TMInterlock update

Venus/Venus_MainPages/Views/TMOperationView.xaml

@@ -305,13 +305,13 @@
             <TextBlock  FontSize="15" Canvas.Top="808" Canvas.Left="625" Text="LL Pump"/>
             <TextBlock  FontSize="15" Canvas.Top="700" Canvas.Left="620" Text="TM Pump"/>
 
-            <TextBlock  FontSize="15" Canvas.Top="565" Canvas.Left="565" Text="Soft&#x0A;Pump&#x0A; V2"/>
-            <TextBlock  FontSize="15" Canvas.Top="565" Canvas.Left="705" Text="Fast&#x0A;Pump&#x0A; V3"/>
+            <TextBlock  FontSize="13" Canvas.Top="565" Canvas.Left="565" Text="Soft&#x0A;Pump&#x0A; V2"/>
+            <TextBlock  FontSize="13" Canvas.Top="565" Canvas.Left="705" Text="Fast&#x0A;Pump&#x0A; V3"/>
 
             <TextBlock  FontSize="13" Canvas.Top="640" Canvas.Left="420" Text="Soft&#x0A;Pump&#x0A; V6"/>
             <TextBlock  FontSize="13" Canvas.Top="640" Canvas.Left="555" Text="Fast&#x0A;Pump&#x0A; V7"/>
 
-            <TextBlock  FontSize="13" Canvas.Top="640" Canvas.Left="780" Text="Soft&#x0A;Pump&#x0A;V12"/>
+            <TextBlock  FontSize="13" Canvas.Top="640" Canvas.Left="775" Text="Soft&#x0A;Pump&#x0A;V12"/>
             <TextBlock  FontSize="13" Canvas.Top="640" Canvas.Left="855" Text="Fast&#x0A;Pump&#x0A;V13"/>
 
             <Border    BorderBrush="Gray"  BorderThickness="0"  Width="60" Height="6" Canvas.Left="785" Canvas.Top="244" >

Venus/Venus_RT/Config/TM/TMInterlock.xml

@@ -3,15 +3,102 @@
   
 
    <!--TM-->
-	<Action do="DO_LLA_Slit_Door_E_Open"					value="true" tip="Loadlock A EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-11" >
-		<Limit di="DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
+  <Action do="DO_N2_Valve"					value="true" tip="N2 Valve"	tip.zh-CN="" tip.en-US="DO-00" >
+    <Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+  </Action>
+  
+  <Action do="DO_Soft_Pumping_Valve_TM"					value="true" tip="Soft Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-01" >
+    <Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
+    <Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
+    <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />    
+    <Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit do="DO_Purge_Valve_TM"	value="false" tip="Purge Valve TM"			tip.zh-CN="" tip.en-US="D0-03" />
+    <Limit do="DO_Vent_Valve_TM"				value="false" tip="Soft Vent Valve TM"					tip.zh-CN="" tip.en-US="DO-04" />
+  </Action>
+  
+  <Action do="DO_Fast_Pumping_Valve_TM"					value="true" tip="Fast Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-02" >
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
+    <Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
+    <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
+    <Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit do="DO_Purge_Valve_TM"	value="false" tip="Purge Valve TM"			tip.zh-CN="" tip.en-US="D0-03" />
+    <Limit do="DO_Vent_Valve_TM"				value="false" tip="Soft Vent Valve TM"					tip.zh-CN="" tip.en-US="DO-04" />
+  </Action>
+
+  <Action do="DO_Purge_Valve_TM"					value="true" tip="Purge Valve TM"	tip.zh-CN="" tip.en-US="DO-03" >
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit do="DO_Soft_Pumping_Valve_TM"			value="false" tip="Soft Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-01" />
+    <Limit do="DO_Fast_Pumping_Valve_TM"			value="false" tip="Fast Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-02" />
+  </Action>
+
+  <Action do="DO_Vent_Valve_TM"					value="true" tip="Soft Vent Valve TM"	tip.zh-CN="" tip.en-US="DO-04" >
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit do="DO_Soft_Pumping_Valve_TM"			value="false" tip="Soft Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-01" />
+    <Limit do="DO_Fast_Pumping_Valve_TM"			value="false" tip="Fast Pumping Valve TM"		tip.zh-CN="" tip.en-US="DO-02" />
+  </Action>
+
+  <Action do="DO_Soft_Pumping_Valve_LLA"					value="true" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
+    <Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
+  </Action>
+
+  <Action do="DO_Fast_Pumping_Valve_LLA"					value="true" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
+    <Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
+  </Action>
+
+  <Action do="DO_Purge_Valve_LLA"					value="true" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
+    <Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
+  </Action>
+
+  <Action do="DO_Vent_Valve_LLA"					value="true" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
+    <Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
+  </Action>
+  
+	<Action do="DO_LLA_Slit_Door_E_Open"					value="true" tip="LLA Slit Door/I Open"	tip.zh-CN="" tip.en-US="DO-11" >
+    <Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
-		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
 	</Action>
 	
