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调度优化

lixiang 2 months ago
parent
f92e6abb17
commit
54c8557dd6
16 changed files with 767 additions and 967 deletions
Split View Show Diff Stats
  1. 0 70
      Venus/Venus_RT/Config/DESequenceFormat.xml
  2. 743 0
      Venus/Venus_RT/Config/EquipmentVariables - 复制.xml
  3. BIN
      Venus/Venus_RT/Config/PM/Kepler2300/Kepler2300DeviceModel.xml
  4. 0 68
      Venus/Venus_RT/Config/SESequenceFormat.xml
  5. 2 6
      Venus/Venus_RT/Config/System_Kepler2300.sccfg
  6. 0 4
      Venus/Venus_RT/Config/TM/DETMInterlock.xml
  7. 0 101
      Venus/Venus_RT/Config/TM/DeviceModelVenusDE_MF.xml
  8. BIN
      Venus/Venus_RT/Config/TM/DeviceModelVenusSE_MF.xml
  9. BIN
      Venus/Venus_RT/Config/TM/DeviceModelVenus_MF.xml
  10. 0 85
      Venus/Venus_RT/Config/TM/SETMInterlock.xml
  11. 0 218
      Venus/Venus_RT/Config/TM/_ioDefineVenusDE_MF.xml
  12. 0 185
      Venus/Venus_RT/Config/TM/_ioDefineVenusSETest_MF.xml
  13. 0 187
      Venus/Venus_RT/Config/TM/_ioDefineVenusSE_MF.xml
  14. 12 12
      Venus/Venus_RT/Devices/TM/JetTM.cs
  15. 3 3
      Venus/Venus_RT/Modules/SystemDispatcher.cs
  16. 7 28
      Venus/Venus_RT/Venus_RT.csproj

+ 0 - 70
Venus/Venus_RT/Config/DESequenceFormat.xml
View File 

@@ -1,70 +0,0 @@
 
-<?xml version="1.0" encoding="utf-8" ?>
 
-<Aitex>
 
-	<TableSequenceFormat RecipeVersion="Cluster">
 
-		<Catalog Type="Position">
 
-			<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
 
-				<Selection Name="Aligner" DisplayName="PreAligner" Parameter="AlignerSelection,AlignAngle" />
 
-				<Selection Name="PM" DisplayName="PM" Parameter="PMSelection,PMARecipe,PMBRecipe,PMCRecipe,PMDRecipe,WTWClean" />
 
-			</Item>
 
-		</Catalog>
 
-
 
-		<Catalog Type="Parameter">
 
-
 
-
 
-			<Item Name="AlignerSelection" DisplayName="Aligner Selection" InputType="MultiSelection" >
 
-				<Selection Name="Aligner1" DisplayName="Aligner1"/>
 
-				<!--<Selection Name="Aligner2" DisplayName="Aligner2"/>-->
 
-			</Item>
 
-
 
-			<Item Name="PMSelection" DisplayName="PM Selection" InputType="MultiSelection" >
 
-				<Selection Name="PMA" DisplayName="PMA"/>
 
-				<Selection Name="PMB" DisplayName="PMB"/>
 
-				<Selection Name="PMC" DisplayName="PMC"/>
 
-				<Selection Name="PMD" DisplayName="PMD"/>
 
-			</Item>
 
-
 
-			<Item Name="PMARecipe" DisplayName="PMA Recipe" InputType="RecipeSelection" Parameter="PMA"    Min="0" Max="999999"  />
 
-			<Item Name="PMBRecipe" DisplayName="PMB Recipe" InputType="RecipeSelection" Parameter="PMB"    Min="0" Max="999999"  />
 
-			<Item Name="PMCRecipe" DisplayName="PMC Recipe" InputType="RecipeSelection" Parameter="PMC"    Min="0" Max="999999"  />
 
-			<Item Name="PMDRecipe" DisplayName="PMD Recipe" InputType="RecipeSelection" Parameter="PMD"    Min="0" Max="999999"  />
 
-
 
-
 
-			<Item Name="AlignAngle" DisplayName="Align Angle" InputType="NumInput"   Min="0" Max="359"  />
 
-
 
-		</Catalog>
 
-	</TableSequenceFormat>
 
-	<TableSequenceData RecipeVersion="Cluster" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
 
-		<Step></Step>
 
-	</TableSequenceData>
 
-	<TableRecipeSchema>
 
-		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
 
-			<xs:simpleType name="booleanType">
 
-				<xs:restriction base="xs:string">
 
-					<xs:enumeration value="0" />
 
-					<xs:enumeration value="1" />
 
-					<xs:enumeration value="False" />
 
-					<xs:enumeration value="True" />
 
-					<xs:enumeration value="false" />
 
-					<xs:enumeration value="true" />
 
-				</xs:restriction>
 
-			</xs:simpleType>
 
-			<xs:element name="TableSequenceData">
 
-				<xs:complexType>
 
-					<xs:sequence>
 
-						<xs:element maxOccurs="unbounded" name="Step">
 
-
 
-						</xs:element>
 
-					</xs:sequence>
 
-					<xs:attribute name="RecipeVersion" type="xs:string" fixed="Cluster" use="required" />
 
-					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
 
-					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
 
-					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
 
-					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
 
-					<xs:attribute name="Barcode" type="xs:string" use="required" />
 
-					<xs:attribute name="Description" type="xs:string" use="required" />
 
-				</xs:complexType>
 
-			</xs:element>
 
-		</xs:schema>
 
-	</TableRecipeSchema>
 
-	<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
 
-</Aitex>

+ 743 - 0
Venus/Venus_RT/Config/EquipmentVariables - 复制.xml
View File 

@@ -0,0 +1,743 @@
 
+<?xml version="1.0"?>
 
+<EquipmentVariables xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
 
+	<SpoolingStreamFunctions />
 
+
 
+	<StatusVariables>
 
+		
+		<StatusVariable id="620101001" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101002" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="620101003" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="620101004" valueType="F4" logicalName="PMA.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
 
+		<StatusVariable id="620101005" valueType="F4" logicalName="PMA.ChamberPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="620101006" valueType="Boolean" logicalName="PMA.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101007" valueType="F8" logicalName="PMA.Chiller.Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101008" valueType="F4" logicalName="PMA.ChillerInnerTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101009" valueType="F4" logicalName="PMA.ChillerOuterTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101010" valueType="F4" logicalName="PMA.ChillerTopTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101011" valueType="F8" logicalName="PMA.ESCHePressure" eventTrigger="" units="" />
 
+		<StatusVariable id="620101012" valueType="F8" logicalName="PMA.ESCHV.Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101013" valueType="F8" logicalName="PMA.ForelinePressure" eventTrigger="" units="" />
 
+		<StatusVariable id="620101014" valueType="Boolean" logicalName="PMA.GasBoxDoorSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101015" valueType="Boolean" logicalName="PMA.GasBoxPressureSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101016" valueType="Boolean" logicalName="PMA.GeneratorInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101017" valueType="F8" logicalName="PMA.GetPVPosition" eventTrigger="" units="" />
 
+		<StatusVariable id="620101018" valueType="F8" logicalName="PMA.HighTemperatureHeater.Position" eventTrigger="" units="" />
 
+		<StatusVariable id="620101019" valueType="F8" logicalName="PMA.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="620101020" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101021" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="620101022" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101023" valueType="F8" logicalName="PMA.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101024" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101025" valueType="Boolean" logicalName="PMA.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="620101026" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101027" valueType="Boolean" logicalName="PMA.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101028" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101029" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="620101030" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="620101031" valueType="Boolean" logicalName="PMA.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101032" valueType="Boolean" logicalName="PMA.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101033" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101034" valueType="Boolean" logicalName="PMA.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101035" valueType="Boolean" logicalName="PMA.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101036" valueType="Boolean" logicalName="PMA.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101037" valueType="Boolean" logicalName="PMA.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101038" valueType="Boolean" logicalName="PMA.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101039" valueType="Boolean" logicalName="PMA.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101040" valueType="Boolean" logicalName="PMA.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101041" valueType="Boolean" logicalName="PMA.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101042" valueType="Boolean" logicalName="PMA.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101043" valueType="Boolean" logicalName="PMA.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101044" valueType="Boolean" logicalName="PMA.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101045" valueType="Boolean" logicalName="PMA.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101046" valueType="Boolean" logicalName="PMA.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101047" valueType="Boolean" logicalName="PMA.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101048" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101049" valueType="Boolean" logicalName="PMA.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101050" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101051" valueType="Boolean" logicalName="PMA.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101052" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101053" valueType="Boolean" logicalName="PMA.IoValve.ValveGuage.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101054" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101055" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101056" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101057" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101058" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101059" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101060" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101061" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101062" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101063" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101064" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101065" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101066" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101067" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101068" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101069" valueType="Boolean" logicalName="PMA.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101070" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101071" valueType="Boolean" logicalName="PMA.IoValve.ValveN2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101072" valueType="Boolean" logicalName="PMA.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101073" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101074" valueType="Boolean" logicalName="PMA.IoValve.ValvePV11.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101075" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101076" valueType="Boolean" logicalName="PMA.IoValve.ValvePV12.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101077" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101078" valueType="Boolean" logicalName="PMA.IoValve.ValvePV21.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101079" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101080" valueType="Boolean" logicalName="PMA.IoValve.ValvePV22.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101081" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101082" valueType="Boolean" logicalName="PMA.IoValve.ValvePV31.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101083" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101084" valueType="Boolean" logicalName="PMA.IoValve.ValvePV32.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101085" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101086" valueType="Boolean" logicalName="PMA.IoValve.ValvePV41.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101087" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101088" valueType="Boolean" logicalName="PMA.IoValve.ValvePV42.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101089" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101090" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101091" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101092" valueType="Boolean" logicalName="PMA.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101093" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101094" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101095" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101096" valueType="Boolean" logicalName="PMA.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101097" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101098" valueType="Boolean" logicalName="PMA.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101099" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101100" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101101" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101102" valueType="Boolean" logicalName="PMA.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="620101103" valueType="Boolean" logicalName="PMA.IsTurboPumpAtSpeed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101104" valueType="Boolean" logicalName="PMA.Lid.IsClosed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101105" valueType="F8" logicalName="PMA.LoadlockPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="620101106" valueType="Boolean" logicalName="PMA.MainPump.IsError" eventTrigger="" units="" />
 
+		<StatusVariable id="620101107" valueType="Boolean" logicalName="PMA.MainPump.IsOn" eventTrigger="" units="" />
 
+		<StatusVariable id="620101108" valueType="Boolean" logicalName="PMA.MainPump.IsRunning" eventTrigger="" units="" />
 
+		<StatusVariable id="620101109" valueType="F8" logicalName="PMA.MainPump.Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101110" valueType="F8" logicalName="PMA.MainPump.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="620101111" valueType="F8" logicalName="PMA.Match.C1" eventTrigger="" units="" />
 
+		<StatusVariable id="620101112" valueType="F8" logicalName="PMA.Match.C2" eventTrigger="" units="" />
 
+		<StatusVariable id="620101113" valueType="F8" logicalName="PMA.MfcGas1.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101114" valueType="F8" logicalName="PMA.MfcGas1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101115" valueType="F8" logicalName="PMA.MfcGas2.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101116" valueType="F8" logicalName="PMA.MfcGas2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101117" valueType="F8" logicalName="PMA.MfcGas3.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101118" valueType="F8" logicalName="PMA.MfcGas3.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101119" valueType="F8" logicalName="PMA.MfcGas4.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101120" valueType="F8" logicalName="PMA.MfcGas4.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101121" valueType="F8" logicalName="PMA.MfcGas5.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101122" valueType="F8" logicalName="PMA.MfcGas5.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101123" valueType="F8" logicalName="PMA.MfcGas6.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101124" valueType="F8" logicalName="PMA.MfcGas6.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101125" valueType="F8" logicalName="PMA.MfcGas7.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101126" valueType="F8" logicalName="PMA.MfcGas7.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101127" valueType="F8" logicalName="PMA.MfcGas8.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101128" valueType="F8" logicalName="PMA.MfcGas8.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101129" valueType="F8" logicalName="PMA.MfcHe.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101130" valueType="F8" logicalName="PMA.MfcHe.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101131" valueType="F8" logicalName="PMA.MfcN2.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="620101132" valueType="F8" logicalName="PMA.MfcN2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101133" valueType="Boolean" logicalName="PMA.N2PressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101134" valueType="F8" logicalName="PMA.ProcessPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="620101135" valueType="F8" logicalName="PMA.Rf.ForwardPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101136" valueType="F8" logicalName="PMA.Rf.Frequency" eventTrigger="" units="" />
 
+		<StatusVariable id="620101137" valueType="F8" logicalName="PMA.Rf.PowerSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101138" valueType="F8" logicalName="PMA.Rf.PulsingDutyCycle" eventTrigger="" units="" />
 
+		<StatusVariable id="620101139" valueType="F8" logicalName="PMA.Rf.PulsingFrequency" eventTrigger="" units="" />
 
+		<StatusVariable id="620101140" valueType="F8" logicalName="PMA.Rf.ReflectPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101141" valueType="Boolean" logicalName="PMA.RFMatchInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101142" valueType="F8" logicalName="PMA.SCR1" eventTrigger="" units="" />
 
+		<StatusVariable id="620101143" valueType="F8" logicalName="PMA.SCR2" eventTrigger="" units="" />
 
+		<StatusVariable id="620101144" valueType="Boolean" logicalName="PMA.SensorATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101145" valueType="Boolean" logicalName="PMA.SensorCDAPressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101146" valueType="Boolean" logicalName="PMA.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101147" valueType="Boolean" logicalName="PMA.SensorPMLidClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101148" valueType="Boolean" logicalName="PMA.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101149" valueType="Boolean" logicalName="PMA.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101150" valueType="Boolean" logicalName="PMA.SensorSourceRFFan.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101151" valueType="Boolean" logicalName="PMA.SensorVacSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101152" valueType="Boolean" logicalName="PMA.SensorWaterLeakOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101153" valueType="Boolean" logicalName="PMA.SlitDoor.IsClosed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101154" valueType="Boolean" logicalName="PMA.TurboPumpInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="620101155" valueType="F8" logicalName="PMA.TurboPumpRotationalSpeed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101156" valueType="Boolean" logicalName="PMA.BiasRf.CommunicationStatus" eventTrigger="" units="" />
 
+		<StatusVariable id="620101157" valueType="F8" logicalName="PMA.BiasRf.ForwardPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101158" valueType="F8" logicalName="PMA.BiasRf.Frequency" eventTrigger="" units="" />
 
+		<StatusVariable id="620101159" valueType="F8" logicalName="PMA.BiasRf.IsPowerOn" eventTrigger="" units="" />
 
+		<StatusVariable id="620101160" valueType="F8" logicalName="PMA.BiasRf.PowerSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101161" valueType="F8" logicalName="PMA.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
 
+		<StatusVariable id="620101162" valueType="F8" logicalName="PMA.BiasRf.PulsingFrequency" eventTrigger="" units="" />
 
+		<StatusVariable id="620101163" valueType="F8" logicalName="PMA.BiasRf.ReflectPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101164" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
 
+		<StatusVariable id="620101165" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101166" valueType="F8" logicalName="IO.PMA.AI_Day" eventTrigger="" units="" />
 
+		<StatusVariable id="620101167" valueType="F8" logicalName="IO.PMA.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
 
+		<StatusVariable id="620101168" valueType="F8" logicalName="IO.PMA.AI_Heartbeat_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="620101169" valueType="F8" logicalName="IO.PMA.AI_MFC1_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101170" valueType="F8" logicalName="IO.PMA.AI_MFC2_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101171" valueType="F8" logicalName="IO.PMA.AI_MFC3_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101172" valueType="F8" logicalName="IO.PMA.AI_MFC4_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101173" valueType="F8" logicalName="IO.PMA.AI_MFC5_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101174" valueType="F8" logicalName="IO.PMA.AI_MFC6_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101175" valueType="F8" logicalName="IO.PMA.AI_Minute" eventTrigger="" units="" />
 
+		<StatusVariable id="620101176" valueType="F8" logicalName="IO.PMA.AI_Month" eventTrigger="" units="" />
 
+		<StatusVariable id="620101177" valueType="F8" logicalName="IO.PMA.AI_Process_Pressure_2t" eventTrigger="" units="" />
 
+		<StatusVariable id="620101178" valueType="F8" logicalName="IO.PMA.AI_Second" eventTrigger="" units="" />
 
