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@@ -27,6 +27,7 @@ using Venus_Unity;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
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using System.Linq.Expressions;
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using Aitex.Core.UI.Control;
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+using SecsGem.Core.ItemModel;
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namespace Venus_RT.Modules
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{
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@@ -91,11 +92,12 @@ namespace Venus_RT.Modules
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private DateTime _scheduledTime;
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+ public ModuleName DestinationPM { get; set; }
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public WaferTask(ModuleName source, int srcSlot, ModuleName dest, int dstSlot, float temp, Guid waferID, Guid lotID, string recipeName, string wtwClean, SequenceLLInOutPath inOutPath, int LLDelay, bool needAlign)
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{
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sourceMod = currentMod = nextMod = routedMod = source;
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sourceSlot = currentSlot = nextSlot = routedSlot = srcSlot;
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-
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+ DestinationPM = dest;
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destMod = dest;
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destSlot = dstSlot;
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hand = Hand.None;
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@@ -593,6 +595,7 @@ namespace Venus_RT.Modules
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public void InvokePreJobClean(string preJobClean)
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{
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+
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_preJobCleanRecipe = preJobClean;
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_pendingCleanTask.Enqueue(CleanType.PreJobClean);
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//LOG.Write(eEvent.INFO_TROUGHPUT_ENHANCE_TRACE, Module, $"Invoke preClean {preJobClean}");
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@@ -947,6 +950,9 @@ namespace Venus_RT.Modules
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public List<string> LP1InUseRecipes = new List<string>();
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public List<string> LP2InUseRecipes = new List<string>();
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public List<string> LP3InUseRecipes = new List<string>();
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+
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+ private Dictionary<ModuleName, DateTime> _pmLastWaferEndTime = new Dictionary<ModuleName, DateTime>();
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+ private int _preCleanMaxIdleTime = 60;
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#region public interface
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public SystemDispatcher()
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{
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@@ -984,6 +990,15 @@ namespace Venus_RT.Modules
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{
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LOG.ModuleErrorInterrupt += (modulename, id) => ModuleErrorInterrupt(modulename, id);
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}
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+
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+ ModuleHelper.InstalledModules.ForEach(x =>
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+ {
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+ if (ModuleHelper.IsPm(x))
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+ {
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+ _pmLastWaferEndTime.Add(x, DateTime.Now.AddDays(-1));
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+ }
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+ });
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+
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}
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private void ModuleErrorInterrupt(ModuleName pmname, eEvent eEventid)
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{
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@@ -993,7 +1008,7 @@ namespace Venus_RT.Modules
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x.Sequence.PMs.ForEach(m => modules.Add(m));
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});
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if (modules.Contains(pmname) && (eEventid == eEvent.ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS || eEventid == eEvent.ERR_PM_SCRUBBER_NOOK_STOPPROCESS))
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- {
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+ {
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Singleton<RouteManager>.Instance.InvokeAbort(new object[] { ModuleName.System });
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LOG.Write(eEvent.ERR_PM_SCRUBBER_NOOK_STOPTRANSFER, ModuleName.System, $"{pmname} Scrubber Alarm ,Tranfer Stop");
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}
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@@ -1027,7 +1042,7 @@ namespace Venus_RT.Modules
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_tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
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_LLSlotInOutOption = (LLSlotInOutOpt)SC.GetValue<int>("System.LoadlockSlotInOutOption");
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_specialRoutingPattern = (SpecialRoutingPattern)SC.GetValue<int>("System.SpecialRoutingPattern");
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-
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+ _preCleanMaxIdleTime = SC.GetValue<int>("System.Job.PreCleanIdleMaxTime");
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// rounding TM robot single arm option
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if (_tmRobotSingleArmOption > 2 && _LLSlotInOutOption == LLSlotInOutOpt.AllInAllOut)
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{
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@@ -1062,7 +1077,7 @@ namespace Venus_RT.Modules
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RoutingVacWafers();
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epilogue();
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-
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+
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return _cycleState;
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}
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@@ -1075,6 +1090,26 @@ namespace Venus_RT.Modules
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reason = "";
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string[] slotSequence = (string[])param["SlotSequence"];
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+ string[] slotWaferId = new string[slotSequence.Length];
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+ if (param.Keys.Contains("WaferId"))
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+ {
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+ slotWaferId = (string[])param["WaferId"];
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+ }
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+ else
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+ {
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+ for (int i = 0; i < slotWaferId.Length; i++)
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+ {
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+ slotWaferId[i] = "";
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+ }
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+ }
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+
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+ string lotType = "";
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+ if (param.Keys.Contains("LotType"))
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+ {
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+ lotType = (string)param["LotType"];
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+ }
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+
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+
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string module = (string)param["Module"];
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string jobId = (string)param["JobId"];
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@@ -1188,6 +1223,8 @@ namespace Venus_RT.Modules
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WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
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cj.LotWafers.Add(waferInfo);
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waferInfo.SequenceName = slotSequence[i];
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+ waferInfo.EAPWaferID = slotWaferId[i];
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+ waferInfo.LotType = lotType;
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waferInfo.LotId = lotId;
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//--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
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@@ -1580,26 +1617,26 @@ namespace Venus_RT.Modules
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ModuleName SourceModule = (ModuleName)objs[0];
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int SourceSlot = (int)objs[1];
