|
@@ -21,6 +21,7 @@ namespace Venus_RT.Modules.PMs
|
|
|
kPrepareValves,
|
|
|
kPumpDown_1,
|
|
|
kGasFlow,
|
|
|
+ kWaitPendulumFullClose,
|
|
|
KDelay_2S,
|
|
|
KGetBeginPressure,
|
|
|
kDelay_1,
|
|
@@ -161,15 +162,16 @@ namespace Venus_RT.Modules.PMs
|
|
|
}
|
|
|
public RState Monitor()
|
|
|
{
|
|
|
- Runner.Run(GasStep.kPrepareValves, PrepareValve, _delay_50ms)
|
|
|
- .LoopStart(GasStep.kPumpDown_1, $"{_mfcDevice.Name} Gas Verification", _paramFlowSet.Count, PumpingDown, WaitPumpDone)
|
|
|
- .LoopRun(GasStep.kGasFlow, FlowGas, CheckGasStable)
|
|
|
- .LoopDelay(GasStep.KDelay_2S, 2 * 1000)
|
|
|
- .LoopRun(GasStep.KGetBeginPressure, GetBeginPressure, JudgePressure, (_holdTime + 10) * 1000)
|
|
|
- //.LoopDelay(GasStep.kDelay_1, _holdTime * 1000)
|
|
|
- .LoopRun(GasStep.kGasVerification, CalcMfcCalibration, _delay_2s)
|
|
|
- .LoopEnd(GasStep.kStopGasFlow, StopGasFlow, IsPumpDownOK)
|
|
|
- .End(GasStep.kEnd, NullFun, _delay_2s);
|
|
|
+ Runner.Run(GasStep.kPrepareValves, PrepareValve, _delay_50ms)
|
|
|
+ .LoopStart(GasStep.kPumpDown_1, $"{_mfcDevice.Name} Gas Verification", _paramFlowSet.Count, PumpingDown, WaitPumpDone)
|
|
|
+ .LoopRun(GasStep.kGasFlow, FlowGas, CheckGasStable)
|
|
|
+ .Wait(GasStep.kWaitPendulumFullClose, WaitPendulumFullClose)
|
|
|
+ .LoopDelay(GasStep.KDelay_2S, 2 * 1000)
|
|
|
+ .LoopRun(GasStep.KGetBeginPressure, GetBeginPressure, JudgePressure, (_holdTime + 10) * 1000)
|
|
|
+ //.LoopDelay(GasStep.kDelay_1, _holdTime * 1000)
|
|
|
+ .LoopRun(GasStep.kGasVerification, CalcMfcCalibration, _delay_2s)
|
|
|
+ .LoopEnd(GasStep.kStopGasFlow, StopGasFlow, IsPumpDownOK)
|
|
|
+ .End(GasStep.kEnd, NullFun, _delay_2s);
|
|
|
|
|
|
return Runner.Status;
|
|
|
}
|
|
@@ -261,7 +263,10 @@ namespace Venus_RT.Modules.PMs
|
|
|
|
|
|
return true;
|
|
|
}
|
|
|
-
|
|
|
+ private bool WaitPendulumFullClose()
|
|
|
+ {
|
|
|
+ return _chamber.PendulumPosition <= 0;
|
|
|
+ }
|
|
|
private bool CheckGasStable()
|
|
|
{
|
|
|
if (_verificationDeviceTimer.GetElapseTime() > _flowTime * 1000)
|
|
@@ -304,7 +309,7 @@ namespace Venus_RT.Modules.PMs
|
|
|
_beginPressure = _chamber.ChamberPressure;
|
|
|
}
|
|
|
Notify($"Get begin pressure {_beginPressure.ToString("f1")}");
|
|
|
-
|
|
|
+
|
|
|
_verificationDeviceTimer.Start(0);
|
|
|
|
|
|
//Notify($"Check finished one point");
|