+		<StatusVariable id="620101179" valueType="F8" logicalName="IO.PMA.AI_Time" eventTrigger="" units="" />
 
+		<StatusVariable id="620101180" valueType="F8" logicalName="IO.PMA.AI_Year" eventTrigger="" units="" />
 
+		<StatusVariable id="620101181" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101182" valueType="F8" logicalName="IO.PMA.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101183" valueType="F8" logicalName="IO.PMA.AO_Heartbeat" eventTrigger="" units="" />
 
+		<StatusVariable id="620101184" valueType="F8" logicalName="IO.PMA.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101185" valueType="F8" logicalName="IO.PMA.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101186" valueType="F8" logicalName="IO.PMA.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101187" valueType="F8" logicalName="IO.PMA.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101188" valueType="F8" logicalName="IO.PMA.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101189" valueType="F8" logicalName="IO.PMA.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101190" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
 
+		<StatusVariable id="620101191" valueType="Boolean" logicalName="IO.PMA.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
 
+		<StatusVariable id="620101192" valueType="Boolean" logicalName="IO.PMA.DI_ATMSW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101193" valueType="Boolean" logicalName="IO.PMA.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101194" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101195" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="620101196" valueType="Boolean" logicalName="IO.PMA.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101197" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101198" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101199" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101200" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101201" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101202" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101203" valueType="Boolean" logicalName="IO.PMA.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101204" valueType="Boolean" logicalName="IO.PMA.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101205" valueType="Boolean" logicalName="IO.PMA.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
 
+		<StatusVariable id="620101206" valueType="Boolean" logicalName="IO.PMA.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
 
+		<StatusVariable id="620101207" valueType="Boolean" logicalName="IO.PMA.DI_VACSW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101208" valueType="Boolean" logicalName="IO.PMA.DI_WaterLeak" eventTrigger="" units="" />
 
+		<StatusVariable id="620101209" valueType="Boolean" logicalName="IO.PMA.DO_Purge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101210" valueType="Boolean" logicalName="IO.PMA.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="620101211" valueType="Boolean" logicalName="IO.PMA.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101212" valueType="Boolean" logicalName="IO.PMA.DO_MFC1_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101213" valueType="Boolean" logicalName="IO.PMA.DO_MFC2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101214" valueType="Boolean" logicalName="IO.PMA.DO_MFC3_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101215" valueType="Boolean" logicalName="IO.PMA.DO_MFC4_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101216" valueType="Boolean" logicalName="IO.PMA.DO_MFC5_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101217" valueType="Boolean" logicalName="IO.PMA.DO_MFC6_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101218" valueType="Boolean" logicalName="IO.PMA.DO_N2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101219" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Final_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101220" valueType="Boolean" logicalName="IO.PMA.DO_Reset_Signal" eventTrigger="" units="" />
 
+		<StatusVariable id="620101221" valueType="Boolean" logicalName="IO.PMA.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101222" valueType="Boolean" logicalName="IO.PMA.DI_RF_BOX_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="620101223" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="620101224" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="620101225" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="620101226" valueType="Boolean" logicalName="IO.PMA.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101227" valueType="Boolean" logicalName="IO.PMA.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101228" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101229" valueType="Boolean" logicalName="IO.PMA.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101230" valueType="Boolean" logicalName="IO.PMA.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101231" valueType="Boolean" logicalName="IO.PMA.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101232" valueType="F8" logicalName="IO.PMA.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101233" valueType="F8" logicalName="IO.PMA.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101234" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101235" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101236" valueType="Boolean" logicalName="IO.PMA.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101237" valueType="Boolean" logicalName="IO.PMA.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101238" valueType="Boolean" logicalName="IO.PMA.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="620101239" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
 
+		<StatusVariable id="620101240" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101241" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101242" valueType="Boolean" logicalName="IO.PMA.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="620101243" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101244" valueType="Boolean" logicalName="IO.PMA.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="620101245" valueType="Boolean" logicalName="IO.PMA.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101246" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101247" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
 
+		<StatusVariable id="620101248" valueType="Boolean" logicalName="IO.PMA.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101249" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Button" eventTrigger="" units="" />
 
+		<StatusVariable id="620101250" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Button" eventTrigger="" units="" />
 
+		<StatusVariable id="620101251" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101252" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101253" valueType="Boolean" logicalName="IO.PMA.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101254" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101255" valueType="Boolean" logicalName="IO.PMA.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101256" valueType="Boolean" logicalName="IO.PMA.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101257" valueType="Boolean" logicalName="IO.PMA.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101258" valueType="Boolean" logicalName="IO.PMA.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101259" valueType="Boolean" logicalName="IO.PMA.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101260" valueType="Boolean" logicalName="IO.PMA.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101261" valueType="Boolean" logicalName="IO.PMA.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101262" valueType="Boolean" logicalName="IO.PMA.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101263" valueType="Boolean" logicalName="IO.PMA.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="620101264" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101265" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101266" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101267" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="620101268" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
 
+		<StatusVariable id="620101269" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
 
+		<StatusVariable id="620101270" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101271" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101272" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101273" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101274" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="620101275" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="620101276" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="620101277" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="620101278" valueType="Boolean" logicalName="IO.PMA.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="620101279" valueType="Boolean" logicalName="IO.PMA.DO_PVN21" eventTrigger="" units="" />
 
+		<StatusVariable id="620101280" valueType="Boolean" logicalName="IO.PMA.DO_PVN22" eventTrigger="" units="" />
 
+		<StatusVariable id="620101281" valueType="Boolean" logicalName="IO.PMA.DO_PV11" eventTrigger="" units="" />
 
+		<StatusVariable id="620101282" valueType="Boolean" logicalName="IO.PMA.DO_PV12" eventTrigger="" units="" />
 
+		<StatusVariable id="620101283" valueType="Boolean" logicalName="IO.PMA.DO_PV21" eventTrigger="" units="" />
 
+		<StatusVariable id="620101284" valueType="Boolean" logicalName="IO.PMA.DO_PV22" eventTrigger="" units="" />
 
+		<StatusVariable id="620101285" valueType="Boolean" logicalName="IO.PMA.DO_PV31" eventTrigger="" units="" />
 
+		<StatusVariable id="620101286" valueType="Boolean" logicalName="IO.PMA.DO_PV32" eventTrigger="" units="" />
 
+		<StatusVariable id="620101287" valueType="Boolean" logicalName="IO.PMA.DO_PV41" eventTrigger="" units="" />
 
+		<StatusVariable id="620101288" valueType="Boolean" logicalName="IO.PMA.DO_PV42" eventTrigger="" units="" />
 
+		<StatusVariable id="620101289" valueType="Boolean" logicalName="IO.PMA.DO_MFC7_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101290" valueType="Boolean" logicalName="IO.PMA.DO_MFC8_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101291" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge1_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101292" valueType="Boolean" logicalName="IO.PMA.DO_N2_Purge2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101293" valueType="Boolean" logicalName="IO.PMA.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101294" valueType="Boolean" logicalName="IO.PMA.DO_Pump_Purge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101295" valueType="Boolean" logicalName="IO.PMA.DO_Gauge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="620101296" valueType="Boolean" logicalName="IO.PMA.DO_P_Valve_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="620101297" valueType="Boolean" logicalName="IO.PMA.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="620101298" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Up" eventTrigger="" units="" />
 
+		<StatusVariable id="620101299" valueType="Boolean" logicalName="IO.PMA.DO_Lid_Down" eventTrigger="" units="" />
 
+		<StatusVariable id="620101300" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
 
+		<StatusVariable id="620101301" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
 
+		<StatusVariable id="620101302" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
 
+		<StatusVariable id="620101303" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Origin" eventTrigger="" units="" />
 
+		<StatusVariable id="620101304" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Enable" eventTrigger="" units="" />
 
+		<StatusVariable id="620101305" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
 
+		<StatusVariable id="620101306" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
 
+		<StatusVariable id="620101307" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
 
+		<StatusVariable id="620101308" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
 
+		<StatusVariable id="620101309" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_Estop" eventTrigger="" units="" />
 
+		<StatusVariable id="620101310" valueType="Boolean" logicalName="IO.PMA.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
 
+		<StatusVariable id="620101311" valueType="F8" logicalName="IO.PMA.AI_MFC7_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101312" valueType="F8" logicalName="IO.PMA.AI_MFC8_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101313" valueType="F8" logicalName="IO.PMA.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="620101314" valueType="F8" logicalName="IO.PMA.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
 
+		<StatusVariable id="620101315" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
 
+		<StatusVariable id="620101316" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
 
+		<StatusVariable id="620101317" valueType="F8" logicalName="IO.PMA.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101318" valueType="F8" logicalName="IO.PMA.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
 
+		<StatusVariable id="620101319" valueType="F8" logicalName="IO.PMA.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101320" valueType="F8" logicalName="IO.PMA.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101321" valueType="F8" logicalName="IO.PMA.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101322" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
 
+		<StatusVariable id="620101323" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="620101324" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="620101325" valueType="F8" logicalName="IO.PMA.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="620101326" valueType="F8" logicalName="IO.PMA.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101327" valueType="F8" logicalName="IO.PMA.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101328" valueType="F8" logicalName="IO.PMA.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101329" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101330" valueType="F8" logicalName="IO.PMA.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101331" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101332" valueType="F8" logicalName="IO.PMA.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101333" valueType="F8" logicalName="IO.PMA.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
 
+		<StatusVariable id="620101334" valueType="Ascii" logicalName="PMA.RecipeStartTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101335" valueType="Ascii" logicalName="PMA.RecipeEndTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101336" valueType="F8" logicalName="PMA.RecipeStepTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101337" valueType="F8" logicalName="PMA.RecipeRfOntime" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="620101338" valueType="F8" logicalName="PMB.RecipeStartTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101339" valueType="F8" logicalName="PMB.RecipeEndTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101340" valueType="F8" logicalName="PMB.RecipeStepTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101341" valueType="F8" logicalName="PMB.RecipeRfOntime" eventTrigger="" units="" />
 
+
 
+	
+
 
+
 
+		<StatusVariable id="620101350" valueType="U4" logicalName="PMA.WaferCounter" eventTrigger="" units="" />
 
+		<StatusVariable id="620101351" valueType="F8" logicalName="PMA.RfOnTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101352" valueType="F8" logicalName="PMA.PumpOnTime" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="620101353" valueType="U4" logicalName="PMB.WaferCounter" eventTrigger="" units="" />
 
+		<StatusVariable id="620101354" valueType="F8" logicalName="PMB.RfOnTime" eventTrigger="" units="" />
 
+		<StatusVariable id="620101355" valueType="F8" logicalName="PMB.PumpOnTime" eventTrigger="" units="" />
 
+
 
+		
+
 
+		<StatusVariable id="620101362" valueType="U4" logicalName="PMA.StepNo" eventTrigger="" units="" />
 
+		<StatusVariable id="620101363" valueType="U4" logicalName="PMB.StepNo" eventTrigger="" units="" />
 
+		<StatusVariable id="620101364" valueType="U4" logicalName="PMC.StepNo" eventTrigger="" units="" />
 
+		<StatusVariable id="620101365" valueType="U4" logicalName="PMD.StepNo" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="620101366" valueType="F8" logicalName="PMA.Match.C1SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101367" valueType="F8" logicalName="PMA.Match.C2SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101368" valueType="F8" logicalName="PMB.Match.C1SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101369" valueType="F8" logicalName="PMB.Match.C2SetPoint" eventTrigger="" units="" />
 
+	
+		
+		<StatusVariable id="620101374" valueType="F8" logicalName="PMA.HighTemperatureHeater.InnerPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101375" valueType="F8" logicalName="PMA.HighTemperatureHeater.OuterPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101376" valueType="F8" logicalName="PMA.Match.Vpp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101377" valueType="F8" logicalName="PMA.RFBox.C1"         eventTrigger="" units="" />
 
+		<StatusVariable id="620101378" valueType="F8" logicalName="PMA.RFBox.C1SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101379" valueType="F8" logicalName="PMA.RFBox.Vpp" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="620101380" valueType="F8" logicalName="PMB.HighTemperatureHeater.InnerPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101381" valueType="F8" logicalName="PMB.HighTemperatureHeater.OuterPower" eventTrigger="" units="" />
 
+		<StatusVariable id="620101382" valueType="F8" logicalName="PMB.Match.Vpp" eventTrigger="" units="" />
 
+		<StatusVariable id="620101383" valueType="F8" logicalName="PMB.RFBox.C1"         eventTrigger="" units="" />
 
+		<StatusVariable id="620101384" valueType="F8" logicalName="PMB.RFBox.C1SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="620101385" valueType="F8" logicalName="PMB.RFBox.Vpp" eventTrigger="" units="" />
 
+		
+	
+
 
+		<StatusVariable id="620101398" valueType="F8" logicalName="PMA.TurboPump.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="620101399" valueType="F8" logicalName="PMB.TurboPump.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="620101400" valueType="F8" logicalName="PMC.TurboPump.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="620101401" valueType="F8" logicalName="PMD.TurboPump.Temperature" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="620101402" valueType="F8" logicalName="PMA.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101403" valueType="F8" logicalName="PMB.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101404" valueType="F8" logicalName="PMC.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
 
+		<StatusVariable id="620101405" valueType="F8" logicalName="PMD.HighTemperatureHeater.Posi_Mm" eventTrigger="" units="" />
 
+
 
+		<StatusVariable id="630101001" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101002" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="630101003" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="630101004" valueType="F4" logicalName="PMB.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
 
+		<StatusVariable id="630101005" valueType="F4" logicalName="PMB.ChamberPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="630101006" valueType="Boolean" logicalName="PMB.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101007" valueType="F8" logicalName="PMB.Chiller.Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101008" valueType="F4" logicalName="PMB.ChillerInnerTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101009" valueType="F4" logicalName="PMB.ChillerOuterTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101010" valueType="F4" logicalName="PMB.ChillerTopTemp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101011" valueType="F8" logicalName="PMB.ESCHePressure" eventTrigger="" units="" />
 
+		<StatusVariable id="630101012" valueType="F8" logicalName="PMB.ESCHV.Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101013" valueType="F8" logicalName="PMB.ForelinePressure" eventTrigger="" units="" />
 
+		<StatusVariable id="630101014" valueType="Boolean" logicalName="PMB.GasBoxDoorSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101015" valueType="Boolean" logicalName="PMB.GasBoxPressureSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101016" valueType="Boolean" logicalName="PMB.GeneratorInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101017" valueType="F8" logicalName="PMB.GetPVPosition" eventTrigger="" units="" />
 
+		<StatusVariable id="630101018" valueType="F8" logicalName="PMB.HighTemperatureHeater.Position" eventTrigger="" units="" />
 
+		<StatusVariable id="630101019" valueType="F8" logicalName="PMB.HighTemperatureHeater.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="630101020" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101021" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="630101022" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101023" valueType="F8" logicalName="PMB.IoHeater.PendulumHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101024" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101025" valueType="Boolean" logicalName="PMB.IoHeater.ValveHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="630101026" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101027" valueType="Boolean" logicalName="PMB.IoHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101028" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101029" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.ControlTcSetPointView" eventTrigger="" units="" />
 
+		<StatusVariable id="630101030" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnFeedback" eventTrigger="" units="" />
 
