1.由于PM种类变多，且分配置，PM 加载device 功能重写

2.修复模拟器读rt配置文件bug
3.删除kepler2300 TM MFPMPickRoutine多一个OpenPMSlitDoor step

Venus/Venus_Core/DeviceName.cs

@@ -78,7 +78,7 @@ namespace Venus_Core
             { EfemOperation.SetThickness,   "THICKNESS" },
             { EfemOperation.StateTrack,     "STATE" },
             { EfemOperation.Grip,           "CLAMP" },
-            { EfemOperation.EmsStop,        "EMS"},          
+            { EfemOperation.EmsStop,        "EMS"},
 
         };
 
@@ -97,10 +97,10 @@ namespace Venus_Core
     }
 
     public enum ChillerType
-    { 
-    Chiller,
-    InnerChiller,
-    OuterChiller,
-    TopChiller
+    {
+        Chiller,
+        InnerChiller,
+        OuterChiller,
+        TopChiller
     }
 }

Venus/Venus_MainPages/ViewModels/OverKepler2300ViewModel.cs

@@ -199,10 +199,16 @@ namespace Venus_MainPages.ViewModels
         private string m_ModuleName;
         private string m_WaferID;
         private int? currentRecipeNumber;
+        private bool m_IsInclude;
 
         #endregion
 
         #region  属性
+        public bool IsInclude
+        {
+            get { return m_IsInclude; }
+            set { SetProperty(ref m_IsInclude, value); }
+        }
         public List<string> CurrentModuleRecipes
         {
             get { return m_CurrentModuleRecipes; }
@@ -1086,6 +1092,10 @@ namespace Venus_MainPages.ViewModels
         private DelegateCommand<object> _AbortRecipeCommnad;
         public DelegateCommand<object> AbortRecipeCommnad =>
             _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
+
+        private DelegateCommand _IncludeCommand;
+        public DelegateCommand IncludeCommand =>
+            _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude));
         #endregion
 
         #region 构造函数
@@ -1494,6 +1504,17 @@ namespace Venus_MainPages.ViewModels
                     break;
             }
         }
+        private void OnInclude()
+        {
+            if (IsInclude)
+            {
+                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}");
+            }
+            else
+            {
+                InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}");
+            }
+        }
         #endregion
 
         #region 私有方法
@@ -1680,6 +1701,7 @@ namespace Venus_MainPages.ViewModels
                 ChamberPressureFeedBack = ChamberPressure;
             }
             IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
+            IsInclude = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsInclude");
         }
         public void addDataKeys()
         {
@@ -1797,6 +1819,7 @@ namespace Venus_MainPages.ViewModels
             m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
             m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
             m_RtDataKeys.Add($"{ModuleName}.IsOnline");
+            m_RtDataKeys.Add($"{ModuleName}.IsInclude");
 
 
 

Venus/Venus_MainPages/Views/OverKepler2300View.xaml

@@ -989,13 +989,13 @@
                         <MenuItem Header="Stop Recipe=>Return Wafer To Foup" Cursor="Hand"   Command="{Binding AbortRecipeCommnad}" CommandParameter="2"/>
                     </customControls:SplitButton>
                     <RadioButton Content="OffLine" GroupName="Online"    Width="100" Height="28" Margin="30 0 5 0" Style="{StaticResource Button_RadioButton}"  IsChecked="{Binding IsAutoMode,Converter={StaticResource BoolToBool},Mode=TwoWay}" FontSize="15" Command="{Binding OfflineCommand}"/>
-                    <RadioButton Content="OnLine"  GroupName="Online"    Width="100" Height="28" Margin="0 0 0 0" Style="{StaticResource Button_RadioButton}" IsChecked="{Binding IsAutoMode,Mode=TwoWay}" FontSize="15"                                      Command="{Binding OnlineCommand}"/>
+                    <RadioButton Content="OnLine"  GroupName="Online"    Width="100" Height="28" Margin="0 0 0 0" Style="{StaticResource Button_RadioButton}"   IsChecked="{Binding IsAutoMode,Mode=TwoWay}" FontSize="15"                                       Command="{Binding OnlineCommand}"/>
                     <customControls:PathButton  Width="120" Height="30" Content="Vent"          Command="{Binding VentCommand}"          Margin="30,0,0,0"  IsEnabled="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" />
                     <customControls:PathButton  Width="120" Height="30" Content="Pump Purge"    Command="{Binding PurgeCommand}"         Margin="30,0,0,0"  IsEnabled="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" />
                     <customControls:PathButton  Width="120" Height="30" Content="Pump Down"     Command="{Binding PumpCommand}"          Margin="30,0,0,0"  IsEnabled="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}"/>
 
-                    <RadioButton Content="Exclude"  GroupName="Include"    Width="100" Height="28" Margin="30 0 5 0" Style="{StaticResource Button_RadioButton}"  IsChecked="{Binding IsAutoMode,Converter={StaticResource BoolToBool},Mode=TwoWay}" FontSize="15" Command="{Binding OfflineCommand}"/>
-                    <RadioButton Content="Include"  GroupName="Include"    Width="100" Height="28" Margin="0 0 0 0" Style="{StaticResource Button_RadioButton}" IsChecked="{Binding IsAutoMode,Mode=TwoWay}" FontSize="15"                                      Command="{Binding OnlineCommand}"/>
+                    <RadioButton Content="Exclude"  GroupName="Include"    Width="100" Height="28" Margin="30 0 5 0" Style="{StaticResource Button_RadioButton}"   IsChecked="{Binding IsInclude,Converter={StaticResource BoolToBool},Mode=TwoWay}" FontSize="15" Command="{Binding IncludeCommand}"/>
+                    <RadioButton Content="Include"  GroupName="Include"    Width="100" Height="28" Margin="0 0 0 0"  Style="{StaticResource Button_RadioButton}"   IsChecked="{Binding IsInclude,Mode=TwoWay}" FontSize="15"                                       Command="{Binding IncludeCommand}"/>
                 </StackPanel>
             </Border>
 

