VenusSE Simulator PM Update

Venus/Framework/Common/IOCore/IOManager.cs

@@ -51,7 +51,8 @@ namespace MECF.Framework.Common.IOCore
         {
             string reason = string.Empty;
             string installedModules = SC.GetStringValue("System.InstalledModules");
-
+            string[] ary= installedModules.Split(',');
+            List<string> strList = new List<string>(ary);
             string[] pms = { "PMA", "PMB", "PMC", "PMD" };
             for (int i = 0; i < pms.Length; i++)
             {
@@ -68,16 +69,14 @@ namespace MECF.Framework.Common.IOCore
             }
             if (installedModules.Contains("SETM"))
             {
-                var InterlockTMConfigFile = PathManager.GetCfgDir() + "TM" + "\\" + "TMSEInterlock.xml";
+                var InterlockTMConfigFile = PathManager.GetCfgDir() + "TM" + "\\" + "SETMInterlock.xml";
                 if (!InterlockManager.Instance.Initialize("TM", InterlockTMConfigFile, _doMap, _diMap, out reason))
                 {
                     throw new Exception(string.Format("TM interlock define file found error: \r\n {0}", reason));
                 }
             }
-            if (installedModules.Contains("TM")&& !installedModules.Contains("SE"))
+            if (strList.Contains("TM"))
             {
-  
-                //int s= SC.GetValue<int>($"TM.TMType");
                 var InterlockTMConfigFile = PathManager.GetCfgDir() + "TM" + "\\" + "TMInterlock.xml";
 
                 if (!InterlockManager.Instance.Initialize("TM", InterlockTMConfigFile, _doMap, _diMap, out reason))

Venus/Venus_RT/Config/PM/VenusSE/VenusSEInterlock.xml

@@ -0,0 +1,321 @@
+<?xml version="1.0" encoding="utf-8"?>
+<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
+
+  <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"			tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"	tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV51" value="true" tip="PV51" tip.zh-CN="" tip.en-US="DO-57" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV52" value="true" tip="PV52" tip.zh-CN="" tip.en-US="DO-58" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV61" value="true" tip="PV61" tip.zh-CN="" tip.en-US="DO-59" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV62" value="true" tip="PV62" tip.zh-CN="" tip.en-US="DO-60" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV71" value="true" tip="PV71" tip.zh-CN="" tip.en-US="DO-61" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV72" value="true" tip="PV72" tip.zh-CN="" tip.en-US="DO-62" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV81" value="true" tip="PV81" tip.zh-CN="" tip.en-US="DO-63" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV82" value="true" tip="PV82" tip.zh-CN="" tip.en-US="DO-64" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV91" value="true" tip="PV91" tip.zh-CN="" tip.en-US="DO-65" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PV92" value="true" tip="PV92" tip.zh-CN="" tip.en-US="DO-66" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PVA1" value="true" tip="PVA1" tip.zh-CN="" tip.en-US="DO-67" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PVA2" value="true" tip="PVA2" tip.zh-CN=""	tip.en-US="DO-68" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PVB1" value="true" tip="PVB1" tip.zh-CN="" tip.en-US="DO-69" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_PVB2" value="true" tip="PVB2" tip.zh-CN="" tip.en-US="DO-70" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+
+  <Action do="DO_PVC1" value="true" tip="PVC1" tip.zh-CN="" tip.en-US="DO-71" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />    
+    <Limit do="DO_Soft_Pumping_Valve"		value="false" tip="Soft Pumping Valve"		tip.zh-CN="" tip.en-US="DO-22" />
+    <Limit do="DO_Fast_Pumping_Valve"	value="false" tip="Fast Pumping Valve"	tip.zh-CN="" tip.en-US="DO-23" />
+  </Action>
+
+  <Action do="DO_PVC2" value="true" tip="PVC2" tip.zh-CN="" tip.en-US="DO-72" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+
+  <Action do="DO_MFC9_Valve" value="true" tip="MFC9 Valve" tip.zh-CN="" tip.en-US="DO-52" >
+    <Limit di="DI_Lid_Closed"		value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
+    <Limit di="DI_TM_Slit_Door_Closed"	value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-59" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_Gas_Box_Door_Switch"		value="true" tip="DI Gas Box Door SW"		tip.zh-CN="" tip.en-US="DI-51" />
+    <Limit di="DI_Gas_Box_Pressure_Switch"	value="true" tip="DI Gas Box Pressure SW"	tip.zh-CN="" tip.en-US="DI-52" />
+  </Action>
+  
+  <Action do="DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
+    <Limit di="DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
+  </Action>
+
+  <Action do="DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
+    <Limit di="DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
+  </Action>
+
+  <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Turbo Pump Pumping Valve" tip.zh-CN="" tip.en-US="DO-29" >
+    <Limit di="DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
+  </Action>
+
+  <Action do="DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
+    <Limit di="DI_CDA_Pressure"				value="true" tip="DI CDA Pressure"				tip.zh-CN="" tip.en-US="DI-12" />
+
+  </Action>
+
+  <Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
+    <Limit di="DI_PM_VAC_SW"				value="true" tip="DI PM Vacuum SW"				tip.zh-CN="" tip.en-US="DI-2" />
+    <Limit di="DI_Slit_Door_Close_POS"		value="true" tip="DI Slit Door Close POS"		tip.zh-CN="" tip.en-US="DI-11" />
+  </Action>
+
+  <Action do="DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
+    <Limit di="DI_CHB_Wall_OT_SW_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
+  </Action>
+
+
+
+</Interlock>