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- if (!_dictModuleTask.Keys.Contains(SourceModule))
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- {
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- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
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- return false;
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- }
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+ //if (!_dictModuleTask.Keys.Contains(SourceModule))
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+ //{
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+ // LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
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+ // return false;
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+ //}
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- if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
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- {
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- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
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- return false;
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- }
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+ //if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
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+ //{
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+ // LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
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+ // return false;
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+ //}
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- if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
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- {
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- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
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- return false;
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- }
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+ //if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
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+ //{
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+ // LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
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+ // return false;
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+ //}
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var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
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- LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
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+ //LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
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_qeReturnWafers.Enqueue(wafer);
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return true;
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@@ -1609,17 +1646,17 @@ namespace Venus_RT.Modules
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{
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var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
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var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
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- if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
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- {
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- LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
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- return RState.Failed;
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- }
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+ //if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
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+ //{
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+ // LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
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+ // return RState.Failed;
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+ //}
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- if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
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- {
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- LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
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- return RState.Failed;
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- }
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+ //if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
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+ //{
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+ // LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
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+ // return RState.Failed;
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+ //}
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foreach (var mod in _dictModuleTask)
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{
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@@ -1629,11 +1666,11 @@ namespace Venus_RT.Modules
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if (!mod.Value.Scheduler.IsInclude)
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continue;
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- if (!mod.Value.Scheduler.IsIdle)
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- {
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- LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
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- return RState.Failed;
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- }
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+ //if (!mod.Value.Scheduler.IsIdle)
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+ //{
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+ // LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
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+ // return RState.Failed;
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+ //}
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int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
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for (int slot = 0; slot < nSlotNumber; slot++)
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@@ -1643,18 +1680,19 @@ namespace Venus_RT.Modules
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continue;
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var destLP = (ModuleName)wafer.OriginStation;
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- if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
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- {
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- LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
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- return RState.Failed;
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- }
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+ //if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
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+ //{
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+ // LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
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+ // return RState.Failed;
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+ //}
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- if (!ModuleHelper.IsLoadPort(destLP))
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- {
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- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
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- return RState.Failed;
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- }
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+ //if (!ModuleHelper.IsLoadPort(destLP))
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+ //{
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+ // LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
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+ // return RState.Failed;
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+ //}
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}
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+
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}
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Clear();
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@@ -1696,6 +1734,7 @@ namespace Venus_RT.Modules
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if (systemWaferCount == 0)
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return RState.End;
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+
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if (_qeWaitCoolingLLs.Count > 0 && _dictModuleTask[_qeWaitCoolingLLs.First()].Scheduler.IsIdle && !IsLLReservedByEFEM(_qeWaitCoolingLLs.First()) && !IsLLReservedByTM(_qeWaitCoolingLLs.First()))
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{
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if ((_dictModuleTask[_qeWaitCoolingLLs.First()] as LoadlockTask).Cooling())
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@@ -1770,6 +1809,17 @@ namespace Venus_RT.Modules
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RunLotCleanTasks();
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CreateNewWaferTask();
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+
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+ //var endWaferTask = _lstWaferTasks.Where(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
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+ //if (endWaferTask.Count() > 0)