Venus/Venus_RT/App.config

@@ -28,7 +28,7 @@
 	<connectionStrings>
 		<add name="PostgreSQL"   connectionString="Server=localhost;Port=5432;User Id=postgres;Password=123456;Database=postgres;Enlist=true;Preload Reader=true;" />
 		<!--0是other，1是Venus,2是kepler2300，3是Kepler2200，4是VenusSE，5是VenusDE-->
-		<add name="ConfigType"   connectionString="2"/>
+		<add name="ConfigType"   connectionString="3"/>
 	</connectionStrings>
 	<system.serviceModel>
 		<!--<diagnostics>

Venus/Venus_RT/Config/System_Kepler2300.sccfg

@@ -284,108 +284,6 @@
 		</configs>
 	</configs>
 
-	<!--SE TM-->
-	<configs name="SETM" nameView="SETM">
-		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
-		<config default="127.0.0.1:1103" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
-		<config default="COM160" name="VPAPort" nameView="VP APort" description="TM PreAligner COM口号" max="" min="" paramter="" tag="" unit="" type="String" />
-		<config default="2" name="PMAStationNumber" nameView="PMA Station Number" description="PMA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="3" name="PMBStationNumber" nameView="PMB Station Number" description="PMB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="4" name="PMCStationNumber" nameView="PMC Station Number" description="PMC Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="5" name="VCE1StationNumber" nameView="VCE1 Station Number" description="VCE1 Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="1" name="VPAStationNumber" nameView="VPA Station Number" description="VPA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="760000" name="ATMTargetPressure" nameView="TM ATM Target Pressure" description="TM ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-    <config default="100" name="VACTargetPressure" nameView="TM VAC Target Pressure" description="TM VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="100" name="SoftVentEndPressure" nameView="TM Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-
-		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
-
-		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-
-		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="TM Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="50"  name="WithLLPressureDifference"   nameView="TM LL Pressure Difference"   description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="50"  name="WithPMPressureDifference"   nameView="TM PM Pressure Difference"   description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="0" name="QueryAWCOption"   nameView="Query AWC Option"   description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
-		<configs name="TM_MFC1" nameView="MFC1" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
-			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-
-		</configs>
-		<configs name="DryPump" nameView="Dry Pump" >
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM24" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		</configs>
-    <configs name="PressureControl" nameView="PressureControl" >
-      <config default="true" name="ControlWriteMode" nameView="ControlWriteMode" description="Control Write Mode:True is Flow,False is Pressure" tag="" unit="" type="Bool" />
-      <config default="1" name="TargetMFC" nameView="TargetMFC" description="Target MFC" max="10" min="0" tag="" unit="sccm" type="Double" />
-      <config default="760000" name="TargetPressure" nameView="TargetPressure" description="Target Pressure" max="760000" min="0" tag="" unit="mTorr" type="Double" />
-    </configs>
-	</configs>
-
-	<!--VCE-->
-	<configs  name="VCE1" nameView="VCE1">
-		<config default="COM15" name="Port" nameView="Port" description="" max="" min="0" paramter="" tag="" unit="" type="String" />
-		<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
-		<config default="100" name="SoftVentEndPressure" nameView="VCE Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="750000" name="OutDoorOpenPressure" nameView="Out Door Open Pressure" description="外门开启时，在ATM信号亮下的最小压力值" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		
-		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-
-		<config default="760000" name="ATMTargetPressure" nameView="VCE ATM Target Pressure" description="VCE ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-    <config default="100" name="VACTargetPressure" nameView="VCE VAC Target Pressure" description="VCE VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="25" name="SlotNumber" nameView="VCE SlotNumber" description="槽位个数" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		<configs name="SMIF" nameView="SMIF" >
-			<config default="1" name="Manufacturer" nameView="Manufacturer" description="厂商, 1:Fortrend;" max="2" min="1" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM24" name="Port" nameView="Port" description="serial port" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
-		</configs>
-	</configs>
-
 	<!--PMA-->
 	<configs name="PMA" nameView="PMA" >
 		<config default="0" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
@@ -443,9 +341,9 @@
 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
 		</configs>
 
-		<configs name="Chiller" nameView="Chiller">
+		<!--<configs name="Chiller" nameView="Chiller">
 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
+			--><!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />--><!--
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
@@ -455,7 +353,7 @@
 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
+		</configs>-->
 		<configs name="InnerChiller" nameView="InnerChiller" >
 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -499,16 +397,7 @@
 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-    <configs name="Magnet" nameView="Magnet" visible="false">
-      <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
-      <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
-      <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
-    </configs>
+    
 		<configs name="Rf" nameView="Source RF" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -551,13 +440,7 @@
 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="RFBox" nameView="RF Box" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+		
 		<configs name="BiasRf" nameView="Bias RF" >
 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -719,62 +602,7 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		<configs name="MfcGas9" nameView="MFC Gas9" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
-			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas10" nameView="MFC Gas10" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
-			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas11" nameView="MFC Gas8" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
-			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas12" nameView="MFC Gas12" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
-			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
+
 		<configs name="MfcN2" nameView="MFC N2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
@@ -967,9 +795,9 @@
 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
 		</configs>
-		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
+		<!--<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
 			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+		</configs>-->
 		<configs name="TurboPump" nameView="Turbo Pump">
 			<config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
@@ -998,19 +826,7 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-		</configs>
+
 	</configs>
 