Venus/Venus_RT/Config/PM/VenusSE/VenusSEIoDefine.xml

@@ -1,338 +1,338 @@
 <?xml version="1.0"?>
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 
-	<!--文件根据IO LIST_PM_VNS_SE 20230905.xlsx生成-->
-	<!--生成时间：09/06/2023 10:44:54-->
-	<Dig_In>
-		<DI_ITEM Index="0"   Name="DI_Lid_Closed" Device="" Addr="w20.00" />
-		<DI_ITEM Index="1"   Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
-		<DI_ITEM Index="2"   Name="DI_PM_VAC_Switch" Device="" Addr="w20.02" />
-		<DI_ITEM Index="3"   Name="DI_Plate_Water_Flow_Switch" Device="" Addr="w20.03" />
-		<DI_ITEM Index="4"   Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
-		<DI_ITEM Index="5"   Name="DI_Lift_Pin_Up_Position" Device="" Addr="w20.05" />
-		<DI_ITEM Index="6"   Name="DI_Lift_Pin_Down_Position" Device="" Addr="w20.06" />
-		<DI_ITEM Index="7"   Name="DI_RF_HV_Interlock_OK" Device="Lid_VAC_Slit_Door_MATCH_INT_OK." Addr="w20.07" />
-		<DI_ITEM Index="8"   Name="" />
-		<DI_ITEM Index="9"   Name="DI_Turbo_Pump_Interlock" Device="Q7.12同步" Addr="w20.09" />
-		<DI_ITEM Index="10"  Name="DI_Slit_Door_Open_Position" Device="" Addr="w20.10" />
-		<DI_ITEM Index="11"  Name="DI_Slit_Door_Close_Position" Device="" Addr="w20.11" />
-		<DI_ITEM Index="12"  Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
-		<DI_ITEM Index="13"  Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.13" />
-		<DI_ITEM Index="14"  Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.14" />
-		<DI_ITEM Index="15"  Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="VG_PPH_真空值比较" Addr="w20.15" />
-		<DI_ITEM Index="16"  Name="DI_GASLINE_TC_Deviation_out_of_range" Device="值比较" Addr="w21.00" />
-		<DI_ITEM Index="17"  Name="DI_GASLINE_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.01" />
-		<DI_ITEM Index="18"  Name="DI_GASLINE_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.02" />
-		<DI_ITEM Index="19"  Name="DI_GASLINE_Heater_On_FB" Device="Q7.10同步" Addr="w21.03" />
-		<DI_ITEM Index="20"  Name="" />
-		<DI_ITEM Index="21"  Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
-		<DI_ITEM Index="22"  Name="" />
-		<DI_ITEM Index="23"  Name="DI_Valve_Heater_On_FB" Device="Q7.13同步" Addr="w21.07" />
-		<DI_ITEM Index="24"  Name="" />
-		<DI_ITEM Index="25"  Name="DI_Foreline_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.09" />
-		<DI_ITEM Index="26"  Name="" />
-		<DI_ITEM Index="27"  Name="DI_Foreline_Heater_On_FB" Device="Q7.14同步" Addr="w21.11" />
-		<DI_ITEM Index="28"  Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="值比较" Addr="w21.12" />
-		<DI_ITEM Index="29"  Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.13" />
-		<DI_ITEM Index="30"  Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.14" />
-		<DI_ITEM Index="31"  Name="DI_CHB_Wall_Heater_On_FB" Device="Q7.15同步" Addr="w21.15" />
-		<DI_ITEM Index="32"  Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
-		<DI_ITEM Index="33"  Name=""/>
-		<DI_ITEM Index="34"  Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
-		<DI_ITEM Index="35"  Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
-		<DI_ITEM Index="36"  Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
-		<DI_ITEM Index="37"  Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
-		<DI_ITEM Index="38"  Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
-		<DI_ITEM Index="39"  Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
-		<DI_ITEM Index="40"  Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
-		<DI_ITEM Index="41"  Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
-		<DI_ITEM Index="42"  Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
-		<DI_ITEM Index="43"  Name="DI_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="Gas Box" />
-		<DI_ITEM Index="44"  Name="" />
-		<DI_ITEM Index="45"  Name="" />
-		<DI_ITEM Index="46"  Name="" />
-		<DI_ITEM Index="47"  Name="" />
-		<DI_ITEM Index="48"  Name="" />
-		<DI_ITEM Index="49"  Name="" />
-		<DI_ITEM Index="50"  Name="" />
-		<DI_ITEM Index="51"  Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
-		<DI_ITEM Index="52"  Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
-		<DI_ITEM Index="53"  Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
-		<DI_ITEM Index="54"  Name="" />
-		<DI_ITEM Index="55"  Name="DI_SOURCE_RF_Water_Flow_Switch" Device="" Addr="w23.07" />
-		<DI_ITEM Index="56"  Name="" />
-		<DI_ITEM Index="57"  Name="" />
-		<DI_ITEM Index="58"  Name="" />
-		<DI_ITEM Index="59"  Name="DI_TM_Slit_Door_Closed" Device="" Addr="w23.11" />
-		<DI_ITEM Index="60"  Name="" />
-		<DI_ITEM Index="61"  Name="" />
-		<DI_ITEM Index="62"  Name="DI_Source_Match_interlock_ok" Device="" Addr="w23.14" />
-		<DI_ITEM Index="63"  Name="DI_Bias_Match_interlock_ok" Device="" Addr="w23.15" />
-		<DI_ITEM Index="64"  Name="" />
-		<DI_ITEM Index="65"  Name="" />
-		<DI_ITEM Index="66"  Name="DI_MFC9_Pressure_Switch" Device="PG9" Addr="w24.02" Note="Gas Box" />
-		<DI_ITEM Index="67"  Name="DI_MFC10_Pressure_Switch" Device="PG10" Addr="w24.03" Note="Gas Box" />
-		<DI_ITEM Index="68"  Name="DI_MFC11_Pressure_Switch" Device="PG11_SPARE_" Addr="w24.04" Note="Gas Box" />
-		<DI_ITEM Index="69"  Name="DI_MFC12_Pressure_Switch" Device="PG12" Addr="w24.05" Note="Gas Box" />
-		<DI_ITEM Index="70"  Name="" />
-		<DI_ITEM Index="71"  Name="" />
-		<DI_ITEM Index="72"  Name="" />
-		<DI_ITEM Index="73"  Name="" />
-		<DI_ITEM Index="74"  Name="" />
-		<DI_ITEM Index="75"  Name="" />
-		<DI_ITEM Index="76"  Name="" />
-		<DI_ITEM Index="77"  Name="" />
-		<DI_ITEM Index="78"  Name="" />
-		<DI_ITEM Index="79"  Name="" />
-		<DI_ITEM Index="80"  Name="" />
-		<DI_ITEM Index="81"  Name="" />
-		<DI_ITEM Index="82"  Name="" />
-		<DI_ITEM Index="83"  Name="" />
-		<DI_ITEM Index="84"  Name="" />
-		<DI_ITEM Index="85"  Name="" />
-		<DI_ITEM Index="86"  Name="" />
-		<DI_ITEM Index="87"  Name="" />
-		<DI_ITEM Index="88"  Name="" />
-		<DI_ITEM Index="89"  Name="" />
-		<DI_ITEM Index="90"  Name="" />
-		<DI_ITEM Index="91"  Name="" />
-		<DI_ITEM Index="92"  Name="" />
-		<DI_ITEM Index="93"  Name="" />
-		<DI_ITEM Index="94"  Name="" />
-		<DI_ITEM Index="95"  Name="" />
-		<DI_ITEM Index="96"  Name="" />
-		<DI_ITEM Index="97"  Name="" />
-		<DI_ITEM Index="98"  Name="" />
-		<DI_ITEM Index="99"  Name="" />
-		<DI_ITEM Index="100" Name="" />
-		<DI_ITEM Index="101" Name="" />
-		<DI_ITEM Index="102" Name="" />
-		<DI_ITEM Index="103" Name="" />
-		<DI_ITEM Index="104" Name="" />
-		<DI_ITEM Index="105" Name="" />
-		<DI_ITEM Index="106" Name="" />
-		<DI_ITEM Index="107" Name="" />
-		<DI_ITEM Index="108" Name="" />
-		<DI_ITEM Index="109" Name="" />
-		<DI_ITEM Index="110" Name="" />
-		<DI_ITEM Index="111" Name="" />
-	</Dig_In>
-	<Dig_Out>
-		<DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
-		<DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
-		<DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
-		<DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
-		<DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
-		<DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
-		<DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
-		<DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
-		<DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
-		<DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
-		<DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
-		<DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
-		<DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
-		<DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
-		<DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
-		<DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
-		<DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
-		<DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
-		<DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
-		<DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
-		<DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
-		<DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
-		<DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
-		<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
-		<DO_ITEM Index="24" Name=""/>
-		<DO_ITEM Index="25" Name=""/>
-		<DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
-		<DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
-		<DO_ITEM Index="28" Name="" />
-		<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
-		<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
-		<DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
-		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
-		<DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
-		<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
-		<DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
-		<DO_ITEM Index="36" Name=""/>
-		<DO_ITEM Index="37" Name=""/>
-		<DO_ITEM Index="38" Name=""/>
-		<DO_ITEM Index="39" Name=""/>
-		<DO_ITEM Index="40" Name=""/>
-		<DO_ITEM Index="41" Name=""/>
-		<DO_ITEM Index="42" Name=""/>
-		<DO_ITEM Index="43" Name=""/>
-		<DO_ITEM Index="44" Name=""/>
-		<DO_ITEM Index="45" Name=""/>
-		<DO_ITEM Index="46" Name="DO_Gasline_Heater_On" Device="" Addr="w2.14" />
-		<DO_ITEM Index="47" Name="" />
-		<DO_ITEM Index="48" Name="DO_PVHe3" Device="GPVHe3" Addr="w3.00" />
-		<DO_ITEM Index="49" Name="DO_He_ISO" Device="PV9" Addr="w3.01" />
-		<DO_ITEM Index="50" Name="" />
-		<DO_ITEM Index="51" Name="" />
-		<DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
-		<DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
-		<DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
-		<DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
-		<DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
-		<DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
-		<DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
-		<DO_ITEM Index="59" Name="DO_PV61" Device="GPV61" Addr="w3.11" />
-		<DO_ITEM Index="60" Name="DO_PV62" Device="GPV62" Addr="w3.12" />
-		<DO_ITEM Index="61" Name="DO_PV71" Device="GPV71" Addr="w3.13" />
-		<DO_ITEM Index="62" Name="DO_PV72" Device="GPV72" Addr="w3.14" />
-		<DO_ITEM Index="63" Name="DO_PV81" Device="GPV81" Addr="w3.15" />
-		<DO_ITEM Index="64" Name="DO_PV82" Device="GPV82" Addr="w4.00" />
-		<DO_ITEM Index="65" Name="DO_PV91" Device="GPV91" Addr="w4.01" />
-		<DO_ITEM Index="66" Name="DO_PV92" Device="GPV92" Addr="w4.02" />
-		<DO_ITEM Index="67" Name="DO_PVA1" Device="GPVA1" Addr="w4.03" />
-		<DO_ITEM Index="68" Name="DO_PVA2" Device="GPVA2" Addr="w4.04" />
-		<DO_ITEM Index="69" Name="DO_PVB1" Device="GPVB1" Addr="w4.05" />
-		<DO_ITEM Index="70" Name="DO_PVB2" Device="GPVB2" Addr="w4.06" />
-		<DO_ITEM Index="71" Name="DO_PVC1" Device="GPVC1" Addr="w4.07" />
-		<DO_ITEM Index="72" Name="DO_PVC2" Device="GPVC2" Addr="w4.08" />
-		<DO_ITEM Index="73" Name="" />
-		<DO_ITEM Index="74" Name="" />
-		<DO_ITEM Index="75" Name="" />
-		<DO_ITEM Index="76" Name="" />
-		<DO_ITEM Index="77" Name="" />
-		<DO_ITEM Index="78" Name="" />
-		<DO_ITEM Index="79" Name="" />
-		<DO_ITEM Index="80" Name="" />
-		<DO_ITEM Index="81" Name="" />
-		<DO_ITEM Index="82" Name="" />
-		<DO_ITEM Index="83" Name="" />
-		<DO_ITEM Index="84" Name="" />
-		<DO_ITEM Index="85" Name="" />
-		<DO_ITEM Index="86" Name="" />
-		<DO_ITEM Index="87" Name="" />
-		<DO_ITEM Index="88" Name="" />
-		<DO_ITEM Index="89" Name="" />
-		<DO_ITEM Index="90" Name="" />
-		<DO_ITEM Index="91" Name="" />
-		<DO_ITEM Index="92" Name="" />
-		<DO_ITEM Index="93" Name="" />
-		<DO_ITEM Index="94" Name="" />
-		<DO_ITEM Index="95" Name="" />
-		<DO_ITEM Index="96" Name="" />
-		<DO_ITEM Index="97" Name="" />
-		<DO_ITEM Index="98" Name="" />
-		<DO_ITEM Index="99" Name="" />
-		<DO_ITEM Index="100" Name="" />
-		<DO_ITEM Index="101" Name="" />
-		<DO_ITEM Index="102" Name="" />
-		<DO_ITEM Index="103" Name="" />
-		<DO_ITEM Index="104" Name="" />
-		<DO_ITEM Index="105" Name="" />
-		<DO_ITEM Index="106" Name="" />
-		<DO_ITEM Index="107" Name="" />
-		<DO_ITEM Index="108" Name="" />
-		<DO_ITEM Index="109" Name="" />
-		<DO_ITEM Index="110" Name="" />
-		<DO_ITEM Index="111" Name="" />
-	</Dig_Out>
-	<Ana_Out>
-		<AO_ITEM Index="0"  Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
-		<AO_ITEM Index="1"  Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
-		<AO_ITEM Index="2"  Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
-		<AO_ITEM Index="3"  Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
-		<AO_ITEM Index="4"  Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
-		<AO_ITEM Index="5"  Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
-		<AO_ITEM Index="6"  Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
-		<AO_ITEM Index="7"  Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
-		<AO_ITEM Index="8"  Name="AO_He_Pressure_Setpoint" Device="" Addr="d1016" Note="He MFC" />
-		<AO_ITEM Index="9"  Name=""/>
-		<AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
-		<AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
-		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
-		<AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
-		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
-		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
-		<AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
-		<AO_ITEM Index="17" Name=""/>
-		<AO_ITEM Index="18" Name=""/>
-		<AO_ITEM Index="19" Name="" />
-		<AO_ITEM Index="20" Name="" />
-		<AO_ITEM Index="21" Name="" />
-		<AO_ITEM Index="22" Name="" />
-		<AO_ITEM Index="23" Name="" />
-		<AO_ITEM Index="24" Name="" />
-		<AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
-		<AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
-		<AO_ITEM Index="27" Name="" />
-		<AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
-		<AO_ITEM Index="29" Name="" />
-		<AO_ITEM Index="30" Name="AO_GASLINE_Temperature_Setpoint" Device="" Addr="d1060" Note="GASLINE 加热设定温度" />
-		<AO_ITEM Index="31" Name="AO_GASLINE_Temp_Limit_Setpoint" Device="" Addr="d1062" Note="Temp Limit" />
-		<AO_ITEM Index="32" Name="" />
-		<AO_ITEM Index="33" Name="" />
-		<AO_ITEM Index="34" Name="" />
-		<AO_ITEM Index="35" Name="" />
-		<AO_ITEM Index="36" Name="" />
-		<AO_ITEM Index="37" Name="" />
-		<AO_ITEM Index="38" Name="" />
-		<AO_ITEM Index="39" Name="" />
-		<AO_ITEM Index="40" Name="" />
-		<AO_ITEM Index="41" Name="" />
-		<AO_ITEM Index="42" Name="" />
-		<AO_ITEM Index="43" Name="" />
-		<AO_ITEM Index="44" Name="" />
-		<AO_ITEM Index="45" Name="" />
-		<AO_ITEM Index="46" Name="" />
-		<AO_ITEM Index="47" Name="" />
-		<AO_ITEM Index="48" Name="" />
-		<AO_ITEM Index="49" Name="" />
-	</Ana_Out>
-	<Ana_In>
-		<AI_ITEM Index="0"  Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
-		<AI_ITEM Index="1"  Name=""/>
-		<AI_ITEM Index="2"  Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
-		<AI_ITEM Index="3"  Name="AI_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
-		<AI_ITEM Index="4"  Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
-		<AI_ITEM Index="5"  Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
-		<AI_ITEM Index="6"  Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
-		<AI_ITEM Index="7"  Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
-		<AI_ITEM Index="8"  Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
-		<AI_ITEM Index="9"  Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
-		<AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
-		<AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
-		<AI_ITEM Index="12" Name="AI_He_Flow" Device="" Addr="d2024" Note="float" />
-		<AI_ITEM Index="13" />
-		<AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
-		<AI_ITEM Index="15" Name="AI_Gasline_Control_TC_Temp" Device="" Addr="d2030" Note="float" />
-		<AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
-		<AI_ITEM Index="17" Name="AI_Gasline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
-		<AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
-		<AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" Device="" Addr="d2038" Note="float" />
-		<AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
-		<AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
-		<AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
-		<AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
-		<AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
-		<AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
-		<AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
-		<AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
-		<AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
-		<AI_ITEM Index="29" Name="" />
-		<AI_ITEM Index="30" Name="" />
-		<AI_ITEM Index="31" Name="" />
-		<AI_ITEM Index="32" Name="" />
-		<AI_ITEM Index="33" Name="" />
-		<AI_ITEM Index="34" Name="" />
-		<AI_ITEM Index="35" Name="AI_MFC9Flow" Device="" Addr="d2070" Note="float" />
-		<AI_ITEM Index="36" Name="AI_MFC10Flow" Device="" Addr="d2072" Note="float" />
-		<AI_ITEM Index="37" Name="AI_MFC11Flow" Device="" Addr="d2074" Note="float" />
-		<AI_ITEM Index="38" Name="AI_MFC12Flow" Device="" Addr="d2076" Note="float" />
-		<AI_ITEM Index="39" Name="" />
-		<AI_ITEM Index="40" Name="AI_He_Pressure" Device="" Addr="d2080" Note="float" />
-		<AI_ITEM Index="41" Name="" />
-		<AI_ITEM Index="42" Name="" />
-		<AI_ITEM Index="43" Name="" />
-		<AI_ITEM Index="44" Name="" />
-		<AI_ITEM Index="45" Name="" />
-		<AI_ITEM Index="46" Name="" />
-		<AI_ITEM Index="47" Name="" />
-		<AI_ITEM Index="48" Name="" />
-		<AI_ITEM Index="49" Name="" />
-	</Ana_In>
+  <!--文件根据IO LIST_PM_VNS_SE 20230905.xlsx生成-->
+  <!--生成时间：09/06/2023 10:44:54-->
+  <Dig_In>
+    <DI_ITEM Index="0"   Name="DI_Lid_Closed" Device="" Addr="w20.00" />
+    <DI_ITEM Index="1"   Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
+    <DI_ITEM Index="2"   Name="DI_PM_VAC_Switch" Device="" Addr="w20.02" />
+    <DI_ITEM Index="3"   Name="DI_ESC_Coolant_Flow_SW" Device="" Addr="w20.03" />
+    <DI_ITEM Index="4"   Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