+		<StatusVariable id="630101031" valueType="Boolean" logicalName="PMB.IoHeater.WallHeater.IsPowerOnSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101032" valueType="Boolean" logicalName="PMB.IoSensor.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101033" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxDoorSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101034" valueType="Boolean" logicalName="PMB.IoSensor.GasBoxPressureSW.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101035" valueType="Boolean" logicalName="PMB.IoSensor.GeneratorInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101036" valueType="Boolean" logicalName="PMB.IoSensor.N2PressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101037" valueType="Boolean" logicalName="PMB.IoSensor.RFMatchInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101038" valueType="Boolean" logicalName="PMB.IoSensor.SensorATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101039" valueType="Boolean" logicalName="PMB.IoSensor.SensorCDAPressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101040" valueType="Boolean" logicalName="PMB.IoSensor.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101041" valueType="Boolean" logicalName="PMB.IoSensor.SensorPMLidClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101042" valueType="Boolean" logicalName="PMB.IoSensor.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101043" valueType="Boolean" logicalName="PMB.IoSensor.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101044" valueType="Boolean" logicalName="PMB.IoSensor.SensorSourceRFFan.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101045" valueType="Boolean" logicalName="PMB.IoSensor.SensorVacSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101046" valueType="Boolean" logicalName="PMB.IoSensor.SensorWaterLeakOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101047" valueType="Boolean" logicalName="PMB.IoSensor.TurboPumpInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101048" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101049" valueType="Boolean" logicalName="PMB.IoValve.ValveFastPump.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101050" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101051" valueType="Boolean" logicalName="PMB.IoValve.ValveGasFinal.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101052" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101053" valueType="Boolean" logicalName="PMB.IoValve.ValveGuage.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101054" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101055" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc1.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101056" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101057" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101058" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101059" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc3.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101060" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101061" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc4.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101062" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101063" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc5.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101064" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101065" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc6.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101066" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101067" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc7.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101068" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101069" valueType="Boolean" logicalName="PMB.IoValve.ValveMfc8.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101070" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101071" valueType="Boolean" logicalName="PMB.IoValve.ValveN2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101072" valueType="Boolean" logicalName="PMB.IoValve.ValvePurge.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101073" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101074" valueType="Boolean" logicalName="PMB.IoValve.ValvePV11.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101075" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101076" valueType="Boolean" logicalName="PMB.IoValve.ValvePV12.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101077" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101078" valueType="Boolean" logicalName="PMB.IoValve.ValvePV21.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101079" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101080" valueType="Boolean" logicalName="PMB.IoValve.ValvePV22.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101081" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101082" valueType="Boolean" logicalName="PMB.IoValve.ValvePV31.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101083" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101084" valueType="Boolean" logicalName="PMB.IoValve.ValvePV32.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101085" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101086" valueType="Boolean" logicalName="PMB.IoValve.ValvePV41.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101087" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101088" valueType="Boolean" logicalName="PMB.IoValve.ValvePV42.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101089" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101090" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe1.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101091" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101092" valueType="Boolean" logicalName="PMB.IoValve.ValvePVHe2.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101093" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101094" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN21.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101095" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101096" valueType="Boolean" logicalName="PMB.IoValve.ValvePVN22.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101097" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101098" valueType="Boolean" logicalName="PMB.IoValve.ValveSoftPump.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101099" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101100" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPumping.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101101" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101102" valueType="Boolean" logicalName="PMB.IoValve.ValveTurboPumpPurge.Status" eventTrigger="" units="" />
 
+		<StatusVariable id="630101103" valueType="Boolean" logicalName="PMB.IsTurboPumpAtSpeed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101104" valueType="Boolean" logicalName="PMB.Lid.IsClosed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101105" valueType="F8" logicalName="PMB.LoadlockPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="630101106" valueType="Boolean" logicalName="PMB.MainPump.IsError" eventTrigger="" units="" />
 
+		<StatusVariable id="630101107" valueType="Boolean" logicalName="PMB.MainPump.IsOn" eventTrigger="" units="" />
 
+		<StatusVariable id="630101108" valueType="Boolean" logicalName="PMB.MainPump.IsRunning" eventTrigger="" units="" />
 
+		<StatusVariable id="630101109" valueType="F8" logicalName="PMB.MainPump.Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101110" valueType="F8" logicalName="PMB.MainPump.Temperature" eventTrigger="" units="" />
 
+		<StatusVariable id="630101111" valueType="F8" logicalName="PMB.Match.C1" eventTrigger="" units="" />
 
+		<StatusVariable id="630101112" valueType="F8" logicalName="PMB.Match.C2" eventTrigger="" units="" />
 
+		<StatusVariable id="630101113" valueType="F8" logicalName="PMB.MfcGas1.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101114" valueType="F8" logicalName="PMB.MfcGas1.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101115" valueType="F8" logicalName="PMB.MfcGas2.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101116" valueType="F8" logicalName="PMB.MfcGas2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101117" valueType="F8" logicalName="PMB.MfcGas3.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101118" valueType="F8" logicalName="PMB.MfcGas3.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101119" valueType="F8" logicalName="PMB.MfcGas4.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101120" valueType="F8" logicalName="PMB.MfcGas4.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101121" valueType="F8" logicalName="PMB.MfcGas5.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101122" valueType="F8" logicalName="PMB.MfcGas5.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101123" valueType="F8" logicalName="PMB.MfcGas6.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101124" valueType="F8" logicalName="PMB.MfcGas6.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101125" valueType="F8" logicalName="PMB.MfcGas7.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101126" valueType="F8" logicalName="PMB.MfcGas7.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101127" valueType="F8" logicalName="PMB.MfcGas8.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101128" valueType="F8" logicalName="PMB.MfcGas8.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101129" valueType="F8" logicalName="PMB.MfcHe.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101130" valueType="F8" logicalName="PMB.MfcHe.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101131" valueType="F8" logicalName="PMB.MfcN2.FeedBack" eventTrigger="" units="" />
 
+		<StatusVariable id="630101132" valueType="F8" logicalName="PMB.MfcN2.SetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101133" valueType="Boolean" logicalName="PMB.N2PressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101134" valueType="F8" logicalName="PMB.ProcessPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="630101135" valueType="F8" logicalName="PMB.Rf.ForwardPower" eventTrigger="" units="" />
 
+		<StatusVariable id="630101136" valueType="F8" logicalName="PMB.Rf.Frequency" eventTrigger="" units="" />
 
+		<StatusVariable id="630101137" valueType="F8" logicalName="PMB.Rf.PowerSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101138" valueType="F8" logicalName="PMB.Rf.PulsingDutyCycle" eventTrigger="" units="" />
 
+		<StatusVariable id="630101139" valueType="F8" logicalName="PMB.Rf.PulsingFrequency" eventTrigger="" units="" />
 
+		<StatusVariable id="630101140" valueType="F8" logicalName="PMB.Rf.ReflectPower" eventTrigger="" units="" />
 
+		<StatusVariable id="630101141" valueType="Boolean" logicalName="PMB.RFMatchInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101142" valueType="F8" logicalName="PMB.SCR1" eventTrigger="" units="" />
 
+		<StatusVariable id="630101143" valueType="F8" logicalName="PMB.SCR2" eventTrigger="" units="" />
 
+		<StatusVariable id="630101144" valueType="Boolean" logicalName="PMB.SensorATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101145" valueType="Boolean" logicalName="PMB.SensorCDAPressureOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101146" valueType="Boolean" logicalName="PMB.SensorLoadlockATMSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101147" valueType="Boolean" logicalName="PMB.SensorPMLidClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101148" valueType="Boolean" logicalName="PMB.SensorSlitDoorClosed.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101149" valueType="Boolean" logicalName="PMB.SensorSmallWaferInPos.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101150" valueType="Boolean" logicalName="PMB.SensorSourceRFFan.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101151" valueType="Boolean" logicalName="PMB.SensorVacSwitch.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101152" valueType="Boolean" logicalName="PMB.SensorWaterLeakOk.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101153" valueType="Boolean" logicalName="PMB.SlitDoor.IsClosed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101154" valueType="Boolean" logicalName="PMB.TurboPumpInterlock.Value" eventTrigger="" units="" />
 
+		<StatusVariable id="630101155" valueType="F8" logicalName="PMB.TurboPumpRotationalSpeed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101156" valueType="Boolean" logicalName="PMB.BiasRf.CommunicationStatus" eventTrigger="" units="" />
 
+		<StatusVariable id="630101157" valueType="F8" logicalName="PMB.BiasRf.ForwardPower" eventTrigger="" units="" />
 
+		<StatusVariable id="630101158" valueType="F8" logicalName="PMB.BiasRf.Frequency" eventTrigger="" units="" />
 
+		<StatusVariable id="630101159" valueType="F8" logicalName="PMB.BiasRf.IsPowerOn" eventTrigger="" units="" />
 
+		<StatusVariable id="630101160" valueType="F8" logicalName="PMB.BiasRf.PowerSetPoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101161" valueType="F8" logicalName="PMB.BiasRf.PulsingDutyCycle" eventTrigger="" units="" />
 
+		<StatusVariable id="630101162" valueType="F8" logicalName="PMB.BiasRf.PulsingFrequency" eventTrigger="" units="" />
 
+		<StatusVariable id="630101163" valueType="F8" logicalName="PMB.BiasRf.ReflectPower" eventTrigger="" units="" />
 
+		<StatusVariable id="630101164" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_10t" eventTrigger="" units="" />
 
+		<StatusVariable id="630101165" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101166" valueType="F8" logicalName="IO.PMB.AI_Day" eventTrigger="" units="" />
 
+		<StatusVariable id="630101167" valueType="F8" logicalName="IO.PMB.AI_Foreline_Pressure_10t" eventTrigger="" units="" />
 
+		<StatusVariable id="630101168" valueType="F8" logicalName="IO.PMB.AI_Heartbeat_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="630101169" valueType="F8" logicalName="IO.PMB.AI_MFC1_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101170" valueType="F8" logicalName="IO.PMB.AI_MFC2_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101171" valueType="F8" logicalName="IO.PMB.AI_MFC3_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101172" valueType="F8" logicalName="IO.PMB.AI_MFC4_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101173" valueType="F8" logicalName="IO.PMB.AI_MFC5_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101174" valueType="F8" logicalName="IO.PMB.AI_MFC6_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101175" valueType="F8" logicalName="IO.PMB.AI_Minute" eventTrigger="" units="" />
 
+		<StatusVariable id="630101176" valueType="F8" logicalName="IO.PMB.AI_Month" eventTrigger="" units="" />
 
+		<StatusVariable id="630101177" valueType="F8" logicalName="IO.PMB.AI_Process_Pressure_2t" eventTrigger="" units="" />
 
+		<StatusVariable id="630101178" valueType="F8" logicalName="IO.PMB.AI_Second" eventTrigger="" units="" />
 
+		<StatusVariable id="630101179" valueType="F8" logicalName="IO.PMB.AI_Time" eventTrigger="" units="" />
 
+		<StatusVariable id="630101180" valueType="F8" logicalName="IO.PMB.AI_Year" eventTrigger="" units="" />
 
+		<StatusVariable id="630101181" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temperature_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101182" valueType="F8" logicalName="IO.PMB.AO_CHB_M_HT_Temp_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101183" valueType="F8" logicalName="IO.PMB.AO_Heartbeat" eventTrigger="" units="" />
 
+		<StatusVariable id="630101184" valueType="F8" logicalName="IO.PMB.AO_MFC1_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101185" valueType="F8" logicalName="IO.PMB.AO_MFC2_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101186" valueType="F8" logicalName="IO.PMB.AO_MFC3_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101187" valueType="F8" logicalName="IO.PMB.AO_MFC4_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101188" valueType="F8" logicalName="IO.PMB.AO_MFC5_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101189" valueType="F8" logicalName="IO.PMB.AO_MFC6_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101190" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorClosePos" eventTrigger="" units="" />
 
+		<StatusVariable id="630101191" valueType="Boolean" logicalName="IO.PMB.DI_1_SlitDoorOpenPos" eventTrigger="" units="" />
 
+		<StatusVariable id="630101192" valueType="Boolean" logicalName="IO.PMB.DI_ATMSW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101193" valueType="Boolean" logicalName="IO.PMB.DI_Chamber_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101194" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101195" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="630101196" valueType="Boolean" logicalName="IO.PMB.DI_Foreline_Pressure_10t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101197" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101198" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101199" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101200" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101201" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101202" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101203" valueType="Boolean" logicalName="IO.PMB.DI_N2_Purge_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101204" valueType="Boolean" logicalName="IO.PMB.DI_Process_Pressure_2t_Gauge_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101205" valueType="Boolean" logicalName="IO.PMB.DI_TM_Safety_Door_Colse" eventTrigger="" units="" />
 
+		<StatusVariable id="630101206" valueType="Boolean" logicalName="IO.PMB.DI_Arm_Not_Extend_to_PM" eventTrigger="" units="" />
 
+		<StatusVariable id="630101207" valueType="Boolean" logicalName="IO.PMB.DI_VACSW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101208" valueType="Boolean" logicalName="IO.PMB.DI_WaterLeak" eventTrigger="" units="" />
 
+		<StatusVariable id="630101209" valueType="Boolean" logicalName="IO.PMB.DO_Purge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101210" valueType="Boolean" logicalName="IO.PMB.DO_CHB_M_HT_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="630101211" valueType="Boolean" logicalName="IO.PMB.DO_Fast_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101212" valueType="Boolean" logicalName="IO.PMB.DO_MFC1_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101213" valueType="Boolean" logicalName="IO.PMB.DO_MFC2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101214" valueType="Boolean" logicalName="IO.PMB.DO_MFC3_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101215" valueType="Boolean" logicalName="IO.PMB.DO_MFC4_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101216" valueType="Boolean" logicalName="IO.PMB.DO_MFC5_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101217" valueType="Boolean" logicalName="IO.PMB.DO_MFC6_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101218" valueType="Boolean" logicalName="IO.PMB.DO_N2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101219" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Final_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101220" valueType="Boolean" logicalName="IO.PMB.DO_Reset_Signal" eventTrigger="" units="" />
 
+		<StatusVariable id="630101221" valueType="Boolean" logicalName="IO.PMB.DO_Soft_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101222" valueType="Boolean" logicalName="IO.PMB.DI_RF_BOX_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="630101223" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Generator_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="630101224" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Match_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="630101225" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Interlock" eventTrigger="" units="" />
 
+		<StatusVariable id="630101226" valueType="Boolean" logicalName="IO.PMB.DI_CDA_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101227" valueType="Boolean" logicalName="IO.PMB.DI_Top_Safty_Door_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101228" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Detector1_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101229" valueType="Boolean" logicalName="IO.PMB.DI__Gas_Detector2_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101230" valueType="Boolean" logicalName="IO.PMB.DI_CHB_M-HT_Switch_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101231" valueType="Boolean" logicalName="IO.PMB.DI_PN2_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101232" valueType="F8" logicalName="IO.PMB.DI_MFC7_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101233" valueType="F8" logicalName="IO.PMB.DI_MFC8_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101234" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Door_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101235" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Box_Pressure_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101236" valueType="Boolean" logicalName="IO.PMB.DI_Turbo_Pump_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101237" valueType="Boolean" logicalName="IO.PMB.DI_Source_RF_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101238" valueType="Boolean" logicalName="IO.PMB.DI_Spare_Water_Flow_Switch" eventTrigger="" units="" />
 
+		<StatusVariable id="630101239" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_TC_Deviation_out_of_Range" eventTrigger="" units="" />
 
+		<StatusVariable id="630101240" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101241" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Monitor_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101242" valueType="Boolean" logicalName="IO.PMB.DI_P_Valve_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="630101243" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Control_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101244" valueType="Boolean" logicalName="IO.PMB.DI_Gas_Line_Heater_On_FB" eventTrigger="" units="" />
 
+		<StatusVariable id="630101245" valueType="Boolean" logicalName="IO.PMB.DI_S_Valve_OT_Switch_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101246" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Ctrl_TC_Broken_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101247" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Heat_ON" eventTrigger="" units="" />
 
+		<StatusVariable id="630101248" valueType="Boolean" logicalName="IO.PMB.DI_Space_Heater_Over_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101249" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Button" eventTrigger="" units="" />
 
+		<StatusVariable id="630101250" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Button" eventTrigger="" units="" />
 
+		<StatusVariable id="630101251" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Up_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101252" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Down_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101253" valueType="Boolean" logicalName="IO.PMB.DI_Top_Plate_Coolant_Flow_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101254" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Rotate_Lock_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101255" valueType="Boolean" logicalName="IO.PMB.DI_Lid_Serve_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101256" valueType="Boolean" logicalName="IO.PMB.DI_MFC1_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101257" valueType="Boolean" logicalName="IO.PMB.DI_MFC2_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101258" valueType="Boolean" logicalName="IO.PMB.DI_MFC3_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101259" valueType="Boolean" logicalName="IO.PMB.DI_MFC4_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101260" valueType="Boolean" logicalName="IO.PMB.DI_MFC5_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101261" valueType="Boolean" logicalName="IO.PMB.DI_MFC6_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101262" valueType="Boolean" logicalName="IO.PMB.DI_MFC7_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101263" valueType="Boolean" logicalName="IO.PMB.DI_MFC8_Fauit_Exist" eventTrigger="" units="" />
 
+		<StatusVariable id="630101264" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101265" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Up_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101266" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Down_Limit_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101267" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_Pos_SW" eventTrigger="" units="" />
 
+		<StatusVariable id="630101268" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_with_origin" eventTrigger="" units="" />
 