 	<!--PMB-->

Venus/Venus_RT/Config/System_Venus.sccfg

@@ -176,8 +176,8 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		
-		
+
+
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -284,107 +284,6 @@
 		</configs>
 	</configs>
 
-	<!--SE TM-->
-	<configs name="SETM" nameView="SETM">
-		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
-		<config default="127.0.0.1:1103" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
-		<config default="COM160" name="VPAPort" nameView="VP APort" description="TM PreAligner COM口号" max="" min="" paramter="" tag="" unit="" type="String" />
-		<config default="2" name="PMAStationNumber" nameView="PMA Station Number" description="PMA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="3" name="PMBStationNumber" nameView="PMB Station Number" description="PMB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="4" name="PMCStationNumber" nameView="PMC Station Number" description="PMC Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="5" name="VCE1StationNumber" nameView="VCE1 Station Number" description="VCE1 Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="1" name="VPAStationNumber" nameView="VPA Station Number" description="VPA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="760000" name="ATMTargetPressure" nameView="TM ATM Target Pressure" description="TM ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-    <config default="100" name="VACTargetPressure" nameView="TM VAC Target Pressure" description="TM VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="100" name="SoftVentEndPressure" nameView="TM Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-
-		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
-
-		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-
-		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="TM Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="50"  name="WithLLPressureDifference"   nameView="TM LL Pressure Difference"   description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="50"  name="WithPMPressureDifference"   nameView="TM PM Pressure Difference"   description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="0" name="QueryAWCOption"   nameView="Query AWC Option"   description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
-		<configs name="TM_MFC1" nameView="MFC1" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
-			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-
-		</configs>
-		<configs name="DryPump" nameView="Dry Pump" >
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM24" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
-			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		</configs>
-    <configs name="PressureControl" nameView="PressureControl" >
-      <config default="true" name="ControlWriteMode" nameView="ControlWriteMode" description="Control Write Mode:True is Flow,False is Pressure" tag="" unit="" type="Bool" />
-      <config default="1" name="TargetMFC" nameView="TargetMFC" description="Target MFC" max="10" min="0" tag="" unit="sccm" type="Double" />
-      <config default="760000" name="TargetPressure" nameView="TargetPressure" description="Target Pressure" max="760000" min="0" tag="" unit="mTorr" type="Double" />
-    </configs>
-	</configs>
-
-	<!--VCE-->
-	<configs  name="VCE1" nameView="VCE1">
-		<config default="COM15" name="Port" nameView="Port" description="" max="" min="0" paramter="" tag="" unit="" type="String" />
-		<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
-		<config default="100" name="SoftVentEndPressure" nameView="VCE Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		<config default="750000" name="OutDoorOpenPressure" nameView="Out Door Open Pressure" description="外门开启时，在ATM信号亮下的最小压力值" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
-		
-		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
-		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
-
-		<config default="760000" name="ATMTargetPressure" nameView="VCE ATM Target Pressure" description="VCE ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-    <config default="100" name="VACTargetPressure" nameView="VCE VAC Target Pressure" description="VCE VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
-		<config default="25" name="SlotNumber" nameView="VCE SlotNumber" description="槽位个数" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
-		<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		<configs name="SMIF" nameView="SMIF" >
-			<config default="1" name="Manufacturer" nameView="Manufacturer" description="厂商, 1:Fortrend;" max="2" min="1" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM24" name="Port" nameView="Port" description="serial port" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
-		</configs>
-	</configs>
 
 	<!--PMA-->
 	<configs name="PMA" nameView="PMA" >
@@ -455,43 +354,7 @@
 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
+		</configs>	
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -499,16 +362,16 @@
 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-    <configs name="Magnet" nameView="Magnet" visible="false">
-      <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
-      <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
-      <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
-    </configs>
+		<configs name="Magnet" nameView="Magnet" visible="false">
+			<config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
+			<config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
+			<config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
+			<config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
+			<config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
+			<config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
+			<config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
+			<config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
+		</configs>
 		<configs name="Rf" nameView="Source RF" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -551,13 +414,7 @@
 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="RFBox" nameView="RF Box" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+
 		<configs name="BiasRf" nameView="Bias RF" >
 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -719,62 +576,7 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		<configs name="MfcGas9" nameView="MFC Gas9" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
-			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas10" nameView="MFC Gas10" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
-			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas11" nameView="MFC Gas8" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
-			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas12" nameView="MFC Gas12" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
-			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
+
 		<configs name="MfcN2" nameView="MFC N2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
@@ -998,19 +800,6 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-		</configs>
 	</configs>
 