+    <DI_ITEM Index="5"   Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
+    <DI_ITEM Index="6"   Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
+    <DI_ITEM Index="7"   Name="DI_RF_HV_Interlock_OK" Device="Lid_VAC_Slit_Door_MATCH_INT_OK." Addr="w20.07" />
+    <DI_ITEM Index="8"   Name="" />
+    <DI_ITEM Index="9"   Name="DI_Turbo_Pump_Interlock" Device="Q7.12同步" Addr="w20.09" />
+    <DI_ITEM Index="10"  Name="" />
+    <DI_ITEM Index="11"  Name="" />
+    <DI_ITEM Index="12"  Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
+    <DI_ITEM Index="13"  Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.13" />
+    <DI_ITEM Index="14"  Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.14" />
+    <DI_ITEM Index="15"  Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="VG_PPH_真空值比较" Addr="w20.15" />
+    <DI_ITEM Index="16"  Name="DI_Process_Pressure_100mt_Gauge_Alarm" Device="VG PPL" Addr="w21.00" />
+    <DI_ITEM Index="17"  Name="" />
+    <DI_ITEM Index="18"  Name="DI_Foreline_Pressure_10t_Gauge_Alarm" Device="TC模块信号" Addr="w21.02" />
+    <DI_ITEM Index="19"  Name="" />
+    <DI_ITEM Index="20"  Name="" />
+    <DI_ITEM Index="21"  Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
+    <DI_ITEM Index="22"  Name="" />
+    <DI_ITEM Index="23"  Name="DI_Valve_Heater_On_FB" Device="Q7.13同步" Addr="w21.07" />
+    <DI_ITEM Index="24"  Name="" />
+    <DI_ITEM Index="25"  Name="DI_Foreline_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.09" />
+    <DI_ITEM Index="26"  Name="" />
+    <DI_ITEM Index="27"  Name="DI_Foreline_Heater_On_FB" Device="Q7.14同步" Addr="w21.11" />
+    <DI_ITEM Index="28"  Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="值比较" Addr="w21.12" />
+    <DI_ITEM Index="29"  Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.13" />
+    <DI_ITEM Index="30"  Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.14" />
+    <DI_ITEM Index="31"  Name="DI_CHB_Wall_Heater_On_FB" Device="Q7.15同步" Addr="w21.15" />
+    <DI_ITEM Index="32"  Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
+    <DI_ITEM Index="33"  Name=""/>
+    <DI_ITEM Index="34"  Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
+    <DI_ITEM Index="35"  Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
+    <DI_ITEM Index="36"  Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
+    <DI_ITEM Index="37"  Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
+    <DI_ITEM Index="38"  Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
+    <DI_ITEM Index="39"  Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
+    <DI_ITEM Index="40"  Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
+    <DI_ITEM Index="41"  Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
+    <DI_ITEM Index="42"  Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
+    <DI_ITEM Index="43"  Name="DI_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="Gas Box" />
+    <DI_ITEM Index="44"  Name="DI_ESC_He_Pressure_100t_Gauge_Alarm" Device="PGHe" Addr="w22.12" Note=""/>
+    <DI_ITEM Index="45"  Name="" />
+    <DI_ITEM Index="46"  Name="" />
+    <DI_ITEM Index="47"  Name="" />
+    <DI_ITEM Index="48"  Name="" />
+    <DI_ITEM Index="49"  Name="" />
+    <DI_ITEM Index="50"  Name="" />
+    <DI_ITEM Index="51"  Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
+    <DI_ITEM Index="52"  Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
+    <DI_ITEM Index="53"  Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
+    <DI_ITEM Index="54"  Name="" />
+    <DI_ITEM Index="55"  Name="DI_SOURCE_RF_Water_Flow_Switch" Device="" Addr="w23.07" />
+    <DI_ITEM Index="56"  Name="" />
+    <DI_ITEM Index="57"  Name="" />
+    <DI_ITEM Index="58"  Name="DI_TM_ROB_NOT_EXTEND_TO_PM" Device="" Addr="w23.10"/>
+    <DI_ITEM Index="59"  Name="DI_TM_Slit_Door_Closed" Device="" Addr="w23.11" />
+    <DI_ITEM Index="60"  Name="" />
+    <DI_ITEM Index="61"  Name="" />
+    <DI_ITEM Index="62"  Name="DI_Source_Match_interlock_ok" Device="" Addr="w23.14" />
+    <DI_ITEM Index="63"  Name="DI_Bias_Match_interlock_ok" Device="" Addr="w23.15" />
+    <DI_ITEM Index="64"  Name="" />
+    <DI_ITEM Index="65"  Name="" />
+    <DI_ITEM Index="66"  Name="DI_MFC9_Pressure_Switch" Device="PG9" Addr="w24.02" Note="Gas Box" />
+    <DI_ITEM Index="67"  Name="DI_MFC10_Pressure_Switch" Device="PG10" Addr="w24.03" Note="Gas Box" />
+    <DI_ITEM Index="68"  Name="DI_MFC11_Pressure_Switch" Device="PG11_SPARE_" Addr="w24.04" Note="Gas Box" />
+    <DI_ITEM Index="69"  Name="DI_MFC12_Pressure_Switch" Device="PG12" Addr="w24.05" Note="Gas Box" />
+    <DI_ITEM Index="70"  Name="" />
+    <DI_ITEM Index="71"  Name="" />
+    <DI_ITEM Index="72"  Name="" />
+    <DI_ITEM Index="73"  Name="" />
+    <DI_ITEM Index="74"  Name="DI_GASLINE_TC_Deviation_out_of_range" Device="" Addr="w24.10"/>
+    <DI_ITEM Index="75"  Name="DI_GASLINE_Control_TC_Broken_Alarm" Device="" Addr="w24.11"/>
+    <DI_ITEM Index="76"  Name="DI_GASLINE_Monitor_TC_Broken_Alarm" Device="" Addr="w24.12"/>
+    <DI_ITEM Index="77"  Name="DI_GASLINE_Heater_On_FB" Device="" Addr="w24.13"/>
+    <DI_ITEM Index="78"  Name="" />
+    <DI_ITEM Index="79"  Name="" />
+    <DI_ITEM Index="80"  Name="DI_CTRL_BOX_1#FAN_OK" Device="" Addr="w25.00" />
+    <DI_ITEM Index="81"  Name="DI_CTRL_BOX_2#FAN_OK" Device="" Addr="w25.01"/>
+    <DI_ITEM Index="82"  Name="DI_POWER_BOX_FAN_OK" Device="" Addr="w25.02"/>
+    <DI_ITEM Index="83"  Name="" />
+    <DI_ITEM Index="84"  Name="" />
+    <DI_ITEM Index="85"  Name="" />
+    <DI_ITEM Index="86"  Name="" />
+    <DI_ITEM Index="87"  Name="" />
+    <DI_ITEM Index="88"  Name="" />
+    <DI_ITEM Index="89"  Name="" />
+    <DI_ITEM Index="90"  Name="" />
+    <DI_ITEM Index="91"  Name="" />
+    <DI_ITEM Index="92"  Name="" />
+    <DI_ITEM Index="93"  Name="" />
+    <DI_ITEM Index="94"  Name="" />
+    <DI_ITEM Index="95"  Name="" />
+    <DI_ITEM Index="96"  Name="" />
+    <DI_ITEM Index="97"  Name="" />
+    <DI_ITEM Index="98"  Name="" />
+    <DI_ITEM Index="99"  Name="" />
+    <DI_ITEM Index="100" Name="" />
+    <DI_ITEM Index="101" Name="" />
+    <DI_ITEM Index="102" Name="" />
+    <DI_ITEM Index="103" Name="" />
+    <DI_ITEM Index="104" Name="" />
+    <DI_ITEM Index="105" Name="" />
+    <DI_ITEM Index="106" Name="" />
+    <DI_ITEM Index="107" Name="" />
+    <DI_ITEM Index="108" Name="" />
+    <DI_ITEM Index="109" Name="" />
+    <DI_ITEM Index="110" Name="" />
+    <DI_ITEM Index="111" Name="" />
+  </Dig_In>
+  <Dig_Out>
+    <DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
+    <DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
+    <DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
+    <DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
+    <DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
+    <DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
+    <DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
+    <DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
+    <DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
+    <DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
+    <DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
+    <DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
+    <DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
+    <DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
+    <DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
+    <DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
+    <DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
+    <DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
+    <DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
+    <DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
+    <DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
+    <DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
+    <DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
+    <DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
+    <DO_ITEM Index="24" Name=""/>
+    <DO_ITEM Index="25" Name=""/>
+    <DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
+    <DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
+    <DO_ITEM Index="28" Name="" />
+    <DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
+    <DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
+    <DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
+    <DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
+    <DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
+    <DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
+    <DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
+    <DO_ITEM Index="36" Name=""/>
+    <DO_ITEM Index="37" Name=""/>
+    <DO_ITEM Index="38" Name=""/>
+    <DO_ITEM Index="39" Name=""/>
+    <DO_ITEM Index="40" Name=""/>
+    <DO_ITEM Index="41" Name=""/>
+    <DO_ITEM Index="42" Name=""/>
+    <DO_ITEM Index="43" Name=""/>
+    <DO_ITEM Index="44" Name=""/>
+    <DO_ITEM Index="45" Name=""/>
+    <DO_ITEM Index="46" Name="DO_Gasline_Heater_On" Device="" Addr="w2.14" />
+    <DO_ITEM Index="47" Name="DO_Slit_Door_Open_Enable" Device="" Addr="w2.15"/>
+    <DO_ITEM Index="48" Name="DO_PVHe3" Device="GPVHe3" Addr="w3.00" />
+    <DO_ITEM Index="49" Name="DO_He_ISO" Device="PV9" Addr="w3.01" />
+    <DO_ITEM Index="50" Name="" />
+    <DO_ITEM Index="51" Name="" />
+    <DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
+    <DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
+    <DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
+    <DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
+    <DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
+    <DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
+    <DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
+    <DO_ITEM Index="59" Name="DO_PV61" Device="GPV61" Addr="w3.11" />
+    <DO_ITEM Index="60" Name="DO_PV62" Device="GPV62" Addr="w3.12" />
+    <DO_ITEM Index="61" Name="DO_PV71" Device="GPV71" Addr="w3.13" />
+    <DO_ITEM Index="62" Name="DO_PV72" Device="GPV72" Addr="w3.14" />
+    <DO_ITEM Index="63" Name="DO_PV81" Device="GPV81" Addr="w3.15" />
+    <DO_ITEM Index="64" Name="DO_PV82" Device="GPV82" Addr="w4.00" />
+    <DO_ITEM Index="65" Name="DO_PV91" Device="GPV91" Addr="w4.01" />
+    <DO_ITEM Index="66" Name="DO_PV92" Device="GPV92" Addr="w4.02" />
+    <DO_ITEM Index="67" Name="DO_PVA1" Device="GPVA1" Addr="w4.03" />
+    <DO_ITEM Index="68" Name="DO_PVA2" Device="GPVA2" Addr="w4.04" />
+    <DO_ITEM Index="69" Name="DO_PVB1" Device="GPVB1" Addr="w4.05" />
+    <DO_ITEM Index="70" Name="DO_PVB2" Device="GPVB2" Addr="w4.06" />
+    <DO_ITEM Index="71" Name="DO_PVC1" Device="GPVC1" Addr="w4.07" />
+    <DO_ITEM Index="72" Name="DO_PVC2" Device="GPVC2" Addr="w4.08" />
+    <DO_ITEM Index="73" Name="" />
+    <DO_ITEM Index="74" Name="" />
+    <DO_ITEM Index="75" Name="" />
+    <DO_ITEM Index="76" Name="" />
+    <DO_ITEM Index="77" Name="" />
+    <DO_ITEM Index="78" Name="" />
+    <DO_ITEM Index="79" Name="" />
+    <DO_ITEM Index="80" Name="" />
+    <DO_ITEM Index="81" Name="" />
+    <DO_ITEM Index="82" Name="" />
+    <DO_ITEM Index="83" Name="" />
+    <DO_ITEM Index="84" Name="" />
+    <DO_ITEM Index="85" Name="" />
+    <DO_ITEM Index="86" Name="" />
+    <DO_ITEM Index="87" Name="" />
+    <DO_ITEM Index="88" Name="" />
+    <DO_ITEM Index="89" Name="" />
+    <DO_ITEM Index="90" Name="" />
+    <DO_ITEM Index="91" Name="" />
+    <DO_ITEM Index="92" Name="" />
+    <DO_ITEM Index="93" Name="" />
+    <DO_ITEM Index="94" Name="" />
+    <DO_ITEM Index="95" Name="" />
+    <DO_ITEM Index="96" Name="" />
+    <DO_ITEM Index="97" Name="" />
+    <DO_ITEM Index="98" Name="" />
+    <DO_ITEM Index="99" Name="" />
+    <DO_ITEM Index="100" Name="" />
+    <DO_ITEM Index="101" Name="" />
+    <DO_ITEM Index="102" Name="" />
+    <DO_ITEM Index="103" Name="" />
+    <DO_ITEM Index="104" Name="" />
+    <DO_ITEM Index="105" Name="" />
+    <DO_ITEM Index="106" Name="" />
+    <DO_ITEM Index="107" Name="" />
+    <DO_ITEM Index="108" Name="" />
+    <DO_ITEM Index="109" Name="" />
+    <DO_ITEM Index="110" Name="" />
+    <DO_ITEM Index="111" Name="" />
+  </Dig_Out>
+  <Ana_Out>
+    <AO_ITEM Index="0"  Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
+    <AO_ITEM Index="1"  Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
+    <AO_ITEM Index="2"  Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
+    <AO_ITEM Index="3"  Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
+    <AO_ITEM Index="4"  Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
+    <AO_ITEM Index="5"  Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
+    <AO_ITEM Index="6"  Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
+    <AO_ITEM Index="7"  Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
+    <AO_ITEM Index="8"  Name=""/>
+    <AO_ITEM Index="9"  Name=""/>
+    <AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
+    <AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
+    <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
+    <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
+    <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
+    <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
+    <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
+    <AO_ITEM Index="17" Name="AO_ESC_He_Pressure_Setpoint" Device="" Addr="d1034" Note="He气体压力设定"/>
+    <AO_ITEM Index="18" Name=""/>
+    <AO_ITEM Index="19" Name="" />
+    <AO_ITEM Index="20" Name="" />
+    <AO_ITEM Index="21" Name="" />
+    <AO_ITEM Index="22" Name="" />
+    <AO_ITEM Index="23" Name="" />
+    <AO_ITEM Index="24" Name="" />
+    <AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
+    <AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
+    <AO_ITEM Index="27" Name="AO_MFC11_Flow_Setpoint (SPARE)" Addr="d1054" Note="MFC" />
+    <AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
+    <AO_ITEM Index="29" Name="" />
+    <AO_ITEM Index="30" Name="AO_GASLINE_Temperature_Setpoint" Device="" Addr="d1060" Note="GASLINE 加热设定温度" />
+    <AO_ITEM Index="31" Name="AO_GASLINE_Temp_Limit_Setpoint" Device="" Addr="d1062" Note="Temp Limit" />
+    <AO_ITEM Index="32" Name="" />
+    <AO_ITEM Index="33" Name="" />
+    <AO_ITEM Index="34" Name="" />
+    <AO_ITEM Index="35" Name="" />
+    <AO_ITEM Index="36" Name="" />
+    <AO_ITEM Index="37" Name="" />
+    <AO_ITEM Index="38" Name="" />
+    <AO_ITEM Index="39" Name="" />
+    <AO_ITEM Index="40" Name="" />
+    <AO_ITEM Index="41" Name="" />
+    <AO_ITEM Index="42" Name="" />
+    <AO_ITEM Index="43" Name="" />
+    <AO_ITEM Index="44" Name="" />
+    <AO_ITEM Index="45" Name="" />
+    <AO_ITEM Index="46" Name="" />
+    <AO_ITEM Index="47" Name="" />
+    <AO_ITEM Index="48" Name="" />
+    <AO_ITEM Index="49" Name="" />
+  </Ana_Out>
+  <Ana_In>
+    <AI_ITEM Index="0"  Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
+    <AI_ITEM Index="1"  Name="AI_Process_Pressure_100mt" Device="" Addr="d2002" />
+    <AI_ITEM Index="2"  Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
+    <AI_ITEM Index="3"  Name="AI_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
+    <AI_ITEM Index="4"  Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
+    <AI_ITEM Index="5"  Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
+    <AI_ITEM Index="6"  Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
+    <AI_ITEM Index="7"  Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
+    <AI_ITEM Index="8"  Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
+    <AI_ITEM Index="9"  Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
+    <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
+    <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
+    <AI_ITEM Index="12" Name="AI_He_Flow" Device="" Addr="d2024" Note="float" />
+    <AI_ITEM Index="13" />
+    <AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
+    <AI_ITEM Index="15" Name="AI_Gasline_Control_TC_Temp" Device="" Addr="d2030" Note="float" />
+    <AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
+    <AI_ITEM Index="17" Name="AI_Gasline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
+    <AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
+    <AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" Device="" Addr="d2038" Note="float" />
+    <AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
+    <AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
+    <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
+    <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
+    <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
+    <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
+    <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
+    <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
+    <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
+    <AI_ITEM Index="29" Name="" />
+    <AI_ITEM Index="30" Name="" />
+    <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
+    <AI_ITEM Index="32" Name="" />
+    <AI_ITEM Index="33" Name="" />
+    <AI_ITEM Index="34" Name="" />
+    <AI_ITEM Index="35" Name="AI_MFC9Flow" Device="" Addr="d2070" Note="float" />
+    <AI_ITEM Index="36" Name="AI_MFC10Flow" Device="" Addr="d2072" Note="float" />
+    <AI_ITEM Index="37" Name="AI_MFC11Flow" Device="" Addr="d2074" Note="float" />
+    <AI_ITEM Index="38" Name="AI_MFC12Flow" Device="" Addr="d2076" Note="float" />
+    <AI_ITEM Index="39" Name="" />
+    <AI_ITEM Index="40" Name="AI_He_Pressure" Device="" Addr="d2080" Note="float" />
+    <AI_ITEM Index="41" Name="" />
+    <AI_ITEM Index="42" Name="" />
+    <AI_ITEM Index="43" Name="" />
+    <AI_ITEM Index="44" Name="" />
+    <AI_ITEM Index="45" Name="" />
+    <AI_ITEM Index="46" Name="" />
+    <AI_ITEM Index="47" Name="" />
+    <AI_ITEM Index="48" Name="" />
+    <AI_ITEM Index="49" Name="" />
+  </Ana_In>
 </IO_DEFINE>

