delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype

Venus/Venus_Core/DeviceName.cs

@@ -99,6 +99,7 @@ namespace Venus_Core
     public enum ChillerType
     {
         Chiller,
+        WallChiller,
         InnerChiller,
         OuterChiller,
         TopChiller

Venus/Venus_Core/VenusDevice.cs

@@ -89,7 +89,7 @@
         InnerChiller,
         OuterChiller,
         TopChiller,
-
+        WallChiller,
 
         Rf,
         BiasRf,

Venus/Venus_RT/Config/System.sccfg

@@ -820,6 +820,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="400" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
@@ -1431,6 +1432,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
@@ -2048,6 +2050,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
@@ -2665,6 +2668,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />

Venus/Venus_RT/Config/System_Kepler2200.sccfg

@@ -550,6 +550,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="30" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="50" min="0" paramter="" tag="" unit="Pa" type="Integer" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -899,7 +900,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="30" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="50" min="0" paramter="" tag="" unit="Pa" type="Integer" />
-
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1248,7 +1249,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="30" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="50" min="0" paramter="" tag="" unit="Pa" type="Integer" />
-
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1597,7 +1598,7 @@
 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 			<config default="75" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
 			<config default="30" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="50" min="0" paramter="" tag="" unit="Pa" type="Integer" />
-
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />

Venus/Venus_RT/Config/System_Kepler2300.sccfg

@@ -658,6 +658,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1188,6 +1189,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1718,6 +1720,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -2248,6 +2251,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />

Venus/Venus_RT/Config/System_VenusDE.sccfg

@@ -826,6 +826,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1447,6 +1448,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -2074,6 +2076,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -2701,6 +2704,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />

Venus/Venus_RT/Config/System_VenusSE.sccfg

@@ -455,7 +455,6 @@
 
 		<configs name="Chiller" nameView="Chiller">
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -468,7 +467,7 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
+		<configs name="WallChiller" nameView="WallChiller" >
 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
@@ -482,34 +481,6 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -843,6 +814,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -968,34 +940,7 @@
 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
 		</configs>
-		<configs name="PendulumHeater" nameView="Heater Pendulum" >
-			<config default="true" name="IsOn"                          nameView="Is On"         description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="Temperature"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
-			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-
-			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
-		</configs>
+		
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
 			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
 		</configs>
@@ -1027,19 +972,6 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-		</configs>
 	</configs>
 
 	<!--PMB-->
@@ -1104,35 +1036,6 @@
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM71" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -1143,13 +1046,13 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
+		<configs name="WallChiller" nameView="WallChiller" >
+			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
@@ -1489,6 +1392,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -1617,34 +1521,6 @@
 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
 		</configs>
-		<configs name="PendulumHeater" nameView="Heater Pendulum" >
-			<config default="true" name="IsOn"                          nameView="Is On"         description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="Temperature"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
-			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-
-			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
-		</configs>
 
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
 			<config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -1678,19 +1554,6 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-		</configs>
 	</configs>
 
 	<!--PMC-->
@@ -1755,7 +1618,6 @@
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM86" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -1766,7 +1628,8 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
+
+		<configs name="WallChiller" nameView="WallChiller" >
 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
@@ -1780,34 +1643,6 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -2128,6 +1963,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -2256,34 +2092,6 @@
 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
 		</configs>
-		<configs name="PendulumHeater" nameView="Heater Pendulum" >
-			<config default="true" name="IsOn"                          nameView="Is On"         description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="Temperature"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
-			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-
-			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
-		</configs>
 
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
 			<config default="COM17" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -2317,21 +2125,6 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-
-		</configs>
 	</configs>
 
 	<!--PMD-->
@@ -2396,7 +2189,6 @@
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM27" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -2407,7 +2199,7 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
+		<configs name="WallChiller" nameView="WallChiller" >
 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
@@ -2421,34 +2213,6 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="00" name="Address" nameView="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="false" name="ShareCOM" nameView="Share COM" description="true=>Share COM;false => Not Share" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -2758,6 +2522,7 @@
 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
+			<config default="500" name="ForelinePressure" nameView="ForelinePressure" description="PumpDown Check it" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		</configs>
 		<configs name="Purge" nameView="Purge" >
 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
@@ -2886,34 +2651,6 @@
 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
 		</configs>
-		<configs name="PendulumHeater" nameView="Heater Pendulum" >
-			<config default="true" name="IsOn"                          nameView="Is On"         description="IsOn" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20"   name="TemperatureSetPoint"           nameView="Temperature"              description="Temperature"                 max="1000" min="0"    paramter="" tag="" unit="℃" type="Double" />
-			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
-
-			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
-			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
-			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
-		</configs>
 