 	<!--PMB-->
@@ -1082,42 +871,6 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM71" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -1125,16 +878,7 @@
 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-    <configs name="Magnet" nameView="Magnet" visible="false">
-      <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
-      <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
-      <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
-    </configs>
+
 		<configs name="Rf" nameView="Source RF" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -1169,13 +913,7 @@
 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="RFBox" nameView="RF Box" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+
 		<configs name="BiasRf" nameView="Bias RF" >
 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -1330,62 +1068,7 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		<configs name="MfcGas9" nameView="MFC Gas9" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
-			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas10" nameView="MFC Gas10" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
-			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas11" nameView="MFC Gas8" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
-			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas12" nameView="MFC Gas12" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
-			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
+
 		<configs name="MfcN2" nameView="MFC N2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
@@ -1614,24 +1297,11 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-		</configs>
 	</configs>
 
 	<!--PMC-->
 	<configs name="PMC" nameView="PMC" >
-		<config default="2" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
+		<config default="1" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
@@ -1647,7 +1317,7 @@
 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
@@ -1690,30 +1360,6 @@
 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM86" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
@@ -1722,39 +1368,18 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM96" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM34" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-    <configs name="Magnet" nameView="Magnet" visible="false">
-      <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
-      <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
-      <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
-    </configs>
+
 		<configs name="Rf" nameView="Source RF" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM59" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM36" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
@@ -1774,25 +1399,18 @@
 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
 		</configs>
-
 		<configs name="Match" nameView="Source Match" >
 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM75" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM42" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="RFBox" nameView="RF Box" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+
 		<configs name="BiasRf" nameView="Bias RF" >
 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -1947,62 +1565,7 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		<configs name="MfcGas9" nameView="MFC Gas9" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
-			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas10" nameView="MFC Gas10" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
-			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas11" nameView="MFC Gas8" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
-			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas12" nameView="MFC Gas12" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
-			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
+
 		<configs name="MfcN2" nameView="MFC N2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
@@ -2200,15 +1763,15 @@
 		</configs>
 
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
-			<config default="COM17" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
 		</configs>
 		<configs name="TurboPump" nameView="Turbo Pump">
-			<config default="COM3" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM8" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
-			<config default="COM77" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM74" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
@@ -2231,26 +1794,11 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-
-		</configs>
 	</configs>
 
 	<!--PMD-->
 	<configs name="PMD" nameView="PMD" >
-		<config default="2" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
+		<config default="1" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
@@ -2266,7 +1814,7 @@
 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
-		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
+		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
@@ -2288,6 +1836,7 @@
 		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 		<config default="80"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
 		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
+
 		<configs name="MFCVerification" nameView="MFC Verification" >
 			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
 			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
@@ -2308,30 +1857,6 @@
 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM27" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="InnerChiller" nameView="InnerChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
-		<configs name="OuterChiller" nameView="OuterChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
@@ -2340,39 +1865,18 @@
 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
 		</configs>
-		<configs name="TopChiller" nameView="TopChiller" >
-			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
-			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
-			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-		</configs>
 		<configs name="DryPump" nameView="Dry Pump" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM29" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM34" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
-    <configs name="Magnet" nameView="Magnet" visible="false">
-      <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
-      <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
-      <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
-      <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
-      <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
-    </configs>
+
 		<configs name="Rf" nameView="Source RF" >
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM50" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM36" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
@@ -2396,20 +1900,14 @@
 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM51" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM42" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="RFBox" nameView="RF Box" >
-			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
-			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
-			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
-			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
-		</configs>
+
 		<configs name="BiasRf" nameView="Bias RF" >
 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
@@ -2564,62 +2062,7 @@
 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
 
 		</configs>
-		<configs name="MfcGas9" nameView="MFC Gas9" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
-			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas10" nameView="MFC Gas10" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
-			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas11" nameView="MFC Gas8" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
-			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
-		<configs name="MfcGas12" nameView="MFC Gas12" >
-			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
-			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
-			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
-			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
-			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
-			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
-			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
-			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
-		</configs>
+
 		<configs name="MfcN2" nameView="MFC N2" >
 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
@@ -2817,15 +2260,15 @@
 		</configs>
 
 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
-			<config default="COM56" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
 		</configs>
 		<configs name="TurboPump" nameView="Turbo Pump">
-			<config default="COM5" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM8" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<configs name="PendulumValve" nameView="Pendulum Valve">
-			<config default="COM80" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
+			<config default="COM74" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
@@ -2848,19 +2291,5 @@
 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
 		</configs>
-		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
-			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
-
-		</configs>
 	</configs>
 </root>

Venus/Venus_RT/Devices/DeviceManager.cs

@@ -170,81 +170,314 @@ namespace Venus_RT.Instances
             device_model_file = PathManager.GetCfgDir() + "PM" + "\\" + jetChamber.ToString() + "\\" + $"{jetChamber.ToString()}DeviceModel.xml";
             Initialize(device_model_file, jetChamber.ToString(), mod, mod.ToString());
 