Venus/Venus_RT/Config/System.sccfg

@@ -106,7 +106,6 @@
 
 	<!--TM-->
 	<configs name="TM" nameView="TM">
-		<config default="0" name="TMType"  nameView="TM Type" description="0=>Venus,1=>VenusSE," max="1" min="0" paramter="" tag=""  unit="" type="Integer" visible="false"/>
 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
 		<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />

Venus/Venus_RT/Config/TM/_ioDefineVenusSE_MF.xml

@@ -28,8 +28,8 @@
     <DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />
     <DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />
     <DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />
-    <DI_ITEM Index="26" Name="DI_TM_DI11" Device="" Addr="w1.10" Note="PMD SLIT DOOR OPEN  ENABLE" />
-    <DI_ITEM Index="27" Name="DI_TM_DI12" Device="" Addr="w1.11" Note="TM RB EXTEND PMD  ENABLE" />
+    <DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />
+    <DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />
     <DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
     <DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
     <DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
@@ -133,10 +133,10 @@
   </Ana_Out>
   <Ana_In>
     <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint"  BufferOffset="2" Device="" Addr="D100" />
-    <AI_ITEM Index="1" Name="VCE_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D101" />
-    <AI_ITEM Index="2" Name="TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D102"/>
-    <AI_ITEM Index="3" Name="VCE_Pipeline_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D103"/>
-    <AI_ITEM Index="4" Name="TM_Pipeline_Vacuum_Gauge"  BufferOffset="22" Device="" Addr="D104"/>
+    <AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D101" />
+    <AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D102"/>
+    <AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D103"/>
+    <AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge"  BufferOffset="22" Device="" Addr="D104"/>
     <AI_ITEM Index="5" Name=""/>
     <AI_ITEM Index="6" Name="" />
     <AI_ITEM Index="7" Name=""/>

Venus/Venus_RT/Venus_RT.csproj

@@ -298,6 +298,7 @@
     <Content Include="Config\PM\VenusSE\VenusSEDeviceModel.xml">
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
     </Content>
+    <Resource Include="Config\PM\VenusSE\VenusSEInterlock.xml" />
     <Content Include="Config\TM\DeviceModelVenusSE_MF.xml">
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
     </Content>
@@ -313,7 +314,7 @@
     <Content Include="Config\PM\Venus\VenusInterlock.xml">
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
     </Content>
-    <Content Include="Config\TM\TMSEInterlock.xml">
+    <Content Include="Config\TM\SETMInterlock.xml">
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
     </Content>
     <Content Include="Config\TM\TMInterlock.xml">

Venus/Venus_RT/Venus_RT.csproj.user

@@ -1,7 +1,7 @@
 <?xml version="1.0" encoding="utf-8"?>
 <Project ToolsVersion="Current" xmlns="http://schemas.microsoft.com/developer/msbuild/2003">
   <PropertyGroup>
-    <ProjectView>ShowAllFiles</ProjectView>
+    <ProjectView>ProjectFiles</ProjectView>
     <PublishUrlHistory>publish\</PublishUrlHistory>
     <InstallUrlHistory />
     <SupportUrlHistory />

Venus/Venus_Simulator/App.xaml.cs

@@ -18,7 +18,6 @@ namespace Venus_Simulator
             SimulatorJetChamber.CurrentPMBChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMB.ChamberType");
             SimulatorJetChamber.CurrentPMCChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMC.ChamberType");
             SimulatorJetChamber.CurrentPMDChamber = (JetChamber)SystemConfig.Instance.GetValue<int>($"PMD.ChamberType");
-            SimulatorJetTM.CurrentTM = (JetTMType)SystemConfig.Instance.GetValue<int>($"TM.TMType");
 
 
             UiApplication.Instance.Initialize(new UiInstance());

Venus/Venus_Simulator/Config/UILayout.xml

@@ -87,8 +87,8 @@
 
   <Navigation Id="TMSE" Name="TMSE">
     <SubView Id="ioSETM" Name="IO-SETM" ViewClass="Venus_Simulator.Views.SimulatorIoSETMView" Assembly="Venus_Simulator"/>
-    <SubView Id="SETMRB" Name="SE TM RB" ViewClass="Venus_Simulator.Views.Simu_seTMView" Assembly="Venus_Simulator"/>
-    <!--<SubView Id="TM" Name="TM" ViewClass="Venus_Simulator.Views.Simu_TMSEView" Assembly="Venus_Simulator" />-->
+    <SubView Id="SETMRB" Name="SE TM RB" ViewClass="Venus_Simulator.Views.Simu_SETMView" Assembly="Venus_Simulator"/>
+    <SubView Id="SkyPumpSETM" Name="SkyPumpSETM" ViewClass="Venus_Simulator.Views.SimuSkyPumpSETMView" Assembly="Venus_Simulator"/>
   </Navigation>
 
