 lixiang
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
5 months ago |
|
lixiang
|
54c8557dd6
调度优化
|
6 months ago |
|
lixiang
|
1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
|
8 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
8 months ago |
 zhouhr
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
 sangwq
|
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
|
11 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
11 months ago |
|
sangwq
|
0af5bc1e75
throughput enhancement.
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
sangwq
|
746ece5800
restore System.Name configure item
|
1 year ago |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 year ago |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 year ago |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 year ago |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
|
1 year ago |
|
lixiang
|
9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
|
1 year ago |
|
lixiang
|
f09d7d1b15
分开所有系列配置文件
|
1 year ago |
