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@@ -130,10 +130,10 @@ namespace Venus_RT.Modules.EFEM
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{
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var waferPresence = _efem.GetWaferPresence();
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//000/111 upperArmWafer, lowerArmWafer, alignerWafer1, alignerWafer2, coolingwafer1,coolingwafer2
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- if (waferPresence.Length != 6)
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+ if (waferPresence.Length != 3)
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{
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LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, {waferPresence}, should be 6 characters");
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- return true;
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+ return false;
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}
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//upper arm
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@@ -185,52 +185,52 @@ namespace Venus_RT.Modules.EFEM
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}
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//aligner2
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- if (waferPresence[3] == '1')
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- {
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- if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
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- {
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- WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
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- }
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- }
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- else
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- {
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- if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
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- {
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- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
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- }
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- }
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+ //if (waferPresence[3] == '1')
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+ //{
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+ // if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
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+ // {
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+ // WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
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+ // }
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+ //}
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+ //else
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+ //{
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+ // if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
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+ // {
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+ // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
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+ // }
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+ //}
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//cooling1
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- if (waferPresence[4] == '1')
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- {
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- if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
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- {
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- WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
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- }
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- }
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- else
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- {
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- if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
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- {
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- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
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- }
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- }
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+ //if (waferPresence[4] == '1')
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+ //{
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+ // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
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+ // {
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+ // WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
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+ // }
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+ //}
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+ //else
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+ //{
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+ // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
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+ // {
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+ // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
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+ // }
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+ //}
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//cooling2
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- if (waferPresence[5] == '1')
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- {
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- if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
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- {
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- WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
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- }
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- }
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- else
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- {
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- if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
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- {
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- LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
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- }
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- }
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+ //if (waferPresence[5] == '1')
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+ //{
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+ // if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
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+ // {
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+ // WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
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+ // }
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+ //}
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+ //else
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+ //{
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+ // if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
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+ // {
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+ // LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
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+ // }
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+ //}
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return true;
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}
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else if (_efem.Status != RState.Running)
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