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+ //{
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+ // foreach (var waferTask in endWaferTask)
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+ // {
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+ // var pj = _lstProcessJobs.Find(process => process.InnerId == waferTask.lotId);
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+ // //_pmLastWaferEndTime[waferTask.DestinationPM] = DateTime.Now;
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+ // }
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+ //}
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+
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_lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
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ReDispatchBlockingWafers();
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@@ -2242,6 +2292,10 @@ namespace Venus_RT.Modules
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private void WaferLeaved(WaferTask wafer, MoveItem item)
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{
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_dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
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+ if (ModuleHelper.IsPm(item.SourceModule))
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+ {
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+ _pmLastWaferEndTime[item.SourceModule] = DateTime.Now;
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+ }
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//--2024-03-21 增加了PortJobWaferStart 上报事件 start--
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if (ModuleHelper.IsLoadPort(item.SourceModule))
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@@ -3199,7 +3253,6 @@ namespace Venus_RT.Modules
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hands.Add((Hand)i);
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}
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}
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-
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return hands;
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}
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@@ -3527,7 +3580,7 @@ namespace Venus_RT.Modules
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var inLLWafers = _lstWaferTasks.FindAll(wt => wt.currentMod == inLL).ToList();
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int pickCount = 0;
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- foreach(var inWafer in inLLWafers)
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+ foreach (var inWafer in inLLWafers)
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{
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if (!_dictModuleTask[inWafer.destMod].HasWafer && _dictModuleTask[inWafer.destMod].TimeToReady < 20 && pickCount < freeHands.Count)
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{
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@@ -3537,21 +3590,21 @@ namespace Venus_RT.Modules
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}
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}
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- if(pickCount == 2)
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+ if (pickCount == 2)
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{
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_tmSchdActions.Enqueue(pickActions);
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- foreach(var ac in placeActions)
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+ foreach (var ac in placeActions)
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{
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_tmSchdActions.Enqueue(new List<MoveItem> { ac });
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}
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}
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- else if(pickCount == 1)
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+ else if (pickCount == 1)
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{
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- if(inLLWafers.Count == 2 && freeHands.Count == 2)
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+ if (inLLWafers.Count == 2 && freeHands.Count == 2)
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{
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var peerSlot = 1 - pickActions.First().SourceSlot;
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var peerWafer = inLLWafers.Find(wt => wt.currentSlot == peerSlot);
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- if(peerWafer != null && _dictModuleTask[peerWafer.destMod].TimeToReady < 60)
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+ if (peerWafer != null && _dictModuleTask[peerWafer.destMod].TimeToReady < 60)
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{
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pickActions.Add(new MoveItem(peerWafer.currentMod, peerWafer.currentSlot, ModuleName.TMRobot, (int)freeHands[pickCount], freeHands[pickCount]));
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}
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@@ -4146,7 +4199,7 @@ namespace Venus_RT.Modules
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destLL = readyPushInLLs.Last().Key;
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}
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- var pickHand = SelectTMPickArm(destLL);
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+ var pickHand = SelectTMPickArm(destLL);
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var llWafers = _lstWaferTasks.Where(x => x.currentMod == destLL).ToList();
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if (llWafers.Count() == 0)
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{
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@@ -4154,11 +4207,11 @@ namespace Venus_RT.Modules
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}
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for (int i = 0; i < llWafers.Count(); i++)
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{
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- if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod) && llWafers[i].destMod==x.currentMod)==0)
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+ if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod) && llWafers[i].destMod == x.currentMod) == 0)
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{
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_tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(destLL, GetLLFixedReadyInOutSlots(destLL).tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand) });
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}
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- }
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+ }
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//if (_lstWaferTasks.Count(x => ModuleHelper.IsPm(x.currentMod)) == 0)
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//{
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//_tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(destLL, GetLLFixedReadyInOutSlots(destLL).tOutSlot.First(), ModuleName.TMRobot, (int)pickHand, pickHand) });
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@@ -4705,7 +4758,7 @@ namespace Venus_RT.Modules
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schdPumpingLLs.Add(ModuleName.LLA);
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}
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else if ((llaWaferStatus.outSlot.Count == _LLASlotNumber) ||
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- (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber && !NeedPairingForNexWafer()))
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+ (llaWaferStatus.outSlot.Count > 0 && llaWaferStatus.outSlot.Count < _LLASlotNumber))
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{
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if (!schdVentingLLs.Contains(ModuleName.LLA))
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schdCoolingLLs.Add(ModuleName.LLA);
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@@ -4718,7 +4771,7 @@ namespace Venus_RT.Modules
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schdPumpingLLs.Add(ModuleName.LLB);
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}
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else if ((llbWaferStatus.outSlot.Count == _LLBSlotNumber) ||
|
|
|
- (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber && !NeedPairingForNexWafer()))
|
|
|
+ (llbWaferStatus.outSlot.Count > 0 && llbWaferStatus.outSlot.Count < _LLBSlotNumber))
|
|
|
{
|
|
|
if (!schdVentingLLs.Contains(ModuleName.LLB))
|
|
|
schdCoolingLLs.Add(ModuleName.LLB);
|
|
|
@@ -4781,7 +4834,10 @@ namespace Venus_RT.Modules
|
|
|
var preClean = pj.Sequence.GetPreCleanRecipe(pm.Key);
|
|
|
if (!string.IsNullOrWhiteSpace(preClean))
|
|
|
{
|
|
|
- pmTask.InvokePreJobClean(preClean);
|
|
|
+ if (DateTime.Now.Subtract(_pmLastWaferEndTime[pm.Key]).TotalSeconds > _preCleanMaxIdleTime)
|
|
|
+ {
|
|
|
+ pmTask.InvokePreJobClean(preClean);
|
|
|
+ }
|
|
|
_preLotCleanMarks[pm.Key].Add(waitInWafer.lotId);
|
|
|
}
|
|
|
}
|
|
|
@@ -5011,7 +5067,7 @@ namespace Venus_RT.Modules
|
|
|
return;
|
|
|
|
|
|
var llActions = _curTmAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
|
|
|
- if(llActions != null && !_qeWaitCoolingLLs.Contains(llActions.DestinationModule) && !RouteManager.IsATMMode)
|
|
|
+ if (llActions != null && !_qeWaitCoolingLLs.Contains(llActions.DestinationModule) && !RouteManager.IsATMMode)
|
|
|
{
|
|
|
_qeWaitCoolingLLs.Enqueue(llActions.DestinationModule);
|
|
|
}
|
