_ITEM Index="8" Name="DO_PMC_SlitDoor_Open" Device="" Addr="w200.08" Note="PMC-slit-door-open"/>
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+ <DO_ITEM Index="9" Name="DO_PMC_SlitDoor_Close" Device="" Addr="w200.09" Note="PMC-slit-door-close"/>
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+ <DO_ITEM Index="10" Name="DO_TM_Fast_Pump" Device="" Addr="w200.10" Note="TM-Fast-Pump"/>
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+ <DO_ITEM Index="11" Name="DO_TM_Soft_Pump" Device="" Addr="w200.11" Note="TM-Soft-Pump"/>
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+ <DO_ITEM Index="12" Name="DO_TM_Fast_Vent" Device="" Addr="w200.12" Note="TM-Fast-Vent"/>
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+ <DO_ITEM Index="13" Name="DO_TM_Soft_Vent" Device="" Addr="w200.13" Note="TM-Soft-Vent"/>
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+ <DO_ITEM Index="14" Name="DO_VCEA_Fast_Pump" Device="" Addr="w200.14" Note="VCE-A-Fast-Pump"/>
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+ <DO_ITEM Index="15" Name="DO_VCEA_Soft_Pump" Device="" Addr="w200.15" Note="VCE-A-Soft-Pump"/>
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+ <DO_ITEM Index="16" Name="DO_VCEB_Fast_Pump" Device="" Addr="w201.00" Note="VCE-B-Fast-Pump"/>
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+ <DO_ITEM Index="17" Name="DO_VCEB_Soft_Pump" Device="" Addr="w201.01" Note="VCE-B-Soft-Pump"/>
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+ <DO_ITEM Index="18" Name="DO_VCEA_Fast_Vent" Device="" Addr="w201.02" Note="VCE-A-Fast-Vent"/>
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+ <DO_ITEM Index="19" Name="DO_VCEA_Soft_Vent" Device="" Addr="w201.03" Note="VCE-A-Soft-Vent"/>
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+ <DO_ITEM Index="20" Name="DO_VCEB_Fast_Vent" Device="" Addr="w201.04" Note="VCE-B-Fast-Vent"/>
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+ <DO_ITEM Index="21" Name="DO_VCEB_Soft_Vent" Device="" Addr="w201.05" Note="VCE-B-Soft-Vent"/>
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+ <DO_ITEM Index="22" Name="DO_Water_Valve_IN" Device="" Addr="w201.06" Note="Water-Valve-IN"/>
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+ <DO_ITEM Index="23" Name="DO_BUZZER1" Device="" Addr="w201.07" Note="BUZZER1"/>
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+ <DO_ITEM Index="24" Name="DO_BUZZER2" Device="" Addr="w201.08" Note="BUZZER2"/>
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+ <DO_ITEM Index="25" Name="DO_RED" Device="" Addr="w201.09" Note="RED"/>
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+ <DO_ITEM Index="26" Name="DO_ORANGE" Device="" Addr="w201.10" Note="ORANGE"/>
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+ <DO_ITEM Index="27" Name="DO_GREEN" Device="" Addr="w201.11" Note="GREEN"/>
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+ <DO_ITEM Index="28" Name="DO_BLUE" Device="" Addr="w201.12" Note="BLUE"/>
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+ <DO_ITEM Index="29" Name="DO_Allow_PowerOff" Device="" Addr="w201.13" Note="系统允许断电"/>
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+ <DO_ITEM Index="30" Name="DO_Smif1_Load_Unload" Device="" Addr="w201.15" Note="1#smif load/unload"/>
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+ <DO_ITEM Index="31" Name="DO_Smif2_Load_Unload" Device="" Addr="w202.00" Note="2#smif load/unload"/>
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+ </Dig_Out>
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+ <Ana_Out>
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+ <AO_ITEM Index="8" Name="AO_MFC_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1016" Note="MFC Flow Setpoint" />
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+ <AO_ITEM Index="9" Name="AO_TM_Pressure_SetPoint" BufferOffset="50" Device="" Addr="d1018" Note="TM Pressure Setpoint" />
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+ <AO_ITEM Index="1" Name="" BufferOffset="" />
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+ <AO_ITEM Index="2" Name="" BufferOffset="" />
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+ <AO_ITEM Index="3" Name="" BufferOffset="" />
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+ <AO_ITEM Index="4" Name="" BufferOffset="" />
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+ <AO_ITEM Index="6" Name="" BufferOffset="" />
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+ <AO_ITEM Index="7" Name="" BufferOffset="" />
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+ <AO_ITEM Index="8" Name="" BufferOffset=""/>
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+ <AO_ITEM Index="9" Name="" BufferOffset="" />
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+ <AO_ITEM Index="10" Name="" BufferOffset="" />
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+ <AO_ITEM Index="11" Name="" BufferOffset="" />
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+ <AO_ITEM Index="12" Name="" BufferOffset="" />
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+ <AO_ITEM Index="13" Name="" BufferOffset="" />
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+ <AO_ITEM Index="14" Name="" BufferOffset="" />
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+ <AO_ITEM Index="15" Name="" BufferOffset="" />
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+ <AO_ITEM Index="16" Name="" BufferOffset="" />
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+ <AO_ITEM Index="17" Name="" BufferOffset="" />
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+ <AO_ITEM Index="18" Name="" BufferOffset="" />
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+ <AO_ITEM Index="19" Name="" BufferOffset="" />
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+ <AO_ITEM Index="20" Name="" BufferOffset="" />
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+ <AO_ITEM Index="21" Name="" />
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+ <AO_ITEM Index="22" Name="" />
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+ <AO_ITEM Index="23" Name="" />
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+ <AO_ITEM Index="24" Name="" />
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+ <AO_ITEM Index="25" Name="" />
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+ <AO_ITEM Index="26" Name="" />
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+ <AO_ITEM Index="27" Name="" />
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+ <AO_ITEM Index="28" Name="" />
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+ <AO_ITEM Index="29" Name="" />
