|
@@ -39,8 +39,8 @@
|
|
|
</Action>
|
|
|
|
|
|
<Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
|
|
|
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
|
|
|
- <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
|
|
|
+ <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
|
|
|
+ <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
|
|
|
<Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
<Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
|
|
|
<Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
|
|
@@ -85,8 +85,8 @@
|
|
|
<Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
<Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
|
|
|
<Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
|
|
|
- <Limit do="DO_Soft_Pumping_Valve" value="false" tip="DO Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" />
|
|
|
- <Limit do="DO_Fast_Pumping_Valve" value="false" tip="DO Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" />
|
|
|
+ <Limit do="DO_Soft_Pumping_Valve" value="false" tip="DO Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" />
|
|
|
+ <Limit do="DO_Fast_Pumping_Valve" value="false" tip="DO Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" />
|
|
|
</Action>
|
|
|
|
|
|
<Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
|
|
@@ -188,11 +188,15 @@
|
|
|
<Action do="DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
|
|
|
<Limit di="DI_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
|
|
|
<Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
+ <Limit di="DI_Arm_Not_Extend_to_PM" value="true" tip="DI Arm Not Extend to PM" tip.zh-CN="" tip.en-US="DI-76" />
|
|
|
+ <Limit di="DI_EFEM_Door_Colse" value="true" tip="DI EFEM Door Colse" tip.zh-CN="" tip.en-US="DI-77" />
|
|
|
</Action>
|
|
|
|
|
|
<Action do="DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
|
|
|
- <Limit di="DI_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
|
|
|
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
+ <Limit di="DI_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
|
|
|
+ <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
+ <Limit di="DI_Arm_Not_Extend_to_PM" value="true" tip="DI Arm Not Extend to PM" tip.zh-CN="" tip.en-US="DI-76" />
|
|
|
+ <Limit di="DI_EFEM_Door_Colse" value="true" tip="DI EFEM Door Colse" tip.zh-CN="" tip.en-US="DI-77" />
|
|
|
</Action>
|
|
|
|
|
|
|
|
@@ -215,11 +219,29 @@
|
|
|
|
|
|
<Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
|
|
|
<Limit di="DI_VAC_Switch" value="true" tip="DI PM Vacuum SW" tip.zh-CN="" tip.en-US="DI-2" />
|
|
|
- <Limit di="DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
|
|
|
+ <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
|
|
|
+ </Action>
|
|
|
+
|
|
|
+ <Action do="DO_S_Valve_Heater_On" value="true" tip="S-Valve Heater On" tip.zh-CN="" tip.en-US="DO-33" >
|
|
|
+ <Limit di="DI_S_Valve_OT_Switch_Alarm" value="false" tip="S_Valve OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-66" />
|
|
|
+ </Action>
|
|
|
+
|
|
|
+ <Action do="DO_Foreline_Heater_On" value="true" tip="Foreline Heater On" tip.zh-CN="" tip.en-US="DO-34" >
|
|
|
+ <Limit di="DI_Foreline_OT_Switch_Alarm" value="false" tip="Foreline OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-67" />
|
|
|
</Action>
|
|
|
|
|
|
<Action do="DO_CHB_Wall_Heater_On" value="true" tip="Chamber Wall Heater On" tip.zh-CN="" tip.en-US="DO-35" >
|
|
|
- <Limit di="DI_CHB_Wall_OT_Switch_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
|
|
|
+ <Limit di="DI_CHB_Wall_OT_Switch_Alarm" value="false" tip="DI Chamber Wall OT Alarm" tip.zh-CN="" tip.en-US="DI-32" />
|
|
|
+ </Action>
|
|
|
+
|
|
|
+ <Action do="DO_Lid_UP" value="true" tip="Lid UP" tip.zh-CN="" tip.en-US="DO-50" >
|
|
|
+ <Limit di="DI_S_Valve_OT_Switch_Alarm" value="false" tip="S_Valve OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-66" />
|
|
|
</Action>
|
|
|
+
|
|
|
+ <Action do="DO_Lid_Down" value="true" tip="Lid Down" tip.zh-CN="" tip.en-US="DO-51" >
|
|
|
+ <Limit di="DI_Foreline_OT_Switch_Alarm" value="false" tip="Foreline OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-67" />
|
|
|
+ </Action>
|
|
|
+
|
|
|
+
|
|
|
|
|
|
</Interlock>
|