-            if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
-                SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
-            {
-                AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.Rf));
-            }
+            //if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
+            //    SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
+            //{
+            //    AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.Rf));
+            //}
+
+
+
+            //if (jetChamber == JetChamber.Kepler2300)
+            //{
+            //    if (SC.GetValue<bool>($"{mod}.InnerChiller.EnableChiller") &&
+            //       SC.GetValue<int>($"{mod}.InnerChiller.CommunicationType") == (int)CommunicationType.RS232)
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.InnerChiller.MFG") == (int)ChillerMFG.SMC)
+            //        {
+            //            AddCustomModuleDevice(new SMCChiller(mod, "InnerChiller"));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.InnerChiller.MFG") == (int)ChillerMFG.AIRSYS)
+            //        {
+            //            AddCustomModuleDevice(new AIRSYSChiller(mod, "InnerChiller"));
+            //        }
+            //    }
+            //    if (SC.GetValue<bool>($"{mod}.OuterChiller.EnableChiller") &&
+            //       SC.GetValue<int>($"{mod}.OuterChiller.CommunicationType") == (int)CommunicationType.RS232)
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.OuterChiller.MFG") == (int)ChillerMFG.SMC)
+            //        {
+            //            AddCustomModuleDevice(new SMCChiller(mod, "OuterChiller"));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.OuterChiller.MFG") == (int)ChillerMFG.AIRSYS)
+            //        {
+            //            AddCustomModuleDevice(new AIRSYSChiller(mod, "OuterChiller"));
+            //        }
+            //    }
+            //    if (SC.GetValue<bool>($"{mod}.TopChiller.EnableChiller") &&
+            //      SC.GetValue<int>($"{mod}.TopChiller.CommunicationType") == (int)CommunicationType.RS232)
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.TopChiller.MFG") == (int)ChillerMFG.SMC)
+            //        {
+            //            AddCustomModuleDevice(new SMCChiller(mod, "TopChiller"));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.TopChiller.MFG") == (int)ChillerMFG.AIRSYS)
+            //        {
+            //            AddCustomModuleDevice(new AIRSYSChiller(mod, "TopChiller"));
+            //        }
+            //    }
+            //}
+
+
+            //if (jetChamber == JetChamber.Kepler2200B)
+            //{
+            //    if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+            //                       SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
+            //                       SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.AdTec)
+            //    {
+            //        AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.RFBox));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+            //        SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
+            //        SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+            //    {
+            //        AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.RS232));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+            //        SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.Ethernet &&
+            //        SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+            //    {
+            //        AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.Ethernet));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+            //        SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
+            //    {
+            //        AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.RFBox, v_board_id));
+            //    }
+            //}
+            //if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
+            //SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
+            //SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.AdTec)
+            //{
+            //    AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.Match));
+            //}
+            //else if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
+            //    SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
+            //    SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.Revtech)
+            //{
+            //    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.Match, MatchCommunicationType.RS232));
+            //}
+            //else if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
+            //    SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.Ethernet &&
+            //    SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.Revtech)
+            //{
+            //    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.Match, MatchCommunicationType.Ethernet));
+            //}
+
+
+            //if (jetChamber != JetChamber.Kepler2200A && jetChamber != JetChamber.Kepler2200B)
+            //{
+            //    if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
+            //    {
+            //        AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.BiasMatch));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
+            //    {
+            //        AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.RS232));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.Ethernet &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
+            //    {
+            //        AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.Ethernet));
+            //    }
+            //    else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+            //        SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
+            //    {
+            //        AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.BiasMatch, v_board_id));
+            //    }
+
+            //    if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF"))
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
+            //        SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
+            //        {
+            //            AddCustomModuleDevice(new CometRF(mod, SC.GetStringValue($"{mod}.BiasRf.IPAddress")));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
+            //        {
+            //            AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.BiasRf));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma_Ethercat && startEthercatOK)
+            //        {
+            //            AddCustomModuleDevice(new TruPlasmaRF_Ethercat(mod, Venus_Core.VenusDevice.BiasRf, v_board_id));
+            //        }
+            //    }
+
+            //    AddCustomModuleDevice(new ESC5HighVoltage(mod));
+
+            //    if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
+            // SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
+            //        {
+            //            AddCustomModuleDevice(new SMCChiller(mod, "Chiller"));
+            //        }
+            //        else if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
+            //        {
+            //            AddCustomModuleDevice(new AIRSYSChiller(mod, "Chiller"));
+            //        }
+            //    }
+
+            //    if (SC.GetValue<bool>($"{mod}.EPD.IsEnabled") == true)
+            //    {
+            //        if (SC.GetValue<int>($"{mod}.EPD.EPDType") == 0)
+            //        {
+            //            AddCustomModuleDevice(new EPDClient(mod));
+            //        }
+            //        else
+            //        {
+            //            AddCustomModuleDevice(new EPDDevice(mod));
+            //        }
+            //    }
+            //}
+
+
+            //if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
+            //{
+            //    if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
+            //    {
+            //        AddCustomModuleDevice(new SkyPump(mod));
+            //    }
+            //    else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
+            //    {
+            //        AddCustomModuleDevice(new EdwardsPump(mod));
+            //    }
+            //}
+
+
+            //AddCustomModuleDevice(new AdixenTurboPump(mod));
+            //AddCustomModuleDevice(new PendulumValve(mod));
+
+
 
 
 