 </MECFUI>

Venus/Venus_Simulator/Config/_ioDefineVenusSE.xml

@@ -1,338 +1,338 @@
 <?xml version="1.0"?>
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 
-	<!--文件根据IO LIST_PM_VNS_SE 20230905.xlsx生成-->
-	<!--生成时间：09/06/2023 10:44:54-->
-	<Dig_In>
-		<DI_ITEM Index="0"   Name="DI_Lid_Closed" Device="" Addr="w20.00" />
-		<DI_ITEM Index="1"   Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
-		<DI_ITEM Index="2"   Name="DI_PM_VAC_Switch" Device="" Addr="w20.02" />
-		<DI_ITEM Index="3"   Name="DI_Plate_Water_Flow_Switch" Device="" Addr="w20.03" />
-		<DI_ITEM Index="4"   Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
-		<DI_ITEM Index="5"   Name="DI_Lift_Pin_Up_Position" Device="" Addr="w20.05" />
-		<DI_ITEM Index="6"   Name="DI_Lift_Pin_Down_Position" Device="" Addr="w20.06" />
-		<DI_ITEM Index="7"   Name="DI_RF_HV_Interlock_OK" Device="Lid_VAC_Slit_Door_MATCH_INT_OK." Addr="w20.07" />
-		<DI_ITEM Index="8"   Name="" />
-		<DI_ITEM Index="9"   Name="DI_Turbo_Pump_Interlock" Device="Q7.12同步" Addr="w20.09" />
-		<DI_ITEM Index="10"  Name="DI_Slit_Door_Open_Position" Device="" Addr="w20.10" />
-		<DI_ITEM Index="11"  Name="DI_Slit_Door_Close_Position" Device="" Addr="w20.11" />
-		<DI_ITEM Index="12"  Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
-		<DI_ITEM Index="13"  Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.13" />
-		<DI_ITEM Index="14"  Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.14" />
-		<DI_ITEM Index="15"  Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="VG_PPH_真空值比较" Addr="w20.15" />
-		<DI_ITEM Index="16"  Name="DI_GASLINE_TC_Deviation_out_of_range" Device="值比较" Addr="w21.00" />
-		<DI_ITEM Index="17"  Name="DI_GASLINE_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.01" />
-		<DI_ITEM Index="18"  Name="DI_GASLINE_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.02" />
-		<DI_ITEM Index="19"  Name="DI_GASLINE_Heater_On_FB" Device="Q7.10同步" Addr="w21.03" />
-		<DI_ITEM Index="20"  Name="" />
-		<DI_ITEM Index="21"  Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
-		<DI_ITEM Index="22"  Name="" />
-		<DI_ITEM Index="23"  Name="DI_Valve_Heater_On_FB" Device="Q7.13同步" Addr="w21.07" />
-		<DI_ITEM Index="24"  Name="" />
-		<DI_ITEM Index="25"  Name="DI_Foreline_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.09" />
-		<DI_ITEM Index="26"  Name="" />
-		<DI_ITEM Index="27"  Name="DI_Foreline_Heater_On_FB" Device="Q7.14同步" Addr="w21.11" />
-		<DI_ITEM Index="28"  Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="值比较" Addr="w21.12" />
-		<DI_ITEM Index="29"  Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.13" />
-		<DI_ITEM Index="30"  Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.14" />
-		<DI_ITEM Index="31"  Name="DI_CHB_Wall_Heater_On_FB" Device="Q7.15同步" Addr="w21.15" />
-		<DI_ITEM Index="32"  Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
-		<DI_ITEM Index="33"  Name=""/>
-		<DI_ITEM Index="34"  Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
-		<DI_ITEM Index="35"  Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
-		<DI_ITEM Index="36"  Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
-		<DI_ITEM Index="37"  Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
-		<DI_ITEM Index="38"  Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
-		<DI_ITEM Index="39"  Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
-		<DI_ITEM Index="40"  Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
-		<DI_ITEM Index="41"  Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
-		<DI_ITEM Index="42"  Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
-		<DI_ITEM Index="43"  Name="DI_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="Gas Box" />
-		<DI_ITEM Index="44"  Name="" />
-		<DI_ITEM Index="45"  Name="" />
-		<DI_ITEM Index="46"  Name="" />
-		<DI_ITEM Index="47"  Name="" />
-		<DI_ITEM Index="48"  Name="" />
-		<DI_ITEM Index="49"  Name="" />
-		<DI_ITEM Index="50"  Name="" />
-		<DI_ITEM Index="51"  Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
-		<DI_ITEM Index="52"  Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
-		<DI_ITEM Index="53"  Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
-		<DI_ITEM Index="54"  Name="" />
-		<DI_ITEM Index="55"  Name="DI_SOURCE_RF_Water_Flow_Switch" Device="" Addr="w23.07" />
-		<DI_ITEM Index="56"  Name="" />
-		<DI_ITEM Index="57"  Name="" />
-		<DI_ITEM Index="58"  Name="" />
-		<DI_ITEM Index="59"  Name="DI_TM_Slit_Door_Closed" Device="" Addr="w23.11" />
-		<DI_ITEM Index="60"  Name="" />
-		<DI_ITEM Index="61"  Name="" />
-		<DI_ITEM Index="62"  Name="DI_Source_Match_interlock_ok" Device="" Addr="w23.14" />
-		<DI_ITEM Index="63"  Name="DI_Bias_Match_interlock_ok" Device="" Addr="w23.15" />
-		<DI_ITEM Index="64"  Name="" />
-		<DI_ITEM Index="65"  Name="" />
-		<DI_ITEM Index="66"  Name="DI_MFC9_Pressure_Switch" Device="PG9" Addr="w24.02" Note="Gas Box" />
-		<DI_ITEM Index="67"  Name="DI_MFC10_Pressure_Switch" Device="PG10" Addr="w24.03" Note="Gas Box" />
-		<DI_ITEM Index="68"  Name="DI_MFC11_Pressure_Switch" Device="PG11_SPARE_" Addr="w24.04" Note="Gas Box" />
-		<DI_ITEM Index="69"  Name="DI_MFC12_Pressure_Switch" Device="PG12" Addr="w24.05" Note="Gas Box" />
-		<DI_ITEM Index="70"  Name="" />
-		<DI_ITEM Index="71"  Name="" />
-		<DI_ITEM Index="72"  Name="" />
-		<DI_ITEM Index="73"  Name="" />
-		<DI_ITEM Index="74"  Name="" />
-		<DI_ITEM Index="75"  Name="" />
-		<DI_ITEM Index="76"  Name="" />
-		<DI_ITEM Index="77"  Name="" />
-		<DI_ITEM Index="78"  Name="" />
-		<DI_ITEM Index="79"  Name="" />
-		<DI_ITEM Index="80"  Name="" />
-		<DI_ITEM Index="81"  Name="" />
-		<DI_ITEM Index="82"  Name="" />
-		<DI_ITEM Index="83"  Name="" />
-		<DI_ITEM Index="84"  Name="" />
-		<DI_ITEM Index="85"  Name="" />
-		<DI_ITEM Index="86"  Name="" />
-		<DI_ITEM Index="87"  Name="" />
-		<DI_ITEM Index="88"  Name="" />
-		<DI_ITEM Index="89"  Name="" />
-		<DI_ITEM Index="90"  Name="" />
-		<DI_ITEM Index="91"  Name="" />
-		<DI_ITEM Index="92"  Name="" />
-		<DI_ITEM Index="93"  Name="" />
-		<DI_ITEM Index="94"  Name="" />
-		<DI_ITEM Index="95"  Name="" />
-		<DI_ITEM Index="96"  Name="" />
-		<DI_ITEM Index="97"  Name="" />
-		<DI_ITEM Index="98"  Name="" />
-		<DI_ITEM Index="99"  Name="" />
-		<DI_ITEM Index="100" Name="" />
-		<DI_ITEM Index="101" Name="" />
-		<DI_ITEM Index="102" Name="" />
-		<DI_ITEM Index="103" Name="" />
-		<DI_ITEM Index="104" Name="" />
-		<DI_ITEM Index="105" Name="" />
-		<DI_ITEM Index="106" Name="" />
-		<DI_ITEM Index="107" Name="" />
-		<DI_ITEM Index="108" Name="" />
-		<DI_ITEM Index="109" Name="" />
-		<DI_ITEM Index="110" Name="" />
-		<DI_ITEM Index="111" Name="" />
-	</Dig_In>
-	<Dig_Out>
-		<DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
-		<DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
-		<DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
-		<DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
-		<DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
-		<DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
-		<DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
-		<DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
-		<DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
-		<DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
-		<DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
-		<DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
-		<DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
-		<DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
-		<DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
-		<DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
-		<DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
-		<DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
-		<DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
-		<DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
-		<DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
-		<DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
-		<DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
-		<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
-		<DO_ITEM Index="24" Name=""/>
-		<DO_ITEM Index="25" Name=""/>
-		<DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
-		<DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
-		<DO_ITEM Index="28" Name="" />
-		<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
-		<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
-		<DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
-		<DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
-		<DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
-		<DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
-		<DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
-		<DO_ITEM Index="36" Name=""/>
-		<DO_ITEM Index="37" Name=""/>
-		<DO_ITEM Index="38" Name=""/>
-		<DO_ITEM Index="39" Name=""/>
-		<DO_ITEM Index="40" Name=""/>
-		<DO_ITEM Index="41" Name=""/>
-		<DO_ITEM Index="42" Name=""/>
-		<DO_ITEM Index="43" Name=""/>
-		<DO_ITEM Index="44" Name=""/>
-		<DO_ITEM Index="45" Name=""/>
-		<DO_ITEM Index="46" Name="DO_Gasline_Heater_On" Device="" Addr="w2.14" />
-		<DO_ITEM Index="47" Name="" />
-		<DO_ITEM Index="48" Name="DO_PVHe3" Device="GPVHe3" Addr="w3.00" />
-		<DO_ITEM Index="49" Name="DO_He_ISO" Device="PV9" Addr="w3.01" />
-		<DO_ITEM Index="50" Name="" />
-		<DO_ITEM Index="51" Name="" />
-		<DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
-		<DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
-		<DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
-		<DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
-		<DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
-		<DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
-		<DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
-		<DO_ITEM Index="59" Name="DO_PV61" Device="GPV61" Addr="w3.11" />
-		<DO_ITEM Index="60" Name="DO_PV62" Device="GPV62" Addr="w3.12" />
-		<DO_ITEM Index="61" Name="DO_PV71" Device="GPV71" Addr="w3.13" />
-		<DO_ITEM Index="62" Name="DO_PV72" Device="GPV72" Addr="w3.14" />
-		<DO_ITEM Index="63" Name="DO_PV81" Device="GPV81" Addr="w3.15" />
-		<DO_ITEM Index="64" Name="DO_PV82" Device="GPV82" Addr="w4.00" />
-		<DO_ITEM Index="65" Name="DO_PV91" Device="GPV91" Addr="w4.01" />
-		<DO_ITEM Index="66" Name="DO_PV92" Device="GPV92" Addr="w4.02" />
-		<DO_ITEM Index="67" Name="DO_PVA1" Device="GPVA1" Addr="w4.03" />
-		<DO_ITEM Index="68" Name="DO_PVA2" Device="GPVA2" Addr="w4.04" />
-		<DO_ITEM Index="69" Name="DO_PVB1" Device="GPVB1" Addr="w4.05" />
-		<DO_ITEM Index="70" Name="DO_PVB2" Device="GPVB2" Addr="w4.06" />
-		<DO_ITEM Index="71" Name="DO_PVC1" Device="GPVC1" Addr="w4.07" />
-		<DO_ITEM Index="72" Name="DO_PVC2" Device="GPVC2" Addr="w4.08" />
-		<DO_ITEM Index="73" Name="" />
-		<DO_ITEM Index="74" Name="" />
-		<DO_ITEM Index="75" Name="" />
-		<DO_ITEM Index="76" Name="" />
-		<DO_ITEM Index="77" Name="" />
-		<DO_ITEM Index="78" Name="" />
-		<DO_ITEM Index="79" Name="" />
-		<DO_ITEM Index="80" Name="" />
-		<DO_ITEM Index="81" Name="" />
-		<DO_ITEM Index="82" Name="" />
-		<DO_ITEM Index="83" Name="" />
-		<DO_ITEM Index="84" Name="" />
-		<DO_ITEM Index="85" Name="" />
-		<DO_ITEM Index="86" Name="" />
-		<DO_ITEM Index="87" Name="" />
-		<DO_ITEM Index="88" Name="" />
-		<DO_ITEM Index="89" Name="" />
-		<DO_ITEM Index="90" Name="" />
-		<DO_ITEM Index="91" Name="" />
-		<DO_ITEM Index="92" Name="" />
-		<DO_ITEM Index="93" Name="" />
-		<DO_ITEM Index="94" Name="" />
-		<DO_ITEM Index="95" Name="" />
-		<DO_ITEM Index="96" Name="" />
-		<DO_ITEM Index="97" Name="" />
-		<DO_ITEM Index="98" Name="" />
-		<DO_ITEM Index="99" Name="" />
-		<DO_ITEM Index="100" Name="" />
-		<DO_ITEM Index="101" Name="" />
-		<DO_ITEM Index="102" Name="" />
-		<DO_ITEM Index="103" Name="" />
-		<DO_ITEM Index="104" Name="" />
-		<DO_ITEM Index="105" Name="" />
-		<DO_ITEM Index="106" Name="" />
-		<DO_ITEM Index="107" Name="" />
-		<DO_ITEM Index="108" Name="" />
-		<DO_ITEM Index="109" Name="" />
-		<DO_ITEM Index="110" Name="" />
-		<DO_ITEM Index="111" Name="" />
-	</Dig_Out>
-	<Ana_Out>
-		<AO_ITEM Index="0"  Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
-		<AO_ITEM Index="1"  Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
-		<AO_ITEM Index="2"  Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
-		<AO_ITEM Index="3"  Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
-		<AO_ITEM Index="4"  Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
-		<AO_ITEM Index="5"  Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
-		<AO_ITEM Index="6"  Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
-		<AO_ITEM Index="7"  Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
-		<AO_ITEM Index="8"  Name="AO_He_Pressure_Setpoint" Device="" Addr="d1016" Note="He MFC" />
-		<AO_ITEM Index="9"  Name=""/>
-		<AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
-		<AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
-		<AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
-		<AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
-		<AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
-		<AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
-		<AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
-		<AO_ITEM Index="17" Name=""/>
-		<AO_ITEM Index="18" Name=""/>
-		<AO_ITEM Index="19" Name="" />
-		<AO_ITEM Index="20" Name="" />
-		<AO_ITEM Index="21" Name="" />
-		<AO_ITEM Index="22" Name="" />
-		<AO_ITEM Index="23" Name="" />
-		<AO_ITEM Index="24" Name="" />
-		<AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
-		<AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
-		<AO_ITEM Index="27" Name="" />
-		<AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
-		<AO_ITEM Index="29" Name="" />
-		<AO_ITEM Index="30" Name="AO_GASLINE_Temperature_Setpoint" Device="" Addr="d1060" Note="GASLINE 加热设定温度" />
-		<AO_ITEM Index="31" Name="AO_GASLINE_Temp_Limit_Setpoint" Device="" Addr="d1062" Note="Temp Limit" />
-		<AO_ITEM Index="32" Name="" />
-		<AO_ITEM Index="33" Name="" />
-		<AO_ITEM Index="34" Name="" />
-		<AO_ITEM Index="35" Name="" />
-		<AO_ITEM Index="36" Name="" />
-		<AO_ITEM Index="37" Name="" />
-		<AO_ITEM Index="38" Name="" />
-		<AO_ITEM Index="39" Name="" />
-		<AO_ITEM Index="40" Name="" />
-		<AO_ITEM Index="41" Name="" />
-		<AO_ITEM Index="42" Name="" />
-		<AO_ITEM Index="43" Name="" />
-		<AO_ITEM Index="44" Name="" />
-		<AO_ITEM Index="45" Name="" />
-		<AO_ITEM Index="46" Name="" />
-		<AO_ITEM Index="47" Name="" />
-		<AO_ITEM Index="48" Name="" />
-		<AO_ITEM Index="49" Name="" />
-	</Ana_Out>
-	<Ana_In>
-		<AI_ITEM Index="0"  Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
-		<AI_ITEM Index="1"  Name=""/>
-		<AI_ITEM Index="2"  Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
-		<AI_ITEM Index="3"  Name="AI_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
-		<AI_ITEM Index="4"  Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
-		<AI_ITEM Index="5"  Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
-		<AI_ITEM Index="6"  Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
-		<AI_ITEM Index="7"  Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
-		<AI_ITEM Index="8"  Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
-		<AI_ITEM Index="9"  Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
-		<AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
-		<AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
-		<AI_ITEM Index="12" Name="AI_He_Flow" Device="" Addr="d2024" Note="float" />
-		<AI_ITEM Index="13" />
-		<AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
-		<AI_ITEM Index="15" Name="AI_Gasline_Control_TC_Temp" Device="" Addr="d2030" Note="float" />
-		<AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
-		<AI_ITEM Index="17" Name="AI_Gasline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
-		<AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
-		<AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" Device="" Addr="d2038" Note="float" />
-		<AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
-		<AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
-		<AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
-		<AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
-		<AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
-		<AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
-		<AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
-		<AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
-		<AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
-		<AI_ITEM Index="29" Name="" />
-		<AI_ITEM Index="30" Name="" />
-		<AI_ITEM Index="31" Name="" />
-		<AI_ITEM Index="32" Name="" />
-		<AI_ITEM Index="33" Name="" />
-		<AI_ITEM Index="34" Name="" />
-		<AI_ITEM Index="35" Name="AI_MFC9Flow" Device="" Addr="d2070" Note="float" />
-		<AI_ITEM Index="36" Name="AI_MFC10Flow" Device="" Addr="d2072" Note="float" />
-		<AI_ITEM Index="37" Name="AI_MFC11Flow" Device="" Addr="d2074" Note="float" />
-		<AI_ITEM Index="38" Name="AI_MFC12Flow" Device="" Addr="d2076" Note="float" />
-		<AI_ITEM Index="39" Name="" />
-		<AI_ITEM Index="40" Name="AI_He_Pressure" Device="" Addr="d2080" Note="float" />
-		<AI_ITEM Index="41" Name="" />
-		<AI_ITEM Index="42" Name="" />
-		<AI_ITEM Index="43" Name="" />
-		<AI_ITEM Index="44" Name="" />
-		<AI_ITEM Index="45" Name="" />
-		<AI_ITEM Index="46" Name="" />
-		<AI_ITEM Index="47" Name="" />
-		<AI_ITEM Index="48" Name="" />
-		<AI_ITEM Index="49" Name="" />
-	</Ana_In>
+  <!--文件根据IO LIST_PM_VNS_SE 20230905.xlsx生成-->
+  <!--生成时间：09/06/2023 10:44:54-->
+  <Dig_In>
+    <DI_ITEM Index="0"   Name="DI_Lid_Closed" Device="" Addr="w20.00" />
+    <DI_ITEM Index="1"   Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
+    <DI_ITEM Index="2"   Name="DI_PM_VAC_Switch" Device="" Addr="w20.02" />
+    <DI_ITEM Index="3"   Name="DI_ESC_Coolant_Flow_SW" Device="" Addr="w20.03" />
