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EventDefine.cs
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a5245356d0
source files
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2 anni fa |
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Fdc.cs
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d33079596b
1.优化新版跑片动画
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11 mesi fa |
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GasBoxLeakCheckRoutine.cs
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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1 anno fa |
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GasFlowRoutine.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 anno fa |
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LLPickRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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LLPlaceRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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LoadLockLeakCheckRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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LoadLockPumpRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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LoadLockPurgeRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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LoadLockVentRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 mesi fa |
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PMEntity.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 mesi fa |
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PMGasVerificationRoutine.cs
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6dc3e20037
添加Mfc calibration 流气后，等待钟摆阀完全关闭的step
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1 anno fa |
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PMGaslinePurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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PMHeatRoutine.cs
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 anno fa |
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PMHomeRoutine.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 anno fa |
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PMLeakCheckRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 anno fa |
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PMPartialPressureRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 anno fa |
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PMProcessRoutine.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 mesi fa |
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PMProcess_FA.cs
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774c804aa9
fixed pm event occurs carrierid is null
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1 anno fa |
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PMPurgeRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 anno fa |
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PMRoutineBase.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 anno fa |
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PMVATPerformanceRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 anno fa |
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Process.cs
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3cad102221
更新 RT
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2 anni fa |
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ProcessDefine.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 mesi fa |
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PumpDownRoutine.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 mesi fa |
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RFPowerSwitchRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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StartDryPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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StartTurboPumpRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 anno fa |
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VentRoutine.cs
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d33079596b
1.优化新版跑片动画
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11 mesi fa |
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VenusRecipeFileContext.cs
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7d93bf0076
Job Clean function, not finished.
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1 anno fa |
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VenusSequenceFileContext.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 mesi fa |
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VenusVentRoutine.cs
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0a2d5ac547
Venus DE TM simulator add
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11 mesi fa |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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2 anni fa |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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2 anni fa |
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