 jiangjy
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5ee3a8b206
启用FoupEnter/waferCharge/WaferDisCharge模块的 N2PurgeEnable/LASV/foup SV参数
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3 weeks ago |
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jiangjy
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e193151597
fix IsUnloadCompleted标志位调整
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3 weeks ago |
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jiangjy
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77f9a9c881
fix 去除FIMSLoadRputine模块 FIMSLoadCheckLAO2 方法，当同时压氧load的时候，氧气分析仪只会在一侧，然后另一个等待，但是 Check方法会失败，导致error
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1 month ago |
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jiangjy
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89f1362802
fix 新增fimsManualCheck配置，防止auto 模式下，氧气分析仪切换有问题导致Load Check fail
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1 month ago |
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jiangjy
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871e353671
添加 CEXH是否控制ffu配置
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2 months ago |
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jiangjy
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e5be95967b
fix 优化ffu config 展示
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2 months ago |
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jiangjy
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4f6af7c7da
fix 更新id
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3 months ago |
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jiangjy
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5d817fc99d
fix：同步检查Recipe文件夹功能
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4 months ago |
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jiangjy
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7f4779e130
fix 调整fa获取recipe列表配置
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4 months ago |
 JET-JJY
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55942603d3
PM工艺事件上报
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4 months ago |
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jiangjy
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0fe0ea3aff
update
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4 months ago |
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jiangjy
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266f6b4d53
fix 优化展示效果
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4 months ago |
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jiangjy
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e43b334688
fix 开放2阶段/4阶段时间设定
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4 months ago |
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jiangjy
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5d04925d53
4/5阶段 不设定MFC51值
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4 months ago |
 huangping
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b2f0c7d993
ELK需求177：bufferPurge功能优化
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4 months ago |
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jiangjy
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7f04b651f3
fix 新增buffer ffu
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4 months ago |
|
jiangjy
|
1ca3313b5b
fix 优化展示效果
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4 months ago |
|
jiangjy
|
9305db1b07
fix 调整N2Purge 展示
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4 months ago |
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jiangjy
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d7a8e008e6
fix add SelectN2PurgeModePhase sc
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4 months ago |
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jiangjy
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19f6ec6d6e
update waferrobot safeHome sc
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4 months ago |
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jiangjy
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e1be64ab39
update
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4 months ago |
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jiangjy
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8fa4ccd9d5
添加安全指令配置
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4 months ago |
|
jiangjy
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35e7818bf8
隐藏FIMS motiontimeout配置
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4 months ago |
|
huangping
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1f9c2d3b94
修改gaspanel CEXH和DPR使用iotrigger
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4 months ago |
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jiangjy
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4f41b9b291
update abortN2purge
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4 months ago |
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jiangjy
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4cbf6674c8
优化是否需要检测
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4 months ago |
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jiangjy
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99195d694b
2阶段/4阶段 添加时间判定逻辑
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4 months ago |
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jiangjy
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5443201140
update
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4 months ago |
|
jiangjy
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9e2badadef
update log
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4 months ago |
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jiangjy
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94b9e52351
update boat home判断dimoving
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4 months ago |
