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@@ -288,8 +288,8 @@ namespace Venus_Simulator.Instances
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IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
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IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
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- IO.DI[$"{mod}.DI_Lift_Pin_Up_Pos"].Value = false;
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- IO.DI[$"{mod}.DI_Lift_Pin_Down_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
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IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
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//IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
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//IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
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@@ -643,49 +643,47 @@ namespace Venus_Simulator.Instances
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{
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ModuleName mod = ModuleName.SETM;
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- IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
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- IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
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- IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
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- IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
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- IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_A"].Value = true;
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- IO.DI[$"{mod}.DI_TM_A"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_SS"].Value = false;
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- IO.DI[$"{mod}.DI_PMB_SS"].Value = false;
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- IO.DI[$"{mod}.DI_PMA_SS"].Value = false;
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- IO.DI[$"{mod}.DI_PMC_SS"].Value = false;
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- IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
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- IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
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- IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
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- IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
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- IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
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- IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_HE"].Value = true;
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- IO.DI[$"{mod}.DI_TM_N2_2"].Value = true;
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- IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
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- IO.DI[$"{mod}.DI_TM_LEAK"].Value = true;
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- IO.DI[$"{mod}.DI_TM_CDA"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_V"].Value = false;
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- IO.DI[$"{mod}.DI_TM_V"].Value = false;
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- IO.DI[$"{mod}.DI_TM_LEAK"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
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- IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
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- IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
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- IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
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+ IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
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+ IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
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+ IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
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+ IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = false;
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+ IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = false;
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+ IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = false;
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+ IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = false;
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+ IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
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+ IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
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+ IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
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+ IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
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+ IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
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+ IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
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SetAiValue($"{mod}.AI_MFC_Flow", 3000);
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- SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
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- SetAiValue($"{mod}.AI_Pipeline_Vacuum_Gauge", 3000);
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- SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
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+ SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
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+ SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
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+ SetAiValue($"{mod}.AI_TM_Pressure", 3000);
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}
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private bool OnMonitor()
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@@ -869,59 +867,59 @@ namespace Venus_Simulator.Instances
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{
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ModuleName mod = ModuleName.SETM;
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// VCE T door open
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- if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
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+ if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
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{
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- IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
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- IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
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}
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// VCE T door Close
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- if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
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+ if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
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{
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- IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
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}
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//pma
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- if (IO.DO[$"{mod}.DO_TM_PMA_OP"].Value)
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+ if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
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{
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- IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
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}
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- if (IO.DO[$"{mod}.DO_TM_PMA_CL"].Value)
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+ if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
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{
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- IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
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}
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//pmb
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- if (IO.DO[$"{mod}.DO_TM_PMB_OP"].Value)
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+ if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
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{
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- IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
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- IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
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}
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- if (IO.DO[$"{mod}.DO_TM_PMB_CL"].Value)
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+ if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
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{
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- IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
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- IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
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}
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//pmc
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- //if (IO.DO[$"{mod}.DO_TM_PMC_OP"].Value)
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- //{
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+ if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
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+ {
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- // IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
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- // IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = false;
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- //}
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
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+ }
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- //if (IO.DO[$"{mod}.DO_TM_PMC_CL"].Value)
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- //{
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- // IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
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- // IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
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- //}
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+ if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
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+ {
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
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+ IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
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+ }
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}
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@@ -1901,21 +1899,21 @@ namespace Venus_Simulator.Instances
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void MonitorSEMFPressure()
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{
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ModuleName mod = ModuleName.SETM;
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- string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
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- string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
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+ string VCE_ChamberPressure = "AI_VCE_Pressure";
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+ string TM_AI_ChamberPressure = "AI_TM_Pressure";
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- DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
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- DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
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+ DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
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+ DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
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- DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
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- DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
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+ DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
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+ DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
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- DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
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- DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
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+ DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
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+ DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
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- DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
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- DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
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+ DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
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+ DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
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float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
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float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
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@@ -1986,10 +1984,10 @@ namespace Venus_Simulator.Instances
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{
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SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
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}
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- IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
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+ IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
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// VAC switch
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- IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
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+ IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
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}
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void MonitorMFPressure()
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hecl