+		<StatusVariable id="630101269" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_servo_on" eventTrigger="" units="" />
 
+		<StatusVariable id="630101270" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101271" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ORG_fail_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101272" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_ABS_fail_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101273" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Over_software_Limt_alarm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101274" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position1_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="630101275" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position2_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="630101276" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position3_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="630101277" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position4_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="630101278" valueType="Boolean" logicalName="IO.PMB.DI_Lift_Servo_Go_Position5_Complete" eventTrigger="" units="" />
 
+		<StatusVariable id="630101279" valueType="Boolean" logicalName="IO.PMB.DO_PVN21" eventTrigger="" units="" />
 
+		<StatusVariable id="630101280" valueType="Boolean" logicalName="IO.PMB.DO_PVN22" eventTrigger="" units="" />
 
+		<StatusVariable id="630101281" valueType="Boolean" logicalName="IO.PMB.DO_PV11" eventTrigger="" units="" />
 
+		<StatusVariable id="630101282" valueType="Boolean" logicalName="IO.PMB.DO_PV12" eventTrigger="" units="" />
 
+		<StatusVariable id="630101283" valueType="Boolean" logicalName="IO.PMB.DO_PV21" eventTrigger="" units="" />
 
+		<StatusVariable id="630101284" valueType="Boolean" logicalName="IO.PMB.DO_PV22" eventTrigger="" units="" />
 
+		<StatusVariable id="630101285" valueType="Boolean" logicalName="IO.PMB.DO_PV31" eventTrigger="" units="" />
 
+		<StatusVariable id="630101286" valueType="Boolean" logicalName="IO.PMB.DO_PV32" eventTrigger="" units="" />
 
+		<StatusVariable id="630101287" valueType="Boolean" logicalName="IO.PMB.DO_PV41" eventTrigger="" units="" />
 
+		<StatusVariable id="630101288" valueType="Boolean" logicalName="IO.PMB.DO_PV42" eventTrigger="" units="" />
 
+		<StatusVariable id="630101289" valueType="Boolean" logicalName="IO.PMB.DO_MFC7_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101290" valueType="Boolean" logicalName="IO.PMB.DO_MFC8_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101291" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge1_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101292" valueType="Boolean" logicalName="IO.PMB.DO_N2_Purge2_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101293" valueType="Boolean" logicalName="IO.PMB.DO_Turbo_Pump_Pumping_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101294" valueType="Boolean" logicalName="IO.PMB.DO_Pump_Purge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101295" valueType="Boolean" logicalName="IO.PMB.DO_Gauge_Valve" eventTrigger="" units="" />
 
+		<StatusVariable id="630101296" valueType="Boolean" logicalName="IO.PMB.DO_P_Valve_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="630101297" valueType="Boolean" logicalName="IO.PMB.DO_Gas_Line_Heater_On" eventTrigger="" units="" />
 
+		<StatusVariable id="630101298" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Up" eventTrigger="" units="" />
 
+		<StatusVariable id="630101299" valueType="Boolean" logicalName="IO.PMB.DO_Lid_Down" eventTrigger="" units="" />
 
+		<StatusVariable id="630101300" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position1" eventTrigger="" units="" />
 
+		<StatusVariable id="630101301" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position2" eventTrigger="" units="" />
 
+		<StatusVariable id="630101302" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position3" eventTrigger="" units="" />
 
+		<StatusVariable id="630101303" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Origin" eventTrigger="" units="" />
 
+		<StatusVariable id="630101304" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Enable" eventTrigger="" units="" />
 
+		<StatusVariable id="630101305" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_UP" eventTrigger="" units="" />
 
+		<StatusVariable id="630101306" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Manual_DOWN" eventTrigger="" units="" />
 
+		<StatusVariable id="630101307" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position4" eventTrigger="" units="" />
 
+		<StatusVariable id="630101308" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Go_Position5" eventTrigger="" units="" />
 
+		<StatusVariable id="630101309" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_Estop" eventTrigger="" units="" />
 
+		<StatusVariable id="630101310" valueType="Boolean" logicalName="IO.PMB.DO_Lift_Servo_MATC_Mode" eventTrigger="" units="" />
 
+		<StatusVariable id="630101311" valueType="F8" logicalName="IO.PMB.AI_MFC7_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101312" valueType="F8" logicalName="IO.PMB.AI_MFC8_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101313" valueType="F8" logicalName="IO.PMB.AI_Turbo_Pump_N2_Flow" eventTrigger="" units="" />
 
+		<StatusVariable id="630101314" valueType="F8" logicalName="IO.PMB.AI_Penning_Gauge_Pressure1" eventTrigger="" units="" />
 
+		<StatusVariable id="630101315" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR1_PWR_OUT" eventTrigger="" units="" />
 
+		<StatusVariable id="630101316" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_SCR2_PWR_OUT" eventTrigger="" units="" />
 
+		<StatusVariable id="630101317" valueType="F8" logicalName="IO.PMB.AI_Spare_Heater_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101318" valueType="F8" logicalName="IO.PMB.AI_Chamber_Pressure_Virtual" eventTrigger="" units="" />
 
+		<StatusVariable id="630101319" valueType="F8" logicalName="IO.PMB.AI_P_Valve_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101320" valueType="F8" logicalName="IO.PMB.AI_Gas_Line_Control_TC_Temp" eventTrigger="" units="" />
 
+		<StatusVariable id="630101321" valueType="F8" logicalName="IO.PMB.AI_Lift_Servo_Current_Posi_Mm" eventTrigger="" units="" />
 
+		<StatusVariable id="630101322" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Reference_Power_Out" eventTrigger="" units="" />
 
+		<StatusVariable id="630101323" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Max_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="630101324" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Min_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="630101325" valueType="F8" logicalName="IO.PMB.AI_CHB_M_HT_Current_Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="630101326" valueType="F8" logicalName="IO.PMB.AO_MFC7_Flow_Swtpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101327" valueType="F8" logicalName="IO.PMB.AO_MFC8_Flow_Swtpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101328" valueType="F8" logicalName="IO.PMB.AO_Turbo_Pump_N2_Flow_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101329" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temperature_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101330" valueType="F8" logicalName="IO.PMB.AO_P_Valve_Temp_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101331" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Heat_Temp_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101332" valueType="F8" logicalName="IO.PMB.AO_Space_Heater_Temp_High_Limit_Setpoint" eventTrigger="" units="" />
 
+		<StatusVariable id="630101333" valueType="F8" logicalName="IO.PMB.AO_CHB_H_HT_Power_Distribute_Percent" eventTrigger="" units="" />
 
+		<StatusVariable id="640101001" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Current_Speed" eventTrigger="" units="" />
 
+		<StatusVariable id="640101002" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Max_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="640101003" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Min_Power" eventTrigger="" units="" />
 
+		<StatusVariable id="640101004" valueType="F4" logicalName="PMC.AI_CHB_M-HT_Reference_Power_Output" eventTrigger="" units="" />
 
+		<StatusVariable id="640101005" valueType="F4" logicalName="PMC.ChamberPressure" eventTrigger="" units="" />
 
+		<StatusVariable id="640101006" valueType="Boolean" logicalName="PMC.CHBWallOTSWAlarm.Value" eventTrigger="" units="" />
 
+		 
+		
+	</StatusVariables>
 
+
 
+</EquipmentVariables>

BIN
Venus/Venus_RT/Config/PM/Kepler2300/Kepler2300DeviceModel.xml
View File


+ 0 - 68
Venus/Venus_RT/Config/SESequenceFormat.xml
View File 

@@ -1,68 +0,0 @@
 
-<?xml version="1.0" encoding="utf-8" ?>
 
-<Aitex>
 
-	<TableSequenceFormat RecipeVersion="Cluster">
 
-		<Catalog Type="Position">
 
-			<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
 
-				<Selection Name="Aligner" DisplayName="PreAligner" Parameter="AlignerSelection,AlignAngle" />
 
-				<Selection Name="PM" DisplayName="PM" Parameter="PMSelection,PMARecipe,PMBRecipe,PMCRecipe,PMDRecipe,WTWClean" />
 
-			</Item>
 
-		</Catalog>
 
-
 
-		<Catalog Type="Parameter">
 
-
 
-
 
-			<Item Name="AlignerSelection" DisplayName="Aligner Selection" InputType="MultiSelection" >
 
-				<Selection Name="Aligner1" DisplayName="Aligner1"/>
 
-				<!--<Selection Name="Aligner2" DisplayName="Aligner2"/>-->
 
-			</Item>
 
-
 
-			<Item Name="PMSelection" DisplayName="PM Selection" InputType="MultiSelection" >
 
-				<Selection Name="PMA" DisplayName="PMA"/>
 
-				<Selection Name="PMB" DisplayName="PMB"/>
 
-				<Selection Name="PMC" DisplayName="PMC"/>
 
-			</Item>
 
-
 
-			<Item Name="PMARecipe" DisplayName="PMA Recipe" InputType="RecipeSelection" Parameter="PMA"    Min="0" Max="999999"  />
 
-			<Item Name="PMBRecipe" DisplayName="PMB Recipe" InputType="RecipeSelection" Parameter="PMB"    Min="0" Max="999999"  />
 
-			<Item Name="PMCRecipe" DisplayName="PMC Recipe" InputType="RecipeSelection" Parameter="PMC"    Min="0" Max="999999"  />
 
-
 
-
 
-			<Item Name="AlignAngle" DisplayName="Align Angle" InputType="NumInput"   Min="0" Max="359"  />
 
-
 
-		</Catalog>
 
-	</TableSequenceFormat>
 
-	<TableSequenceData RecipeVersion="Cluster" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
 
-		<Step></Step>
 
-	</TableSequenceData>
 
-	<TableRecipeSchema>
 
-		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
 
-			<xs:simpleType name="booleanType">
 
-				<xs:restriction base="xs:string">
 
-					<xs:enumeration value="0" />
 
-					<xs:enumeration value="1" />
 
-					<xs:enumeration value="False" />
 
-					<xs:enumeration value="True" />
 
-					<xs:enumeration value="false" />
 
-					<xs:enumeration value="true" />
 
-				</xs:restriction>
 
-			</xs:simpleType>
 
-			<xs:element name="TableSequenceData">
 
-				<xs:complexType>
 
-					<xs:sequence>
 
-						<xs:element maxOccurs="unbounded" name="Step">
 
-
 
-						</xs:element>
 
-					</xs:sequence>
 
-					<xs:attribute name="RecipeVersion" type="xs:string" fixed="Cluster" use="required" />
 
-					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
 
-					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
 
-					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
 
-					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
 
-					<xs:attribute name="Barcode" type="xs:string" use="required" />
 
-					<xs:attribute name="Description" type="xs:string" use="required" />
 
-				</xs:complexType>
 
-			</xs:element>
 
-		</xs:schema>
 
-	</TableRecipeSchema>
 
-	<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
 
-</Aitex>

File diff suppressed because it is too large
+ 2 - 6
Venus/Venus_RT/Config/System_Kepler2300.sccfg


+ 0 - 4
Venus/Venus_RT/Config/TM/DETMInterlock.xml
View File 

@@ -1,4 +0,0 @@
 
-<?xml version="1.0" encoding="utf-8" ?>
 
-<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
 
-	
-</Interlock>

+ 0 - 101
Venus/Venus_RT/Config/TM/DeviceModelVenusDE_MF.xml
View File 

@@ -1,101 +0,0 @@
 
-<?xml version="1.0" encoding="utf-8" ?>
 
-<DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
 
-	<IoValves>
 
-		<IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
 
-	        isDefaultOpen="false" diOpen="DI_TM_Fast_Pump" doOpen="DO_TM_Fast_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="DI_TM_Soft_Pump" doOpen="DO_TM_Soft_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEASoftPumpValve" display="VCEA Soft Pump Valve" schematicId="SoftPumpVCEA" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEAFastPumpValve" display="VCEA Fast Pump Valve" schematicId="FastPumpVCEA" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEBSoftPumpValve" display="VCEB Soft Pump Valve" schematicId="SoftPumpVCEB" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEBFastPumpValve" display="VCEB Fast Pump Valve" schematicId="FastPumpVCEB" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Pump" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="DI_TM_Soft_Vent" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEASoftVentValve" display="VCEA Soft Vent Valve" schematicId="SoftVentVCEA" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Soft_Vent" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEAFastVentValve" display="VCEA Fast Vent Valve" schematicId="FastVentVCEA" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEA_Fast_Vent" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEBSoftVentValve" display="VCEB Soft Vent Valve" schematicId="SoftVentVCEB" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Soft_Vent" diCloseSensor="" diOpenSensor="" />
 
-		<IoValve id="VCEBFastVentValve" display="VCEB Fast Vent Valve" schematicId="FastVentVCEB" unit="" isNc="true"
 
-			isDefaultOpen="false" diOpen="" doOpen="DO_VCEB_Fast_Vent" diCloseSensor="" diOpenSensor="" />
 
-	</IoValves>
 
-
 
-	<IoSensors>
 
-
 
-		<IoSensor id="TMATMSensor" display="TM ATM Sensor"  schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEAATMSensor" display="VCEA ATM Sensor"  schematicId="" unit="" di="DI_VCEA_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEBATMSensor" display="VCEB ATM Sensor"  schematicId="" unit="" di="DI_VCEB_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEACasSensor" display="VCEB Cassette Sensor"  schematicId="" unit="" di="DI_VCEA_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
 
-						infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEBCasSensor" display="VCEB Cassette Sensor"  schematicId="" unit="" di="DI_VCEB_Cassette_Present" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEALOCKEDSensor" display="VCEA LOCKED Sensor"  schematicId="" unit="" di="DI_VCEA_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEBLOCKEDSensor" display="VCEB LOCKED Sensor"  schematicId="" unit="" di="DI_VCEB_ADR_LOCKED" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEAProtrusionSensor" display="VCEA Protrusion Sensor"  schematicId="" unit="" di="DI_VCEA_Protrusion" isLowAsNormal="" textOutTrigValue="false"
 
-						infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="VCEBProtrusionSensor" display="VCEB Protrusion Sensor"  schematicId="" unit="" di="DI_VCEB_Protrusion" isLowAsNormal="" textOutTrigValue="false"
 
-						infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="ROBOTNotExtendVCEA" display="ROBOT Not Extend VCEA"  schematicId="" unit="" di="DI_ROBOT_TO_VCEA_RETRACT" isLowAsNormal="" textOutTrigValue="false"
 
-						infoText="" warningText="" alarmText="" />
 
-		<IoSensor id="ROBOTNotExtendVCEB" display="ROBOT Not Extend VCEB"  schematicId="" unit="" di="DI_ROBOT_TO_VCEB_RETRACT" isLowAsNormal="" textOutTrigValue="false"
 
-				infoText="" warningText="" alarmText="" />
 
-	</IoSensors>
 
-	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
 
-		<IoCylinder id="VCEASlitDoor" display="VCEA Slit Door" schematicId="" unit="" doMotorRelay=""
 
-                doON="DO_VCEA_SlitDoor_Open" doOFF="DO_VCEA_SlitDoor_Close" diON="DI_VCEA_SlitDoor_Open_POS" diOFF="DI_VCEA_SlitDoor_Close_POS" />
 
-		<IoCylinder id="VCEBSlitDoor" display="VCEB Slit Door" schematicId="" unit="" doMotorRelay=""
 
-				doON="DO_VCEB_SlitDoor_Open" doOFF="DO_VCEB_SlitDoor_Close" diON="DI_VCEB_SlitDoor_Open_POS" diOFF="DI_VCEB_SlitDoor_Close_POS" />
 
-		<IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
 
-                doON="DO_PMA_SlitDoor_Open" doOFF="DO_PMA_SlitDoor_Close" diON="DI_PMA_SlitDoor_Open_POS" diOFF="DI_PMA_SlitDoor_Close_POS" />
 
-		<IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""									   
-				doON="DO_PMB_SlitDoor_Open" doOFF="DO_PMB_SlitDoor_Close" diON="DI_PMB_SlitDoor_Open_POS" diOFF="DI_PMB_SlitDoor_Close_POS" />
 
-		<IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""									   
-                doON="DO_PMC_SlitDoor_Open" doOFF="DO_PMC_SlitDoor_Close" diON="DI_PMC_SlitDoor_Open_POS" diOFF="DI_PMC_SlitDoor_Close_POS" />
 
-		<IoCylinder id="PMDSlitDoor" display="PMD Slit Door" schematicId="" unit="" doMotorRelay=""
 
