 hecl
|
58b65c3ff0
VenusSE Simulator PM Update
|
il y a 1 an |
|
hecl
|
afc3b9494f
VenusSE TM pressurecontrol update
|
il y a 1 an |
 zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
il y a 1 an |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
il y a 1 an |
|
zhouhr
|
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
|
il y a 1 an |
 lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
|
il y a 1 an |
|
zhouhr
|
bc73e24685
Add the Monitor of Venus_UI && Add the Status Of DatabaseManager
|
il y a 1 an |
|
zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
il y a 1 an |
|
zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
il y a 1 an |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
il y a 1 an |
|
zhouhr
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
|
il y a 1 an |
|
zhouhr
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
il y a 1 an |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
il y a 1 an |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
il y a 1 an |
 sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
il y a 1 an |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
il y a 1 an |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
il y a 1 an |
|
Intern01
|
aaff066e93
EFEM Align UI RT 更新
|
il y a 1 an |
|
sangwq
|
68c484e4c3
兼容去胶机使用的Endpoint.
|
il y a 1 an |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
il y a 1 an |
|
Intern01
|
c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
|
il y a 1 an |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
il y a 1 an |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
il y a 1 an |
|
lixiang
|
530ddcbae7
优化topview界面
|
il y a 1 an |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
il y a 1 an |
|
sangwq
|
f211c4242f
Efem module raw design.
|
il y a 1 an |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
il y a 1 an |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
il y a 2 ans |
|
sangwq
|
44ec74603f
TM Transfer
|
il y a 2 ans |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
il y a 2 ans |
