 hecl
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ea59788c5a
Venuse DE routine update &fix config can't hide bugs
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1 year ago |
 lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 year ago |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 year ago |
|
hecl
|
7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
|
hecl
|
091efd8f64
1.enhance PMdataRecord about waferstatus update
|
1 year ago |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
1 year ago |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
|
1 year ago |
|
lixiang
|
5c995238da
1.修复kepler流气模拟器bug
|
1 year ago |
|
lixiang
|
407ebcf41c
1.kepler2200控压模拟器修改
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
hecl
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
 zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
hecl
|
1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 year ago |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
2 years ago |
|
lixiang
|
235f843244
优化跑片动画算法
|
2 years ago |
|
hecl
|
58b65c3ff0
VenusSE Simulator PM Update
|
2 years ago |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
2 years ago |
|
hecl
|
2aa32f8ae4
fix bugs
|
2 years ago |
|
hecl
|
5396e84cfe
VenusSE TM io simulator update
|
2 years ago |
|
hecl
|
afc3b9494f
VenusSE TM pressurecontrol update
|
2 years ago |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
2 years ago |