-                doON="DO_PMD_SlitDoor_Open" doOFF="DO_PMD_SlitDoor_Close" diON="DI_PMD_SlitDoor_Open_POS" diOFF="DI_PMD_SlitDoor_Close_POS" />
 
-	</IoCylinders>
 
-
 
-
 
-	<IoSignalTowers assembly="Venus_RT" classType="Venus_RT.Devices.IoSignalTower">
 
-		<IoSignalTower  id="SignalTower" display="SignalTower" schematicId="SignalTower" unit=""
 
-                   doRed="DO_RED" doYellow="DO_ORANGE" doGreen="DO_GREEN" doBlue="DO_BLUE" doWhite="" doBuzzer1="DO_BUZZER1"
 
-                   doBuzzer2="DO_BUZZER2"/>
 
-	</IoSignalTowers>
 
-
 
-	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
 
-		<IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
 
-						    aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
 
-		<IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
 
-						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
 
-		<IoPressureMeter id="VCEPipelinePressure" display="VCE Pipeline Pressure" schematicId="" unit="mTorr"
 
-						    aiValue="AI_VCE_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
 
-		<IoPressureMeter id="VCEAPressure" display="VCEA Pressure" schematicId="" unit="mTorr"
 
-						    aiValue="AI_Left_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
 
-		<IoPressureMeter id="VCEBPressure" display="VCEB Pressure" schematicId="" unit="mTorr"
 
-						    aiValue="AI_Right_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
 
-	</IoPressureMeters>
 
-
 
-	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
 
-		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
 
-				aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
 
-				diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
 
-	</IoMfcs>
 
-
 
-	<IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
 
-		<IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
 
-	</IoHongHuControls>
 
-
 
-</DeviceModelDefine>
 
-

BIN
Venus/Venus_RT/Config/TM/DeviceModelVenusSE_MF.xml
View File


BIN
Venus/Venus_RT/Config/TM/DeviceModelVenus_MF.xml
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+ 0 - 85
Venus/Venus_RT/Config/TM/SETMInterlock.xml
View File 

@@ -1,85 +0,0 @@
 
-<?xml version="1.0" encoding="utf-8" ?>
 
-<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
 
-	<Action do="DO_VCE_Slit_Door_Open"	value="true" tip="VCE Slit Door Open"	tip.zh-CN="" tip.en-US="DO-13" >
 
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />
 
-	</Action>
 
-	<Action do="DO_VCE_Slit_Door_Close"	value="true" tip="VCE Slit Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
 
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"	value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-		<Limit di="DI_VCE_Wafer_Senser"			value="true" tip="VCE Wafer Senser"		tip.zh-CN="" tip.en-US="DI-07" />												  	   	    
-	</Action>												  	   	    
-	<Action do="DO_PMA_Slit_Door_Open"	value="true" tip="PMA Slit Door Open"	tip.zh-CN="" tip.en-US="DO-15" >
 
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-	</Action>												  	   	    
-	<Action do="DO_PMA_Slit_Door_Close"	value="true" tip="PMA Slit Door Close"	tip.zh-CN="" tip.en-US="DO-16" >
 
-									
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
-		<Limit di="DI_PMA_Wafer_Senser"			value="true" tip="PMA Wafer Senser"		tip.zh-CN="" tip.en-US="DI-08" />											  	   	    
-							  	   	    
-	</Action>												  	   	    
-	<Action do="DO_PMB_Slit_Door_Open"	value="true" tip="PMB Slit Door Open"	tip.zh-CN="" tip.en-US="DO-17" >
 
-				
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-														    
-	</Action>
 
-	<Action do="DO_PMB_Slit_Door_Close"	value="true" tip="PMB_Slit_Door_Close"	tip.zh-CN="" tip.en-US="DO-18" >
 
-
 
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />													  	   	    
-		<Limit di="DI_PMB_Wafer_Senser"			value="true" tip="PMB Wafer Senser"		tip.zh-CN="" tip.en-US="DI-09" />											  	   	    
-	
-	</Action>
 
-	<Action do="DO_TM_Fast_Pumping"	value="true" tip="TM Fast Pumping"	tip.zh-CN="" tip.en-US="DO-21" >
 
-				
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-		<Limit do="DO_TM_Fast_Vent"			value="false" tip="TM Fast Vent"		tip.zh-CN="" tip.en-US="DO-23" />												  	   	    
-		<Limit do="DO_TM_Soft_Vent"			value="false" tip="TM Soft Vent"		tip.zh-CN="" tip.en-US="DO-24" />												  	   	    
-											 	  
-	</Action>											 	  
-	<Action do="DO_TM_Soft_Pumping"	value="true" tip="TM Soft Pumping"	tip.zh-CN="" tip.en-US="DO-09" >
 
-			
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-												 	  
-	</Action>											 	  
-	<Action do="DO_TM_Fast_Vent"	value="true" tip="TM Fast Vent"	tip.zh-CN="" tip.en-US="DO-23" >
 
-			
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
-		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
-												 	  
-	</Action>											 	  
-	<Action do="DO_TM_Soft_Vent"	value="true" tip="TM Soft Vent"	tip.zh-CN="" tip.en-US="DO-24" >
 
-
 
-		<Limit di="DI_LID_DOOR_CLOSED"		value="true" tip="TM Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-01" />
 
-		<Limit di="DI_System_CDA_Pressure_OK"			value="true" tip="System CDA Pressure OK"		tip.zh-CN="" tip.en-US="DI-00" />												  	   	    
-		<Limit do="DO_TM_Fast_Pumping"		value="false" tip="TM Fast Pumping"		tip.zh-CN="" tip.en-US="DO-21" />												  	   	    
-		<Limit di="DI_SYSTEM_N2_Pressure_SW"		value="true" tip="SYSTEM N2 Pressure SW"			tip.zh-CN="" tip.en-US="DO-15" />												  	   	    
-
 
-	</Action>
 
-	<Action do="DO_VCE_Fast_Pumping"	value="true" tip="VCE Fast Pumping"	tip.zh-CN="" tip.en-US="DO-25" >
 
-													  	   	    
-												  	   
-	</Action>												  	   
-	<Action do="DO_VCE_Soft_Pumping"	value="true" tip="VCE Soft Pumping"	tip.zh-CN="" tip.en-US="DO-26" >
 
-									  	   	    
-	
-	</Action>
 
-	<Action do="DO_VCE_Fast_Vent"	value="true" tip="VCE Fast Vent"	tip.zh-CN="" tip.en-US="DO-27" >
 
-													  	   	    
-												  	   
-	</Action>											  	   
-	<Action do="DO_VCE_Soft_Vent"	value="true" tip="VCE Soft Vent"	tip.zh-CN="" tip.en-US="DO-28" >
 
-							  	   	    
-
 
-	</Action>
 
-	<Action do="DO_PCW_Valve"	value="true" tip="PCW Valve"	tip.zh-CN="" tip.en-US="DO-29" >
 
-		<Limit di="DI_PCW_Leak_SW"			value="true" tip="PCW Leak SW"		tip.zh-CN="" tip.en-US="DI-25" />
 
-	</Action>
 
-</Interlock>

+ 0 - 218
Venus/Venus_RT/Config/TM/_ioDefineVenusDE_MF.xml
View File 

@@ -1,218 +0,0 @@
 
-<?xml version='1.0'?>
 
-<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 
-	<Dig_In>
 
-		<DI_ITEM Index="0"  Name="DI_Smif1_Ready_to_load"		Device="" Addr="w0.00" Note="Smif1 Ready to load" />
 
-		<DI_ITEM Index="1"  Name="DI_Smif1_Ready_to_unload"		Device="" Addr="w0.01" Note="Smif1 Ready to unload" />
 
-		<DI_ITEM Index="2"  Name="DI_Smif2_Ready_to_load"		Device="" Addr="w0.02" Note="Smif2 Ready to load" />
 
-		<DI_ITEM Index="3"  Name="DI_Smif2_Ready_to_unload"		Device="" Addr="w0.03" Note="Smif2 Ready to unload" />
 
-		<DI_ITEM Index="4"  Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE"	Device="" Addr="w0.04" Note="PMA SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="5"  Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE"	Device="" Addr="w0.05" Note="PMB SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="6"  Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE"	Device="" Addr="w0.06" Note="PMC SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="7"  Name="DI_ROBOT_TO_VCEA_RETRACT"		Device="" Addr="w0.07" Note="ROBOT_TO_VCEA_RETRACT" />
 
-		<DI_ITEM Index="8"  Name="DI_ROBOT_TO_VCEB_RETRACT"		Device="" Addr="w0.08" Note="ROBOT_TO_VCEB_RETRACT" />
 
-		<DI_ITEM Index="9"  Name="DI_ROBOT_TO_PMA_RETRACT"		Device="" Addr="w0.09" Note="ROBOT_TO_PMA_RETRACT" />
 
-		<DI_ITEM Index="10" Name="DI_ROBOT_TO_PMB_RETRACT"		Device="" Addr="w0.10" Note="ROBOT_TO_PMB_RETRACT" />
 
-		<DI_ITEM Index="11" Name="DI_ROBOT_TO_PMC_RETRACT"		Device="" Addr="w0.11" Note="ROBOT_TO_PMC_RETRACT" />
 
-		<DI_ITEM Index="12" Name="DI_ROBOT_TO_PMD_RETRACT"		Device="" Addr="w0.12" Note="ROBOT_TO_PMD_RETRACT" />
 
-		<DI_ITEM Index="13" Name="DI_VCEA_Wafer_Sensor"			Device="" Addr="w0.13" Note="VCEA Wafer Sensor" />
 
-		<DI_ITEM Index="14" Name="DI_VCEB_Wafer_Sensor"			Device="" Addr="w0.14" Note="VCEB Wafer Sensor" />
 
-		<DI_ITEM Index="15" Name="DI_PMA_Wafer_Sensor"			Device="" Addr="w0.15" Note="PMA Wafer Sensor" />
 
-		<DI_ITEM Index="16" Name="DI_PMB_Wafer_Sensor"			Device="" Addr="w1.00" Note="PMB Wafer Sensor" />
 
-		<DI_ITEM Index="17" Name="DI_PMC_Wafer_Sensor"			Device="" Addr="w1.01" Note="PMC Wafer Sensor" />
 
-		<DI_ITEM Index="18" Name="DI_PMD_Wafer_Sensor"			Device="" Addr="w1.02" Note="PMD Wafer Sensor" />
 
-		<DI_ITEM Index="19" Name="DI_VCEA_SlitDoor_Open_POS"	Device="" Addr="w1.03" Note="VCEA SlitDoor Open POS" />
 
-		<DI_ITEM Index="20" Name="DI_VCEA_SlitDoor_Close_POS"	Device="" Addr="w1.04" Note="VCEA SlitDoor Close POS" />
 
-		<DI_ITEM Index="21" Name="DI_VCEB_SlitDoor_Open_POS"	Device="" Addr="w1.05" Note="VCEB SlitDoor Open POS" />
 
-		<DI_ITEM Index="22" Name="DI_VCEB_SlitDoor_Close_POS"	Device="" Addr="w1.06" Note="VCEB SlitDoor Close POS" />
 
-		<DI_ITEM Index="23" Name="DI_PMA_SlitDoor_Open_POS"		Device="" Addr="w1.07" Note="PMA SlitDoor Open POS" />
 
-		<DI_ITEM Index="24" Name="DI_PMA_SlitDoor_Close_POS"	Device="" Addr="w1.08" Note="PMA SlitDoor Close POS" />
 
-		<DI_ITEM Index="25" Name="DI_PMB_SlitDoor_Open_POS"		Device="" Addr="w1.09" Note="PMB SlitDoor Open POS" />
 
-		<DI_ITEM Index="26" Name="DI_PMB_SlitDoor_Close_POS"	Device="" Addr="w1.10" Note="PMB SlitDoor Close POS" />
 
-		<DI_ITEM Index="27" Name="DI_PMC_SlitDoor_Open_POS"		Device="" Addr="w1.11" Note="PMC SlitDoor Open POS" />
 
-		<DI_ITEM Index="28" Name="DI_PMC_SlitDoor_Close_POS"	Device="" Addr="w1.12" Note="PMC SlitDoor Close POS" />
 
-		<DI_ITEM Index="29" Name="DI_TM_N2_1_SW"				Device="" Addr="w1.13" Note="TM N2 1 SW" />
 
-		<DI_ITEM Index="30" Name="DI_TM_N2_2_SW"				Device="" Addr="w1.14" Note="TM_N2 2 SW" />
 
-		<DI_ITEM Index="31" Name="DI_TM_CDA_SW"					Device="" Addr="w1.15" Note="TM CDA SW" />
 
-		<DI_ITEM Index="32" Name="DI_TM_He_SW"					Device="" Addr="w2.00" Note="TM He SW" />
 
-		<DI_ITEM Index="33" Name="DI_LEAK"						Device="" Addr="w2.01" Note="LEAK" />
 
-		<DI_ITEM Index="34" Name="DI_VCEA_ATM_SW"				Device="" Addr="w2.02" Note="VCEA ATM SW" />
 
-		<DI_ITEM Index="35" Name="DI_VCEB_ATM_SW"				Device="" Addr="w2.03" Note="VCEB ATM SW" />
 
-		<DI_ITEM Index="36" Name="DI_TM_ATM_SW"					Device="" Addr="w2.04" Note="TM ATM SW" />
 
-		<DI_ITEM Index="37" Name=""								Device="" Addr=""		Note="" />
 
-		<DI_ITEM Index="38" Name=""								Device="" Addr=""		Note="" />
 
-		<DI_ITEM Index="39" Name=""								Device="" Addr=""		Note="" />
 
-		<DI_ITEM Index="40" Name="DI_AC_RACK_FAN_OK"			Device="" Addr="w2.08"	Note="AC RACK FAN OK" />
 
-		<DI_ITEM Index="41" Name="DI_AC_RACK_SMOKE_Out1"		Device="" Addr="w2.09"	Note="AC RACK 烟感out1" />
 
-		<DI_ITEM Index="42" Name="DI_AC_RACK_SMOKE_Out2"		Device="" Addr="w2.10"	Note="AC RACK 烟感out2" />
 
-		<DI_ITEM Index="43" Name="DI_FACTORY_SMOKE_Out"			Device="" Addr="w2.11"	Note="厂房烟感 out" />
 
-		<DI_ITEM Index="44" Name="DI_Abnormal_Exhaust_Gas"		Device="" Addr="w2.12"	Note="尾气处理异常" />
 
-		<DI_ITEM Index="45" Name="DI_VCEA_Cassette_Present"		Device="" Addr="w2.13"	Note="VCEA-cassette  present" />
 
-		<DI_ITEM Index="46" Name="DI_VCEB_Cassette_Present"		Device="" Addr="w2.14"	Note="VCEB-cassette  present" />
 
-		<DI_ITEM Index="47" Name="DI_VCEA_ADR_LOCKED"			Device="" Addr="w2.15"	Note="VCE-A-ADR-LOCKED" />
 
-		<DI_ITEM Index="48" Name="DI_VCEB_ADR_LOCKED"			Device="" Addr="w3.00"  Note="VCE-B-ADR-LOCKED" />
 
-		<DI_ITEM Index="49" Name="DI_TM_LID_Close"				Device="" Addr="w3.01"  Note="TM-LID-close" />
 
-		<DI_ITEM Index="50" Name="DI_LEFT_SMIF_READY"			Device="" Addr="w3.02"  Note="LEFT-SMIF-READY" />
 
-		<DI_ITEM Index="51" Name="DI_RIGHT_SMIF_READY"			Device="" Addr="w3.03"  Note="RIGHT-SMIF-READY" />
 
-		<DI_ITEM Index="52" Name="DI_LEFT_SMIF_POD_INPLACE"		Device="" Addr="w3.04"  Note="LEFT-SMIF-POD IN PLACE" />
 
-		<DI_ITEM Index="53" Name="DI_RIGHT_SMIF_POD_INPLACE"	Device="" Addr="w3.05"  Note="RIGHT-SMIF-POD IN PLACE" />
 
-		<DI_ITEM Index="54" Name="DI_LEFT_SMIF_ERROR"			Device="" Addr="w3.06"  Note="LEFT-SMIF-ERROR" />
 
-		<DI_ITEM Index="55" Name="DI_RIGHT_SMIF_ERROR"			Device="" Addr="w3.07"  Note="RIGHT-SMIF-ERROR" />
 