+    <DI_ITEM Index="4"   Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
+    <DI_ITEM Index="5"   Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
+    <DI_ITEM Index="6"   Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
+    <DI_ITEM Index="7"   Name="DI_RF_HV_Interlock_OK" Device="Lid_VAC_Slit_Door_MATCH_INT_OK." Addr="w20.07" />
+    <DI_ITEM Index="8"   Name="" />
+    <DI_ITEM Index="9"   Name="DI_Turbo_Pump_Interlock" Device="Q7.12同步" Addr="w20.09" />
+    <DI_ITEM Index="10"  Name="" />
+    <DI_ITEM Index="11"  Name="" />
+    <DI_ITEM Index="12"  Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
+    <DI_ITEM Index="13"  Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.13" />
+    <DI_ITEM Index="14"  Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.14" />
+    <DI_ITEM Index="15"  Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="VG_PPH_真空值比较" Addr="w20.15" />
+    <DI_ITEM Index="16"  Name="DI_Process_Pressure_100mt_Gauge_Alarm" Device="VG PPL" Addr="w21.00" />
+    <DI_ITEM Index="17"  Name="" />
+    <DI_ITEM Index="18"  Name="DI_Foreline_Pressure_10t_Gauge_Alarm" Device="TC模块信号" Addr="w21.02" />
+    <DI_ITEM Index="19"  Name="" />
+    <DI_ITEM Index="20"  Name="" />
+    <DI_ITEM Index="21"  Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
+    <DI_ITEM Index="22"  Name="" />
+    <DI_ITEM Index="23"  Name="DI_Valve_Heater_On_FB" Device="Q7.13同步" Addr="w21.07" />
+    <DI_ITEM Index="24"  Name="" />
+    <DI_ITEM Index="25"  Name="DI_Foreline_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.09" />
+    <DI_ITEM Index="26"  Name="" />
+    <DI_ITEM Index="27"  Name="DI_Foreline_Heater_On_FB" Device="Q7.14同步" Addr="w21.11" />
+    <DI_ITEM Index="28"  Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="值比较" Addr="w21.12" />
+    <DI_ITEM Index="29"  Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.13" />
+    <DI_ITEM Index="30"  Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.14" />
+    <DI_ITEM Index="31"  Name="DI_CHB_Wall_Heater_On_FB" Device="Q7.15同步" Addr="w21.15" />
+    <DI_ITEM Index="32"  Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
+    <DI_ITEM Index="33"  Name=""/>
+    <DI_ITEM Index="34"  Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
+    <DI_ITEM Index="35"  Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
+    <DI_ITEM Index="36"  Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
+    <DI_ITEM Index="37"  Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
+    <DI_ITEM Index="38"  Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
+    <DI_ITEM Index="39"  Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
+    <DI_ITEM Index="40"  Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
+    <DI_ITEM Index="41"  Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
+    <DI_ITEM Index="42"  Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
+    <DI_ITEM Index="43"  Name="DI_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="Gas Box" />
+    <DI_ITEM Index="44"  Name="DI_ESC_He_Pressure_100t_Gauge_Alarm" Device="PGHe" Addr="w22.12" Note=""/>
+    <DI_ITEM Index="45"  Name="" />
+    <DI_ITEM Index="46"  Name="" />
+    <DI_ITEM Index="47"  Name="" />
+    <DI_ITEM Index="48"  Name="" />
+    <DI_ITEM Index="49"  Name="" />
+    <DI_ITEM Index="50"  Name="" />
+    <DI_ITEM Index="51"  Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
+    <DI_ITEM Index="52"  Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
+    <DI_ITEM Index="53"  Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
+    <DI_ITEM Index="54"  Name="" />
+    <DI_ITEM Index="55"  Name="DI_SOURCE_RF_Water_Flow_Switch" Device="" Addr="w23.07" />
+    <DI_ITEM Index="56"  Name="" />
+    <DI_ITEM Index="57"  Name="" />
+    <DI_ITEM Index="58"  Name="DI_TM_ROB_NOT_EXTEND_TO_PM" Device="" Addr="w23.10"/>
+    <DI_ITEM Index="59"  Name="DI_TM_Slit_Door_Closed" Device="" Addr="w23.11" />
+    <DI_ITEM Index="60"  Name="" />
+    <DI_ITEM Index="61"  Name="" />
+    <DI_ITEM Index="62"  Name="DI_Source_Match_interlock_ok" Device="" Addr="w23.14" />
+    <DI_ITEM Index="63"  Name="DI_Bias_Match_interlock_ok" Device="" Addr="w23.15" />
+    <DI_ITEM Index="64"  Name="" />
+    <DI_ITEM Index="65"  Name="" />
+    <DI_ITEM Index="66"  Name="DI_MFC9_Pressure_Switch" Device="PG9" Addr="w24.02" Note="Gas Box" />
+    <DI_ITEM Index="67"  Name="DI_MFC10_Pressure_Switch" Device="PG10" Addr="w24.03" Note="Gas Box" />
+    <DI_ITEM Index="68"  Name="DI_MFC11_Pressure_Switch" Device="PG11_SPARE_" Addr="w24.04" Note="Gas Box" />
+    <DI_ITEM Index="69"  Name="DI_MFC12_Pressure_Switch" Device="PG12" Addr="w24.05" Note="Gas Box" />
+    <DI_ITEM Index="70"  Name="" />
+    <DI_ITEM Index="71"  Name="" />
+    <DI_ITEM Index="72"  Name="" />
+    <DI_ITEM Index="73"  Name="" />
+    <DI_ITEM Index="74"  Name="DI_GASLINE_TC_Deviation_out_of_range" Device="" Addr="w24.10"/>
+    <DI_ITEM Index="75"  Name="DI_GASLINE_Control_TC_Broken_Alarm" Device="" Addr="w24.11"/>
+    <DI_ITEM Index="76"  Name="DI_GASLINE_Monitor_TC_Broken_Alarm" Device="" Addr="w24.12"/>
+    <DI_ITEM Index="77"  Name="DI_GASLINE_Heater_On_FB" Device="" Addr="w24.13"/>
+    <DI_ITEM Index="78"  Name="" />
+    <DI_ITEM Index="79"  Name="" />
+    <DI_ITEM Index="80"  Name="DI_CTRL_BOX_1#FAN_OK" Device="" Addr="w25.00" />
+    <DI_ITEM Index="81"  Name="DI_CTRL_BOX_2#FAN_OK" Device="" Addr="w25.01"/>
+    <DI_ITEM Index="82"  Name="DI_POWER_BOX_FAN_OK" Device="" Addr="w25.02"/>
+    <DI_ITEM Index="83"  Name="" />
+    <DI_ITEM Index="84"  Name="" />
+    <DI_ITEM Index="85"  Name="" />
+    <DI_ITEM Index="86"  Name="" />
+    <DI_ITEM Index="87"  Name="" />
+    <DI_ITEM Index="88"  Name="" />
+    <DI_ITEM Index="89"  Name="" />
+    <DI_ITEM Index="90"  Name="" />
+    <DI_ITEM Index="91"  Name="" />
+    <DI_ITEM Index="92"  Name="" />
+    <DI_ITEM Index="93"  Name="" />
+    <DI_ITEM Index="94"  Name="" />
+    <DI_ITEM Index="95"  Name="" />
+    <DI_ITEM Index="96"  Name="" />
+    <DI_ITEM Index="97"  Name="" />
+    <DI_ITEM Index="98"  Name="" />
+    <DI_ITEM Index="99"  Name="" />
+    <DI_ITEM Index="100" Name="" />
+    <DI_ITEM Index="101" Name="" />
+    <DI_ITEM Index="102" Name="" />
+    <DI_ITEM Index="103" Name="" />
+    <DI_ITEM Index="104" Name="" />
+    <DI_ITEM Index="105" Name="" />
+    <DI_ITEM Index="106" Name="" />
+    <DI_ITEM Index="107" Name="" />
+    <DI_ITEM Index="108" Name="" />
+    <DI_ITEM Index="109" Name="" />
+    <DI_ITEM Index="110" Name="" />
+    <DI_ITEM Index="111" Name="" />
+  </Dig_In>
+  <Dig_Out>
+    <DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
+    <DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
+    <DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
+    <DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
+    <DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
+    <DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
+    <DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
+    <DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
+    <DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
+    <DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
+    <DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
+    <DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
+    <DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
+    <DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
+    <DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
+    <DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
+    <DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
+    <DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
+    <DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
+    <DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
+    <DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
+    <DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
+    <DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
+    <DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
+    <DO_ITEM Index="24" Name=""/>
+    <DO_ITEM Index="25" Name=""/>
+    <DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
+    <DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
+    <DO_ITEM Index="28" Name="" />
+    <DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
+    <DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
+    <DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
+    <DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
+    <DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
+    <DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
+    <DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
+    <DO_ITEM Index="36" Name=""/>
+    <DO_ITEM Index="37" Name=""/>
+    <DO_ITEM Index="38" Name=""/>
+    <DO_ITEM Index="39" Name=""/>
+    <DO_ITEM Index="40" Name=""/>
+    <DO_ITEM Index="41" Name=""/>
+    <DO_ITEM Index="42" Name=""/>
+    <DO_ITEM Index="43" Name=""/>
+    <DO_ITEM Index="44" Name=""/>
+    <DO_ITEM Index="45" Name=""/>
+    <DO_ITEM Index="46" Name="DO_Gasline_Heater_On" Device="" Addr="w2.14" />
+    <DO_ITEM Index="47" Name="DO_Slit_Door_Open_Enable" Device="" Addr="w2.15"/>
+    <DO_ITEM Index="48" Name="DO_PVHe3" Device="GPVHe3" Addr="w3.00" />
+    <DO_ITEM Index="49" Name="DO_He_ISO" Device="PV9" Addr="w3.01" />
+    <DO_ITEM Index="50" Name="" />
+    <DO_ITEM Index="51" Name="" />
+    <DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
+    <DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
+    <DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
+    <DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
+    <DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
+    <DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
+    <DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
+    <DO_ITEM Index="59" Name="DO_PV61" Device="GPV61" Addr="w3.11" />
+    <DO_ITEM Index="60" Name="DO_PV62" Device="GPV62" Addr="w3.12" />
+    <DO_ITEM Index="61" Name="DO_PV71" Device="GPV71" Addr="w3.13" />
+    <DO_ITEM Index="62" Name="DO_PV72" Device="GPV72" Addr="w3.14" />
+    <DO_ITEM Index="63" Name="DO_PV81" Device="GPV81" Addr="w3.15" />
+    <DO_ITEM Index="64" Name="DO_PV82" Device="GPV82" Addr="w4.00" />
+    <DO_ITEM Index="65" Name="DO_PV91" Device="GPV91" Addr="w4.01" />
+    <DO_ITEM Index="66" Name="DO_PV92" Device="GPV92" Addr="w4.02" />
+    <DO_ITEM Index="67" Name="DO_PVA1" Device="GPVA1" Addr="w4.03" />
+    <DO_ITEM Index="68" Name="DO_PVA2" Device="GPVA2" Addr="w4.04" />
+    <DO_ITEM Index="69" Name="DO_PVB1" Device="GPVB1" Addr="w4.05" />
+    <DO_ITEM Index="70" Name="DO_PVB2" Device="GPVB2" Addr="w4.06" />
+    <DO_ITEM Index="71" Name="DO_PVC1" Device="GPVC1" Addr="w4.07" />
+    <DO_ITEM Index="72" Name="DO_PVC2" Device="GPVC2" Addr="w4.08" />
+    <DO_ITEM Index="73" Name="" />
+    <DO_ITEM Index="74" Name="" />
+    <DO_ITEM Index="75" Name="" />
+    <DO_ITEM Index="76" Name="" />
+    <DO_ITEM Index="77" Name="" />
+    <DO_ITEM Index="78" Name="" />
+    <DO_ITEM Index="79" Name="" />
+    <DO_ITEM Index="80" Name="" />
+    <DO_ITEM Index="81" Name="" />
+    <DO_ITEM Index="82" Name="" />
+    <DO_ITEM Index="83" Name="" />
+    <DO_ITEM Index="84" Name="" />
+    <DO_ITEM Index="85" Name="" />
+    <DO_ITEM Index="86" Name="" />
+    <DO_ITEM Index="87" Name="" />
+    <DO_ITEM Index="88" Name="" />
+    <DO_ITEM Index="89" Name="" />
+    <DO_ITEM Index="90" Name="" />
+    <DO_ITEM Index="91" Name="" />
+    <DO_ITEM Index="92" Name="" />
+    <DO_ITEM Index="93" Name="" />
+    <DO_ITEM Index="94" Name="" />
+    <DO_ITEM Index="95" Name="" />
+    <DO_ITEM Index="96" Name="" />
+    <DO_ITEM Index="97" Name="" />
+    <DO_ITEM Index="98" Name="" />
+    <DO_ITEM Index="99" Name="" />
+    <DO_ITEM Index="100" Name="" />
+    <DO_ITEM Index="101" Name="" />
+    <DO_ITEM Index="102" Name="" />
+    <DO_ITEM Index="103" Name="" />
+    <DO_ITEM Index="104" Name="" />
+    <DO_ITEM Index="105" Name="" />
+    <DO_ITEM Index="106" Name="" />
+    <DO_ITEM Index="107" Name="" />
+    <DO_ITEM Index="108" Name="" />
+    <DO_ITEM Index="109" Name="" />
+    <DO_ITEM Index="110" Name="" />
+    <DO_ITEM Index="111" Name="" />
+  </Dig_Out>
+  <Ana_Out>
+    <AO_ITEM Index="0"  Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
+    <AO_ITEM Index="1"  Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
+    <AO_ITEM Index="2"  Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
+    <AO_ITEM Index="3"  Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
+    <AO_ITEM Index="4"  Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
+    <AO_ITEM Index="5"  Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
+    <AO_ITEM Index="6"  Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
+    <AO_ITEM Index="7"  Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
+    <AO_ITEM Index="8"  Name=""  />
+    <AO_ITEM Index="9"  Name=""/>
+    <AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
+    <AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
+    <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
+    <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
+    <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
+    <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
+    <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
+    <AO_ITEM Index="17" Name=""/>
+    <AO_ITEM Index="18" Name=""/>
+    <AO_ITEM Index="19" Name="" />
+    <AO_ITEM Index="20" Name="" />
+    <AO_ITEM Index="21" Name="" />
+    <AO_ITEM Index="22" Name="" />
+    <AO_ITEM Index="23" Name="" />
+    <AO_ITEM Index="24" Name="" />
+    <AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
+    <AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
+    <AO_ITEM Index="27" Name="" />
+    <AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
+    <AO_ITEM Index="29" Name="" />
+    <AO_ITEM Index="30" Name="AO_GASLINE_Temperature_Setpoint" Device="" Addr="d1060" Note="GASLINE 加热设定温度" />
+    <AO_ITEM Index="31" Name="AO_GASLINE_Temp_Limit_Setpoint" Device="" Addr="d1062" Note="Temp Limit" />
+    <AO_ITEM Index="32" Name="" />
+    <AO_ITEM Index="33" Name="" />
+    <AO_ITEM Index="34" Name="" />
+    <AO_ITEM Index="35" Name="" />
+    <AO_ITEM Index="36" Name="" />
+    <AO_ITEM Index="37" Name="" />
+    <AO_ITEM Index="38" Name="" />
+    <AO_ITEM Index="39" Name="" />
+    <AO_ITEM Index="40" Name="" />
+    <AO_ITEM Index="41" Name="" />
+    <AO_ITEM Index="42" Name="" />
+    <AO_ITEM Index="43" Name="" />
+    <AO_ITEM Index="44" Name="" />
+    <AO_ITEM Index="45" Name="" />
+    <AO_ITEM Index="46" Name="" />
+    <AO_ITEM Index="47" Name="" />
+    <AO_ITEM Index="48" Name="" />
+    <AO_ITEM Index="49" Name="" />
+  </Ana_Out>
+  <Ana_In>
+    <AI_ITEM Index="0"  Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
+    <AI_ITEM Index="1"  Name="AI_Process_Pressure_100mt" Device="" Addr="d2002" />
+    <AI_ITEM Index="2"  Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
+    <AI_ITEM Index="3"  Name="AI_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
+    <AI_ITEM Index="4"  Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
+    <AI_ITEM Index="5"  Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
+    <AI_ITEM Index="6"  Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
+    <AI_ITEM Index="7"  Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
+    <AI_ITEM Index="8"  Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
+    <AI_ITEM Index="9"  Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
+    <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
+    <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
+    <AI_ITEM Index="12" Name="AI_He_Flow" Device="" Addr="d2024" Note="float" />
+    <AI_ITEM Index="13" />
+    <AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
+    <AI_ITEM Index="15" Name="AI_Gasline_Control_TC_Temp" Device="" Addr="d2030" Note="float" />
+    <AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
+    <AI_ITEM Index="17" Name="AI_Gasline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
+    <AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
+    <AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" Device="" Addr="d2038" Note="float" />
+    <AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
+    <AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
+    <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
+    <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
+    <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
+    <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
+    <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
+    <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
+    <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
+    <AI_ITEM Index="29" Name="" />
+    <AI_ITEM Index="30" Name="" />
+    <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
+    <AI_ITEM Index="32" Name="" />
+    <AI_ITEM Index="33" Name="" />
+    <AI_ITEM Index="34" Name="" />
+    <AI_ITEM Index="35" Name="AI_MFC9Flow" Device="" Addr="d2070" Note="float" />
+    <AI_ITEM Index="36" Name="AI_MFC10Flow" Device="" Addr="d2072" Note="float" />
+    <AI_ITEM Index="37" Name="AI_MFC11Flow" Device="" Addr="d2074" Note="float" />
+    <AI_ITEM Index="38" Name="AI_MFC12Flow" Device="" Addr="d2076" Note="float" />
+    <AI_ITEM Index="39" Name="" />
+    <AI_ITEM Index="40" Name="AI_He_Pressure" Device="" Addr="d2080" Note="float" />
+    <AI_ITEM Index="41" Name="" />
+    <AI_ITEM Index="42" Name="" />
+    <AI_ITEM Index="43" Name="" />
+    <AI_ITEM Index="44" Name="" />
+    <AI_ITEM Index="45" Name="" />
+    <AI_ITEM Index="46" Name="" />
+    <AI_ITEM Index="47" Name="" />
+    <AI_ITEM Index="48" Name="" />
+    <AI_ITEM Index="49" Name="" />
+  </Ana_In>
 </IO_DEFINE>

