 lixiang
|
9f512c69c9
优化efem动画
|
2 gadi atpakaļ |
 Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
|
2 gadi atpakaļ |
 sangwq
|
8d21b41b42
AutoCycle enhancement.
|
2 gadi atpakaļ |
|
lixiang
|
46aa26403c
优化压差开siltdoor功能
|
2 gadi atpakaļ |
 zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
2 gadi atpakaļ |
|
lixiang
|
fc317f2d07
添加控压状态，开关slitdoor，check压差的功能
|
2 gadi atpakaļ |
|
lixiang
|
00d42e8c17
efem动画优化
|
2 gadi atpakaļ |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
|
2 gadi atpakaļ |
|
Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
2 gadi atpakaļ |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
2 gadi atpakaļ |
|
lixiang
|
afb706578a
添加CycleCount/WaferCount显示
|
2 gadi atpakaļ |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
2 gadi atpakaļ |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 gadi atpakaļ |
|
Intern01
|
73729331e4
Simulator Device Update
|
2 gadi atpakaļ |
|
Intern01
|
c5abe7c813
Simulator Communication Port Update
|
2 gadi atpakaļ |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 gadi atpakaļ |
|
lixiang
|
9c46c55950
解决冲突
|
2 gadi atpakaļ |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
2 gadi atpakaļ |
|
zhouhr
|
bcc9d2faf8
1、Chamber add the waferID
|
2 gadi atpakaļ |
|
Intern01
|
60e9a04892
Simulator LP3 Update
|
2 gadi atpakaļ |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
2 gadi atpakaļ |
|
Intern01
|
211accc82b
PMD&Simulator update
|
2 gadi atpakaļ |
|
zhouhr
|
296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
|
2 gadi atpakaļ |
|
sangwq
|
344d734fff
ATM Transfer.
|
2 gadi atpakaļ |
|
lixiang
|
aad749230c
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 gadi atpakaļ |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
|
2 gadi atpakaļ |
|
zhouhr
|
2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
|
2 gadi atpakaļ |
|
lixiang
|
bb6f18ea1a
修改配置文件名，合并代码
|
2 gadi atpakaļ |
|
Intern01
|
b7129c8da5
PM&Simulator update
|
2 gadi atpakaļ |
|
zhouhr
|
c8ec52ec1e
修复下手臂无法右键的问题
|
2 gadi atpakaļ |