-		<DI_ITEM Index="56" Name="DI_VCEA_EXTEND_ENABLE"		Device="" Addr="w3.08"  Note="VCE-A-EXTEND-ENABLE" />
 
-		<DI_ITEM Index="57" Name="DI_VCEB_EXTEND_ENABLE"		Device="" Addr="w3.09"  Note="VCE-B-EXTEND-ENABLE" />
 
-		<DI_ITEM Index="58" Name="DI_PMA_EXTEND_ENABLE"			Device="" Addr="w3.10"  Note="PMA-EXTEND-ENABLE" />
 
-		<DI_ITEM Index="59" Name="DI_PMB_EXTEND_ENABLE"			Device="" Addr="w3.11"  Note="PMB-EXTEND-ENABLE" />
 
-		<DI_ITEM Index="60" Name="DI_PMC_EXTEND_ENABLE"			Device="" Addr="w3.12"  Note="PMC-EXTEND-ENABLE" />
 
-		<DI_ITEM Index="61" Name="DI_EMO"						Device="" Addr="w3.13"  Note="EMO" />
 
-		<DI_ITEM Index="62" Name="DI_VCEA_Protrusion"			Device="" Addr="w3.14"  Note="VCEA凸片" />
 
-		<DI_ITEM Index="63" Name="DI_VCEB_Protrusion"			Device="" Addr="w3.15"  Note="VCEB凸片" />
 
-		<DI_ITEM Index="64" Name="DI_TM_Soft_Pump"				Device="" Addr="w5.00"  Note="TM-Soft-pump" />
 
-		<DI_ITEM Index="65" Name="DI_TM_Soft_Vent"				Device="" Addr="w5.01"  Note="TM-Soft-vent" />
 
-		<DI_ITEM Index="66" Name="DI_TM_Fast_Pump"				Device="" Addr="w5.02"  Note="TM-Fast-Pump" />
 
-		<DI_ITEM Index="67" Name="DI_PMD_SlitDoor_Open_POS"		Device="" Addr="w5.11" Note="PMD SlitDoor Open POS" />
 
-		<DI_ITEM Index="68" Name="DI_PMD_SlitDoor_Close_POS"	Device="" Addr="w5.12" Note="PMD SlitDoor Close POS" />
 
-		
-	</Dig_In>
 
-	<Dig_Out>
 
-		<DO_ITEM Index="0"	 Name="DO_VCEA_SlitDoor_Open" Device="" Addr="w200.00" Note="VCE-A-slit-door-open"/>
 
-		<DO_ITEM Index="1"	 Name="DO_VCEA_SlitDoor_Close" Device="" Addr="w200.01" Note="VCE-A-slit-door-close"/>
 
-		<DO_ITEM Index="2"	 Name="DO_VCEB_SlitDoor_Open" Device="" Addr="w200.02" Note="VCE-B-slit-door-open"/>
 
-		<DO_ITEM Index="3"	 Name="DO_VCEB_SlitDoor_Close" Device="" Addr="w200.03" Note="VCE-B-slit-door-close"/>
 
-		<DO_ITEM Index="4"	 Name="DO_PMA_SlitDoor_Open" Device="" Addr="w200.04" Note="PMA-slit-door-open"/>
 
-		<DO_ITEM Index="5"	 Name="DO_PMA_SlitDoor_Close" Device="" Addr="w200.05" Note="PMA-slit-door-close"/>
 
-		<DO_ITEM Index="6"	 Name="DO_PMB_SlitDoor_Open" Device="" Addr="w200.06" Note="PMB-slit-door-open"/>
 
-		<DO_ITEM Index="7"   Name="DO_PMB_SlitDoor_Close" Device="" Addr="w200.07" Note="PMB-slit-door-close"/>
 
-		<DO_ITEM Index="8"   Name="DO_PMC_SlitDoor_Open" Device="" Addr="w200.08" Note="PMC-slit-door-open"/>
 
-		<DO_ITEM Index="9"   Name="DO_PMC_SlitDoor_Close" Device="" Addr="w200.09" Note="PMC-slit-door-close"/>
 
-		<DO_ITEM Index="10"  Name="DO_TM_Fast_Pump" Device="" Addr="w200.10" Note="TM-Fast-Pump"/>
 
-		<DO_ITEM Index="11"  Name="DO_TM_Soft_Pump" Device="" Addr="w200.11" Note="TM-Soft-Pump"/>
 
-		<DO_ITEM Index="12"  Name="DO_TM_Fast_Vent" Device="" Addr="w200.12" Note="TM-Fast-Vent"/>
 
-		<DO_ITEM Index="13"  Name="DO_TM_Soft_Vent" Device="" Addr="w200.13" Note="TM-Soft-Vent"/>
 
-		<DO_ITEM Index="14"  Name="DO_VCEA_Fast_Pump" Device="" Addr="w200.14" Note="VCE-A-Fast-Pump"/>
 
-		<DO_ITEM Index="15"  Name="DO_VCEA_Soft_Pump" Device="" Addr="w200.15" Note="VCE-A-Soft-Pump"/>
 
-		<DO_ITEM Index="16"  Name="DO_VCEB_Fast_Pump" Device="" Addr="w201.00" Note="VCE-B-Fast-Pump"/>
 
-		<DO_ITEM Index="17"  Name="DO_VCEB_Soft_Pump" Device="" Addr="w201.01" Note="VCE-B-Soft-Pump"/>
 
-		<DO_ITEM Index="18"  Name="DO_VCEA_Fast_Vent" Device="" Addr="w201.02" Note="VCE-A-Fast-Vent"/>
 
-		<DO_ITEM Index="19"  Name="DO_VCEA_Soft_Vent" Device="" Addr="w201.03" Note="VCE-A-Soft-Vent"/>
 
-		<DO_ITEM Index="20"  Name="DO_VCEB_Fast_Vent" Device="" Addr="w201.04" Note="VCE-B-Fast-Vent"/>
 
-		<DO_ITEM Index="21"  Name="DO_VCEB_Soft_Vent" Device="" Addr="w201.05" Note="VCE-B-Soft-Vent"/>
 
-		<DO_ITEM Index="22"  Name="DO_Water_Valve_IN" Device="" Addr="w201.06" Note="Water-Valve-IN"/>
 
-		<DO_ITEM Index="23"  Name="DO_BUZZER1" Device="" Addr="w201.07" Note="BUZZER1"/>
 
-		<DO_ITEM Index="24"  Name="DO_BUZZER2" Device="" Addr="w201.08" Note="BUZZER2"/>
 
-		<DO_ITEM Index="25"  Name="DO_RED" Device="" Addr="w201.09" Note="RED"/>
 
-		<DO_ITEM Index="26"  Name="DO_ORANGE" Device="" Addr="w201.10" Note="ORANGE"/>
 
-		<DO_ITEM Index="27"  Name="DO_GREEN" Device="" Addr="w201.11" Note="GREEN"/>
 
-		<DO_ITEM Index="28"  Name="DO_BLUE" Device="" Addr="w201.12" Note="BLUE"/>
 
-		<DO_ITEM Index="29"  Name="DO_Allow_PowerOff" Device="" Addr="w201.13" Note="系统允许断电"/>
 
-		<DO_ITEM Index="30"  Name="DO_Smif1_Load_Unload" Device="" Addr="w201.15" Note="1#smif load/unload"/>
 
-		<DO_ITEM Index="31"  Name="DO_Smif2_Load_Unload" Device="" Addr="w202.00" Note="2#smif load/unload"/>
 
-		<DO_ITEM Index="32"  Name="DO_Flow_Mode" Device="" Addr="w202.14" Note="恒流模式"/>
 
-		<DO_ITEM Index="33"  Name="DO_Pressure_Mode" Device="" Addr="w202.15" Note="控压模式"/>
 
-		<DO_ITEM Index="34"   Name="DO_PMD_SlitDoor_Open" Device="" Addr="w203.01" Note="PMD-slit-door-open"/>
 
-		<DO_ITEM Index="35"   Name="DO_PMD_SlitDoor_Close" Device="" Addr="w203.02" Note="PMD-slit-door-close"/>
 
-		
-	</Dig_Out>
 
-	<Ana_Out>
 
-		<AO_ITEM Index="8" Name="AO_MFC_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1016"  Note="MFC Flow Setpoint" />
 
-		<AO_ITEM Index="9" Name="AO_TM_Pressure_SetPoint" BufferOffset="50" Device="" Addr="d1018"  Note="TM Pressure Setpoint" />
 
-		<AO_ITEM Index="1" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="2" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="3" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="4" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="6" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="7" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="8" Name="" BufferOffset=""/>
 
-		<AO_ITEM Index="9" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="10" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="11" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="12" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="13" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="14" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="15" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="16" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="17" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="18" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="19" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="20" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="21" Name="" />
 
-		<AO_ITEM Index="22" Name="" />
 
-		<AO_ITEM Index="23" Name="" />
 
-		<AO_ITEM Index="24" Name="" />
 
-		<AO_ITEM Index="25" Name="" />
 
-		<AO_ITEM Index="26" Name="" />
 
-		<AO_ITEM Index="27" Name="" />
 
-		<AO_ITEM Index="28" Name="" />
 
-		<AO_ITEM Index="29" Name="" />
 
-		<AO_ITEM Index="30" Name="" />
 
-		<AO_ITEM Index="31" Name="" />
 
-		<AO_ITEM Index="32" Name="" />
 
-		<AO_ITEM Index="33" Name="" />
 
-		<AO_ITEM Index="34" Name="" />
 
-		<AO_ITEM Index="35" Name="" />
 
-		<AO_ITEM Index="36" Name="" />
 
-		<AO_ITEM Index="37" Name="" />
 
-		<AO_ITEM Index="38" Name="" />
 
-		<AO_ITEM Index="39" Name="" />
 
-		<AO_ITEM Index="40" Name="" />
 
-		<AO_ITEM Index="41" Name="" />
 
-		<AO_ITEM Index="42" Name="" />
 
-		<AO_ITEM Index="43" Name="" />
 
-		<AO_ITEM Index="44" Name="" />
 
-		<AO_ITEM Index="45" Name="" />
 
-		<AO_ITEM Index="46" Name="" />
 
-		<AO_ITEM Index="47" Name="" />
 
-		<AO_ITEM Index="48" Name="" />
 
-		<AO_ITEM Index="49" Name="" />
 
-	</Ana_Out>
 
-	<Ana_In>
 
-		<AI_ITEM Index="0" Name="AI_Left_VCE_Pressure"  BufferOffset="0" Device="" Addr="d2000" />
 
-		<AI_ITEM Index="1" Name="AI_Right_VCE_Pressure"  BufferOffset="2" Device="" Addr="d2002" />
 
-		<AI_ITEM Index="2" Name="AI_TM_Pressure"  BufferOffset="4" Device="" Addr="d2004"/>
 
-		<AI_ITEM Index="3" Name="AI_MFC_Flow"  BufferOffset="6" Device="" Addr="d2006"/>
 
-		<AI_ITEM Index="4" Name="AI_VCE_Foreline_Pressure"  BufferOffset="8" Device="" Addr="d2008"/>
 
-		<AI_ITEM Index="5" Name=""/>
 
-		<AI_ITEM Index="6" Name="AI_TM_Foreline_Pressure"  BufferOffset="12" Device="" Addr="d2012"/>
 
-		<AI_ITEM Index="7" Name=""/>
 
-		<AI_ITEM Index="8" Name=""/>
 
-		<AI_ITEM Index="9" Name=""/>
 
-		<AI_ITEM Index="10" Name="" />
 
-		<AI_ITEM Index="11" Name=""/>
 
-		<AI_ITEM Index="12" Name=""/>
 
-		<AI_ITEM Index="13" Name=""/>
 
-		<AI_ITEM Index="14" Name=""/>
 
-		<AI_ITEM Index="15" Name=""/>
 
-		<AI_ITEM Index="16" Name=""/>
 
-		<AI_ITEM Index="17" Name=""/>
 
-		<AI_ITEM Index="18" Name=""/>
 
-		<AI_ITEM Index="19" Name=""/>
 
-		<AI_ITEM Index="20" Name=""/>
 
-		<AI_ITEM Index="21" Name="" />
 
-		<AI_ITEM Index="22" Name=""/>
 
-		<AI_ITEM Index="23" Name=""/>
 
-		<AI_ITEM Index="24" Name=""/>
 
-		<AI_ITEM Index="25" Name=""/>
 
-		<AI_ITEM Index="26" Name="" />
 
-		<AI_ITEM Index="27" Name="" />
 
-		<AI_ITEM Index="28" Name="" />
 
-		<AI_ITEM Index="29" Name="" />
 
-		<AI_ITEM Index="30" Name="" />
 
-		<AI_ITEM Index="31" Name="" />
 
-		<AI_ITEM Index="32" Name="" />
 
-		<AI_ITEM Index="33" Name="" />
 
-		<AI_ITEM Index="34" Name="" />
 
-		<AI_ITEM Index="35" Name="" />
 
-		<AI_ITEM Index="36" Name="" />
 
-		<AI_ITEM Index="37" Name="" />
 
-		<AI_ITEM Index="38" Name="" />
 
-		<AI_ITEM Index="39" Name="" />
 
-		<AI_ITEM Index="40" Name="" />
 
-		<AI_ITEM Index="41" Name="" />
 
-		<AI_ITEM Index="42" Name="" />
 
-		<AI_ITEM Index="43" Name="" />
 
-		<AI_ITEM Index="44" Name="" />
 
-		<AI_ITEM Index="45" Name="" />
 
-		<AI_ITEM Index="46" Name="" />
 
-		<AI_ITEM Index="47" Name="" />
 
-		<AI_ITEM Index="48" Name="" />
 
-		<AI_ITEM Index="49" Name="" />
 
-	</Ana_In>
 
-</IO_DEFINE>

+ 0 - 185
Venus/Venus_RT/Config/TM/_ioDefineVenusSETest_MF.xml
View File 

@@ -1,185 +0,0 @@
 
-<?xml version='1.0'?>
 
-<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 
-
 
-	<Dig_In>
 
-		<DI_ITEM Index="0" Name="DI_TM_DI1" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
 
-		<DI_ITEM Index="1" Name="DI_TM_DI2" Device="" Addr="w0.01" Note="System N2 Pressure ok"/>
 
-		<DI_ITEM Index="2" Name="DI_TM_DI3" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />
 
-		<DI_ITEM Index="3" Name="DI_TM_DI5" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="4" Name="DI_TM_DI7" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="5" Name="DI_VCE_A" Device="" Addr="w0.05" Note="VCE大气信号" />
 
-		<DI_ITEM Index="6" Name="DI_TM_A" Device="" Addr="w0.06" Note="TM大气信号" />
 
-		<DI_ITEM Index="7" Name="DI_VCE_SS" Device="" Addr="w0.07" Note="VCE wafer senser" />
 
-		<DI_ITEM Index="8" Name="DI_PMA_SS" Device="" Addr="w0.08" Note="PMA wafer senser" />
 
-		<DI_ITEM Index="9" Name="DI_PMB_SS" Device="" Addr="w0.09" Note="PMB wafer senser" />
 
-		<DI_ITEM Index="10" Name="DI_SYS_C1" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
 
-		<DI_ITEM Index="11" Name="DI_SYS_C2" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
 
-		<DI_ITEM Index="12" Name="DI_SYS_C3" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
 
-		<DI_ITEM Index="13" Name="DI_SYS_C4" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />
 
-		<DI_ITEM Index="14" Name="DI_TSYS_C5" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />
 
-		<DI_ITEM Index="15" Name="DI_TM_N2_1" Device="" Addr="w0.15" Note="TM N2气压表1" />
 
-		<DI_ITEM Index="16" Name="DI_VCE_TM_OPS" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />
 
-		<DI_ITEM Index="17" Name="DI_VCE_TM_CLS" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />
 
-		<DI_ITEM Index="18" Name="DI_TM_PMA_OPS" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />
 
-		<DI_ITEM Index="19" Name="DI_TM_PMA_CLS" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />
 
-		<DI_ITEM Index="20" Name="DI_TM_PMB_OPS" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />
 
-		<DI_ITEM Index="21" Name="DI_TM_PMB_CLS" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />
 
-		<DI_ITEM Index="22" Name="DI_TM_N2_2" Device="" Addr="w1.06" Note="TM N2气压表2" />
 