-            if (jetChamber == JetChamber.Kepler2300)
+            switch (jetChamber)
             {
-                if (SC.GetValue<bool>($"{mod}.InnerChiller.EnableChiller") &&
-                   SC.GetValue<int>($"{mod}.InnerChiller.CommunicationType") == (int)CommunicationType.RS232)
-                {
-                    if (SC.GetValue<int>($"{mod}.InnerChiller.MFG") == (int)ChillerMFG.SMC)
-                    {
-                        AddCustomModuleDevice(new SMCChiller(mod, "InnerChiller"));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.InnerChiller.MFG") == (int)ChillerMFG.AIRSYS)
-                    {
-                        AddCustomModuleDevice(new AIRSYSChiller(mod, "InnerChiller"));
-                    }
-                }
-                if (SC.GetValue<bool>($"{mod}.OuterChiller.EnableChiller") &&
-                   SC.GetValue<int>($"{mod}.OuterChiller.CommunicationType") == (int)CommunicationType.RS232)
-                {
-                    if (SC.GetValue<int>($"{mod}.OuterChiller.MFG") == (int)ChillerMFG.SMC)
-                    {
-                        AddCustomModuleDevice(new SMCChiller(mod, "OuterChiller"));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.OuterChiller.MFG") == (int)ChillerMFG.AIRSYS)
-                    {
-                        AddCustomModuleDevice(new AIRSYSChiller(mod, "OuterChiller"));
-                    }
-                }
-                if (SC.GetValue<bool>($"{mod}.TopChiller.EnableChiller") &&
-                  SC.GetValue<int>($"{mod}.TopChiller.CommunicationType") == (int)CommunicationType.RS232)
-                {
-                    if (SC.GetValue<int>($"{mod}.TopChiller.MFG") == (int)ChillerMFG.SMC)
-                    {
-                        AddCustomModuleDevice(new SMCChiller(mod, "TopChiller"));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.TopChiller.MFG") == (int)ChillerMFG.AIRSYS)
-                    {
-                        AddCustomModuleDevice(new AIRSYSChiller(mod, "TopChiller"));
-                    }
-                }
-            }
+                case JetChamber.Venus:
+                    AddEscHighVoltage(mod);
+                    AddAdixenTurboPump(mod);
+                    AddEPD(mod);
+                    AddPendulumValve(mod);
+                    AddChiller(ChillerType.Chiller, mod);
+                    AddMatch(mod);
+                    AddBiasMatch(mod);
+                    AddRF(mod);
+                    AddBiasRF(mod);
+                    AddDryPump(mod);
+                    AddCustomDevice(new JetVenusPM(mod));
+                    
+                    break;
+                case JetChamber.Kepler2300:
+                    AddAdixenTurboPump(mod);
+                    //AddEPD(mod);
+                    AddPendulumValve(mod);
+                    AddChiller(ChillerType.InnerChiller, mod);
+                    AddChiller(ChillerType.OuterChiller, mod);
+                    AddChiller(ChillerType.TopChiller, mod);
+
+                    AddMatch(mod);
+                    AddBiasMatch(mod);
+                    AddRF(mod);
+                    AddBiasRF(mod);
+                    AddDryPump(mod);
+                    AddCustomDevice(new JetKepler2300PM(mod));
+                    break;
+                case JetChamber.Kepler2200A:
+
+                    AddAdixenTurboPump(mod);
+                    AddPendulumValve(mod);
+                    AddMatch(mod);
+                    AddRF(mod);
+                    AddDryPump(mod);
+
+                    AddCustomDevice(new JetKepler2200APM(mod));
+                    break;
+                case JetChamber.Kepler2200B:
+
+                    AddAdixenTurboPump(mod);
+                    AddPendulumValve(mod);
+                    AddMatch(mod);
+                    AddRF(mod);
+                    AddDryPump(mod);
+                    AddRFBox(mod);
+
+                    AddCustomDevice(new JetKepler2200BPM(mod));
+                    break;
+                case JetChamber.VenusSE:
+                    AddEscHighVoltage(mod);
+                    AddAdixenTurboPump(mod);
+                    AddEPD(mod);
+                    AddPendulumValve(mod);
+                    AddChiller(ChillerType.Chiller, mod);
+                    AddMatch(mod);
+                    AddBiasMatch(mod);
+                    AddRF(mod);
+                    AddBiasRF(mod);
+                    AddDryPump(mod);                  
+                    AddCustomDevice(new JetVenusSEPM(mod));
+                    break;
+                case JetChamber.VenusDE:
+                    AddEscHighVoltage(mod);
+                    AddAdixenTurboPump(mod);
+                    AddEPD(mod);
+                    AddPendulumValve(mod);
+                    AddChiller(ChillerType.Chiller, mod);
+                    AddMatch(mod);
+                    AddBiasMatch(mod);
+                    //AddRF(mod);
+                    AddBiasRF(mod);
+                    AddDryPump(mod);
 
+                    AddCustomDevice(new JetVenusDEPM(mod));
+                    break;
+            }
 
