update

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -1257,12 +1257,15 @@
 		<IoTrigger id="TrigF2CleanSwitchB" display="" schematicId="" unit="" doTrigger="DO_CleanSwitch"/>
 		<IoTrigger id="TrigFOUPRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_FOUPRobotActionCommand" aiFeedback="AI_FOUPRobotActionCommand"/>
 		<IoTrigger id="TrigWaferRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_WaferRobotActionCommand" aiFeedback="AI_WaferRobotActionCommand"/>
+		<IoTrigger id="TrigVFD" display="" schematicId="" unit="" aoTrigger="AO_VFDSetValue" aiFeedback="AI_VFDCurrentSpeed"/>
 
 		<IoTrigger id="TrigMS501" display="" schematicId="" unit="" doTrigger="DO_MS501"/>
 		<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
 		<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
 		<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
+		
 		<IoTrigger id="TrigBufferN2PurageEN" display="" schematicId="" unit="" doTrigger="DO_BufferN2PurageEN"/>
+		<IoTrigger id="TrigBufferPurgeTime" display="" schematicId="" unit="" aoTrigger="AO_BufferPurgeTimeSV" />
 
 
 
@@ -1593,7 +1596,7 @@
 		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="AV201" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="AV202" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
-	
+
 		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveFIMS2N2Purge" doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveSV61" doOpen="DO_SV61Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -503,6 +503,12 @@
 		<DI_ITEM Index="5218"   Name="DI_FIMS1HomeComplete"                                      BufferOffset="5218"                                      Addr="D326.2"                      Description="FIMS1 Home Complete"                       />
 		<DI_ITEM Index="5219"   Name="DI_FIMS1Running"                                      BufferOffset="5219"                                      Addr="D326.3"                      Description="FIMS1 Running"                       />
 		<DI_ITEM Index="5220"   Name="DI_FIMS1AutoManualMode"                                      BufferOffset="5220"                                      Addr="D326.4"                      Description="FIMS1 Auto/Manual Mode"                       />
+	
+		<DI_ITEM Index="5220"   Name="DI_O2_Detect_Side_LA"                                      BufferOffset="5221"                                      Addr="D326.5"                      Description="02 Detect side LA"                       />
+		<DI_ITEM Index="5220"   Name="DI_O2_Detect_Side_FIMS1"                                      BufferOffset="5222"                                      Addr="D326.6"                      Description="02 Detect side FIMS1"                       />
+		<DI_ITEM Index="5220"   Name="DI_O2_Detect_Side_FIMS2"                                      BufferOffset="5223"                                      Addr="D326.7"                      Description="02 Detect side FIMS2"                       />
+
+
 		<DI_ITEM Index="5232"   Name="DI_FIMS2LoadComplete"                                      BufferOffset="5232"                                      Addr="D327.0"                      Description="FIMS2 Load Complete"                       />
 		<DI_ITEM Index="5233"   Name="DI_FIMS2UnloadComplete"                                      BufferOffset="5233"                                      Addr="D327.1"                      Description="FIMS2 Unload Complete"                       />
 		<DI_ITEM Index="5234"   Name="DI_FIMS2HomeComplete"                                      BufferOffset="5234"                                      Addr="D327.2"                      Description="FIMS2 Home Complete"                       />
@@ -1031,6 +1037,7 @@
 		<DO_ITEM Index="966"    Name="DO_FIMS1O2CheckEN"                                      BufferOffset="966"                                      Addr="D1060.6"                      Description="FIMS1 O2 CheckEN"                       />
 		<DO_ITEM Index="967"    Name="DO_FIMS2O2CheckEN"                                      BufferOffset="967"                                      Addr="D1060.7"                      Description="FIMS2 O2 CheckEN"                       />
 		<DO_ITEM Index="968"    Name="DO_N2PURGEPROCESS"                                      BufferOffset="968"                                      Addr="D1060.8"                      Description="N2 PURGE PROCESS"                       />
+		<DO_ITEM Index="968"    Name="DO_PCToPLCHeaterBeat"                                      BufferOffset="976"                                      Addr="D1061.0"                      Description="PC to plc HeaterBeat"                       />
 		<DO_ITEM Index="1104"   Name="DO_StartButton"                                      BufferOffset="1104"                                      Addr="D1069.0"                      Description="start button"                       />
 		<DO_ITEM Index="1105"   Name="DO_StopButton"                                      BufferOffset="1105"                                      Addr="D1069.1"                      Description="stop button"                       />
 		<DO_ITEM Index="1106"   Name="DO_ResetButton"                                      BufferOffset="1106"                                      Addr="D1069.2"                      Description="reset button"                       />
@@ -1433,6 +1440,8 @@
 		<AI_ITEM Index="417"    Name="AI_FFU4CurrentSpeed"                                      BufferOffset="417"                                      Addr="D5834"                      Description="FFU7 Current speed"                       />
 		<AI_ITEM Index="418"    Name="AI_FFU4Status"                                      BufferOffset="418"                                      Addr="D5836"                      Description="FFU7 voltage"                       />
 		
