|
@@ -455,7 +455,6 @@
|
|
|
|
|
|
<configs name="Chiller" nameView="Chiller">
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -468,7 +467,7 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="InnerChiller" nameView="InnerChiller" >
|
|
|
+ <configs name="WallChiller" nameView="WallChiller" >
|
|
|
<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -482,34 +481,6 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="OuterChiller" nameView="OuterChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
- <configs name="TopChiller" nameView="TopChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
<configs name="DryPump" nameView="Dry Pump" >
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -843,6 +814,7 @@
|
|
|
<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
|
|
|
+ <config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Purge" nameView="Purge" >
|
|
|
<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
|
|
@@ -968,34 +940,7 @@
|
|
|
<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
- <configs name="PendulumHeater" nameView="Heater Pendulum" >
|
|
|
- <config default="true" name="IsOn" nameView="Is On" description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="TemperatureSetPoint" nameView="Temperature" description="Temperature" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
- </configs>
|
|
|
+
|
|
|
<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
|
|
|
<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
</configs>
|
|
@@ -1027,19 +972,6 @@
|
|
|
<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
|
|
|
- <config default="60" name="LiftServoPosition1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition2" nameView="Lift Servo Position2" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition3" nameView="Lift Servo Position3" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition4" nameView="Lift Servo Position4" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition5" nameView="Lift Servo Position5" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchLowSpeed" nameView="Origin Search Low Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="AbsMoveSpeed" nameView="Abs Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="MaximusMoveSpeed" nameView="Maximus Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftDownLimit" nameView="Soft Down Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftUpLimit" nameView="Soft Up Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- </configs>
|
|
|
</configs>
|
|
|
|
|
|
<!--PMB-->
|
|
@@ -1104,35 +1036,6 @@
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
- <configs name="InnerChiller" nameView="InnerChiller" >
|
|
|
- <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM71" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
- <configs name="OuterChiller" nameView="OuterChiller" >
|
|
|
- <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -1143,13 +1046,13 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="TopChiller" nameView="TopChiller" >
|
|
|
- <config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
+ <configs name="WallChiller" nameView="WallChiller" >
|
|
|
+ <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
@@ -1489,6 +1392,7 @@
|
|
|
<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
|
|
|
+ <config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Purge" nameView="Purge" >
|
|
|
<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
|
|
@@ -1617,34 +1521,6 @@
|
|
|
<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
- <configs name="PendulumHeater" nameView="Heater Pendulum" >
|
|
|
- <config default="true" name="IsOn" nameView="Is On" description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="TemperatureSetPoint" nameView="Temperature" description="Temperature" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
- </configs>
|
|
|
|
|
|
<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
|
|
|
<config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -1678,19 +1554,6 @@
|
|
|
<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
|
|
|
- <config default="60" name="LiftServoPosition1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition2" nameView="Lift Servo Position2" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition3" nameView="Lift Servo Position3" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition4" nameView="Lift Servo Position4" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition5" nameView="Lift Servo Position5" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchLowSpeed" nameView="Origin Search Low Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="AbsMoveSpeed" nameView="Abs Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="MaximusMoveSpeed" nameView="Maximus Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftDownLimit" nameView="Soft Down Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftUpLimit" nameView="Soft Up Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- </configs>
|
|
|
</configs>
|
|
|
|
|
|
<!--PMC-->
|
|
@@ -1755,7 +1618,6 @@
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM86" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -1766,7 +1628,8 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="InnerChiller" nameView="InnerChiller" >
|
|
|
+
|
|
|
+ <configs name="WallChiller" nameView="WallChiller" >
|
|
|
<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -1780,34 +1643,6 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="OuterChiller" nameView="OuterChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
- <configs name="TopChiller" nameView="TopChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
<configs name="DryPump" nameView="Dry Pump" >
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -2128,6 +1963,7 @@
|
|
|
<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
|
|
|
+ <config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Purge" nameView="Purge" >
|
|
|
<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
|
|
@@ -2256,34 +2092,6 @@
|
|
|
<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
- <configs name="PendulumHeater" nameView="Heater Pendulum" >
|
|
|
- <config default="true" name="IsOn" nameView="Is On" description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="TemperatureSetPoint" nameView="Temperature" description="Temperature" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
- </configs>
|
|
|
|
|
|
<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
|
|
|
<config default="COM17" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -2317,21 +2125,6 @@
|
|
|
<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
|
-
|
|
|
- <configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
|
|
|
- <config default="60" name="LiftServoPosition1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition2" nameView="Lift Servo Position2" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition3" nameView="Lift Servo Position3" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition4" nameView="Lift Servo Position4" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition5" nameView="Lift Servo Position5" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchLowSpeed" nameView="Origin Search Low Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="AbsMoveSpeed" nameView="Abs Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="MaximusMoveSpeed" nameView="Maximus Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftDownLimit" nameView="Soft Down Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftUpLimit" nameView="Soft Up Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
-
|
|
|
- </configs>
|
|
|
</configs>
|
|
|
|
|
|
<!--PMD-->
|
|
@@ -2396,7 +2189,6 @@
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM27" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -2407,7 +2199,7 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="InnerChiller" nameView="InnerChiller" >
|
|
|
+ <configs name="WallChiller" nameView="WallChiller" >
|
|
|
<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -2421,34 +2213,6 @@
|
|
|
<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="OuterChiller" nameView="OuterChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
- <configs name="TopChiller" nameView="TopChiller" >
|
|
|
- <config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
|
- <config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- </configs>
|
|
|
<configs name="DryPump" nameView="Dry Pump" >
|
|
|
<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
@@ -2758,6 +2522,7 @@
|
|
|
<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
|
|
|
+ <config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Purge" nameView="Purge" >
|
|
|
<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
|
|
@@ -2886,34 +2651,6 @@
|
|
|
<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
- <configs name="PendulumHeater" nameView="Heater Pendulum" >
|
|
|
- <config default="true" name="IsOn" nameView="Is On" description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="20" name="TemperatureSetPoint" nameView="Temperature" description="Temperature" max="1000" min="0" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
- <config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
|
|
|
- <config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
-
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
- </configs>
|
|
|
|
|
|
<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
|
|
|
<config default="COM56" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -2947,19 +2684,5 @@
|
|
|
<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
</configs>
|
|
|
- <configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
|
|
|
- <config default="60" name="LiftServoPosition1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition2" nameView="Lift Servo Position2" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition3" nameView="Lift Servo Position3" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition4" nameView="Lift Servo Position4" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="LiftServoPosition5" nameView="Lift Servo Position5" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="OriginSearchLowSpeed" nameView="Origin Search Low Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="AbsMoveSpeed" nameView="Abs Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="MaximusMoveSpeed" nameView="Maximus Move Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftDownLimit" nameView="Soft Down Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
- <config default="60" name="SoftUpLimit" nameView="Soft Up Limit" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
|
|
|
-
|
|
|
- </configs>
|
|
|
</configs>
|
|
|
</root>
|