-		<DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />
 
-		<DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />
 
-		<DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />
 
-		<DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />
 
-		<DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />
 
-		<DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
 
-		<DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
 
-		<DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
 
-		<DI_ITEM Index="31" Name="DI_PMC_RB_RET" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
 
-		<DI_ITEM Index="32" Name="DI_TM_DI8" Device="" Addr="w2.00" Note="PMC SLIT DOOR OPEN  ENABLE" />
 
-		<DI_ITEM Index="33" Name="DI_PMC_SS" Device="" Addr="w2.01" Note="PMC wafer senser" />
 
-		<DI_ITEM Index="34" Name="DI_TM_PMC_OPS" Device="" Addr="w2.02" Note="TM到PMC门阀开信号" />
 
-		<DI_ITEM Index="35" Name="DI_TM_PMC_CLS" Device="" Addr="w2.03" Note="TM到PMC门阀关信号" />
 
-	</Dig_In>
 
-	<Dig_Out>
 
-		<DO_ITEM Index="0" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="1" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="2" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="3" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="4" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="5" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="6" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="7" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="8" Name="DO_TM_PMC_OP" Device="" Addr="w199.11" Note="TM到PMC门阀开"/>
 
-		<DO_ITEM Index="9" Name="DO_TM_PMC_CL" Device="" Addr="w199.12" Note="TM到PMC门阀关"/>
 
-		<DO_ITEM Index="10" Name="DO_TM_V_LS" Device="" Addr="w199.13"  Note="TM腔慢抽真空"/>
 
-		<DO_ITEM Index="11" Name="DO_TM_BUZZER" Device="" Addr="w199.14" Note="蜂鸣"/>
 
-		<DO_ITEM Index="12" Name="DO_RED" Device="" Addr="w199.15" Note="报警灯1(红灯)" />
 
-		<DO_ITEM Index="13" Name="DO_VCE_TM_OP" Device="" Addr="w200.00" Note="VCE到TM门阀开" />
 
-		<DO_ITEM Index="14" Name="DO_VCE_TM_CL" Device="" Addr="w200.01" Note="VCE到TM门阀关" />
 
-		<DO_ITEM Index="15" Name="DO_TM_PMA_OP" Device="" Addr="w200.02" Note="TM到PMA门阀开"/>
 
-		<DO_ITEM Index="16" Name="DO_TM_PMA_CL" Device="" Addr="w200.03" Note="TM到PMA门阀关"/>
 
-		<DO_ITEM Index="17" Name="DO_TM_PMB_OP" Device="" Addr="w200.04" Note="TM到PMB门阀开"/>
 
-		<DO_ITEM Index="18" Name="DO_TM_PMB_CL" Device="" Addr="w200.05" Note="TM到PMB门阀关"/>
 
-		<DO_ITEM Index="19" Name="DO_ORANGE" Device="" Addr="w200.06" Note="报警灯2(橙灯)"/>
 
-		<DO_ITEM Index="20" Name="DO_GREEN" Device="" Addr="w200.07" Note="报警灯3(绿灯)"/>
 
-		<DO_ITEM Index="21" Name="DO_TM_V_HS" Device="" Addr="w200.08" Note="TM腔快抽真空"/>
 
-		<DO_ITEM Index="22" Name="DO_BLUE" Device="" Addr="w200.09" Note="报警灯4(蓝灯)"/>
 
-		<DO_ITEM Index="23" Name="DO_TM_B_HS" Device="" Addr="w200.10" Note="TM腔快破真空"/>
 
-		<DO_ITEM Index="24" Name="DO_TM_B_LS" Device=""  Addr="w200.11" Note="TM腔慢破真空"/>
 
-		<DO_ITEM Index="25" Name="DO_VCE_V_HS" Device="" Addr="w200.12" Note="VCE腔快抽真空"/>
 
-		<DO_ITEM Index="26" Name="DO_VCE_V_LS" Device="" Addr="w200.13" Note="VCE腔慢抽真空" />
 
-		<DO_ITEM Index="27" Name="DO_VCE_B_HS" Device="" Addr="w200.14" Note="VCE腔快破真空"/>
 
-		<DO_ITEM Index="28" Name="DO_VCE_B_LS" Device="" Addr="w200.15" Note="VCE腔慢破真空"/>
 
-		<DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="水阀"/>
 
-		<DO_ITEM Index="30" Name="" Device=""  Addr="" Note=""/>
 
-		<DO_ITEM Index="31" Name="" Device=""  Addr="" Note=""/>
 
-		<DO_ITEM Index="32" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="33" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="34" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="35" Name="" Device="" Addr="" />
 
-		<DO_ITEM Index="36" Name="" Device="" Addr="" />
 
-	</Dig_Out>
 
-	<Ana_Out>
 
-		<AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d308"  Note="MFC Flow Setpoint" />
 
-		<AO_ITEM Index="1" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="2" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="3" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="4" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="5" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="6" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="7" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="8" Name="" BufferOffset=""/>
 
-		<AO_ITEM Index="9" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="10" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="11" Name="" BufferOffset=""  />
 
-		<AO_ITEM Index="12" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="13" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="14" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="15" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="16" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="17" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="18" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="19" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="20" Name="" BufferOffset="" />
 
-		<AO_ITEM Index="21" Name="" />
 
-		<AO_ITEM Index="22" Name="" />
 
-		<AO_ITEM Index="23" Name="" />
 
-		<AO_ITEM Index="24" Name="" />
 
-		<AO_ITEM Index="25" Name="" />
 
-		<AO_ITEM Index="26" Name="" />
 
-		<AO_ITEM Index="27" Name="" />
 
-		<AO_ITEM Index="28" Name="" />
 
-		<AO_ITEM Index="29" Name="" />
 
-		<AO_ITEM Index="30" Name="" />
 
-		<AO_ITEM Index="31" Name="" />
 
-		<AO_ITEM Index="32" Name="" />
 
-		<AO_ITEM Index="33" Name="" />
 
-		<AO_ITEM Index="34" Name="" />
 
-		<AO_ITEM Index="35" Name="" />
 
-		<AO_ITEM Index="36" Name="" />
 
-		<AO_ITEM Index="37" Name="" />
 
-		<AO_ITEM Index="38" Name="" />
 
-		<AO_ITEM Index="39" Name="" />
 
-		<AO_ITEM Index="40" Name="" />
 
-		<AO_ITEM Index="41" Name="" />
 
-		<AO_ITEM Index="42" Name="" />
 
-		<AO_ITEM Index="43" Name="" />
 
-		<AO_ITEM Index="44" Name="" />
 
-		<AO_ITEM Index="45" Name="" />
 
-		<AO_ITEM Index="46" Name="" />
 
-		<AO_ITEM Index="47" Name="" />
 
-		<AO_ITEM Index="48" Name="" />
 
-		<AO_ITEM Index="49" Name="" />
 
-	</Ana_Out>
 
-	<Ana_In>
 
-		<AI_ITEM Index="0" Name="AI_VCE_Vacuum_Gauge"  BufferOffset="0" Device="" Addr="D300" />
 
-		<AI_ITEM Index="1" Name="AI_TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D302" />
 
-		<AI_ITEM Index="2" Name="AI_Pipeline_Vacuum_Gauge"  BufferOffset="4" Device="" Addr="D304"/>
 
-		<AI_ITEM Index="3" Name="AI_MFC_Flow"  BufferOffset="6" Device="" Addr="D306"/>
 
-		<AI_ITEM Index="4" Name=""/>
 
-		<AI_ITEM Index="5" Name=""/>
 
-		<AI_ITEM Index="6" Name="" />
 
-		<AI_ITEM Index="7" Name=""/>
 
-		<AI_ITEM Index="8" Name=""/>
 
-		<AI_ITEM Index="9" Name=""/>
 
-		<AI_ITEM Index="10" Name="" />
 
-		<AI_ITEM Index="11" Name=""/>
 
-		<AI_ITEM Index="12" Name=""/>
 
-		<AI_ITEM Index="13" Name=""/>
 
-		<AI_ITEM Index="14" Name=""/>
 
-		<AI_ITEM Index="15" Name=""/>
 
-		<AI_ITEM Index="16" Name=""/>
 
-		<AI_ITEM Index="17" Name=""/>
 
-		<AI_ITEM Index="18" Name=""/>
 
-		<AI_ITEM Index="19" Name=""/>
 
-		<AI_ITEM Index="20" Name=""/>
 
-		<AI_ITEM Index="21" Name="" />
 
-		<AI_ITEM Index="22" Name=""/>
 
-		<AI_ITEM Index="23" Name=""/>
 
-		<AI_ITEM Index="24" Name=""/>
 
-		<AI_ITEM Index="25" Name=""/>
 
-		<AI_ITEM Index="26" Name="" />
 
-		<AI_ITEM Index="27" Name="" />
 
-		<AI_ITEM Index="28" Name="" />
 
-		<AI_ITEM Index="29" Name="" />
 
-		<AI_ITEM Index="30" Name="" />
 
-		<AI_ITEM Index="31" Name="" />
 
-		<AI_ITEM Index="32" Name="" />
 
-		<AI_ITEM Index="33" Name="" />
 
-		<AI_ITEM Index="34" Name="" />
 
-		<AI_ITEM Index="35" Name="" />
 
-		<AI_ITEM Index="36" Name="" />
 
-		<AI_ITEM Index="37" Name="" />
 
-		<AI_ITEM Index="38" Name="" />
 
-		<AI_ITEM Index="39" Name="" />
 
-		<AI_ITEM Index="40" Name="" />
 
-		<AI_ITEM Index="41" Name="" />
 
-		<AI_ITEM Index="42" Name="" />
 
-		<AI_ITEM Index="43" Name="" />
 
-		<AI_ITEM Index="44" Name="" />
 
-		<AI_ITEM Index="45" Name="" />
 
-		<AI_ITEM Index="46" Name="" />
 
-		<AI_ITEM Index="47" Name="" />
 
-		<AI_ITEM Index="48" Name="" />
 
-		<AI_ITEM Index="49" Name="" />
 
-	</Ana_In>
 
-</IO_DEFINE>

+ 0 - 187
Venus/Venus_RT/Config/TM/_ioDefineVenusSE_MF.xml
View File 

@@ -1,187 +0,0 @@
 
-<?xml version='1.0'?>
 
-<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 
-
 
-  <Dig_In>
 
-    <DI_ITEM Index="0" Name="DI_System_CDA_Pressure_OK" Device="" Addr="w0.00" Note="System CDA Pressure ok" />
 
-    <DI_ITEM Index="1" Name="DI_LID_DOOR_CLOSED" Device="" Addr="w0.01" Note="LID DOOR CLOSED"/>
 
-    <DI_ITEM Index="2" Name="DI_VCE_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.02" Note="VCE SLIT DOOR CLOSE STATUS" />
 
-    <DI_ITEM Index="3" Name="DI_PMA_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN  ENABLE" />
 
-    <DI_ITEM Index="4" Name="DI_PMB_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN  ENABLE" />
 
-    <DI_ITEM Index="5" Name="DI_VCE_ATM_SW" Device="" Addr="w0.05" Note="VCE大气信号" />
 
-    <DI_ITEM Index="6" Name="DI_TM_ATM_SW" Device="" Addr="w0.06" Note="TM大气信号" />
 
-    <DI_ITEM Index="7" Name="DI_VCE_Wafer_Senser" Device="" Addr="w0.07" Note="VCE wafer senser" />
 
-    <DI_ITEM Index="8" Name="DI_PMA_Wafer_Senser" Device="" Addr="w0.08" Note="PMA wafer senser" />
 
-    <DI_ITEM Index="9" Name="DI_PMB_Wafer_Senser" Device="" Addr="w0.09" Note="PMB wafer senser" />
 
-    <DI_ITEM Index="10" Name="DI_AC_RACK_FAN_OK" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
 
-    <DI_ITEM Index="11" Name="DI_AC_RACK_Smoke_SW1" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
 
-    <DI_ITEM Index="12" Name="DI_AC_RACK_Smoke_SW2" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
 
-    <DI_ITEM Index="13" Name="DI_FA_Smoke_SW" Device="" Addr="w0.13" Note="Factory Smoke Detector Out" />
 
-    <DI_ITEM Index="14" Name="DI_Gas_Treatment_Alarm" Device="" Addr="w0.14" Note="Abnormal exhaust gas treatment" />
 
-    <DI_ITEM Index="15" Name="DI_SYSTEM_N2_Pressure_SW" Device="" Addr="w0.15" Note="TM N2气压表1" />
 
-    <DI_ITEM Index="16" Name="DI_VCE_TM_Slit_Door_Open_Pos" Device="" Addr="w1.00" Note="VCE到TM门阀开信号" />
 
-    <DI_ITEM Index="17" Name="DI_VCE_TM_Slit_Door_Close_Pos" Device="" Addr="w1.01" Note="VCE到TM门阀关信号" />
 
-    <DI_ITEM Index="18" Name="DI_TM_PMA_Slit_Door_Open_Pos" Device="" Addr="w1.02" Note="TM到PMA门阀开信号" />
 
-    <DI_ITEM Index="19" Name="DI_TM_PMA_Slit_Door_Close_Pos" Device="" Addr="w1.03" Note="TM到PMA门阀关信号" />
 
-    <DI_ITEM Index="20" Name="DI_TM_PMB_Slit_Door_Open_Pos" Device="" Addr="w1.04" Note="TM到PMB门阀开信号" />
 
-    <DI_ITEM Index="21" Name="DI_TM_PMB_Slit_Door_Close_Pos" Device="" Addr="w1.05" Note="TM到PMB门阀关信号" />
 
-    <DI_ITEM Index="22" Name="DI_TM_N2_Pressure_SW" Device="" Addr="w1.06" Note="TM N2气压表2" />
 
-    <DI_ITEM Index="23" Name="DI_TM_CDA_Pressure_SW" Device="" Addr="w1.07" Note="TM CDA气压表" />
 
-    <DI_ITEM Index="24" Name="DI_TM_HE_Pressure_SW" Device="" Addr="w1.08" Note="TM He气压表" />
 
-    <DI_ITEM Index="25" Name="DI_PCW_Leak_SW" Device="" Addr="w1.09" Note="漏液检测器" />
 
-    <DI_ITEM Index="26" Name="DI_VCE_VAC_SW" Device="" Addr="w1.10" Note="VCE真空信号" />
 
-    <DI_ITEM Index="27" Name="DI_TM_VAC_SW" Device="" Addr="w1.11" Note="TM真空信号" />
 
-    <DI_ITEM Index="28" Name="DI_TM_ROBOT_NOT_EXTEND_VCE" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
 
-    <DI_ITEM Index="29" Name="DI_TM_ROBOT_NOT_EXTEND_PMA" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
 
-    <DI_ITEM Index="30" Name="DI_TM_ROBOT_NOT_EXTEND_PMB" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
 
-    <DI_ITEM Index="31" Name="DI_TM_ROBOT_NOT_EXTEND_PMC" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
 
-    <DI_ITEM Index="32" Name="DI_PMC_SLIT_DOOR_OPEN_ENABLE" Device="" Addr="w2.00" Note="PMC SLIT DOOR OPEN  ENABLE" />
 
-    <DI_ITEM Index="33" Name="DI_PMC_Wafer_Senser" Device="" Addr="w2.01" Note="PMC wafer senser" />
 
-    <DI_ITEM Index="34" Name="DI_TM_PMC_Slit_Door_Open_Pos" Device="" Addr="w2.02" Note="TM到PMC门阀开信号" />
 
-    <DI_ITEM Index="35" Name="DI_TM_PMC_Slit_Door_Close_Pos" Device="" Addr="w2.03" Note="TM到PMC门阀关信号" />
 
-    <DI_ITEM Index="36" Name="DI_TM_Soft_Pump" Device="" Addr="w3.00" Note="TM 慢抽" />
 
-    <DI_ITEM Index="37" Name="DI_TM_Soft_Vent" Device="" Addr="w3.01" Note="TM 慢破" />
 
-  </Dig_In>
 
-  <Dig_Out>
 
-    <DO_ITEM Index="0" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="1" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="2" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="3" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="4" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="5" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="6" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="7" Name="DO_PMC_Slit_Door_Open" Device="" Addr="w200.07" Note="TM到PMC门阀开"/>
 
-    <DO_ITEM Index="8" Name="DO_PMC_Slit_Door_Close" Device="" Addr="w200.08" Note="TM到PMC门阀关"/>
 