Venus/Venus_Simulator/Config/_ioDefineVenusSE_MF.xml

@@ -28,8 +28,8 @@
     <DI_ITEM Index="23" Name="DI_TM_CDA" Device="" Addr="w1.07" Note="TM CDA气压表" />
     <DI_ITEM Index="24" Name="DI_TM_HE" Device="" Addr="w1.08" Note="TM He气压表" />
     <DI_ITEM Index="25" Name="DI_TM_LEAK" Device="" Addr="w1.09" Note="漏液检测器" />
-    <DI_ITEM Index="26" Name="DI_TM_DI11" Device="" Addr="w1.10" Note="PMD SLIT DOOR OPEN  ENABLE" />
-    <DI_ITEM Index="27" Name="DI_TM_DI12" Device="" Addr="w1.11" Note="TM RB EXTEND PMD  ENABLE" />
+    <DI_ITEM Index="26" Name="DI_VCE_V" Device="" Addr="w1.10" Note="VCE真空信号" />
+    <DI_ITEM Index="27" Name="DI_TM_V" Device="" Addr="w1.11" Note="TM真空信号" />
     <DI_ITEM Index="28" Name="DI_VCE_RB_RET" Device="" Addr="w1.12" Note="ROBOT TO VCE RETRACT" />
     <DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
     <DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
@@ -132,11 +132,11 @@
     <AO_ITEM Index="49" Name="" />
   </Ana_Out>
   <Ana_In>
-    <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint"  BufferOffset="0" Device="" Addr="D100" />
-    <AI_ITEM Index="1" Name="VCE_Vacuum_Gauge"  BufferOffset="1" Device="" Addr="D101" />
-    <AI_ITEM Index="2" Name="TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D102"/>
-    <AI_ITEM Index="3" Name="VCE_Pipeline_Vacuum_Gauge"  BufferOffset="3" Device="" Addr="D103"/>
-    <AI_ITEM Index="4" Name="TM_Pipeline_Vacuum_Gauge"  BufferOffset="4" Device="" Addr="D104"/>
+    <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint"  BufferOffset="2" Device="" Addr="D100" />
+    <AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D101" />
+    <AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge"  BufferOffset="2" Device="" Addr="D102"/>
+    <AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge"  BufferOffset="10" Device="" Addr="D103"/>
+    <AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge"  BufferOffset="22" Device="" Addr="D104"/>
     <AI_ITEM Index="5" Name=""/>
     <AI_ITEM Index="6" Name="" />
     <AI_ITEM Index="7" Name=""/>

Venus/Venus_Simulator/Instances/SimulatorSystem.cs

@@ -185,20 +185,16 @@ namespace Venus_Simulator.Instances
                     IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
                     IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
                     IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
-                    IO.DI[$"{mod}.DI_Plate_Water_Flow_Switch"].Value = true;
+                    IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
                     IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
 
                     IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
-                    IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
+                    IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
                     //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
                     //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
-                    IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
 
                     IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
                     IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
-                    IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = true;
-
-                    IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = false;
                     IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
                     IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
 
@@ -206,15 +202,13 @@ namespace Venus_Simulator.Instances
 
                     IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
 
-                    IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = false;
-                    IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = false;
-                    IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = false;
-                    IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = false;
-
+                    IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
+                    IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
                     IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
                     IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
+
                     IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
-                    IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = true;
+                    IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
 
                     IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
                     IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
@@ -236,7 +230,7 @@ namespace Venus_Simulator.Instances
                     IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
                     IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
                     IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
-                    IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
+                    IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
 
 
 
@@ -244,13 +238,22 @@ namespace Venus_Simulator.Instances
                     IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
                     IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
                     IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
+                    IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
                     IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
                     IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
                     IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
 
+                    IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
+                    IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
+                    IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
+                    IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
+
+                    IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
+                    IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
+                    IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
 
                     //// pressure
-                    //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
+
                     SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
                     //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
                     SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
@@ -260,9 +263,9 @@ namespace Venus_Simulator.Instances
                     //// Temperature
 
                     SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
-                    SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
+                    //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
                     SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
-                    SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
+                    //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
                     SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
                     SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
                     SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
@@ -275,6 +278,7 @@ namespace Venus_Simulator.Instances
                     SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
                     SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
                     SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
+
                     break;
                 case JetChamber.Kepler2300:
                     // chamber
@@ -544,10 +548,10 @@ namespace Venus_Simulator.Instances
             IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
 
             SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
-            SetAiValue($"{mod}.VCE_Vacuum_Gauge", 3000);
-            SetAiValue($"{mod}.VCE_Pipeline_Vacuum_Gauge", 3000);
-            SetAiValue($"{mod}.TM_Pipeline_Vacuum_Gauge", 3000);
-            SetAiValue($"{mod}.TM_Vacuum_Gauge", 3000);
+            SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
+            SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
+            SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
+            SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
         }
 
             private bool OnMonitor()
@@ -597,6 +601,11 @@ namespace Venus_Simulator.Instances
                             break;
                         case JetChamber.Kepler2200B:
                             break;
+                        case JetChamber.VenusSE:
+                            MonitorPin(item.Key);
+                            //MonitorVenuSESlitDoor(item.Key);
+                            MonitorPressure_VenusSE(item.Key);
+                            break;
                     }
                 }
 
@@ -605,8 +614,7 @@ namespace Venus_Simulator.Instances
                 MonitorMFSlitDoor();
                 MonitorSEMFSlitDoor();
                 MonitorMFPressure();
-
-
+                MonitorSEMFPressure();
 