-            if (jetChamber == JetChamber.Kepler2200B)
+        }
+        private void AddEPD(ModuleName mod)
+        {
+            if (SC.GetValue<bool>($"{mod}.EPD.IsEnabled") == true)
             {
-                if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
-                                   SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
-                                   SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.AdTec)
+                if (SC.GetValue<int>($"{mod}.EPD.EPDType") == 0)
                 {
-                    AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.RFBox));
+                    AddCustomModuleDevice(new EPDClient(mod));
                 }
-                else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
-                    SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
-                    SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+                else
                 {
-                    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.RS232));
+                    AddCustomModuleDevice(new EPDDevice(mod));
                 }
-                else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
-                    SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.Ethernet &&
-                    SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+            }
+        }
+        private void AddAdixenTurboPump(ModuleName mod)
+        {
+            AddCustomModuleDevice(new AdixenTurboPump(mod));
+        }
+        private void AddPendulumValve(ModuleName mod)
+        { 
+            AddCustomModuleDevice(new PendulumValve(mod));
+        }
+        private void AddChiller(ChillerType chillerType, ModuleName mod)
+        {
+            if (SC.GetValue<bool>($"{mod}.{chillerType}.EnableChiller") &&
+                SC.GetValue<int>($"{mod}.{chillerType}.CommunicationType") == (int)CommunicationType.RS232)
+            {
+                if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.SMC)
                 {
-                    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.Ethernet));
+                    AddCustomModuleDevice(new SMCChiller(mod, chillerType.ToString()));
                 }
-                else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
-                    SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
+                else if (SC.GetValue<int>($"{mod}.{chillerType}.MFG") == (int)ChillerMFG.AIRSYS)
                 {
-                    AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.RFBox, v_board_id));
+                    AddCustomModuleDevice(new AIRSYSChiller(mod, chillerType.ToString()));
                 }
             }
+        }
+        private void AddMatch(ModuleName mod)
+        {
             if (SC.GetValue<bool>($"{mod}.Match.EnableMatch") &&
             SC.GetValue<int>($"{mod}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
             SC.GetValue<int>($"{mod}.Match.MFG") == (int)MatchMFG.AdTec)
@@ -263,80 +496,88 @@ namespace Venus_RT.Instances
             {
                 AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.Match, MatchCommunicationType.Ethernet));
             }
-
-
-            if (jetChamber != JetChamber.Kepler2200A && jetChamber != JetChamber.Kepler2200B)
+        }
+        private void AddRFBox(ModuleName mod)
+        {
+            if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+                                   SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
+                                   SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.AdTec)
             {
-                if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
-                {
-                    AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.BiasMatch));
-                }
-                else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
-                {
-                    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.RS232));
-                }
-                else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.Ethernet &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
-                {
-                    AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.Ethernet));
-                }
-                else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
-                    SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
-                {
-                    AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.BiasMatch, v_board_id));
-                }
-
-                if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF"))
+                AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.RFBox));
+            }
+            else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+                SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.RS232 &&
+                SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+            {
+                AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.RS232));
+            }
+            else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+                SC.GetValue<int>($"{mod}.RFBox.CommunicationType") == (int)CommunicationType.Ethernet &&
+                SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Revtech)
+            {
+                AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.RFBox, MatchCommunicationType.Ethernet));
+            }
+            else if (SC.GetValue<bool>($"{mod}.RFBox.EnableMatch") &&
+                SC.GetValue<int>($"{mod}.RFBox.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
+            {
+                AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.RFBox, v_board_id));
+            }
+        }
+        private void AddBiasMatch(ModuleName mod)
+        {
+            if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+                       SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
+                       SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
+            {
+                AddCustomModuleDevice(new AdTecMatch(mod, Venus_Core.VenusDevice.BiasMatch));
+            }
+            else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+                SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
+                SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
+            {
+                AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.RS232));
+            }
+            else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+                SC.GetValue<int>($"{mod}.BiasMatch.CommunicationType") == (int)CommunicationType.Ethernet &&
+                SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
+            {
+                AddCustomModuleDevice(new RevtechMatch(mod, Venus_Core.VenusDevice.BiasMatch, MatchCommunicationType.Ethernet));
+            }
+            else if (SC.GetValue<bool>($"{mod}.BiasMatch.EnableBiasMatch") &&
+                SC.GetValue<int>($"{mod}.BiasMatch.MFG") == (int)MatchMFG.Lz_Ethercat && startEthercatOK)
+            {
+                AddCustomModuleDevice(new LzMatch_Ethercat(mod, Venus_Core.VenusDevice.BiasMatch, v_board_id));
+            }
+        }
+        private void AddRF(ModuleName mod)
+        {
+            if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
+                   SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
+            {
+                AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.Rf));
+            }
+        }
+        private void AddBiasRF(ModuleName mod)
+        {
+            if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF"))
+            {
+                if (SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
+                SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
                 {
-                    if (SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
-                    SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
-                    {
-                        AddCustomModuleDevice(new CometRF(mod, SC.GetStringValue($"{mod}.BiasRf.IPAddress")));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
-                    {
-                        AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.BiasRf));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma_Ethercat && startEthercatOK)
-                    {
-                        AddCustomModuleDevice(new TruPlasmaRF_Ethercat(mod, Venus_Core.VenusDevice.BiasRf, v_board_id));
-                    }
+                    AddCustomModuleDevice(new CometRF(mod, SC.GetStringValue($"{mod}.BiasRf.IPAddress")));
                 }
-
-                AddCustomModuleDevice(new ESC5HighVoltage(mod));
-
-                if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
-             SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
+                else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
                 {
-                    if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
-                    {
-                        AddCustomModuleDevice(new SMCChiller(mod, "Chiller"));
-                    }
-                    else if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
-                    {
-                        AddCustomModuleDevice(new AIRSYSChiller(mod, "Chiller"));
-                    }
+                    AddCustomModuleDevice(new AdTecGenerator(mod, Venus_Core.VenusDevice.BiasRf));
                 }
-
-                if (SC.GetValue<bool>($"{mod}.EPD.IsEnabled") == true)
+                else if (SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma_Ethercat && startEthercatOK)
                 {
-                    if (SC.GetValue<int>($"{mod}.EPD.EPDType") == 0)
-                    {
-                        AddCustomModuleDevice(new EPDClient(mod));
-                    }
-                    else
-                    {
-                        AddCustomModuleDevice(new EPDDevice(mod));
-                    }
+                    AddCustomModuleDevice(new TruPlasmaRF_Ethercat(mod, Venus_Core.VenusDevice.BiasRf, v_board_id));
                 }
             }
-
-
+        }
+        private void AddDryPump(ModuleName mod)
+        {
             if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
             {
                 if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
@@ -348,38 +589,12 @@ namespace Venus_RT.Instances
                     AddCustomModuleDevice(new EdwardsPump(mod));
                 }
             }
-
-
-            AddCustomModuleDevice(new AdixenTurboPump(mod));
-            AddCustomModuleDevice(new PendulumValve(mod));
-
-
-
-
-
-            switch (jetChamber)
-            {
-                case JetChamber.Venus:
-                    AddCustomDevice(new JetVenusPM(mod));
-                    break;
-                case JetChamber.Kepler2300:
-                    AddCustomDevice(new JetKepler2300PM(mod));
-                    break;
-                case JetChamber.Kepler2200A:
-                    AddCustomDevice(new JetKepler2200APM(mod));
-                    break;
-                case JetChamber.Kepler2200B:
-                    AddCustomDevice(new JetKepler2200BPM(mod));
-                    break;
-                case JetChamber.VenusSE:
-                    AddCustomDevice(new JetVenusSEPM(mod));
-                    break;
-                case JetChamber.VenusDE:
-                    AddCustomDevice(new JetVenusDEPM(mod));
-                    break;
-            }
-
         }
+        private void AddEscHighVoltage(ModuleName mod)
+        {
+            AddCustomModuleDevice(new ESC5HighVoltage(mod));
+        }
+
 