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+ <AO_ITEM Index="30" Name="" />
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+ <AO_ITEM Index="31" Name="" />
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+ <AO_ITEM Index="32" Name="" />
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+ <AO_ITEM Index="33" Name="" />
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+ <AO_ITEM Index="34" Name="" />
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+ <AO_ITEM Index="35" Name="" />
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+ <AO_ITEM Index="36" Name="" />
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+ <AO_ITEM Index="37" Name="" />
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+ <AO_ITEM Index="38" Name="" />
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+ <AO_ITEM Index="39" Name="" />
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+ <AO_ITEM Index="40" Name="" />
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+ <AO_ITEM Index="41" Name="" />
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+ <AO_ITEM Index="42" Name="" />
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+ <AO_ITEM Index="43" Name="" />
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+ <AO_ITEM Index="44" Name="" />
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+ <AO_ITEM Index="45" Name="" />
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+ <AO_ITEM Index="46" Name="" />
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+ <AO_ITEM Index="47" Name="" />
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+ <AO_ITEM Index="48" Name="" />
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+ <AO_ITEM Index="49" Name="" />
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+ </Ana_Out>
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+ <Ana_In>
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+ <AI_ITEM Index="0" Name="AI_Left_VCE_Pressure" BufferOffset="0" Device="" Addr="d2000" />
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+ <AI_ITEM Index="1" Name="AI_Right_VCE_Pressure" BufferOffset="2" Device="" Addr="d2002" />
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+ <AI_ITEM Index="2" Name="AI_TM_Pressure" BufferOffset="4" Device="" Addr="d2004"/>
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+ <AI_ITEM Index="3" Name="AI_MFC_Flow" BufferOffset="6" Device="" Addr="d2006"/>
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+ <AI_ITEM Index="4" Name="AI_VCE_Foreline_Pressure" BufferOffset="8" Device="" Addr="d2008"/>
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+ <AI_ITEM Index="5" Name=""/>
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+ <AI_ITEM Index="6" Name="AI_TM_Foreline_Pressure" BufferOffset="12" Device="" Addr="d2012"/>
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+ <AI_ITEM Index="7" Name=""/>
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+ <AI_ITEM Index="8" Name=""/>
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+ <AI_ITEM Index="9" Name=""/>
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+ <AI_ITEM Index="10" Name="" />
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+ <AI_ITEM Index="11" Name=""/>
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+ <AI_ITEM Index="12" Name=""/>
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+ <AI_ITEM Index="13" Name=""/>
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+ <AI_ITEM Index="14" Name=""/>
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+ <AI_ITEM Index="15" Name=""/>
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+ <AI_ITEM Index="16" Name=""/>
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+ <AI_ITEM Index="17" Name=""/>
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+ <AI_ITEM Index="18" Name=""/>
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+ <AI_ITEM Index="19" Name=""/>
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+ <AI_ITEM Index="20" Name=""/>
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+ <AI_ITEM Index="21" Name="" />
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+ <AI_ITEM Index="22" Name=""/>
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+ <AI_ITEM Index="23" Name=""/>
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+ <AI_ITEM Index="24" Name=""/>
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+ <AI_ITEM Index="25" Name=""/>
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+ <AI_ITEM Index="26" Name="" />
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+ <AI_ITEM Index="27" Name="" />
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+ <AI_ITEM Index="28" Name="" />
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+ <AI_ITEM Index="29" Name="" />
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+ <AI_ITEM Index="30" Name="" />
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+ <AI_ITEM Index="31" Name="" />
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+ <AI_ITEM Index="32" Name="" />
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+ <AI_ITEM Index="33" Name="" />
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+ <AI_ITEM Index="34" Name="" />
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+ <AI_ITEM Index="35" Name="" />
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+ <AI_ITEM Index="36" Name="" />
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+ <AI_ITEM Index="37" Name="" />
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+ <AI_ITEM Index="38" Name="" />
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+ <AI_ITEM Index="39" Name="" />
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+ <AI_ITEM Index="40" Name="" />
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+ <AI_ITEM Index="41" Name="" />
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+ <AI_ITEM Index="42" Name="" />
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+ <AI_ITEM Index="43" Name="" />
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+ <AI_ITEM Index="44" Name="" />
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+ <AI_ITEM Index="45" Name="" />
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+ <AI_ITEM Index="46" Name="" />
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+ <AI_ITEM Index="47" Name="" />
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+ <AI_ITEM Index="48" Name="" />
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+ <AI_ITEM Index="49" Name="" />
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+ </Ana_In>
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+</IO_DEFINE>
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