             }
             catch (Exception e)
@@ -631,7 +639,10 @@ namespace Venus_Simulator.Instances
 
 
         }
+        //void MonitorVenuSESlitDoor(ModuleName mod)
+        //{
 
+        //}
         void MonitorSlitDoor(ModuleName mod)
         {
             // slit door open
@@ -727,13 +738,6 @@ namespace Venus_Simulator.Instances
                 IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
                 IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
             }
-
-            // VCE T door Close
-            if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
-            {
-                IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
-                IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
-            }
         }
 
 
@@ -1237,13 +1241,131 @@ namespace Venus_Simulator.Instances
             IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
 
         }
-        void MonitorPressure_Kepler2200A(ModuleName mod)
+        void MonitorPressure_VenusSE(ModuleName mod)
         {
             string sAI_Foreline = "AI_Foreline_Pressure_10t";
+            string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
+            string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
+            DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
+            DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
+            DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
 
+            if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
+            {
+                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
+            }
+            else
+            {
+                SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
+            }
 
+            if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
+            {
+                if (fast_pump_vlv.Value && soft_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
+                    }
 
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
+                }
+                else if (fast_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
+                    }
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
+                }
+                else if (soft_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+                    if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
+                    {
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
+                        //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
+                    }
+                    else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
+                    {
+                        getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                        SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
+                        SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
+                    }
+                    //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
+                    //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
+                }
+                else if (turbo_pump_vlv.Value)
+                {
+                    float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+                    float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+
+                    getAiValue_ProcessPressure = getAiValue_ChamberPressure;
+                    SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
+                    SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
+                }
+            }
+            // 压力值越界，复位
+            float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
+            if (chamber_pressure1 > ATM_PRESSURE)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
+            }
+            else if (chamber_pressure1 < 20)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
+            }
+
+            float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
+            if (process_pressure1 > PROCESS_GAUGE)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
+            }
+            else if (process_pressure1 < 20)
+            {
+                SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
+            }
+
+            float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
+            if (foreline_pressure > 10000)
+            {
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
+            }
+            else if (foreline_pressure < 150)
+            {
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
+            }
+
+            // ATM switch
+            IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
 
+            // VAC switch
+            IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
+        }
+        void MonitorPressure_Kepler2200A(ModuleName mod)
+        {
+            string sAI_Foreline = "AI_Foreline_Pressure_10t";
 
             if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
             {
@@ -1402,6 +1524,100 @@ namespace Venus_Simulator.Instances
             IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
 
         }
+        void MonitorSEMFPressure()
+        {
+            ModuleName mod = ModuleName.SETM;
+            string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
+            string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
+
+            DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
+            DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
+
+            DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
+            DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
+
+
+            DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
+            DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
+
+            DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
+            DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
+            float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
+            float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
+
+            if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
+            {
+                if (getAiValue_TM_ChamberPressure > 10000)
+                {
+                    SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
+                }
+                else if (getAiValue_TM_ChamberPressure <= 10000)
+                {
+                    SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
+                }
+            }
+
+            if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
+            {
+                if (getAiValue_TM_ChamberPressure > 10000)
+                {
+                    SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
+                }
+                else if (getAiValue_TM_ChamberPressure <= 10000)
+                {
+                    SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
+                }
+            }
+            if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
+            {
+                if (getAiValue_VCE_ChamberPressure > 10000)
+                {
+                    SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
+                }
+                else if (getAiValue_VCE_ChamberPressure <= 10000)
+                {
+                    SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
+                }
+            }
+
+            if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
+            {
+                if (getAiValue_VCE_ChamberPressure > 10000)
+                {
+                    SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
+                }
+                else if (getAiValue_VCE_ChamberPressure <= 10000)
+                {
+                    SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
+                }
+            }
+            getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
+
+            if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
+            {
+                SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
+            }
+            else if (getAiValue_VCE_ChamberPressure < 20)
+            {
+                SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
+            }
+
+            getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
+
+            if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
+            {
+                SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
+            }
+            else if (getAiValue_TM_ChamberPressure < 20)
+            {
+                SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
+            }
+            IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
+
+            // VAC switch
+            IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
+
+        }
         void MonitorMFPressure()
         {
             //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)

Venus/Venus_Simulator/Venus_Simulator.csproj

@@ -220,6 +220,9 @@
     <Compile Include="Views\SimuSkyPumpPMCView.xaml.cs">
       <DependentUpon>SimuSkyPumpPMCView.xaml</DependentUpon>
     </Compile>
+    <Compile Include="Views\SimuSkyPumpSETMView.xaml.cs">
+      <DependentUpon>SimuSkyPumpSETMView.xaml</DependentUpon>
+    </Compile>
     <Compile Include="Views\SimuSkyPumpTMView.xaml.cs">
       <DependentUpon>SimuSkyPumpTMView.xaml</DependentUpon>
     </Compile>
@@ -274,8 +277,8 @@
     <Compile Include="Views\Simu_EfemView.xaml.cs">
       <DependentUpon>Simu_EfemView.xaml</DependentUpon>
     </Compile>
-    <Compile Include="Views\Simu_seTMView.xaml.cs">
-      <DependentUpon>Simu_seTMView.xaml</DependentUpon>
+    <Compile Include="Views\Simu_SETMView.xaml.cs">
+      <DependentUpon>Simu_SETMView.xaml</DependentUpon>
     </Compile>
     <Compile Include="Views\Simu_TMView.xaml.cs">
       <DependentUpon>Simu_TMView.xaml</DependentUpon>
@@ -502,6 +505,10 @@
       <Generator>MSBuild:Compile</Generator>
       <SubType>Designer</SubType>
     </Page>
+    <Page Include="Views\SimuSkyPumpSETMView.xaml">
+      <Generator>MSBuild:Compile</Generator>
+      <SubType>Designer</SubType>
+    </Page>
     <Page Include="Views\SimuSkyPumpTMView.xaml">
       <Generator>MSBuild:Compile</Generator>
       <SubType>Designer</SubType>
@@ -574,7 +581,7 @@
       <Generator>MSBuild:Compile</Generator>
       <SubType>Designer</SubType>
     </Page>
-    <Page Include="Views\Simu_seTMView.xaml">
+    <Page Include="Views\Simu_SETMView.xaml">
       <SubType>Designer</SubType>
       <Generator>MSBuild:Compile</Generator>
     </Page>
@@ -589,6 +596,7 @@
   </ItemGroup>
   <ItemGroup />
   <ItemGroup>
+    <Resource Include="Config\_ioDefineVenusSE.xml" />
     <Content Include="Config\_ioDefineVenus_MF.xml">
       <CopyToOutputDirectory>Always</CopyToOutputDirectory>
     </Content>

Venus/Venus_Simulator/Venus_Simulator.csproj.user

@@ -1,6 +1,6 @@
 <?xml version="1.0" encoding="utf-8"?>
 <Project ToolsVersion="Current" xmlns="http://schemas.microsoft.com/developer/msbuild/2003">
   <PropertyGroup>
-    <ProjectView>ShowAllFiles</ProjectView>
+    <ProjectView>ProjectFiles</ProjectView>
   </PropertyGroup>
 </Project>

Venus/Venus_Simulator/Views/SimuSkyPumpSETMView.xaml

@@ -0,0 +1,53 @@
+<UserControl x:Class="Venus_Simulator.Views.SimuSkyPumpSETMView"
+             xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
+             xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
+             xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006" 
+             xmlns:d="http://schemas.microsoft.com/expression/blend/2008" 
+             xmlns:local="clr-namespace:Venus_Simulator.Views"
+             xmlns:commons="clr-namespace:MECF.Framework.Simulator.Core.Commons;assembly=MECF.Framework.Simulator.Core"
+             mc:Ignorable="d" 
+             d:DesignHeight="900" d:DesignWidth="1200">
+    <Grid>
+        <Grid.RowDefinitions>
+            <RowDefinition Height="100"></RowDefinition>
+            <RowDefinition Height="0"></RowDefinition>
+            <RowDefinition Height="50"></RowDefinition>
+            <RowDefinition Height="*"></RowDefinition>
+        </Grid.RowDefinitions>
+        <commons:SerialPortTitleView Grid.Row="0"></commons:SerialPortTitleView>
+        <Grid  Grid.Row="1" Height="350" Width="900">
+            <Grid.RowDefinitions>
+                <RowDefinition Height="300"></RowDefinition>
+                <RowDefinition Height="50"></RowDefinition>
+            </Grid.RowDefinitions>
+        </Grid>
+        <StackPanel Grid.Row="2" Orientation="Horizontal" Width="1200">
+            <Button Content="Clear Log" Width="100" Height="35"   Command="{Binding ClearLogCommand}"></Button>
+        </StackPanel>
+        <DataGrid Grid.Row="3" FontSize="16" AutoGenerateColumns="False" CanUserAddRows="False" CanUserResizeRows="False" CanUserSortColumns="False" ItemsSource="{Binding TransactionLogItems}"
+                      ScrollViewer.CanContentScroll="True"
+                      ScrollViewer.VerticalScrollBarVisibility="Auto"
+                      ScrollViewer.HorizontalScrollBarVisibility="Auto"
+                      Width="1200" Height="Auto" VerticalAlignment="Top">
+            <DataGrid.Columns>
+                <DataGridTextColumn Header="Time" Width="200" IsReadOnly="True" Binding="{Binding OccurTime, UpdateSourceTrigger=PropertyChanged}" />
+                <DataGridTextColumn Header="Incoming" Width="500" IsReadOnly="True"  Binding="{Binding Incoming, UpdateSourceTrigger=PropertyChanged}">
+                    <DataGridTextColumn.ElementStyle>
+                        <Style TargetType="TextBlock">
+                            <Setter Property="TextWrapping" Value="Wrap" />
+                            <Setter Property="Height" Value="auto" />
+                        </Style>
+                    </DataGridTextColumn.ElementStyle>
+                </DataGridTextColumn>
+                <DataGridTextColumn Header="Outgoing" Width="500" IsReadOnly="True"  Binding="{Binding Outgoing, UpdateSourceTrigger=PropertyChanged}">
+                    <DataGridTextColumn.ElementStyle>
+                        <Style TargetType="TextBlock">
+                            <Setter Property="TextWrapping" Value="Wrap" />
+                            <Setter Property="Height" Value="auto" />
+                        </Style>
+                    </DataGridTextColumn.ElementStyle>
+                </DataGridTextColumn>
+            </DataGrid.Columns>
+        </DataGrid>
+    </Grid>
+</UserControl>

Venus/Venus_Simulator/Views/SimuSkyPumpSETMView.xaml.cs

@@ -0,0 +1,31 @@
+using System.Windows.Controls;
+using MECF.Framework.Simulator.Core.Commons;
+using Venus_Simulator.Devices;
+
+namespace Venus_Simulator.Views
+{
+    /// <summary>
+    /// Interaction logic for SimuAdTecMatchView.xaml
+    /// </summary>
+    public partial class SimuSkyPumpSETMView : UserControl
+    {
+        public SimuSkyPumpSETMView()
+        {
+            InitializeComponent();
+            this.DataContext = new MockSkyPumpViewModelSETM();
+        }
+    }
+
+    class MockSkyPumpViewModelSETM : SerialPortDeviceViewModel
+    {
+        public string Title
+        {
+            get { return "Sky pump SETM simulator"; }
+        }
+
+        public MockSkyPumpViewModelSETM() : base("SkyPumpSETMSimulator")
+        {
+            Init(new SkyPumpMockTM());
+        }
+    }
+}

Venus/Venus_Simulator/Views/Simu_seTMView.xaml

@@ -1,4 +1,4 @@
-<UserControl x:Class="Venus_Simulator.Views.Simu_seTMView"
+<UserControl x:Class="Venus_Simulator.Views.Simu_SETMView"
               xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
              xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
              xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006" 

Venus/Venus_Simulator/Views/Simu_seTMView.xaml.cs

@@ -21,13 +21,13 @@ namespace Venus_Simulator.Views
     /// <summary>
     /// Simu_seTMView.xaml 的交互逻辑
     /// </summary>
-    public partial class Simu_seTMView : UserControl
+    public partial class Simu_SETMView : UserControl
     {
-        public Simu_seTMView()
+        public Simu_SETMView()
         {
 
             InitializeComponent();
-            this.DataContext = new seTMSimulatorViewModel();
+            this.DataContext = new SETMSimulatorViewModel();
             this.Loaded += OnViewLoaded;
         }
 
@@ -37,7 +37,7 @@ namespace Venus_Simulator.Views
         }
     }
 
-    class seTMSimulatorViewModel : SocketDeviceViewModel
+    class SETMSimulatorViewModel : SocketDeviceViewModel
     {
         public string Title
         {
@@ -50,7 +50,7 @@ namespace Venus_Simulator.Views
 
 
 
-        public seTMSimulatorViewModel() : base("seTMSimuViewModel")
+        public SETMSimulatorViewModel() : base("SETMSimuViewModel")
         {