+		<AI_ITEM Index="418"    Name="AI_VFDCurrentSpeed"                                      BufferOffset="430"                                      Addr="D5860"                      Description="VFD Current speed"                       />
+		
 		<AI_ITEM Index="450"    Name="AI_MFC1AirFlowPV"                                      BufferOffset="450"                                      Addr="D5900"                      Description="MFC1 air flow PV"                       />
 		<AI_ITEM Index="451"    Name="AI_MFC2AirFlowPV"                                      BufferOffset="451"                                      Addr="D5902"                      Description="MFC2 air flow PV"                       />
 		<AI_ITEM Index="452"    Name="AI_MFC3AirFlowPV"                                      BufferOffset="452"                                      Addr="D5904"                      Description="MFC3 air flow PV"                       />
@@ -1623,12 +1632,15 @@
 		<AO_ITEM Index="111"    Name="AO_ExchangeFOUPTOFOUPWaitTime"                                      BufferOffset="111"                                      Addr="D10222"                      Description="Exchange FOUP TO FOUP WaitTime"                       />
 		<AO_ITEM Index="112"    Name="AO_LAO2checkSV"                                      BufferOffset="112"                                      Addr="D10224"                      Description="LA O2 check SV"                       />
 		<AO_ITEM Index="113"    Name="AO_FOUPO2CheckSV"                                      BufferOffset="113"                                      Addr="D10226"                      Description="FOUP O2 Check SV"                       />
+	
+		<AO_ITEM Index="114"    Name="AO_BufferPurgeTimeSV"                                      BufferOffset="114"                                      Addr="D10228"                      Description="Buffer Purge Time SV"                       />
 		
 		<AO_ITEM Index="176"    Name="AO_FFU1SetSpeed"                                      BufferOffset="176"                                      Addr="D10352"                      Description="FFU4 Set speed"                       />
 		<AO_ITEM Index="182"    Name="AO_FFU2SetSpeed"                                      BufferOffset="182"                                      Addr="D10364"                      Description="FFU5 Set speed"                       />
 		<AO_ITEM Index="188"    Name="AO_FFU3SetSpeed"                                      BufferOffset="188"                                      Addr="D10376"                      Description="FFU6 Set speed"                       />
 		<AO_ITEM Index="194"    Name="AO_FFU4SetSpeed"                                      BufferOffset="194"                                      Addr="D10388"                      Description="FFU7 Set speed"                       />
-		
+		<AO_ITEM Index="203"    Name="AO_VFDSetValue"                                      BufferOffset="203"                                      Addr="D10406"                      Description="VFD Set Value"                       />
+
 		<AO_ITEM Index="215"    Name="AO_MFC1AirFlowSV"                                      BufferOffset="215"                                      Addr="D10430"                      Description="MFC1 air flow SV"                       />
 		<AO_ITEM Index="216"    Name="AO_MFC2AirFlowSV"                                      BufferOffset="216"                                      Addr="D10432"                      Description="MFC2 air flow SV"                       />
 		<AO_ITEM Index="217"    Name="AO_MFC3AirFlowSV"                                      BufferOffset="217"                                      Addr="D10434"                      Description="MFC3 air flow SV"                       />

Furnace/FurnaceRT/Config/System.sccfg

@@ -4573,6 +4573,9 @@
 	</configs>
 
 	<configs name="PM1" display="Parameter">
+		<configs name="RHC">
+			<config default="1" name="RHCVDFFrequency" description="RHC VDF Frequency" max="1000000" min="0" paramter="" tag="" unit="" type="Double" />
+		</configs>
 		<!--是否开启Recipe 关联N2PurgeMode/ATMMode功能-->
 		<config default="true" name="RecipeRelevancyN2Purge" description="Is Open Recipe Relevancy N2Purge" max="" min="" paramter="true;false" tag="ReadOnlySelection" unit="" type="Bool" />
 		<config default="" name="SelectN2PurgeMode" description="" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>

Furnace/FurnaceRT/Equipments/PMs/PMModuleDevice.cs

@@ -1544,6 +1544,11 @@ namespace FurnaceRT.Equipments.PMs
 
 
         // -------------------------------------------------------------------------
+        [Tag("TrigBufferPurgeTime")]
+        public IoTrigger TrigBufferPurgeTime { get; set; }
+        [Tag("TrigVFD")]
+        public IoTrigger TrigVFD { get; set; }
+
         [Tag("TrigFurnaceLZoneHeatingEnable")]
         public IoTrigger TrigFurnaceLZoneHeatingEnable { get; set; }
         [Tag("TrigFurnaceCLZoneHeatingEnable")]