-    <DO_ITEM Index="9" Name="DO_TM_Soft_Pumping" Device="" Addr="w200.09"  Note="TM腔慢抽真空"/>
 
-    <DO_ITEM Index="10" Name="DO_BUZZER2" Device="" Addr="w200.10" Note="蜂鸣2"/>
 
-    <DO_ITEM Index="11" Name="DO_BUZZER1" Device="" Addr="w200.11" Note="蜂鸣1"/>
 
-    <DO_ITEM Index="12" Name="DO_Red_Light_ON"  Device="" Addr="w200.12" Note="报警灯1(红灯)"/>
 
-    <DO_ITEM Index="13" Name="DO_VCE_Slit_Door_Open" Device="" Addr="w200.13" Note="VCE到TM门阀开" />
 
-    <DO_ITEM Index="14" Name="DO_VCE_Slit_Door_Close" Device="" Addr="w200.14" Note="VCE到TM门阀关" />
 
-    <DO_ITEM Index="15" Name="DO_PMA_Slit_Door_Open" Device="" Addr="w200.15" Note="TM到PMA门阀开"/>
 
-    <DO_ITEM Index="16" Name="DO_PMA_Slit_Door_Close" Device="" Addr="w201.00" Note="TM到PMA门阀关"/>
 
-    <DO_ITEM Index="17" Name="DO_PMB_Slit_Door_Open" Device="" Addr="w201.01" Note="TM到PMB门阀开"/>
 
-    <DO_ITEM Index="18" Name="DO_PMB_Slit_Door_Close" Device="" Addr="w201.02" Note="TM到PMB门阀关"/>
 
-    <DO_ITEM Index="19" Name="DO_Orange_Light_ON" Device="" Addr="w201.03" Note="报警灯2(橙灯)"/>
 
-    <DO_ITEM Index="20" Name="DO_Green_Light_ON" Device="" Addr="w201.04" Note="报警灯3(绿灯)"/>
 
-    <DO_ITEM Index="21" Name="DO_TM_Fast_Pumping" Device="" Addr="w201.05" Note="TM腔快抽真空"/>
 
-    <DO_ITEM Index="22" Name="DO_Blue_Light_ON" Device="" Addr="w201.06" Note="报警灯4(蓝灯)"/>
 
-    <DO_ITEM Index="23" Name="DO_TM_Fast_Vent" Device="" Addr="w201.07" Note="TM腔快破真空"/>
 
-    <DO_ITEM Index="24" Name="DO_TM_Soft_Vent" Device=""  Addr="w201.08" Note="TM腔慢破真空"/>
 
-    <DO_ITEM Index="25" Name="DO_VCE_Fast_Pumping" Device="" Addr="w201.09" Note="VCE腔快抽真空"/>
 
-    <DO_ITEM Index="26" Name="DO_VCE_Soft_Pumping" Device="" Addr="w201.10" Note="VCE腔慢抽真空" />
 
-    <DO_ITEM Index="27" Name="DO_VCE_Fast_Vent" Device="" Addr="w201.11" Note="VCE腔快破真空"/>
 
-    <DO_ITEM Index="28" Name="DO_VCE_Soft_Vent" Device="" Addr="w201.12" Note="VCE腔慢破真空"/>
 
-    <DO_ITEM Index="29" Name="DO_PCW_Valve" Device="" Addr="w201.13" Note="水阀"/>
 
-    <DO_ITEM Index="30" Name="DO_System_Power_OFF_Enable" Device=""  Addr="w201.14" Note="系统允许断电"/>
 
-    <DO_ITEM Index="31" Name="DO_System_Control_OUT" Device=""  Addr="w201.15" Note="备用"/>
 
-    <DO_ITEM Index="32" Name="DO_Flow_Mode" Device="" Addr="w202.00" Note="Flow模式"/>
 
-    <DO_ITEM Index="33" Name="DO_Pressure_Mode" Device="" Addr="w202.01" Note="Pressure模式"/>
 
-    <DO_ITEM Index="34" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="35" Name="" Device="" Addr="" />
 
-    <DO_ITEM Index="36" Name="" Device="" Addr="" />
 
-  </Dig_Out>
 
-  <Ana_Out>
 
-    <AO_ITEM Index="8" Name="AO_MFC_Flow_Setpoint" BufferOffset="8" Device="" Addr="d1016"  Note="MFC Flow Setpoint" />
 
-    <AO_ITEM Index="9" Name="AO_TM_Pressure_SetPoint" BufferOffset="50" Device="" Addr="d1018"  Note="TM Pressure Setpoint" />
 
-    <AO_ITEM Index="1" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="2" Name="" BufferOffset=""  />
 
-    <AO_ITEM Index="3" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="4" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="6" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="7" Name="" BufferOffset=""  />
 
-    <AO_ITEM Index="8" Name="" BufferOffset=""/>
 
-    <AO_ITEM Index="9" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="10" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="11" Name="" BufferOffset=""  />
 
-    <AO_ITEM Index="12" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="13" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="14" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="15" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="16" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="17" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="18" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="19" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="20" Name="" BufferOffset="" />
 
-    <AO_ITEM Index="21" Name="" />
 
-    <AO_ITEM Index="22" Name="" />
 
-    <AO_ITEM Index="23" Name="" />
 
-    <AO_ITEM Index="24" Name="" />
 
-    <AO_ITEM Index="25" Name="" />
 
-    <AO_ITEM Index="26" Name="" />
 
-    <AO_ITEM Index="27" Name="" />
 
-    <AO_ITEM Index="28" Name="" />
 
-    <AO_ITEM Index="29" Name="" />
 
-    <AO_ITEM Index="30" Name="" />
 
-    <AO_ITEM Index="31" Name="" />
 
-    <AO_ITEM Index="32" Name="" />
 
-    <AO_ITEM Index="33" Name="" />
 
-    <AO_ITEM Index="34" Name="" />
 
-    <AO_ITEM Index="35" Name="" />
 
-    <AO_ITEM Index="36" Name="" />
 
-    <AO_ITEM Index="37" Name="" />
 
-    <AO_ITEM Index="38" Name="" />
 
-    <AO_ITEM Index="39" Name="" />
 
-    <AO_ITEM Index="40" Name="" />
 
-    <AO_ITEM Index="41" Name="" />
 
-    <AO_ITEM Index="42" Name="" />
 
-    <AO_ITEM Index="43" Name="" />
 
-    <AO_ITEM Index="44" Name="" />
 
-    <AO_ITEM Index="45" Name="" />
 
-    <AO_ITEM Index="46" Name="" />
 
-    <AO_ITEM Index="47" Name="" />
 
-    <AO_ITEM Index="48" Name="" />
 
-    <AO_ITEM Index="49" Name="" />
 
-  </Ana_Out>
 
-  <Ana_In>
 
-    <AI_ITEM Index="0" Name="AI_VCE_Pressure"  BufferOffset="0" Device="" Addr="d2000" />
 
-    <AI_ITEM Index="1" Name="AI_TM_Pressure"  BufferOffset="2" Device="" Addr="d2002" />
 
-    <AI_ITEM Index="2" Name="AI_Foreline_Pressure"  BufferOffset="4" Device="" Addr="d2004"/>
 
-    <AI_ITEM Index="3" Name="AI_MFC_Flow"  BufferOffset="6" Device="" Addr="d2006"/>
 
-    <AI_ITEM Index="4" Name=""/>
 
-    <AI_ITEM Index="5" Name=""/>
 
-    <AI_ITEM Index="6" Name="" />
 
-    <AI_ITEM Index="7" Name=""/>
 
-    <AI_ITEM Index="8" Name=""/>
 
-    <AI_ITEM Index="9" Name=""/>
 
-    <AI_ITEM Index="10" Name="" />
 
-    <AI_ITEM Index="11" Name=""/>
 
-    <AI_ITEM Index="12" Name=""/>
 
-    <AI_ITEM Index="13" Name=""/>
 
-    <AI_ITEM Index="14" Name=""/>
 
-    <AI_ITEM Index="15" Name=""/>
 
-    <AI_ITEM Index="16" Name=""/>
 
-    <AI_ITEM Index="17" Name=""/>
 
-    <AI_ITEM Index="18" Name=""/>
 
-    <AI_ITEM Index="19" Name=""/>
 
-    <AI_ITEM Index="20" Name=""/>
 
-    <AI_ITEM Index="21" Name="" />
 
-    <AI_ITEM Index="22" Name=""/>
 
-    <AI_ITEM Index="23" Name=""/>
 
-    <AI_ITEM Index="24" Name=""/>
 
-    <AI_ITEM Index="25" Name=""/>
 
-    <AI_ITEM Index="26" Name="" />
 
-    <AI_ITEM Index="27" Name="" />
 
-    <AI_ITEM Index="28" Name="" />
 
-    <AI_ITEM Index="29" Name="" />
 
-    <AI_ITEM Index="30" Name="" />
 
-    <AI_ITEM Index="31" Name="" />
 
-    <AI_ITEM Index="32" Name="" />
 
-    <AI_ITEM Index="33" Name="" />
 
-    <AI_ITEM Index="34" Name="" />
 
-    <AI_ITEM Index="35" Name="" />
 
-    <AI_ITEM Index="36" Name="" />
 
-    <AI_ITEM Index="37" Name="" />
 
-    <AI_ITEM Index="38" Name="" />
 
-    <AI_ITEM Index="39" Name="" />
 
-    <AI_ITEM Index="40" Name="" />
 
-    <AI_ITEM Index="41" Name="" />
 
-    <AI_ITEM Index="42" Name="" />
 
-    <AI_ITEM Index="43" Name="" />
 
-    <AI_ITEM Index="44" Name="" />
 
-    <AI_ITEM Index="45" Name="" />
 
-    <AI_ITEM Index="46" Name="" />
 
-    <AI_ITEM Index="47" Name="" />
 
-    <AI_ITEM Index="48" Name="" />
 
-    <AI_ITEM Index="49" Name="" />
 
-  </Ana_In>
 
-</IO_DEFINE>

+ 12 - 12
Venus/Venus_RT/Devices/TM/JetTM.cs
View File 

@@ -102,12 +102,12 @@ namespace Venus_RT.Devices
 
         private readonly IoSensor _LLAATMSwitch;
 
         private readonly IoSensor _LLBATMSwitch;
 
 
-        private readonly IoSwitch _LLAWaferSizeCheck;
 
-        private readonly IoSwitch _LLBWaferSizeCheck;
 
-        private readonly IoSwitch _PMAWaferSizeCheck;
 
-        private readonly IoSwitch _PMBWaferSizeCheck;
 
-        private readonly IoSwitch _PMCWaferSizeCheck;
 
-        private readonly IoSwitch _PMDWaferSizeCheck;
 
+        //private readonly IoSwitch _LLAWaferSizeCheck;
 
+        //private readonly IoSwitch _LLBWaferSizeCheck;
 
+        //private readonly IoSwitch _PMAWaferSizeCheck;
 
+        //private readonly IoSwitch _PMBWaferSizeCheck;
 
+        //private readonly IoSwitch _PMCWaferSizeCheck;
 
+        //private readonly IoSwitch _PMDWaferSizeCheck;
 
         private readonly IoSwitch _TM_PressureMode_Switch;
 
         private readonly IoSwitch _LLA_PressureMode_Switch;
 
         private readonly IoSwitch _LLB_PressureMode_Switch;
 
@@ -324,12 +324,12 @@ namespace Venus_RT.Devices
 
             _LLAATMSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAATMSwitch}");
 
             _LLBATMSwitch = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBATMSwitch}");
 
 
-            _LLAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLAWaferSizeCheckSwitch}");
 
-            _LLBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLBWaferSizeCheckSwitch}");
 
-            _PMAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMAWaferSizeCheckSwitch}");
 
-            _PMBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMBWaferSizeCheckSwitch}");
 
-            _PMCWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMCWaferSizeCheckSwitch}");
 
-            _PMDWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMDWaferSizeCheckSwitch}");
 
+            //_LLAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLAWaferSizeCheckSwitch}");
 
+            //_LLBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLBWaferSizeCheckSwitch}");
 
+            //_PMAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMAWaferSizeCheckSwitch}");
 
+            //_PMBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMBWaferSizeCheckSwitch}");
 
+            //_PMCWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMCWaferSizeCheckSwitch}");
 
+            //_PMDWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMDWaferSizeCheckSwitch}");
 
             _TM_PressureMode_Switch = DEVICE.GetDevice<IoSwitch>("TM.TMPressureModeSwitch");
 
             _LLA_PressureMode_Switch = DEVICE.GetDevice<IoSwitch>("TM.LLAPressureModeSwitch");
 
             _LLB_PressureMode_Switch = DEVICE.GetDevice<IoSwitch>("TM.LLBPressureModeSwitch");

+ 3 - 3
Venus/Venus_RT/Modules/SystemDispatcher.cs
View File 

@@ -3520,13 +3520,13 @@ namespace Venus_RT.Modules
 
                                         llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && readyOutPMs.Exists(pm => pm.Key == wt.destMod && pm.Value.TimeToReady < 5));
 
                                     }
 
 
-                                    if (llWafer != null)
 
+                                    if (llWafer != null && readyOutPMs.Count(x=>x.Key==llWafer.destMod)>0)
 
                                     {
 
                                         _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, llWafer.currentSlot, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
 
 
                                         var pmSwap = new List<MoveItem>
 
-                                        {   new MoveItem(readyOutPMs.First().Key, 0, ModuleName.TMRobot, (int)freeHands[1], freeHands[1]),
 
-                                            new MoveItem(ModuleName.TMRobot, (int)freeHands[0], readyOutPMs.First().Key, 0, freeHands[0])
 
+                                        {   new MoveItem(llWafer.destMod, 0, ModuleName.TMRobot, (int)freeHands[1], freeHands[1]),
 
+                                            new MoveItem(ModuleName.TMRobot, (int)freeHands[0], llWafer.destMod, 0, freeHands[0])
 
                                         };
 
 
                                         _tmSchdActions.Enqueue(pmSwap);

+ 7 - 28
Venus/Venus_RT/Venus_RT.csproj
View File 

@@ -348,9 +348,9 @@
 
     <Content Include="Config\DataGroup.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
-    <Content Include="Config\DESequenceFormat.xml">
 
-      <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
 
-    </Content>
 
+    <Resource Include="Config\EquipmentVariables - 复制.xml">
 
+      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
+    </Resource>
 
     <Content Include="Config\EquipmentVariables.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
@@ -381,18 +381,6 @@
 
     <Content Include="Config\PM\Kepler2300\TwincatConfig.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
-    <Content Include="Config\SESequenceFormat.xml">
 
-      <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
 
-    </Content>
 
-    <Content Include="Config\TM\DETMInterlock.xml">
 
-      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
-    </Content>
 
-    <Content Include="Config\TM\DeviceModelVenusDE_MF.xml">
 
-      <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
 
-    </Content>
 
-    <Content Include="Config\TM\DeviceModelVenusSE_MF.xml">
 
-      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
-    </Content>
 
     <Content Include="Config\TM\DeviceModelVenus_MF.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
@@ -402,21 +390,9 @@
 
     <Content Include="Config\PM\Kepler2300\Kepler2300IoDefine.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
-    <Content Include="Config\TM\SETMInterlock.xml">
 
-      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
-    </Content>
 
     <Content Include="Config\TM\TMInterlock.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
-    <Content Include="Config\TM\_ioDefineVenusDE_MF.xml">
 
-      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
-    </Content>
 
-    <Content Include="Config\TM\_ioDefineVenusSETest_MF.xml">
 
-      <CopyToOutputDirectory>PreserveNewest</CopyToOutputDirectory>
 
-    </Content>
 
-    <Content Include="Config\TM\_ioDefineVenusSE_MF.xml">
 
-      <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
-    </Content>
 
     <Content Include="Config\TM\_ioDefineVenus_MF.xml">
 
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
 
     </Content>
 
@@ -527,7 +503,10 @@
 
       <Install>false</Install>
 
     </BootstrapperPackage>
 
   </ItemGroup>
 
-  <ItemGroup />
 
+  <ItemGroup>
 
+    <Folder Include="Config\TM\Kepler2200\" />
 
+    <Folder Include="Config\TM\Kepler2300\" />
 
+  </ItemGroup>
 
   <Import Project="$(MSBuildToolsPath)\Microsoft.CSharp.targets" />
 
   <PropertyGroup>
 
     <PreBuildEvent>python.exe  ../../Config/VenusPreProcess.py</PreBuildEvent>