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
 			<config default="COM56" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -2947,19 +2684,5 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-
-		</configs>
 	</configs>
 </root>

Venus/Venus_RT/Devices/DeviceManager.cs

@@ -227,6 +227,7 @@ namespace Venus_RT.Instances
                     AddEPD(mod);
                     AddPendulumValve(mod);
                     AddChiller(ChillerType.Chiller, mod);
+                    AddChiller(ChillerType.WallChiller, mod);
                     AddMatch(mod);
                     AddBiasMatch(mod);
                     //AddRF(mod);

Venus/Venus_RT/Devices/JetVenusDEPM.cs

@@ -102,6 +102,7 @@ namespace Venus_RT.Devices
         private readonly PendulumValve _pendulumValve;
 
         private readonly ChillerBase _Chiller;
+        private readonly ChillerBase _WallChiller;
 
         private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
         private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
@@ -259,6 +260,33 @@ namespace Venus_RT.Devices
                 }
             }
 
+            if (SC.GetValue<bool>($"{Module}.WallChiller.EnableChiller") &&
+                SC.GetValue<int>($"{Module}.WallChiller.CommunicationType") == (int)CommunicationType.RS232)
+            {
+                if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.SMC)
+                {
+                    _WallChiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.WallChiller}");
+                }
+                else if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.AIRSYS)
+                {
+                    _WallChiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.WallChiller}");
+                }
+            }
+            else
+            if (SC.GetValue<bool>($"{Module}.WallChiller.EnableChiller") &&
+                SC.GetValue<int>($"{Module}.WallChiller.CommunicationType") == (int)CommunicationType.RS485 &&
+                SC.GetValue<bool>($"{Module}.WallChiller.ShareCOM"))
+            {
+                if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.SMC)
+                {
+                    _WallChiller = DEVICE.GetDevice<SMCShareChiller>($"{Module}.{VenusDevice.WallChiller}");
+                }
+                else if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.AIRSYS)
+                {
+                    _WallChiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.WallChiller}");
+                }
+            }
+
 
             // RS232 AdTec Generator
             if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&

Venus/Venus_RT/Devices/SMCChillerDrive.cs

@@ -223,7 +223,6 @@ namespace Venus_RT.Devices
 
                 //每interval获取温度 超过一秒时效性失去意义 500 * 2积累太多数据 同时注意其是与monitor紧密联系的 实际上是每interval就会进来可能导致数组变大
                 //因此每次进来要控制规模 > 2 时 实时性已经失去此时应该等待回复并把头前的清除掉 而且要注意 chiller本身升温很慢 界面上ramp不明显
-
                 _addressCmdQueue[str.Substring(1, 2)].Enqueue(str);
                 if (_addressCmdQueue[str.Substring(1, 2)].Count > 2)
                     _addressCmdQueue[str.Substring(1, 2)].Dequeue();

Venus/Venus_RT/Modules/PMs/PumpDownRoutine.cs

@@ -32,6 +32,7 @@ namespace Venus_RT.Modules.PMs
         private int _pump_delay = 5000;
         private int _roughPumpPressure = 75000;
         private int _vHe2FlowPressure = 200;
+        private int _forelinePressure = 200;
         private int _basePressure = 10;
         private JetChamber jetChamber = JetChamber.None;
         //private bool needsoft = true;
@@ -64,9 +65,10 @@ namespace Venus_RT.Modules.PMs
                 _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
 
                 //前端压力值高于某个数值
-                if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > 500)
+                _forelinePressure = SC.GetValue<int>($"{Module}.Pump.ForelinePressure");
+                if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > _forelinePressure)
                 {
-                    LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}");
+                    LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}=>Target:{_forelinePressure}");
                     return RState.Failed;
                 }