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添加Mfc calibration 流气后,等待钟摆阀完全关闭的step

lixiang 11 months ago
parent
commit
6dc3e20037

+ 16 - 11
Venus/Venus_RT/Modules/PMs/PMGasVerificationRoutine.cs

@@ -21,6 +21,7 @@ namespace Venus_RT.Modules.PMs
             kPrepareValves,
             kPumpDown_1,
             kGasFlow,
+            kWaitPendulumFullClose,
             KDelay_2S,
             KGetBeginPressure,
             kDelay_1,
@@ -161,15 +162,16 @@ namespace Venus_RT.Modules.PMs
         }
         public RState Monitor()
         {
-          Runner.Run(GasStep.kPrepareValves,        PrepareValve,   _delay_50ms)
-                .LoopStart(GasStep.kPumpDown_1,     $"{_mfcDevice.Name} Gas Verification",  _paramFlowSet.Count, PumpingDown, WaitPumpDone)
-                .LoopRun(GasStep.kGasFlow,          FlowGas, CheckGasStable)
-                .LoopDelay(GasStep.KDelay_2S,       2 * 1000)
-                .LoopRun(GasStep.KGetBeginPressure, GetBeginPressure,                       JudgePressure, (_holdTime + 10) * 1000)
-                //.LoopDelay(GasStep.kDelay_1,            _holdTime * 1000)
-                .LoopRun(GasStep.kGasVerification, CalcMfcCalibration, _delay_2s)
-                .LoopEnd(GasStep.kStopGasFlow,     StopGasFlow, IsPumpDownOK)
-                .End(GasStep.kEnd,                 NullFun,     _delay_2s);
+            Runner.Run(GasStep.kPrepareValves, PrepareValve, _delay_50ms)
+                  .LoopStart(GasStep.kPumpDown_1, $"{_mfcDevice.Name} Gas Verification", _paramFlowSet.Count, PumpingDown, WaitPumpDone)
+                  .LoopRun(GasStep.kGasFlow, FlowGas, CheckGasStable)
+                  .Wait(GasStep.kWaitPendulumFullClose, WaitPendulumFullClose)
+                  .LoopDelay(GasStep.KDelay_2S, 2 * 1000)
+                  .LoopRun(GasStep.KGetBeginPressure, GetBeginPressure, JudgePressure, (_holdTime + 10) * 1000)
+                  //.LoopDelay(GasStep.kDelay_1,            _holdTime * 1000)
+                  .LoopRun(GasStep.kGasVerification, CalcMfcCalibration, _delay_2s)
+                  .LoopEnd(GasStep.kStopGasFlow, StopGasFlow, IsPumpDownOK)
+                  .End(GasStep.kEnd, NullFun, _delay_2s);
 
             return Runner.Status;
         }
@@ -261,7 +263,10 @@ namespace Venus_RT.Modules.PMs
 
             return true;
         }
-
+        private bool WaitPendulumFullClose()
+        {
+            return _chamber.PendulumPosition <= 0;
+        }
         private bool CheckGasStable()
         {
             if (_verificationDeviceTimer.GetElapseTime() > _flowTime * 1000)
@@ -304,7 +309,7 @@ namespace Venus_RT.Modules.PMs
                 _beginPressure = _chamber.ChamberPressure;
             }
             Notify($"Get begin pressure {_beginPressure.ToString("f1")}");
-           
+
             _verificationDeviceTimer.Start(0);
 
             //Notify($"Check finished one point");

+ 14 - 0
Venus/Venus_Themes/Venus_Themes.csproj

@@ -178,6 +178,9 @@
     <Compile Include="UserControls\FOUPFrontView.xaml.cs">
       <DependentUpon>FOUPFrontView.xaml</DependentUpon>
     </Compile>
+    <Compile Include="UserControls\GuangChuanRobot.xaml.cs">
+      <DependentUpon>GuangChuanRobot.xaml</DependentUpon>
+    </Compile>
     <Compile Include="UserControls\LoadLockLeft.xaml.cs">
       <DependentUpon>LoadLockLeft.xaml</DependentUpon>
     </Compile>
@@ -262,6 +265,9 @@
     <Compile Include="UserControls\WPFMessageBox.xaml.cs">
       <DependentUpon>WPFMessageBox.xaml</DependentUpon>
     </Compile>
+    <Compile Include="UserControls\XinSongRobot.xaml.cs">
+      <DependentUpon>XinSongRobot.xaml</DependentUpon>
+    </Compile>
     <Compile Include="UserControls\ZhenValve.xaml.cs">
       <DependentUpon>ZhenValve.xaml</DependentUpon>
     </Compile>
@@ -415,6 +421,10 @@
       <Generator>MSBuild:Compile</Generator>
       <SubType>Designer</SubType>
     </Page>
+    <Page Include="UserControls\GuangChuanRobot.xaml">
+      <Generator>MSBuild:Compile</Generator>
+      <SubType>Designer</SubType>
+    </Page>
     <Page Include="UserControls\LoadLockLeft.xaml">
       <SubType>Designer</SubType>
       <Generator>MSBuild:Compile</Generator>
@@ -527,6 +537,10 @@
       <Generator>MSBuild:Compile</Generator>
       <SubType>Designer</SubType>
     </Page>
+    <Page Include="UserControls\XinSongRobot.xaml">
+      <Generator>MSBuild:Compile</Generator>
+      <SubType>Designer</SubType>
+    </Page>
     <Page Include="UserControls\ZhenValve.xaml">
       <SubType>Designer</SubType>
       <Generator>MSBuild:Compile</Generator>