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1.enhance PMdataRecord about waferstatus update
2.fix venuse foreline pressure bugs

hecl 1 year ago
parent
commit
091efd8f64

+ 2 - 1
Venus/Venus_RT/Modules/PMs/PMProcessRoutine.cs

@@ -407,7 +407,7 @@ namespace Venus_RT.Modules.PMs
             var result = step.Run();
             if (result == RState.Failed)
             {
-                WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Failed);
+                WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
                 RecipeDown("Fail");            
                 UpdateWaferStatus(false);
                 Runner.Stop($"Recipe:{CurrentRunningRecipe}, Step:{_currentStep + 1} Failed");
@@ -499,6 +499,7 @@ namespace Venus_RT.Modules.PMs
             RecipeFileManager.Instance.SaveAsRecipe2(Module.ToString(), _currentRecipe.Header.Type.ToString(), _currentRecipe.Header.Name, RecipeUnity.RecipeToString(_currentRecipe));
             _stepTime.Stop();
             WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Idle);
+            WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
             CloseAllValves();
             _chamber.GeneratorSetpower(0);
             _chamber.GeneratorBiasSetpower(0);

+ 4 - 4
Venus/Venus_Simulator/Instances/SimulatorSystem.cs

@@ -1403,13 +1403,13 @@ namespace Venus_Simulator.Instances
             }
 
             float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
-            if (foreline_pressure > 10000)
+            if (foreline_pressure > 1999)
             {
-                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
             }
-            else if (foreline_pressure < 150)
+            else if (foreline_pressure < 750)
             {
-                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
+                SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 751);
             }
 
             // ATM switch