         private void InitTM(ModuleName mod)
         {
@@ -414,7 +629,6 @@ namespace Venus_RT.Instances
 
             AddCustomDevice(new JetTM());
         }
-
         private void InitSETM(ModuleName mod)
         {
             Initialize(device_model_file_SEMF, mod.ToString(), mod, mod.ToString());
@@ -431,7 +645,6 @@ namespace Venus_RT.Instances
             }
             AddCustomDevice(new HongHuTM());
         }
-
         private WaferSize MapWaferSize(int value)
         {
             switch (value)

Venus/Venus_RT/Devices/JetKepler2300PM.cs

@@ -400,18 +400,18 @@ namespace Venus_RT.Devices
             _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
             _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");
 
-            if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
-                SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
-            {
-                if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
-                {
-                    _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
-                }
-                else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
-                {
-                    _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
-                }
-            }
+            //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
+            //    SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
+            //{
+            //    if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
+            //    {
+            //        _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
+            //    }
+            //    else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
+            //    {
+            //        _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
+            //    }
+            //}
 
             if (SC.GetValue<bool>($"{Module}.InnerChiller.EnableChiller") &&
                 SC.GetValue<int>($"{Module}.InnerChiller.CommunicationType") == (int)CommunicationType.RS232)

Venus/Venus_RT/Modules/Schedulers/TransferModule.cs

@@ -3,6 +3,7 @@ using Venus_RT.Modules.Schedulers;
 using Venus_RT.Scheduler;
 using Aitex.Core.RT.Routine;
 using System.Collections.Generic;
+using Venus_Core;
 
 namespace Venus_RT.Modules
 {
@@ -10,7 +11,7 @@ namespace Venus_RT.Modules
     {
         protected SchedulerEfemRobot _efemRobot = new SchedulerEfemRobot();
         protected SchedulerTMRobot _tmRobot = new SchedulerTMRobot();
-        protected SchedulerSETMRobot _setm = new SchedulerSETMRobot(ModuleName.SETM);
+        protected SchedulerSETMRobot _setm ;
 
         protected SchedulerLoadPort _lp1 = new SchedulerLoadPort(ModuleName.LP1);
         protected SchedulerLoadPort _lp2 = new SchedulerLoadPort(ModuleName.LP2);
@@ -32,7 +33,10 @@ namespace Venus_RT.Modules
 
         public TransferModule()
         {
-
+            if (RtInstance.ConfigType == ConfigType.VenusSE)
+            {
+                _setm = new SchedulerSETMRobot(ModuleName.SETM);
+            }
         }
 
 

Venus/Venus_RT/Modules/TM/MFPMPickRoutine.cs

@@ -141,7 +141,6 @@ namespace Venus_RT.Modules.TM
                 .Delay(PickStep.PickDelay, _pickDelayTime)
                 .Run(PickStep.ArmRetract,            ArmRetract,         WaitRobotRetractDone)
                 .Run(PickStep.ClosePMSlitDoor,       ClosePMSlitDoor,     ClosePMSlitDoorIsOK)
-                .Run(PickStep.OpenPMSlitDoor,          OpenPMSlitDoor, OpenPMSlitDoorIsOK)
 
                 .End(PickStep.NotifyDone,            NotifyPMDone,                               _delay_50ms);
                 break;

Venus/Venus_Simulator/Instances/SystemConfig.cs

@@ -36,6 +36,15 @@ namespace Venus_Simulator.Instances
                 throw;
             }
         }
+        public enum ConfigType
+        {
+            Other,
+            Venus,
+            Kepler2300,
+            Kepler2200,
+            VenusSE,
+            VenusDE
+        }
         public void Initialize()
         {
             var current_path = Environment.CurrentDirectory;
@@ -44,8 +53,8 @@ namespace Venus_Simulator.Instances
             string rtConfigPath = current_path + "\\Venus_RT\\bin\\Debug\\Venus_RT.exe.config";
             var configType=GetConfig(rtConfigPath).ConnectionStrings.ConnectionStrings["ConfigType"].ConnectionString;
             if (configType != "0")
-            {
-                pathName = $"_{configType}";
+            {          
+                pathName = $"_{(ConfigType)Enum.Parse(typeof(ConfigType), configType)}";
             }