-	<Action do="DO_LLA_Slit_Door_E_Close"				value="true" tip="Loadlock A EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
-		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
-		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+	<Action do="DO_LLA_Slit_Door_E_Close"				value="true" tip="LLA Slit Door/I Close"	tip.zh-CN="" tip.en-US="DO-12" >
+    <Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
 	</Action>
 	
 	<Action do="DO_LLB_Slit_Door_E_Open"					value="true" tip="Loadlock B EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-21" >
@@ -19,36 +106,101 @@
 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
 		<Limit di="DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
 	</Action>
-	
-	<Action do="DO_LLB_Slit_Door_E_Close"				value="true" tip="Loadlock B EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
-		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
-		<Limit di="DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
-	</Action>
 
 	<Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
 		<Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
-		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit di="DI_LLA_VAC_Switch"				value="true" tip="LLA VAC Switch"					tip.zh-CN="" tip.en-US="DI-34" />
+    <Limit di="DI_LLA_ATM_Switch"				value="false" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
+    <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
 	</Action>
-	
+  
 	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
-		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
 	</Action>
-	
-	<Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="Loadlock B TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-23" >
+  
+  <Action do="DO_Soft_Pumping_Valve_LLB"				value="true" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit do="DO_Purge_Valve_LLB"	value="false" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" />
+    <Limit do="DO_Vent_Valve_LLB"				value="false" tip="Vent Valve LLB"			tip.zh-CN="" tip.en-US="DO-19" />
+  </Action>
+
+  <Action do="DO_Fast_Pumping_Valve_LLB"					value="true" tip="Fast Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-17" >
+    <Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
+    <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit do="DO_Purge_Valve_LLB"	value="false" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" />
+    <Limit do="DO_Vent_Valve_LLB"				value="false" tip="Vent Valve LLB"			tip.zh-CN="" tip.en-US="DO-19" />
+  </Action>
+
+  <Action do="DO_Fast_Pumping_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
+    <Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
+  </Action>
+
+  <Action do="DO_Vent_Valve_LLB"					value="true" tip="Vent Valve LLB"		tip.zh-CN="" tip.en-US="DO-19" >
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
+    <Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
+  </Action>
+
+  <Action do="DO_LLB_Slit_Door_E_Open"					value="true" tip="LLB Slit Door/I Open"		tip.zh-CN="" tip.en-US="DO-21" >
+    <Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit di="DI_LLB_ATM_Switch"	value="false" tip="LLB ATM Switch"		tip.zh-CN="" tip.en-US="DI-37" />
+  </Action>
+
+  <Action do="DO_LLB_Slit_Door_E_Close"					value="true" tip="LLB Slit Door/I Close"		tip.zh-CN="" tip.en-US="DO-22" >
+    <Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit di="DI_LLB_ATM_Switch"	value="false" tip="LLB ATM Switch"		tip.zh-CN="" tip.en-US="DI-37" />
+  </Action>
+  
+	<Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
 		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
-		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
+		<Limit di="DI_LLB_VAC_Switch"				value="true" tip="LLB VAC Switch"			tip.zh-CN="" tip.en-US="DI-36" />
+    <Limit di="DI_LLB_ATM_Switch"				value="false" tip="LLB ATM Switch"			tip.zh-CN="" tip.en-US="DI-37" />
+    <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
 	</Action>
 	
-	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="Loadlock B TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-24" >
+	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="LLB Slit Door/O Close"	tip.zh-CN="" tip.en-US="DO-24" >
 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
-		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
 	</Action>
+  
+  <Action do="DO_Water_Valve_Relay"				value="true" tip="Water Valve Relay"	tip.zh-CN="" tip.en-US="DO-26" >
+    <Limit di="DI_Water_Leak_Sensor"				value="true" tip="Water Leak Sensor"		tip.zh-CN="" tip.en-US="DI-3" />
+  </Action>
 	
 </Interlock>